749 lines
22 KiB
C#
749 lines
22 KiB
C#
using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Fsm;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Utilities;
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using Aitex.Sorter.Common;
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using Mainframe.TMs;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace Mainframe.LLs
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{
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public class LoadLockModule : LoadLockModuleBase
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{
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public enum STATE
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{
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NotInstall,
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Init,
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Idle,
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Homing,
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Pump,
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Vent,
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MoveLift,
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Purge,
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LeakCheck,
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Transfer,
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Error,
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PrepareTransfer,
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OpenDoor,
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CloseDoor,
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Cooling,
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}
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public enum MSG
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{
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Home,
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Reset,
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Abort,
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Error,
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Transfer,
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PrepareTransfer,
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MoveLift,
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Pump,
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Vent,
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Purge,
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LeakCheck,
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OpenDoor,
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CloseDoor,
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Cooling,
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SetOnline,
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SetOffline,
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ToInit,
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}
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public bool IsAlarm
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{
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get
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{
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return FsmState == (int)STATE.Error;
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}
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}
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public override bool IsReady
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{
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get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
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}
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public override bool IsError
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{
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get { return FsmState == (int)STATE.Error; }
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}
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public override bool IsInit
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{
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get { return FsmState == (int)STATE.Init; }
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}
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public bool IsBusy
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{
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get { return !IsInit && !IsError && !IsReady; }
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}
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public override bool IsIdle
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{
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get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
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}
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public int CurrentRoutineLoop
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{
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get
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{
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if (FsmState == (int)STATE.Purge)
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return _purgeRoutine.LoopCounter + 1; // CurrentLoop从0开始
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return 0;
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}
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}
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public int CurrentRoutineLoopTotal
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{
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get
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{
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if (FsmState == (int)STATE.Purge)
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return _purgeRoutine.LoopTotalTime;
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return 0;
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}
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}
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public bool JobDone
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{
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get
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{
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if (_llDevice != null)
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{
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return _llDevice.JobDone;
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}
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return false;
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}
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}
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public event Action<string> OnEnterError;
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private bool _isInit;
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public SicLoadLock _llDevice { get; set; }
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private LoadLockPumpRoutine _pumpRoutine;
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private LoadLockVentRoutine _ventRoutine;
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private LoadLockPurgeRoutine _purgeRoutine;
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private LoadLockLeakCheckRoutine _leakCheckRoutine;
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private LoadLockDoorRoutine _doorRoutine;
