741 lines
24 KiB
C#
741 lines
24 KiB
C#
|
using System;
|
|||
|
|
using System.Diagnostics;
|
|||
|
|
using Aitex.Core.RT.Device;
|
|||
|
|
using Aitex.Core.RT.Device.Unit;
|
|||
|
|
using Aitex.Core.RT.Event;
|
|||
|
|
using Aitex.Core.RT.Log;
|
|||
|
|
using Aitex.Core.RT.Routine;
|
|||
|
|
using Aitex.Core.RT.SCCore;
|
|||
|
|
using Mainframe.Devices;
|
|||
|
|
using Mainframe.LLs;
|
|||
|
|
using MECF.Framework.Common.DBCore;
|
|||
|
|
using MECF.Framework.Common.Equipment;
|
|||
|
|
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
|||
|
|
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
|||
|
|
|
|||
|
|
namespace Mainframe.TMs
|
|||
|
|
{
|
|||
|
|
public class TMLeakCheckRoutine : ModuleRoutine, IRoutine
|
|||
|
|
{
|
|||
|
|
enum RoutineStep
|
|||
|
|
{
|
|||
|
|
SlowPump,
|
|||
|
|
FastPump,
|
|||
|
|
VaccumDelay,
|
|||
|
|
PumpDelay,
|
|||
|
|
CloseValves,
|
|||
|
|
CLoseSlowValue,
|
|||
|
|
SlowPump1,
|
|||
|
|
FastPump1,
|
|||
|
|
VaccumDelay1,
|
|||
|
|
PumpDelay1,
|
|||
|
|
CloseValves1,
|
|||
|
|
CLoseSlowValue1,
|
|||
|
|
Delay,
|
|||
|
|
CheckSlitValves,
|
|||
|
|
RunPumpRoutine,
|
|||
|
|
ContinuePump,
|
|||
|
|
ClosePumpValve,
|
|||
|
|
DoLeakCheck,
|
|||
|
|
CalcLeakCheck,
|
|||
|
|
StartLoop,
|
|||
|
|
LoopVent,
|
|||
|
|
LoopPump,
|
|||
|
|
StopLoop,
|
|||
|
|
SetMFC, OpenSlowVent, OpenFastVent, CloseFastVent, CloseSlowVent
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private int _paramLeakCheckTime;
|
|||
|
|
private double _beginPressure;
|
|||
|
|
|
|||
|
|
private int _paramContinuePumpTime;
|
|||
|
|
private int _routineTimeOut;
|
|||
|
|
private double _leakSpec;
|
|||
|
|
private int _purgeCount;
|
|||
|
|
|
|||
|
|
private double _slowFastVentSwitchPressure;
|
|||
|
|
private double _slowFastPumpSwitchPressure;
|
|||
|
|
|
|||
|
|
private int _pumpDelayTime;
|
|||
|
|
private double _pumpBasePressure;
|
|||
|
|
private int _pumpTimeOut;
|
|||
|
|
|
|||
|
|
private double _mfcTargetSetPoint;
|
|||
|
|
private int _ventTimeOut;
|
|||
|
|
private double _ventBasePressure;
|
|||
|
|
private int _ventDelayTime;
|
|||
|
|
|
|||
|
|
private double _beginTime;
|
|||
|
|
private int _calTimes; //第几次计算LeakCheck的值（每60秒计算一次）
|
|||
|
|
|
|||
|
|
private TM _tm;
|
|||
|
|
private IoSensor _bufferLid;
|
|||
|
|
private IoSensor _tmLid;
|
|||
|
|
private Devices.IoPump _pumpType;
|
|||
|
|
private LoadLock _ll;
|
|||
|
|
private IoSensor _preHeatLid;
|
|||
|
|
private IoInterLock _tmIoInterLock;
|
|||
|
|
private SicPM.Devices.IoMFC _mfc40;
|
|||
|
|
private Stopwatch _swTimer = new Stopwatch();
|
|||
|
|
private bool isAtmMode = false;
|
|||
|
|
|
|||
|
|
public int ElapsedTime
|
|||
|
|
{
|
|||
|
|
get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; }
|
|||
|
|
}
|
|||
|
|
public TMLeakCheckRoutine()
|
|||
|
|
{
|
|||
|
|
Module = ModuleName.TM.ToString();
|
|||
|
|
Name = "Leak Check";
|
|||
|
|
_tm = DEVICE.GetDevice<TM>($"{ ModuleName.System.ToString()}.{ Module}");
|
|||
|
|
_ll = DEVICE.GetDevice<SicLoadLock>($"LoadLock.LoadLock");
|
|||
|
|
_bufferLid = DEVICE.GetDevice<IoSensor>($"TM.BufferLidClosed");
|
|||
|
|
_tmLid = DEVICE.GetDevice<IoSensor>($"TM.TMLidClosed");
|
|||
|
|
_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump");
|
|||
|
|
_preHeatLid = DEVICE.GetDevice<IoSensor>($"TM.PreHeatStationLidClosed");
|
|||
|
|
_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
|
|||
|
|
_mfc40 = DEVICE.GetDevice<SicPM.Devices.IoMFC>($"TM.Mfc40");
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
internal void Init(int pumpTime, int leakCheckTime)
|
|||
|
|
{
|
|||
