531 lines
39 KiB
XML
531 lines
39 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<Aitex>
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<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
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<!--###########################################-->
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Step Information">
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
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<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="EndBy" UnitName="" ControlName="EndBy" Description="">
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<Item DisplayName="ByTime" ControlName="ByTime" />
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<Item DisplayName="ByPressure" ControlName="ByPressure" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="" ControlName="GrothRate" InputMode="" Min="0" Max="10000" Description=""/></Group>
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</Catalog>
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<Catalog DisplayName="LoopInfo">
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<Group DisplayName="Loop Setting">
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<Step ModuleName="" DeviceType="" DisplayName="LoopStart" ControlName="LoopStart" InputType="ReadOnlySelection" UnitName="" Description="Loop Start">
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<Item DisplayName="False" ControlName="False" />
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<Item DisplayName="True" ControlName="True" />
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</Step>
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<Step ModuleName="" DeviceType="" DisplayName="LoopEnd" ControlName="LoopEnd" InputType="ReadOnlySelection" UnitName="" Description="Loop End">
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<Item DisplayName="False" ControlName="False" />
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<Item DisplayName="True" ControlName="True" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="LoopTimes" UnitName="" ControlName="LoopTimes" InputMode="" Min="0" Max="10000" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="Temperature -> Pressure -> Rotation">
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<Group DisplayName="Pressure -> Rotation">
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="1. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="1200" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="2. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="Temperature -> Control Mode">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="3. TV Enable" UnitName="" ControlName="TV.SetTVEnableRoutine" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Enable" ControlName="Enable" />
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<Item DisplayName="Disable" ControlName="Disable" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="3. TV Mode" UnitName="" ControlName="TV.SetMode" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Position" ControlName="Position" />
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<Item DisplayName="Pressure" ControlName="Pressure" />
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<Item DisplayName="Close" ControlName="Close" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="4. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Pyro" ControlName="Pyro" />
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<Item DisplayName="TC" ControlName="TC" />
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<Item DisplayName="Power" ControlName="Power" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="6. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Pyro" ControlName="Pyro" />
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<Item DisplayName="TC" ControlName="TC" />
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<Item DisplayName="Power" ControlName="Power" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Temperature -> Temp Setting">
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="8. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="9. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="10. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="11. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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</Group>
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<Group DisplayName="Temperature -> Heater Output">
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="12. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="13. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="14. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="15. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="16. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="17. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="Air Operated Valve">
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<Group DisplayName="Gas Supply">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="18. H2.Supply(V31)" UnitName="" ControlName="V31.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="19. Ar.Supply(V32)" UnitName="" ControlName="V32.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="20. H2Ar.Line1(V35)" UnitName="" ControlName="V35.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="21. H2Ar.Line2(V36)" UnitName="" ControlName="V36.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="A (Ar/H2 Switch)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="23. Carrier Gas Ar(V65)" UnitName="" ControlName="V65.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="24. GasRing.Ar.Purge(V67)" UnitName="" ControlName="V67.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Ar" ControlName="Ar" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="25. ChamBody.Ar.Purge(V68)" UnitName="" ControlName="V68.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Ar" ControlName="Ar" />
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</Step>
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</Group>
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<Group DisplayName="B (H2 Supply)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="26. SH.H2/Ar Switch(V33)" UnitName="" ControlName="V33.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Ar" ControlName="Ar" />
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<Item DisplayName="H2" ControlName="H2" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="27. Carrier Gas H2(V64)" UnitName="" ControlName="V64.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="28. GasRing.H2.Purge(V66)" UnitName="" ControlName="V66.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="H2" ControlName="H2" />
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</Step>
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</Group>
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<Group DisplayName="C (MO Bypass)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="29. TMA Release(V43)" UnitName="" ControlName="V43.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="30. TCS Release(V48)" UnitName="" ControlName="V48.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="D (MO Bypass)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="31. TMA.Bypass(V45)" UnitName="" ControlName="V45.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="32. TCS Bypass(V49)" UnitName="" ControlName="V49.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="E (MO VAC)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="33. TMA VAC(V46)" UnitName="" ControlName="V46.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="34. TCS VAC(V50)" UnitName="" ControlName="V50.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="F (RUN/VENT)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="35. Diluted N2 Run(V39)" UnitName="" ControlName="V39.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="36. High N2 Run(V40)" UnitName="" ControlName="V40.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="37. TMA Run(V41)" UnitName="" ControlName="V41.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="38. TCS Run(V53)" UnitName="" ControlName="V53.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="39. HCL Run(V54)" UnitName="" ControlName="V54.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="40. SiH4.Run(V55)" UnitName="" ControlName="V55.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="41. C2H4.Run(V59)" UnitName="" ControlName="V59.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="G (VENT)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="42. TMA Vent(V42)" UnitName="" ControlName="V42.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="43. SiH4.Vent(V56)" UnitName="" ControlName="V56.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="44. C2H4.Vent(V60)" UnitName="" ControlName="V60.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="H (H2/ProcessGas Switch)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="45. HCL.Switch(V51)" UnitName="" ControlName="V51.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="46. SiH4.Switch(V52)" UnitName="" ControlName="V52.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="47. C2H4.Switch(V58)" UnitName="" ControlName="V58.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="48. N2.Switch(V37s)" UnitName="" ControlName="V37s.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="49. High N2Flow(V38)" UnitName="" ControlName="V38.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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</Group>
