71 lines
3.5 KiB
XML
71 lines
3.5 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
|
||
<Aitex>
|
||
<TableSequenceFormat RecipeVersion="Sic">
|
||
<Catalog Type="Position">
|
||
<Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >
|
||
<Selection Name="Sic" DisplayName="PM" Parameter="PMSelection,ProcessRecipe,EnablePre,EnableComplete,PretreatmentRecipe,CompleteRecipe" />
|
||
<Selection Name="Buffer" DisplayName="Buffer" Parameter="CoolingType,CoolingValue" />
|
||
<Selection Name="LoadLock" DisplayName="LoadLock" Parameter="Routine" />
|
||
</Item>
|
||
</Catalog>
|
||
|
||
<Catalog Type="Parameter">
|
||
<Item Name="PMSelection" DisplayName="Reactor Selection" InputType="MultiSelection" >
|
||
<Selection Name="PM1" DisplayName="PM1"/>
|
||
<Selection Name="PM2" DisplayName="PM2"/>
|
||
</Item>
|
||
<Item Name="ProcessRecipe" DisplayName="Process Recipe" InputType="RecipeSelection" Parameter="Process" Min="0" Max="999999" />
|
||
<Item Name="CoolingType" DisplayName="CoolingType" InputType="ReadOnlySelection" >
|
||
<Selection Name="Temperature" DisplayName="Temperature"/>
|
||
<Selection Name="Time" DisplayName="Time"/>
|
||
</Item>
|
||
<Item Name="CoolingValue" DisplayName="CoolingValue" InputType="NumInput" Min="0" Max="10000" />
|
||
<Item Name="EnablePre" DisplayName="Pretreatment Enable" InputType="MultiSelection" >
|
||
<Selection Name="EnablePre1" DisplayName="Enable"/>
|
||
</Item>
|
||
<Item Name="PretreatmentRecipe" DisplayName="Pretreatment Recipe" InputType="RecipeSelection" Parameter="Clean" Min="0" Max="999999" />
|
||
<Item Name="EnableComplete" DisplayName="CompleteClean Enable" InputType="MultiSelection" >
|
||
<Selection Name="EnableComplete1" DisplayName="Enable"/>
|
||
</Item>
|
||
<Item Name="CompleteRecipe" DisplayName="CompleteClean Recipe" InputType="RecipeSelection" Parameter="Clean" Min="0" Max="999999" />
|
||
<Item Name="Routine" DisplayName="Routine" InputType="ReadOnlySelection" >
|
||
<Selection Name="Purge" DisplayName="Purge"/>
|
||
<Selection Name="Vent" DisplayName="Vent"/>
|
||
</Item>
|
||
</Catalog>
|
||
</TableSequenceFormat>
|
||
<TableSequenceData RecipeVersion="Sic" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
|
||
<Step></Step>
|
||
</TableSequenceData>
|
||
<TableRecipeSchema>
|
||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||
<xs:simpleType name="booleanType">
|
||
<xs:restriction base="xs:string">
|
||
<xs:enumeration value="0" />
|
||
<xs:enumeration value="1" />
|
||
<xs:enumeration value="False" />
|
||
<xs:enumeration value="True" />
|
||
<xs:enumeration value="false" />
|
||
<xs:enumeration value="true" />
|
||
</xs:restriction>
|
||
</xs:simpleType>
|
||
<xs:element name="TableSequenceData">
|
||
<xs:complexType>
|
||
<xs:sequence>
|
||
<xs:element maxOccurs="unbounded" name="Step">
|
||
|
||
</xs:element>
|
||
</xs:sequence>
|
||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="Sic" use="required" />
|
||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||
<xs:attribute name="Barcode" type="xs:string" use="required" />
|
||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||
</xs:complexType>
|
||
</xs:element>
|
||
</xs:schema>
|
||
</TableRecipeSchema>
|
||
<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
|
||
</Aitex> |