|
|
_paramContinuePumpTime = pumpTime;
|
|||
|
|
_paramLeakCheckTime = leakCheckTime;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
internal void Init()
|
|||
|
|
{
|
|||
|
|
_paramContinuePumpTime = SC.GetValue<int>("TM.LeakCheck.PumpDelayTime"); ;
|
|||
|
|
_paramLeakCheckTime = SC.GetValue<int>("TM.LeakCheck.LeakCheckDelayTime"); ;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public Result Start(params object[] objs)
|
|||
|
|
{
|
|||
|
|
Reset();
|
|||
|
|
_swTimer.Restart();
|
|||
|
|
|
|||
|
|
string reason;
|
|||
|
|
if (!_tm.SetFastPumpValve(false, out reason) || !_tm.SetFastVentValve(false, out reason))
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (SC.GetValue<bool>("System.IsATMMode"))
|
|||
|
|
{
|
|||
|
|
EV.PostInfoLog(Module, $"system in atm mode, {_tm.Module} pump skipped");
|
|||
|
|
return Result.DONE;
|
|||
|
|
}
|
|||
|
|
if (SC.ContainsItem("TM.RunPumpRoutineEventBelowBasePressure") && !SC.ContainsItem("TM.RunPumpRoutineEventBelowBasePressure"))
|
|||
|
|
{
|
|||
|
|
if (_tm.ChamberPressure < _pumpBasePressure)
|
|||
|
|
{
|
|||
|
|
EV.PostInfoLog(Module, $"{_tm.Module} already under pump base pressure");
|
|||
|
|
return Result.DONE;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1 };
|
|||
|
|
foreach (var moduleName in modules)
|
|||
|
|
{
|
|||
|
|
if (!_tm.CheckSlitValveClose(moduleName))
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"Can not leakCheck, {moduleName} slit valve not closed");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_slowFastPumpSwitchPressure = SC.GetValue<double>("TM.Pump.SlowFastPumpSwitchPressure");
|
|||
|
|
_slowFastVentSwitchPressure= SC.GetValue<double>("TM.Vent.SlowFastVentSwitchPressure");
|
|||
|
|
|
|||
|
|
_pumpTimeOut = SC.GetValue<int>("TM.LeakCheck.PumpTimeout");
|
|||
|
|
_pumpBasePressure = SC.GetValue<double>("TM.LeakCheck.PumpBasePressure");
|
|||
|
|
_pumpDelayTime = SC.GetValue<int>("TM.LeakCheck.PumpDelayTime");
|
|||
|
|
_ventTimeOut = SC.GetValue<int>("TM.LeakCheck.VentTimeout");
|
|||
|
|
_ventBasePressure = SC.GetValue<double>("TM.LeakCheck.VentBasePressure");
|
|||
|
|
_ventDelayTime = SC.GetValue<int>("TM.LeakCheck.VentDelayTime");
|
|||
|
|
_routineTimeOut = SC.GetValue<int>("TM.LeakCheck.RoutineTimeOut");
|
|||
|
|
_leakSpec = SC.GetValue<double>("TM.LeakCheck.LeakSpec");
|
|||
|
|
_purgeCount= SC.GetValue<int>("TM.LeakCheck.CyclePurgeCount");
|
|||
|
|
_mfcTargetSetPoint = SC.GetValue<double>("TM.Vent.MfcFlow40");
|
|||
|
|
|
|||
|
|
if (_slowFastPumpSwitchPressure < _pumpBasePressure)
|
|||
|
|
{
|
|||
|
|
_slowFastPumpSwitchPressure = _pumpBasePressure;
|
|||
|
|
}
|
|||
|
|
if (_slowFastVentSwitchPressure > _ventBasePressure)
|
|||
|
|
{
|
|||
|
|
_slowFastVentSwitchPressure = _ventBasePressure;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
if (!_ll.SetFastPumpValve(false, out reason))
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"Can not leakCheck,LL fastPump can not close");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
if (!_bufferLid.Value)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"Can not leakCheck,Buffer lid is not open");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
if (!_tmLid.Value)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"Can not leakCheck,TM lid is not open");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
if (_pumpType.IsAlarm)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"can not leakCheck,TM pump alarm");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