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private LoadLockCoolingRoutine _coolingRoutine;
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private LoadLockVerifyAtmDoorRoutine _verifyDoorRoutine;
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private LoadLockServoTo _llServoTo;
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private LoadLockPrepareTransferRoutine _prepareTransferRoutine;
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//private TMSlitValveRoutine _slitValveRoutine;
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public LoadLockModule(ModuleName module) : base(1)
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{
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Module = module.ToString();
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Name = module.ToString();
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IsOnline = false;
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EnumLoop<STATE>.ForEach((item) =>
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{
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MapState((int)item, item.ToString());
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});
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EnumLoop<MSG>.ForEach((item) =>
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{
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MapMessage((int)item, item.ToString());
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});
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EnableFsm(50, IsInstalled ? STATE.Init : STATE.NotInstall);
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}
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public override bool Initialize()
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{
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InitRoutine();
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InitDevice();
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InitFsm();
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InitOp();
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InitData();
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return base.Initialize();
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}
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private void InitRoutine()
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{
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ModuleName module = ModuleHelper.Converter(Module);
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_pumpRoutine = new LoadLockPumpRoutine(module);
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_ventRoutine = new LoadLockVentRoutine(module);
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_purgeRoutine = new LoadLockPurgeRoutine(module);
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_leakCheckRoutine = new LoadLockLeakCheckRoutine(module);
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_doorRoutine = new LoadLockDoorRoutine(module);
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_coolingRoutine = new LoadLockCoolingRoutine(module);
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_verifyDoorRoutine = new LoadLockVerifyAtmDoorRoutine(module);
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_llServoTo = new LoadLockServoTo(module);
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_prepareTransferRoutine = new LoadLockPrepareTransferRoutine(module);
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//_slitValveRoutine = new TMSlitValveRoutine();
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}
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private void InitDevice()
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{
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_llDevice = DEVICE.GetDevice<SicLoadLock>($"{Module}.{Module}");
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}
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private void InitFsm()
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{
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//Error
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AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
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Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
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EnterExitTransition<STATE, FSM_MSG>(STATE.Error, FsmEnterError, FSM_MSG.NONE, FsmExitError);
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//Home
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Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
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Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
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Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
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Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
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Transition(STATE.Homing, MSG.Error, null, STATE.Init);
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Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
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EnterExitTransition((int)STATE.Homing, FsmEnterIdle, (int)FSM_MSG.NONE, FsmExitIdle);
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AnyStateTransition(MSG.ToInit, FsmToInit, STATE.Init);
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//PrepareTransfer
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Transition(STATE.Idle, MSG.PrepareTransfer, FsmStartPrepareTransfer, STATE.PrepareTransfer);
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Transition(STATE.PrepareTransfer, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.PrepareTransfer, MSG.Abort, FsmAbortTask, STATE.Idle);
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////Online
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//Transition(STATE.Idle, MSG.SetOnline, FsmStartSetOnline, STATE.Idle);
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//Transition(STATE.Idle, MSG.SetOffline, FsmStartSetOffline, STATE.Idle);
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//Pump
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Transition(STATE.Idle, MSG.Pump, FsmStartPump, STATE.Pump);
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Transition(STATE.Pump, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.Pump, MSG.Abort, FsmAbortTask, STATE.Idle);
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//Vent
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Transition(STATE.Idle, MSG.Vent, FsmStartVent, STATE.Vent);
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Transition(STATE.Vent, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.Vent, MSG.Abort, FsmAbortTask, STATE.Idle);
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//Purge
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Transition(STATE.Idle, MSG.Purge, FsmStartPurge, STATE.Purge);
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Transition(STATE.Purge, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.Purge, MSG.Abort, FsmAbortTask, STATE.Idle);
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//Leak Check
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Transition(STATE.Idle, MSG.LeakCheck, FsmStartLeakCheck, STATE.LeakCheck);
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Transition(STATE.LeakCheck, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.LeakCheck, MSG.Abort, FsmAbortTask, STATE.Idle);
