367 lines
12 KiB
C#
367 lines
12 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Reflection;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Equipment;
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using SicPM.Routines;
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namespace SicPM.RecipeExecutions
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{
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public class PostProcess : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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OpenH2Valve,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetPC,
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SetGroupJ,
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SetM19to38,
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SetPC567Close,
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SetPC567Default,
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SetPC567Mode,
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SetGasOut,
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SetTv,
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SetM291519to38,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetM291519to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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CheckPM1000,
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SetGasIn2,
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SetGroupJOpen,
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CloseFinal2,
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OpenFinal2,
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SetMfcFinal2,
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WaitPmPressureUp,
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WaitPmPressureUp1020,
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SetTvOpen,
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SetTvMode,
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SetTVto1050,
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SetTVto300,
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WaitTvTo300,
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CheckPmVac,
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CheckPmAtm,
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CheckV72Open,
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SetV72,
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SetV76,
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SetV75,
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SetEPV1,
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SetEPV2,
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SetEPV11,
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SetEPV22,
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SetTvModeToPress,
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SetMfc28to40Special,
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SetMfc28to40Default,
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SetPressUpOrDown1,
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SetPressureDown,
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EnableRotation,
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EnableHeater,
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SetRotation1,
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SetTC1Mode,
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SetTC1Ratio,
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SetTC1Ref,
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SetTC2Mode,
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SetTC2Ratio,
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SetTC2Ref,
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EnableTC1,
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EnableTC2,
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SetFinal1ToDefault,
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SetFinal1To0,
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SetFinal2ToDefault,
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SetFinal2To0,
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CheckFinal1Open,
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CheckFinal2Open,
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CheckTvOpen,
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SetRotation2,
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SetGroupV38,
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TimeDelay0,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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TimeDelay18,
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Notify1,
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Notify2
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}
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private IoThrottleValve2 _IoThrottle;
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private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _mfc1to16RampTime = 30;
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private int _mfc19to38RampTime = 30;
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private RecipeHead head;
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public string RecipeName
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{
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get;
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private set;
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}
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public string RecipeContex
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{
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get;
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private set;
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}
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private bool _purgeActive;
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private int _purgeCycleCount;
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private int _purgeVentTime;
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private int _purgePumpPressure;
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private int _purgePumpTimeLimit;
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private int _purgeVentStableTime;
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private int _purgePumpStableTime;
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private int _ventTime;
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private int _ventTimeLimit;
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private bool _isOnline;
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private bool _isVentAfterManualProcess;
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private IRecipeExecutor _executor;
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private PMToProcessIdleRoutine _pmToProcessIdleRoutine;
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public PostProcess(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "PostProcess";
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//_executor = executor;
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_pmToProcessIdleRoutine = new PMToProcessIdleRoutine(module, pm);
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//_ventRoutine = new PMVentRoutine(module, );
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}
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public bool Initialize()
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{
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return true;
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}
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public void Terminate()
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{
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}
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public override Result Start(params object[] objs)
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{
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try
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{
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//_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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//_mfc1to16RampTime = SC.GetValue<int>($"PM.{Module}.ProcessIdle.MFC1to16RampTime");
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//_mfc19to38RampTime = SC.GetValue<int>($"PM.{Module}.ProcessIdle.MFC19to38RampTime");
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//_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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//_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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//_throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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//Reset();