if (!_pumpType.IsRunning)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"can not leakCheck,TM pump is not running");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
if (!_tmIoInterLock.SetTMLeakCheckRoutineRunning(true, out reason))
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"can not leakCheck,{reason}");
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
isAtmMode = SC.GetValue<bool>("System.IsATMMode");
|
|||
|
|
|
|||
|
|
Notify("Start");
|
|||
|
|
return Result.RUN;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public Result Monitor()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
if (isAtmMode)
|
|||
|
|
{
|
|||
|
|
return Result.DONE;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
CheckRoutineTimeOut();
|
|||
|
|
|
|||
|
|
Loop((int)RoutineStep.StartLoop, _purgeCount);
|
|||
|
|
//Pump
|
|||
|
|
OpenSlowPump((int)RoutineStep.SlowPump, _tm, _slowFastPumpSwitchPressure, _pumpTimeOut);
|
|||
|
|
|
|||
|
|
OpenFastPump((int)RoutineStep.FastPump, _tm, _pumpBasePressure, _pumpTimeOut);
|
|||
|
|
|
|||
|
|
TimeDelay((int)RoutineStep.VaccumDelay, _pumpDelayTime);
|
|||
|
|
|
|||
|
|
CloseFastPump((int)RoutineStep.CloseValves, _tm);
|
|||
|
|
|
|||
|
|
CloseSlowPump((int)RoutineStep.CLoseSlowValue, _tm);
|
|||
|
|
|
|||
|
|
//Vent
|
|||
|
|
SetMFCToSetPoint((int)RoutineStep.SetMFC, _mfc40, _mfcTargetSetPoint);
|
|||
|
|
|
|||
|
|
OpenSlowVent((int)RoutineStep.OpenSlowVent, _tm, _slowFastVentSwitchPressure, _ventTimeOut);
|
|||
|
|
|
|||
|
|
OpenFastVent((int)RoutineStep.OpenFastVent, _tm, _ventBasePressure, _ventTimeOut);
|
|||
|
|
|
|||
|
|
CloseFastVent((int)RoutineStep.CloseFastVent, _tm);
|
|||
|
|
|
|||
|
|
CloseSlowVentValve((int)RoutineStep.CloseSlowVent, _tm);
|
|||
|
|
|
|||
|
|
EndLoop((int)RoutineStep.StopLoop);
|
|||
|
|
|
|||
|
|
OpenSlowPump((int)RoutineStep.SlowPump1, _tm, _slowFastPumpSwitchPressure, _pumpTimeOut);
|
|||
|
|
|
|||
|
|
OpenFastPump((int)RoutineStep.FastPump1, _tm, _pumpBasePressure, _pumpTimeOut);
|
|||
|
|
|
|||
|
|
TimeDelay((int)RoutineStep.VaccumDelay1, _paramContinuePumpTime);
|
|||
|
|
|
|||
|
|
CloseFastPump((int)RoutineStep.CloseValves1, _tm);
|
|||
|
|
|
|||
|
|
CloseSlowPump((int)RoutineStep.CLoseSlowValue1, _tm);
|
|||
|
|
|
|||
|
|
DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime);
|
|||
|
|
|
|||
|
|
CalcLeackCheckPerMinute(_paramLeakCheckTime);
|
|||
|
|
}
|
|||
|
|
catch (RoutineBreakException)
|
|||
|
|
{
|
|||
|
|
return Result.RUN;
|
|||
|
|
}
|
|||
|
|
catch (RoutineFaildException)
|
|||
|
|
{
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
|||
|
|
_tmIoInterLock.DoTmLeakCheckRoutineRunning = false;
|
|||
|
|
_swTimer.Stop();
|
|||
|
|
return Result.DONE;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Abort()
|
|||
|
|
{
|
|||
|
|
Stop("Leak check aborted");
|
|||
|
|
_tmIoInterLock.DoTmLeakCheckRoutineRunning = false;
|
|||
|
|
|
|||
|
|
_swTimer.Stop();
|
|||
|
|
LeakCheckDataRecorder.Add((int)_swTimer.ElapsedMilliseconds / 1000, _beginPressure, _tm.ChamberPressure, 0, Result.FAIL.ToString(), "", Module);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
private void CheckRoutineTimeOut()
|
|||
|
|
{
|
|||
|
|
if (_routineTimeOut > 10)
|
|||
|
|
{
|
|||
|
|
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
|||
|
|
{
|
|||
|
|
Notify($"Routine TimeOut! over {_routineTimeOut} s");
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CheckSlitValves(int id, TM tm)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Check(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify("Check slit valve is all closed");
|
|||
|
|
|
|||
|
|
ModuleName[] modules = new ModuleName[]
|
