388 lines
12 KiB
C#
388 lines
12 KiB
C#
using System;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.Devices;
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using Mainframe.TMs;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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namespace Mainframe.LLs
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{
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public class LoadLockVentRoutine : ModuleRoutine, IRoutine
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{
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enum RoutineStep
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{
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SlowVent,
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FastVent,
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VentDelay,
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CloseSlowVentValve,
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CloseFastVentValve,
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CloseValveDelay,
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//Equal,
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//CloseEqualValve,
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}
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private double _ventBasePressure;
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private double _ventSwitchPressure;
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private int _slowVentTimeout;
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private int _fastVentTimeout;
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private int _ventDelayTime;
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private int _routineTimeOut;
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private LoadLock _ll;
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private SicTM _tm;
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private Devices.IoPump _pumpType;
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private IoInterLock _tmIoInterLock;
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private bool _useSettingValue;
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private Stopwatch _swTimer = new Stopwatch();
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public LoadLockVentRoutine(ModuleName module)
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{
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Module = module.ToString();
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Name = "Vent";
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_ll = DEVICE.GetDevice<SicLoadLock>($"{ Module}.{Module}");
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_tm = DEVICE.GetDevice<SicTM>($"{ModuleName.System.ToString()}.{"TM"}");
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_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump");
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_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
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}
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public void Init()
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{
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_useSettingValue = false;
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}
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public void Init(double basePressure, int ventDelayTime)
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{
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_ventBasePressure = basePressure;
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_ventDelayTime = ventDelayTime;
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_useSettingValue = true;
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}
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public Result Start(params object[] objs)
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{
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Reset();
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string reason;
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if (_ll.CheckAtm())
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{
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EV.PostInfoLog(Module, $"{_ll.Module} in atm, vent skipped");
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return Result.DONE;
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}
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if (!_tm.CheckSlitValveClose(ModuleHelper.Converter(_ll.Module)))
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{
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EV.PostAlarmLog(Module, $"can not vent, slit valve is open");
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return Result.FAIL;
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}
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if (!_ll.CheckDoorClose())
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{
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EV.PostAlarmLog(Module, $"can not vent, lid is open");
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return Result.FAIL;
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}
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if (_pumpType.IsAlarm)
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{
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EV.PostAlarmLog(Module, $"can not vent,TM pump alarm");
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return Result.FAIL;
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}
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if (!_pumpType.IsRunning)
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{
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EV.PostAlarmLog(Module, $"can not vent,TM pump is not running");
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return Result.FAIL;
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}
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if (!_tm.SetFastPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not vent, TM fast pump value can not close");
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return Result.FAIL;
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}
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if (!_ll.SetFastPumpValve(false, out reason)
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|| !_ll.SetSlowPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (!_tm.SetTmToLLVent(false, out _))
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{
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EV.PostAlarmLog(Module, $"can not vent,can not close v85!");
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}
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if (!_tmIoInterLock.SetLLVentRoutineRunning(true, out reason))
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{
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EV.PostAlarmLog(Module, $"can not vent,{reason}");
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return Result.FAIL;
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}
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_ventSwitchPressure = SC.GetValue<double>("LoadLock.Vent.SlowFastVentSwitchPressure");
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_slowVentTimeout = SC.GetValue<int>("LoadLock.Vent.SlowVentTimeout");
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_fastVentTimeout = SC.GetValue<int>("LoadLock.Vent.FastVentTimeout");
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if (!_useSettingValue)
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{
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_ventBasePressure = SC.GetValue<double>("LoadLock.Vent.VentBasePressure");
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_ventDelayTime = SC.GetValue<int>("LoadLock.Vent.VentDelayTime");
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}
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_routineTimeOut = SC.GetValue<int>("LoadLock.Vent.RoutineTimeOut");
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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SlowVent((int)RoutineStep.SlowVent, _ll, _ventSwitchPressure, _slowVentTimeout);
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FastVent((int)RoutineStep.FastVent, _ll, _ventBasePressure, _fastVentTimeout);
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TimeDelay((int)RoutineStep.VentDelay, _ventDelayTime);
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CloseFastVentValve((int)RoutineStep.CloseFastVentValve, _ll);
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CloseSlowVentValve((int)RoutineStep.CloseSlowVentValve, _ll);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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_ll.SetSlowVentValve(false, out _);
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_ll.SetFastVentValve(false, out _);
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoLLVentUpRoutineRunning = false;
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return Result.DONE;
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}
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public void Abort()
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{
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_tmIoInterLock.DoLLVentUpRoutineRunning = false;
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_ll.SetFastPumpValve(false, out string reason);
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_ll.SetSlowPumpValve(false, out reason);
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_ll.SetFastVentValve(false, out reason);
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_ll.SetSlowVentValve(false, out reason);
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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Notify($"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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public void SlowVent(int id, LoadLock ll, double switchPressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} slow vent valve to {switchPressure} mbar");
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if (!_ll.SetSlowVentValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return ll.ChamberPressure >= switchPressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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_ll.SetSlowVentValve(false, out string _);
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Stop($"{ll.Name} pressure can not vent to {switchPressure} mbar in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void FastVent(int id, LoadLock ll, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} fast vent valve to {basePressure} mbar");
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if (!_ll.SetFastVentValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return ll.ChamberPressure >= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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_ll.SetSlowVentValve(false, out string _);
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_ll.SetFastVentValve(false, out string _);
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Stop($"{ll.Name} pressure can not vent to {basePressure} mbar in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseSlowVentValve(int id, LoadLock ll)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {ll.Name} slow vent valve");
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if (!_ll.SetSlowVentValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseFastVentValve(int id, LoadLock ll)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {ll.Name} fast vent valve");
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if (!_ll.SetFastVentValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void OpenEqualValve(int id, LoadLock ll, int time)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} equal vent valve");
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if (!_ll.SetEqualVentValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return true;
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}, time * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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throw (new RoutineBreakException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseEqualValve(int id, LoadLock ll, int time)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Close {ll.Name} equal vent valve");
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if (!_ll.SetEqualVentValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return true;
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}, time * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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throw (new RoutineBreakException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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