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//open door
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Transition(STATE.Idle, MSG.OpenDoor, FsmStartOpenDoor, STATE.OpenDoor);
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Transition(STATE.OpenDoor, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.OpenDoor, MSG.Abort, FsmAbortTask, STATE.Idle);
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//close door
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Transition(STATE.Idle, MSG.CloseDoor, FsmStartCloseDoor, STATE.CloseDoor);
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Transition(STATE.CloseDoor, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.CloseDoor, MSG.Abort, FsmAbortTask, STATE.Idle);
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//cooling
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Transition(STATE.Idle, MSG.Cooling, FsmStartCooling, STATE.Cooling);
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Transition(STATE.Cooling, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
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Transition(STATE.Cooling, MSG.Abort, FsmAbortTask, STATE.Idle);
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}
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private void InitOp()
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{
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OP.Subscribe($"{Name}.Home", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.Home);
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});
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OP.Subscribe($"{Name}.Pump", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.Pump);
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});
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OP.Subscribe($"{Name}.Vent", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.Vent);
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});
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OP.Subscribe($"{Name}.Purge", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.Purge);
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});
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OP.Subscribe($"{Name}.LeakCheck", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.LeakCheck, args);
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});
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OP.Subscribe($"{Name}.MoveLift", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.MoveLift, args[0]);
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});
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OP.Subscribe($"{Name}.OpenDoor", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.OpenDoor);
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});
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OP.Subscribe($"{Name}.CloseDoor", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.CloseDoor);
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});
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OP.Subscribe($"{Name}.Reset", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.Reset);
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});
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OP.Subscribe($"{Name}.Abort", (string cmd, object[] args) =>
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{
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return CheckToPostMessage((int)MSG.Abort);
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});
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OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) => PutOnline());
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OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) => PutOffline());
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}
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private void InitData()
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{
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DATA.Subscribe($"{Name}.Status", () => StringFsmStatus);
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DATA.Subscribe($"{Name}.IsOnline", () => IsOnline);
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DATA.Subscribe($"{Name}.IsBusy", () => IsBusy);
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DATA.Subscribe($"{Name}.CurrentRoutineLoop", () => CurrentRoutineLoop);
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DATA.Subscribe($"{Name}.CurrentRoutineLoopTotal", () => CurrentRoutineLoopTotal);
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DATA.Subscribe($"{Module}.IsAlarm", () => IsAlarm);
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DATA.Subscribe($"{Name}.LeakCheckElapseTime", () =>
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{
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if (FsmState == (int)STATE.LeakCheck)
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return _leakCheckRoutine.ElapsedTime;
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return 0;
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});
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DATA.Subscribe($"{Name}.AtATM", () =>
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{
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if (_llDevice.CheckAtm())
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{
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return true;
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}
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return false;
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});
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DATA.Subscribe($"{Name}.UnderVAC", () =>
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{
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if (_llDevice.CheckVacuum())
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{
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return true;
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}
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return false;
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});
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DATA.Subscribe($"{Name}.LidState", () =>
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{
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if (_llDevice.CheckLidClosed())
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{
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return "Closed";
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}
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return "Open";
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});
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}
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private bool FsmOnError(object[] param)
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{
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IsOnline = false;
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if (FsmState == (int)STATE.Error)
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{
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return false;
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}
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if (FsmState == (int)STATE.Init)
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return false;
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return true;
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}
