310 lines
8.9 KiB
C#
310 lines
8.9 KiB
C#
using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.DataCenter;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using System.Xml;
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namespace Mainframe.LLs
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{
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public class SicLoadLock : LoadLock
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{
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public override bool EnableLift
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{
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get
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{
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return _enableLift;
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}
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}
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private IoLift _lift;
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private IoDoor _door;
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private IoSensor _lid;
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private IoValve _slowVentValve;
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private IoValve _fastVentValve;
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private IoValve _slowPumpValve;
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private IoValve _fastPumpValve;
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private IoValve _equalAtmVentValve;
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private IoSensor _LLWaferPresence;
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private IoPressureMeter3 _forelineGuage;
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private IoPressureMeter3 _chamberGuage;
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private R_TRIG _trigWafer = new R_TRIG();
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private F_TRIG _trigNoWafer = new F_TRIG();
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private DeviceTimer _timerJobDone = new DeviceTimer();
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//private IoSensor _sensorAtm;
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//private IoSensor _sensorVacuum;
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//private IoSensor _sensorAboveAtm;
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//private IoSensor _sensorBelowAtm;
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public override double ChamberPressure
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{
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get
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{
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return _chamberGuage.Value;
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}
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}
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public override double ForelinePressure
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{
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get
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{
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return _forelineGuage.Value;
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}
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}
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public bool JobDone
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{
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get;set;
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}
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private bool _enableLift;
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public SicLoadLock(string module, XmlElement node, string ioModule = "") : base(module)
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{
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var attrModule = node.GetAttribute("module");
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base.Module = string.IsNullOrEmpty(attrModule) ? module : attrModule;
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base.Name = node.GetAttribute("id");
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base.Display = node.GetAttribute("display");
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}
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public override bool Initialize()
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{
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_slowPumpValve = DEVICE.GetDevice<IoValve>("TM.LLSlowRough");
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_fastPumpValve = DEVICE.GetDevice<IoValve>("TM.LLFastRough");
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_slowVentValve = DEVICE.GetDevice<IoValve>("TM.LLSlowVent");
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_fastVentValve = DEVICE.GetDevice<IoValve>("TM.LLFastVent");
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_lid = DEVICE.GetDevice<IoSensor>("TM.LLLidClosed");
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_LLWaferPresence = DEVICE.GetDevice<IoSensor>("TM.LLWaferPresence");
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_chamberGuage = DEVICE.GetDevice<IoPressureMeter3>("TM.LLPressure");
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_forelineGuage = DEVICE.GetDevice<IoPressureMeter3>("TM.ForelinePressure");
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DATA.Subscribe($"{Name}.JobDone", () => JobDone);
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return base.Initialize();
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}
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public bool CheckLidClosed()
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{
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return _lid.Value == true;
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}
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public override bool CheckAtm()
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{
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return _chamberGuage.Value >= SC.GetValue<double>("LoadLock.AtmPressureBase");
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////if (SC.GetValue<bool>("System.IsBypassIoATMSensor"))
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////{
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//// return _chamberGuage.Value > SC.GetValue<double>("LoadLock.AtmPressureBase");
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////}
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//return _sensorAtm.Value && !_sensorVacuum.Value &&
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// _chamberGuage.Value > SC.GetValue<double>("LoadLock.AtmPressureBase");
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}
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public override bool CheckVacuum()
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{
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return _chamberGuage.Value <= SC.GetValue<double>("LoadLock.VacuumPressureBase");
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//if (SC.GetValue<bool>("System.IsBypassIoATMSensor"))
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//{
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// return _chamberGuage.Value < SC.GetValue<double>("LoadLock.VacuumPressureBase");
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//}
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//return _sensorVacuum.Value && !_sensorAtm.Value &&
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// _chamberGuage.Value < SC.GetValue<double>("LoadLock.VacuumPressureBase");
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}
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public override bool CheckIsPumping()
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{
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return _slowPumpValve.Status || _fastPumpValve.Status;
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}
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public override bool CheckDoorClose()
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{
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return CheckLidClosed(); // _door.IsClose;
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}
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public override bool CheckDoorOpen()
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{
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return !CheckLidClosed(); // _door.IsOpen;
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}
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public override bool SetLift(bool isUp, out string reason)
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{
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reason = string.Empty;
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if (!_enableLift)
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{
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return true;
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}