|||
|
|
{ModuleName.LLA, ModuleName.LLB, ModuleName.PM1, ModuleName.PM2, ModuleName.PM3, ModuleName.PM4};
|
|||
|
|
|
|||
|
|
foreach (var m in modules)
|
|||
|
|
{
|
|||
|
|
if (!tm.CheckSlitValveClose(m))
|
|||
|
|
{
|
|||
|
|
Stop($"{m} slit valve not closed.");
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void DoLeakCheck(int id, double time )
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Keep pressure for {time} seconds");
|
|||
|
|
|
|||
|
|
_beginTime = _swTimer.ElapsedMilliseconds;
|
|||
|
|
_beginPressure = _tm.ChamberPressure;
|
|||
|
|
_calTimes = 1;
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//Tuple<bool, Result> ret = Delay(id, () =>
|
|||
|
|
// {
|
|||
|
|
// Notify($"Keep pressure for {time} seconds");
|
|||
|
|
|
|||
|
|
// _beginPressure = _tm.ChamberPressure;
|
|||
|
|
|
|||
|
|
// return true;
|
|||
|
|
// }, time * 1000);
|
|||
|
|
|
|||
|
|
//if (ret.Item1)
|
|||
|
|
//{
|
|||
|
|
// if (ret.Item2 == Result.RUN)
|
|||
|
|
// {
|
|||
|
|
// throw (new RoutineBreakException());
|
|||
|
|
// }
|
|||
|
|
//}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CalcLeackCheckPerMinute(int time)
|
|||
|
|
{
|
|||
|
|
//大于LeakCheck时间,
|
|||
|
|
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time)
|
|||
|
|
{
|
|||
|
|
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
|||
|
|
double endPressure = _tm.ChamberPressure;
|
|||
|
|
double leakSpan = endPressure - _beginPressure;
|
|||
|
|
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
|||
|
|
if (leakRate > _leakSpec)
|
|||
|
|
{
|
|||
|
|
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
|||
|
|
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module);
|
|||
|
|
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes)
|
|||
|
|
{
|
|||
|
|
_calTimes++;
|
|||
|
|
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
|||
|
|
double endPressure = _tm.ChamberPressure;
|
|||
|
|
double leakSpan = endPressure - _beginPressure;
|
|||
|
|
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
|||
|
|
if (leakRate > _leakSpec)
|
|||
|
|
{
|
|||
|
|
EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}");
|
|||
|
|
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}");
|
|||
|
|
}
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CalcLeakCheck(int id, int time)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
double endPressure = _tm.ChamberPressure;
|
|||
|
|
double leakSpan = endPressure - _beginPressure;
|
|||
|
|
double leakRate = (endPressure - _beginPressure) / (time / 60.0);
|
|||
|
|
|
|||
|
|
if (leakRate > _leakSpec)
|
|||
|
|
{
|
|||
|
|
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
|||
|
|
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "",Module);
|
|||
|
|
EV.PostInfoLog(Module,$"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
});
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void OpenSlowPump(int id, TM tm, double basePressure, int timeout)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Open {tm.Name} slow pump valve");
|
|||
|
|
|
|||
|
|
if (!tm.SetSlowPumpValve(true, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}, () =>
|
|||
|
|
{
|
|||
|
|
return tm.ChamberPressure <= basePressure;
|
|||
|
|
|
|||
|
|
}, timeout * 1000);
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
|||
|
|
{
|
|||
|
|
tm.SetFastPumpValve(false, out string _);
|
|||
|
|
|
|||
|
|
Stop($"{tm.Name} pressure can not pump to {basePressure} in {timeout} seconds");
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CloseSlowPump(int id, TM tm)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Close {tm.Name} pump valves");