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private bool FsmReset(object[] param)
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{
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if (!_isInit)
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{
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PostMsg(MSG.ToInit);
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return false;
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}
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//LoadLock Reset时,需要添加执行关闭V79、V80、V85、V83、V84的动作
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string reason;
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_llDevice.SetSlowPumpValve(false, out reason);
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_llDevice.SetFastPumpValve(false, out reason);
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_llDevice.SetFastVentValve(false, out reason);
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_llDevice.SetSlowVentValve(false, out reason);
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IoValve _TmToLLVent = DEVICE.GetDevice<IoValve>("TM.TMTOLLVent");
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_TmToLLVent.TurnValve(false, out reason);
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return true;
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}
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private bool FsmExitError(object[] param)
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{
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return true;
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}
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private bool FsmEnterError(object[] param)
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{
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if (OnEnterError != null)
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OnEnterError(Module);
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return true;
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}
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private bool FsmStartHome(object[] param)
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{
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QueueRoutine.Clear();
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if (SC.ContainsItem("LoadLock.IsVerifyDoorEnabled") && SC.GetValue<bool>("LoadLock.IsVerifyDoorEnabled"))
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{
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_verifyDoorRoutine.Init();
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QueueRoutine.Enqueue(_verifyDoorRoutine);
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}
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else
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{
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return true;
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}
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Result ret = StartRoutine();
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if (ret == Result.FAIL)
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return false;
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if (ret == Result.DONE)
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return true;
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_isInit = false;
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return ret == Result.RUN;
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}
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private bool FsmMonitorHomeTask(object[] param)
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{
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Result ret = MonitorRoutine();
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if (ret == Result.FAIL)
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{
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PostMsg(MSG.Error);
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return false;
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}
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if (ret == Result.DONE)
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{
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_isInit = true;
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return true;
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}
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return false;
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}
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private bool FsmAbortTask(object[] param)
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{
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AbortRoutine();
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return true;
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}
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private bool FsmExitIdle(object[] param)
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{
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return true;
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}
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private bool FsmEnterIdle(object[] param)
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{
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return true;
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}
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private bool FsmToInit(object[] param)
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{
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return true;
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}
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private bool FsmStartPrepareTransfer(object[] param)
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{
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QueueRoutine.Clear();
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//double tragetPressure = SC.GetConfigItem("TM.PressureBalance.BalancePressureForLL").DoubleValue;
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//if (tragetPressure < 20)
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//{
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// //_doorRoutine.Init(false);
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// //QueueRoutine.Enqueue(_doorRoutine);
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// //_pumpRoutine.Init();
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// //QueueRoutine.Enqueue(_pumpRoutine);
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//}
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//else
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//{
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// //_doorRoutine.Init(false);
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// //QueueRoutine.Enqueue(_doorRoutine);
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// //_pumpRoutine.Init();
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// //QueueRoutine.Enqueue(_pumpRoutine);
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// //QueueRoutine.Enqueue(_prepareTransferRoutine);
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//}
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QueueRoutine.Enqueue(_prepareTransferRoutine);
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Result ret = StartRoutine();
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if (ret == Result.FAIL || ret == Result.DONE)