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//_purgeCycleCount = (int)SC.GetValue<double>(SCName.ProcessConfig_PurgeCycleCount);
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//_purgePumpPressure = (int)SC.GetValue<double>(SCName.ProcessConfig_PurgePumpPressure);
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//_purgeVentTime = (int)SC.GetValue<double>(SCName.ProcessConfig_PurgeVentTime);
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//_purgePumpTimeLimit = (int)SC.GetValue<double>(SCName.ProcessConfig_PurgePumpTimeLimit);
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//_purgeVentStableTime = (int)SC.GetValue<double>(SCName.ProcessConfig_PurgeVentStableTime);
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//_purgePumpStableTime = (int)SC.GetValue<double>(SCName.ProcessConfig_PurgePumpStableTime);
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//_ventTime = SC.GetValue<int>("PM.VentTime");
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//_isOnline = Singleton<RouteManager>.Instance.PM.IsOnline;
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//_isVentAfterManualProcess = SC.GetValue<bool>("PM.VentAfterManualProcess");
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}
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catch (Exception ex)
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{
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LOG.Write(ex, String.Format("Postprocess Start has exception"));
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return Result.FAIL;
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}
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, _mfc1to16RampTime);
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//TimeDelay((int)RoutineStep.TimeDelay0, _mfc1to16RampTime);
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//SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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//SetMfcToDefaultByGroup((int)RoutineStep.SetM19to38, MfcGroupName.M19to38, _mfc19to38RampTime);
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//TimeDelay((int)RoutineStep.TimeDelay1, _mfc19to38RampTime);
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////关闭A组，开启B组
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//SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
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//SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
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//SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure);
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//WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
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//TimeDelay((int)RoutineStep.TimeDelay7, 10);
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//ExecuteRoutine((int)RoutineStep.ToProcessIdle, _pmToProcessIdleRoutine);
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//RFPowerOff((int)RoutineStep.RFPowerOff);
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//StopAllGasFlow((int)RoutineStep.StopGasFlow, 10);
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//CloseAllValves((int)RoutineStep.CloseAllValves, 10);
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//if (_purgeActive)
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//{
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// Loop((int)RoutineStep.Loop, Betone.Preclean.RT.Properties.Resources.CyclePurgeRoutine_Monitor_StartCyclePurge, _purgeCycleCount, Notify, Stop);
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// CyclePump((int)RoutineStep.Pump, string.Format("Pump to {0} mTorr", _purgePumpPressure), _purgePumpPressure, _purgePumpTimeLimit, Notify, Stop);
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// CloseValve((int)RoutineStep.ClosePumpValve, string.Format("Pump valve"), DeviceModel.ValveRough, 5, Notify, Stop);
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// Delay((int)RoutineStep.PumpDelay, string.Format("Pump delay {0} seconds", _purgePumpStableTime), _purgePumpStableTime, Notify, Stop);
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// CycleVent((int)RoutineStep.Vent, string.Format("Purge {0} senconds", _purgeVentTime), _purgeVentTime, Notify, Stop);
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// CloseValve((int)RoutineStep.ClosePurgeValve, string.Format("Purge valve"), DeviceModel.ValveVent, 5, Notify, Stop);
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// Delay((int)RoutineStep.VentDelay, string.Format("Purge delay {0} seconds", _purgeVentStableTime), _purgeVentStableTime, Notify, Stop);
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// EndLoop((int)RoutineStep.EndLoop, Notify, Stop);
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//}
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//else
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{
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//ClosePumpingValve((int)RoutineStep.ClosePumpValve, 10);
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//if (!_isSimulatorMode)
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// Delay((int)RoutineStep.DelayWaitValve, 3);
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}
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//if (!_isATMMode && (_isOnline || _isVentAfterManualProcess))
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//{
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// //VentToPrecision((int)RoutineStep.VentEndToPrecision, _ventTime);
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// //ExecuteRoutine((int)RoutineStep.Vent, _ventRoutine);
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// //CloseVentValves((int)RoutineStep.CloseVentValve, _ventTime);
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//}
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//NoteProcessComplete((int)RoutineStep.NoteProcessComplete);
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//End((int)RoutineStep.End, "PostProcess finished");
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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//NoteProcessFailed((int)RoutineStep.NoteProcessFailed);
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public void Exit()
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{
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//_executor.RecipeRunningInfo.RecipeName = string.Empty;
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//_executor.RecipeRunningInfo.StepName = string.Empty;
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//_executor.RecipeRunningInfo.Step = 0;
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//_executor.RecipeRunningInfo.ElapsedTime = 0;
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//if (DeviceModel.SignalTower != null)
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//{
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// DeviceModel.SignalTower.BuzzerBlinking(SC.GetValue<double>(SCName.System_BuzzerBlinkingTime));
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//}
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//update processing end time
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//Singleton<ProcessRecorder>.Instance.EndRecipeProcess(Singleton<PMEntity>.Instance.CurrentRunningJob.RecipeRunId, SusceptorStatus.Processed);
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}
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public override void Abort()
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{
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PMDevice.AbortRunProcess(out string reason);
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//.StopAllGasFlow(out string reason);
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//_pm.SetPowerOnOff(false, out reason);
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//_pm.SetPower(0, false);
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//_pm.CloseValvesForPumping(out reason);
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//_executor.RecipeRunningInfo.RecipeName = string.Empty;
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//_executor.RecipeRunningInfo.StepName = string.Empty;
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//_executor.RecipeRunningInfo.Step = 0;
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//_executor.RecipeRunningInfo.ElapsedTime = 0;
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}
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}
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}
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