|
|||
|
|
|
|||
|
|
if (!_tm.SetSlowPumpValve(false, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public void OpenFastPump(int id, TM tm, double basePressure, int timeout)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Open {tm.Name} pump valve");
|
|||
|
|
|
|||
|
|
if (!tm.SetFastPumpValve(true, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}, () =>
|
|||
|
|
{
|
|||
|
|
return tm.ChamberPressure <= basePressure;
|
|||
|
|
|
|||
|
|
}, timeout * 1000);
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
|||
|
|
{
|
|||
|
|
tm.SetFastPumpValve(false, out string _);
|
|||
|
|
|
|||
|
|
Stop($"{tm.Name} pressure can not pump to {basePressure} in {timeout} seconds");
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public void CloseFastPump(int id, TM tm)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Close {tm.Name} pump valves");
|
|||
|
|
|
|||
|
|
if (!_tm.SetFastPumpValve(false, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
private void SetMFCToSetPoint(int id, SicPM.Devices.IoMFC _mfc, double setPoint)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Set MFC value to default");
|
|||
|
|
_mfc.Ramp(setPoint, 0);
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void OpenFastVent(int id, TM tm, double basePressure, int timeout)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Open {tm.Name} slow vent valve");
|
|||
|
|
|
|||
|
|
if (!tm.SetFastVentValve(true, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}, () =>
|
|||
|
|
{
|
|||
|
|
return tm.ChamberPressure >= basePressure;
|
|||
|
|
|
|||
|
|
}, timeout * 1000);
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
|||
|
|
{
|
|||
|
|
tm.SetFastVentValve(false, out string _);
|
|||
|
|
|
|||
|
|
Stop($"{tm.Name} pressure can not vent to {basePressure} in {timeout} seconds");
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CloseFastPumpValve(int id, TM tm)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Close {tm.Name} fast pump valve");
|
|||
|
|
|
|||
|
|
if (!tm.SetFastPumpValve(false, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void OpenSlowVent(int id, TM tm, double basePressure, int timeout)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Open {tm.Name} slow vent valve");
|
|||
|
|
|
|||
|
|
if (!tm.SetSlowVentValve(true, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}, () =>
|
|||
|
|
{
|
|||
|
|
return tm.ChamberPressure >= basePressure;
|
|||
|
|
|
|||
|
|
}, timeout * 1000);
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else if (ret.Item2 == Result.TIMEOUT) //timeout
|
|||
|
|
{
|
|||
|
|
tm.SetFastVentValve(false, out string _);
|
|||
|
|
|
|||
|
|
Stop($"{tm.Name} pressure can not vent to {basePressure} in {timeout} seconds");
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CloseSlowVentValve(int id, TM tm)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Close {tm.Name} fast pump valve");
|
|||
|
|
|
|||
|
|
if (!tm.SetSlowVentValve(false, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void CloseFastVent(int id, TM tm)
|
|||
|
|
{
|
|||
|
|
Tuple<bool, Result> ret = Execute(id, () =>
|
|||
|
|
{
|
|||
|
|
Notify($"Close {tm.Name} vent valves");
|
|||
|
|
|
|||
|
|
if (!tm.SetFastVentValve(false, out string reason))
|
|||
|
|
{
|
|||
|
|
Stop(reason);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
if (ret.Item1)
|
|||
|
|
{
|
|||
|
|
if (ret.Item2 == Result.FAIL)
|
|||
|
|
{
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
throw (new RoutineBreakException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|