428 lines
13 KiB
C#
428 lines
13 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.TMs;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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namespace Mainframe.LLs
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{
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public class LoadLockPrepareTransferRoutine : ModuleRoutine, IRoutine
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{
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enum RoutineStep
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{
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CheckForelinePressure,
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RequestPump,
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RequestPumpDelay,
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SlowPump,
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CloseSlowValve,
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FastPump,
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PumpDelay,
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CloseFastValve,
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Delay,
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SlowVent,
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CloseSlowVentValve,
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TimeDelay1,
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TimeDelay2
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}
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private double _pumpSwitchPressure;
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private int _waitForelineTimeout;
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private int _slowPumpTimeout = 100;
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private int _fastPumpTimeout = 100;
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private int _slowVentTimeout = 100;
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private LoadLock _ll;
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private TM _tm;
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private Devices.IoPump _pumpType;
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private bool _useSettingValue;
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private double _targetPressure;
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private bool _needPump = false;
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private double _llVacPressure = 0;
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private double _balancePressureDiff = 0;
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public LoadLockPrepareTransferRoutine(ModuleName module)
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{
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Module = module.ToString();
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Name = "LoadLockPrepareTransfer";
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_ll = DEVICE.GetDevice<SicLoadLock>($"{ Module}.{ Module}");
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_tm = DEVICE.GetDevice<SicTM>($"{ModuleName.System.ToString()}.{"TM"}");
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_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump");
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}
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public Result Start(params object[] objs)
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{
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Reset();
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_targetPressure = SC.GetConfigItem("TM.PressureBalance.BalancePressureForLL").DoubleValue;
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_llVacPressure = SC.GetValue<double>("LoadLock.VacuumPressureBase");
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_pumpSwitchPressure = SC.GetValue<double>("LoadLock.Pump.SlowFastPumpSwitchPressure");
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//PrepareTrasfer需要把压力调到VacuumBasePressure以下
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if (_targetPressure > _llVacPressure)
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{
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_targetPressure = _llVacPressure;
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}
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string reason;
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if (!_ll.SetFastVentValve(false, out reason) || !_ll.SetSlowVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (!_ll.SetFastPumpValve(false, out reason) || !_ll.SetSlowPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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if (isAtmMode)
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{
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EV.PostInfoLog(Module, $"system in atm mode, {_ll.Module} pump skipped");
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return Result.DONE;
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}
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if (!_ll.CheckDoorClose())
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{
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EV.PostAlarmLog(Module, $"Can not pump, door is open");
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return Result.FAIL;
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}
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if (!_tm.CheckSlitValveClose(ModuleHelper.Converter(_ll.Module)))
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{
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EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open");
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return Result.FAIL;
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}
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_balancePressureDiff = SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue;
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if (Math.Abs(_targetPressure - _ll.ChamberPressure) < _balancePressureDiff && _ll.CheckVacuum())
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{
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return Result.DONE;
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}
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_needPump = _ll.ChamberPressure > _targetPressure;
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Notify("Start");
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return Result.RUN;
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}
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public Result Monitor()
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{
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try
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{
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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if (_needPump)
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{
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//需要调节的压力低于打开快抽的压力
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if (_targetPressure < _pumpSwitchPressure)
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{
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SlowPump((int)RoutineStep.SlowPump, _ll, _pumpSwitchPressure, _slowPumpTimeout);
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FastPump((int)RoutineStep.FastPump, _ll, _targetPressure, _fastPumpTimeout);
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CloseFastPumpValve((int)RoutineStep.CloseFastValve, _ll);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve, _ll);
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}
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else
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{
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SlowPump((int)RoutineStep.SlowPump, _ll, _targetPressure, _slowPumpTimeout);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve, _ll);
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}
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}
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else
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{
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SlowVent((int)RoutineStep.SlowVent, _ll, _targetPressure, _balancePressureDiff,_slowVentTimeout);
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CloseSlowVentValve((int)RoutineStep.CloseSlowVentValve, _ll);
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}
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TimeDelay((int)RoutineStep.TimeDelay2, 1);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public void Abort()
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{
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_ll.SetSlowPumpValve(false, out _);
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_ll.SetFastPumpValve(false, out _);
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}
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public void SlowVent(int id, LoadLock ll, double switchPressure,double pressureDiff, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} slow vent valve to {switchPressure} mbar");
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if (!_ll.SetSlowVentValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return ll.ChamberPressure >= switchPressure - pressureDiff;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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_ll.SetSlowVentValve(false, out string _);
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Stop($"{ll.Name} pressure can not vent to {switchPressure} mbar in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseSlowVentValve(int id, LoadLock ll)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {ll.Name} slow vent valve");
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if (!_ll.SetSlowVentValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CheckForelinePressure(int id, LoadLock ll, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Check {ll.Name} foreline pressure under {basePressure} mbar");
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return true;
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}, () =>
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{
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return ll.ForelinePressure <= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"{ll.Name} foreline pressure can not lower than {basePressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void RequestPump(int id, LoadLock ll, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Check pump ready for {ll.Name}");
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return true;
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}, () =>
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{
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//return SharedPump.Instance.RequestPump(ModuleHelper.Converter(ll.Module));
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return true;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"pump can not ready for {ll.Module} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void SlowPump(int id, LoadLock ll, double switchPressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} slow pump valve to {switchPressure} mbar");
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if (!_ll.SetSlowPumpValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return ll.ChamberPressure <= switchPressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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_ll.SetSlowPumpValve(false, out string _);
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Stop($"{ll.Name} pressure can not pump to {switchPressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void FastPump(int id, LoadLock ll, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} fast pump valve to {basePressure} mbar");
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if (!_ll.SetFastPumpValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return ll.ChamberPressure <= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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_ll.SetSlowPumpValve(false, out string _);
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_ll.SetFastPumpValve(false, out string _);
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Stop($"{ll.Name} pressure can not pump to {basePressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseSlowPumpValve(int id, LoadLock ll)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {ll.Name} slow pump valve");
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if (!_ll.SetSlowPumpValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseFastPumpValve(int id, LoadLock ll)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {ll.Name} fast pump valve");
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if (!_ll.SetFastPumpValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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