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return false;
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return ret == Result.RUN;
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}
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private bool FsmMonitorTask(object[] param)
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{
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Result ret = MonitorRoutine();
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if (ret == Result.FAIL)
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{
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PostMsg(MSG.Error);
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return false;
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}
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return ret == Result.DONE;
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}
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private bool FsmStartSetOffline(object[] param)
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{
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IsOnline = false;
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return true;
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}
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private bool FsmStartSetOnline(object[] param)
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{
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IsOnline = true;
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return true;
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}
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private bool FsmStartPump(object[] param)
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{
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Result ret = StartRoutine(_pumpRoutine);
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if (ret == Result.FAIL || ret == Result.DONE)
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return false;
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return ret == Result.RUN;
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}
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private bool FsmStartVent(object[] param)
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{
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Result ret = StartRoutine(_ventRoutine);
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if (ret == Result.FAIL || ret == Result.DONE)
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return false;
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return ret == Result.RUN;
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}
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private bool FsmStartPurge(object[] param)
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{
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Result ret = StartRoutine(_purgeRoutine);
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if (ret == Result.FAIL || ret == Result.DONE)
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return false;
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return ret == Result.RUN;
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}
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private bool FsmStartLeakCheck(object[] param)
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{
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if (param != null && param.Length >= 2)
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{
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_leakCheckRoutine.Init((int)param[0], (int)param[1]);
|
|
}
|
|
else
|
|
{
|
|
_leakCheckRoutine.Init();
|
|
}
|
|
|
|
Result ret = StartRoutine(_leakCheckRoutine);
|
|
if (ret == Result.FAIL || ret == Result.DONE)
|
|
return false;
|
|
return ret == Result.RUN;
|
|
}
|
|
|
|
private bool FsmStartOpenDoor(object[] param)
|
|
{
|
|
_doorRoutine.Init(true);
|
|
|
|
Result ret = StartRoutine(_doorRoutine);
|
|
if (ret == Result.FAIL || ret == Result.DONE)
|
|
return false;
|
|
return ret == Result.RUN;
|
|
}
|
|
|
|
private bool FsmStartCloseDoor(object[] param)
|
|
{
|
|
_doorRoutine.Init(false);
|
|
|
|
Result ret = StartRoutine(_doorRoutine);
|
|
if (ret == Result.FAIL || ret == Result.DONE)
|
|
return false;
|
|
return ret == Result.RUN;
|
|
}
|
|
|
|
private bool FsmStartCooling(object[] param)
|
|
{
|
|
_coolingRoutine.Init((int)param[0]);
|
|
|
|
Result ret = StartRoutine(_coolingRoutine);
|
|
if (ret == Result.FAIL || ret == Result.DONE)
|
|
return false;
|
|
return ret == Result.RUN;
|
|
}
|
|
|
|
public override bool Home(out string reason)
|
|
{
|
|
CheckToPostMessage((int)MSG.Home);
|
|
reason = string.Empty;
|
|
return true;
|
|
}
|
|
|
|
public override int InvokeCooling(int time)
|
|
{
|
|
if (CheckToPostMessage((int)MSG.Cooling, time))
|
|
return (int)MSG.Cooling;
|
|
|
|
return (int)FSM_MSG.NONE;
|
|
}
|
|
|
|
public override int InvokeVent()
|
|
{
|
|
if (CheckToPostMessage((int)MSG.Vent))
|
|
{
|
|
return (int)MSG.Vent;
|
|
}
|
|
|
|
return (int)FSM_MSG.NONE;
|
|
}
|
|
|
|
public override int InvokePump()
|
|
{
|
|
if (CheckToPostMessage((int)MSG.Pump))
|
|
return (int)MSG.Pump;
|
|
|
|
return (int)FSM_MSG.NONE;
|
|
}
|
|
|
|
public override int InvokePurge()
|
|
{
|
|
if (CheckToPostMessage((int)MSG.Purge))
|
|
return (int)MSG.Purge;
|
|
|
|
return (int)FSM_MSG.NONE;
|
|
}
|
|
|
|
public override bool CheckAcked(int entityTaskToken)
|
|
{
|
|
return FsmState == (int)STATE.Idle && CheckAllMessageProcessed();
|
|
//return true;
|
|
}
|
|
|
|
public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
|
|
{
|
|
//CheckToPostMessage(MSG.InTransfer);
|
|
}
|
|
|
|
public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
|
|
{
|
|
//if (FsmState == (int)STATE.InTransfer)
|
|
// CheckToPostMessage(MSG.TransferComplete);
|
|
}
|
|
|
|
public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
|
|
{
|
|
reason = string.Empty;
|
|
|
|
if (CheckToPostMessage((int)MSG.PrepareTransfer, robot, targetSlot))
|
|
return true;
|
|
|
|
return false;
|
|
}
|
|
|
|
public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
|
|
{
|
|
reason = string.Empty;
|
|
return true;
|
|
}
|
|
|
|
public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
|
|
{
|
|
reason = string.Empty;
|
|
return true;
|
|
}
|
|
|
|
public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
|
|
out string reason)
|
|
{
|
|
reason = string.Empty;
|
|
|
|
if (SC.GetValue<bool>("System.IsATMMode"))
|
|
{
|
|
return true;
|
|
}
|
|
//else
|
|
//{
|
|
// return _llDevice.ChamberPressure < SC.GetConfigItem("TM.PressureBalance.BalancePressureForLL").DoubleValue + SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue;
|
|
//}
|
|
|
|
return _llDevice.CheckVacuum() && !SC.GetValue<bool>("System.IsATMMode") || (_llDevice.CheckAtm() && SC.GetValue<bool>("System.IsATMMode"));
|
|
}
|
|
|
|
public override bool CheckReadyForMap(ModuleName robot, Hand blade, out string reason)
|
|
{
|
|
//return _lpDevice.IsEnableMapWafer(out reason) && IsReady;
|
|
reason = string.Empty;
|
|
return true;
|
|
}
|
|
|
|
private bool PutOnline()
|
|
{
|
|
IsOnline = true;
|
|
return true;
|
|
}
|
|
|
|
private bool PutOffline()
|
|
{
|
|
IsOnline = false;
|
|
return true;
|
|
}
|
|
|
|
public override void InvokeOffline()
|
|
{
|
|
PutOffline();
|
|
}
|
|
|
|
public override void InvokeOnline()
|
|
{
|
|
PutOnline();
|
|
}
|
|
|
|
public override bool CheckLidClose()
|
|
{
|
|
return _llDevice.CheckLidClosed();
|
|
}
|
|
}
|
|
}
|