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return _lift.Move(isUp, out reason);
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}
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public override bool CheckLiftDown()
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{
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if (!_enableLift)
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{
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return true;
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}
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return _lift.IsDown;
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}
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public override bool CheckLiftUp()
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{
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if (!_enableLift)
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{
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return true;
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}
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return _lift.IsUp;
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}
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public override bool SetDoor(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true; // _door.SetDoor(isOpen, out reason);
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}
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public override bool SetSlowPumpValve(bool isOpen, out string reason)
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{
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return _slowPumpValve.TurnValve(isOpen, out reason);
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}
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public override bool SetFastPumpValve(bool isOpen, out string reason)
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{
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return _fastPumpValve.TurnValve(isOpen, out reason);
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}
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public override bool SetFastVentValve(bool isOpen, out string reason)
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{
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return _fastVentValve.TurnValve(isOpen, out reason);
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}
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public override bool SetSlowVentValve(bool isOpen, out string reason)
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{
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return _slowVentValve.TurnValve(isOpen, out reason);
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}
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public override bool SetEqualVentValve(bool isOpen, out string reason)
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{
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return _equalAtmVentValve.TurnValve(isOpen, out reason);
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}
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// lift up， 对应 slot 0， lift down 对应 slot 1
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public override bool SetLift(int slot, out string reason)
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{
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reason = string.Empty;
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if (!_enableLift)
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{
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return true;
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}
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return SetLift(slot == 0, out reason);
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}
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public override bool CheckLift(int slot)
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{
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if (!_enableLift)
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{
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return true;
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}
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return slot == 0 ? CheckLiftUp() : CheckLiftDown();
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}
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public override bool CheckEnableTransfer(EnumTransferType type)
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{
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return CheckLiftUp() || CheckLiftDown();
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}
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public void SetJobDoneStatus()
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{
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EV.PostInfoLog(Module, "Set LoadLock Job Done!");
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JobDone = true;
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_timerJobDone.Start(30*1000);
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}
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int times = 0;
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public override void Monitor()
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{
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if (_chamberGuage.Value >= SC.GetValue<double>("LoadLock.VentMaxPressure") && SC.GetValue<double>("LoadLock.VentMaxPressure")> SC.GetValue<double>("LoadLock.AtmPressureBase") && times>20)
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{
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if (_fastVentValve.Status)
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{
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SetFastVentValve(false, out string reason);
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}
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if (_slowVentValve.Status)
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{
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SetSlowVentValve(false, out string reason);
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}
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}
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times++;
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if (times > 22)
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{
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times = 0;
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}
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if (!CheckLidClosed())
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{
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_trigWafer.CLK = _LLWaferPresence.Value;
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_trigNoWafer.CLK = _LLWaferPresence.Value;
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if (_trigWafer.Q)
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{
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if (WaferManager.Instance.CheckNoWafer(ModuleName.LoadLock, 0))
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{
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WaferManager.Instance.CreateWafer(ModuleName.LoadLock, 0, WaferStatus.Normal);
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}
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_trigNoWafer.RST = true;
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}
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if (_trigNoWafer.Q)
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{
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if (WaferManager.Instance.CheckHasWafer(ModuleName.LoadLock, 0))
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{
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WaferManager.Instance.DeleteWafer(ModuleName.LoadLock, 0);
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}
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_trigWafer.RST = true;
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}
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}
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//设置JobDone状态,10秒后恢复为false
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if (_timerJobDone.IsTimeout())
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{
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JobDone = false;
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_timerJobDone.Stop();
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}
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}
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public override void Reset()
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{
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_trigWafer.RST = true;
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_trigNoWafer.RST = true;
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}
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}
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}
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