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<Group DisplayName="I (Final Valve)">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="50. SH/OpticPurge.Final(V87)" UnitName="" ControlName="V87.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="51. OuterGas.Final(V88)" UnitName="" ControlName="V88.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="52. InnerGas.Final(V89)" UnitName="" ControlName="V89.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="53. MiddleGas.Final(V90)" UnitName="" ControlName="V90.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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|
</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="54. GasRingPurge.Final(V91)" UnitName="" ControlName="V91.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="55. HeaterUpPurge.Final(V92)" UnitName="" ControlName="V92.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="56. ChamberPurge.Final(V93)" UnitName="" ControlName="V93.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="57. RotationUpPurge.Final(V94)" UnitName="" ControlName="V94.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="58. ConfinementRing.Final(V95)" UnitName="" ControlName="V95.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="59. HeaterWF.Final(V96)" UnitName="" ControlName="V96.GVTurnValve" Description="">
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<Item DisplayName="Hold" ControlName="Hold" />
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<Item DisplayName="Close" ControlName="Close" />
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<Item DisplayName="Open" ControlName="Open" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="60. Carry Gas.Final(V97)" UnitName="" ControlName="V97.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
|
|
</Group>
|
|
|
|
<Group DisplayName="J (Run Final)">
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="61. Dopping.Final(V61)" UnitName="" ControlName="V61.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="62. Silane.Final(V62)" UnitName="" ControlName="V62.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="63. Propane.Final(V63)" UnitName="" ControlName="V63.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
</Group>
|
|
|
|
<Group DisplayName="K (Leak Check)">
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="64. Gasbox Leak Check(V74)" UnitName="" ControlName="V74.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="65. Reactor Leak Check(V69)" UnitName="" ControlName="V69.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="66. MO Vac(V73)" UnitName="" ControlName="V73.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
</Group>
|
|
|
|
<Group DisplayName="GasBox.Vent.Pump">
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="67. GasBox.Vent.Pump(V72)" UnitName="" ControlName="V72.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
</Group>
|
|
|
|
<Group DisplayName="GasBox.Vent.Bypass">
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="68. GasBox.Vent.Pump(V25)" UnitName="" ControlName="V25.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
</Group>
|
|
|
|
<Group DisplayName="DOR Valve">
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="69. DOR.Vac(V75)" UnitName="" ControlName="V75.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="70. DOR.Refill(V76)" UnitName="" ControlName="V76.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
</Group>
|
|
|
|
<Group DisplayName="EPV">
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="71. EPV1" UnitName="" ControlName="EPV1.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="72. EPV2" UnitName="" ControlName="EPV2.GVTurnValve" Description="">
|
|
<Item DisplayName="Hold" ControlName="Hold" />
|
|
<Item DisplayName="Close" ControlName="Close" />
|
|
<Item DisplayName="Open" ControlName="Open" />
|
|
</Step>
|
|
</Group>
|
|
|
|
</Catalog>
|
|
|
|
<Catalog DisplayName="StepInfo">
|
|
<Group DisplayName="MFC">
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="73. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="74.Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="75.N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="76.N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="77. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="500" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="78.TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="500" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="79.TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="80.TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="81.TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="82.TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="83.HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="84.SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="500" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="85.C Source Push Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="86.Dope Push Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="87. Si Source Push Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="88.C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="500" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="89.Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="90. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="91.Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="92.Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="93.C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="94.C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="95. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="96. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="50000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="97. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="98.Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="99. Surrounding Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="100000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="100. GR Purge Main Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="101. Heater-Up Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="102. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="103. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="104. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="105. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="106. Balance C Flow (M39)" UnitName="sccm" ControlName="Mfc39.Ramp" InputMode="" Min="0" Max="50" Description=""/>
|
|
</Group>
|
|
|
|
<Group DisplayName="PC">
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="107.N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="108. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="109.TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="110. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="111. Dope Pre-Split Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="112.Si Source Pre-Split Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="113.C Source Pre-Split Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
|
|
</Group>
|
|
</Catalog>
|
|
|
|
<!--*************************************************************-->
|
|
<ProcessConfig DisplayName="ProcessConfig">
|
|
<Configs DisplayName="Process Config">
|
|
</Configs>
|
|
</ProcessConfig>
|
|
|
|
</TableRecipeFormat>
|
|
|
|
<TableRecipeSchema>
|
|
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
|
<xs:simpleType name="processType">
|
|
<xs:restriction base="xs:string">
|
|
<xs:enumeration value="Process" />
|
|
<xs:enumeration value="Clean" />
|
|
</xs:restriction>
|
|
</xs:simpleType>
|
|
<xs:simpleType name="booleanType">
|
|
<xs:restriction base="xs:string">
|
|
<xs:enumeration value="0" />
|
|
<xs:enumeration value="1" />
|
|
<xs:enumeration value="False" />
|
|
<xs:enumeration value="True" />
|
|
<xs:enumeration value="false" />
|
|
<xs:enumeration value="true" />
|
|
</xs:restriction>
|
|
</xs:simpleType>
|
|
<xs:element name="TableRecipeData">
|
|
<xs:complexType>
|
|
<xs:sequence>
|
|
<xs:element maxOccurs="unbounded" name="Step">
|
|
<xs:complexType>
|
|
<xs:sequence>
|
|
|
|
<xs:element name="Mfc">
|
|
<xs:complexType>
|
|
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
|
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
|
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
|
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
|
</xs:complexType>
|
|
</xs:element>
|
|
|
|
</xs:sequence>
|
|
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
|
<xs:attribute name="Name" type="xs:string" use="required" />
|
|
<xs:attribute name="Loop" type="xs:string" use="required" />
|
|
<xs:attribute name="Type" type="xs:string" use="required" />
|
|
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
|
</xs:complexType>
|
|
</xs:element>
|
|
</xs:sequence>
|
|
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
|
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
|
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
|
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
|
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
|
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
|
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
|
<xs:attribute name="Description" type="xs:string" use="required" />
|
|
</xs:complexType>
|
|
</xs:element>
|
|
</xs:schema>
|
|
</TableRecipeSchema>
|
|
</Aitex> |