42 lines
2.8 KiB
XML
42 lines
2.8 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
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<VersionID Name="V1.2.0.1"/>
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<Action do="PM1.DO_ChamMoveBodyUpDownEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-100">
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<Limit do="PM1.DO_DilutedN2RunVent" value="false" tip="V39" tip.zh-CN="" tip.en-US="DO-9" />
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<Limit do="PM1.DO_HighN2RunVent" value="false" tip="V40" tip.zh-CN="" tip.en-US="DO-10" />
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<Limit do="PM1.DO_TMARun" value="false" tip="V41" tip.zh-CN="" tip.en-US="DO-11" />
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<Limit do="PM1.DO_TCSRunVent" value="false" tip="V53" tip.zh-CN="" tip.en-US="DO-23" />
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<Limit do="PM1.DO_HCLRunVent" value="false" tip="V54" tip.zh-CN="" tip.en-US="DO-24" />
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<Limit do="PM1.DO_SiH4Run" value="false" tip="V55" tip.zh-CN="" tip.en-US="DO-25" />
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<Limit do="PM1.DO_C3H8Run" value="false" tip="V59" tip.zh-CN="" tip.en-US="DO-29" />
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<Limit do="PM1.DO_HCLSwitch" value="false" tip="V51" tip.zh-CN="" tip.en-US="DO-21" />
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<Limit do="PM1.DO_SiH4Switch" value="false" tip="V52" tip.zh-CN="" tip.en-US="DO-22" />
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<Limit do="PM1.DO_C3H8Switch" value="false" tip="V58" tip.zh-CN="" tip.en-US="DO-28" />
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<Limit do="PM1.DO_N2Switch" value="false" tip="V37S" tip.zh-CN="" tip.en-US="DO-7" />
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<Limit do="PM1.DO_SHH2ArSwitch" value="false" tip="V33" tip.zh-CN="" tip.en-US="DO-3" />
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<Limit do="PM1.DO_SHOpticPurgeFinal" value="false" tip="V87" tip.zh-CN="" tip.en-US="DO-40" />
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<Limit do="PM1.DO_OuterGasFinal" value="false" tip="V88" tip.zh-CN="" tip.en-US="DO-41" />
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<Limit do="PM1.DO_InnerGasFinal" value="false" tip="V89" tip.zh-CN="" tip.en-US="DO-112" />
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<Limit do="PM1.DO_MiddleGasFinal" value="false" tip="V90" tip.zh-CN="" tip.en-US="DO-113" />
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<Limit do="PM1.DO_GasRingPurgeFinal" value="false" tip="V91" tip.zh-CN="" tip.en-US="DO-114" />
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<Limit do="PM1.DO_HeaterUpPurgeFinal" value="false" tip="V92" tip.zh-CN="" tip.en-US="DO-115" />
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<Limit do="PM1.DO_ChamberPurgeFinal" value="false" tip="V93" tip.zh-CN="" tip.en-US="DO-116" />
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<Limit do="PM1.DO_RotationUpPurgeFinal" value="false" tip="V94" tip.zh-CN="" tip.en-US="DO-117" />
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<Limit do="PM1.DO_ConfinementRingFinal" value="false" tip="V95" tip.zh-CN="" tip.en-US="DO-118" />
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<Limit do="PM1.DO_HeaterWFFinal" value="false" tip="V96" tip.zh-CN="" tip.en-US="DO-119" />
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<Limit di="PM1.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13" />
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<Limit di="PM1.DI_EPV11_FB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-280" />
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<Limit do="PM1.DO_PurgeRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-172" />
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<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
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<Limit di="PM1.DI_PMATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
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</Action>
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</Interlock> |