173 lines
5.3 KiB
C#
173 lines
5.3 KiB
C#
using System;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.Devices;
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using Mainframe.LLs;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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namespace Mainframe.TMs
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{
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public class TMPurgeRoutine : ModuleRoutine, IRoutine
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{
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enum RoutineStep
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{
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StartLoop,
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LoopPump,
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LoopVent,
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StopLoop,
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}
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private TMPumpRoutine _pumpRoutine;
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private TMVentRoutine _ventRoutine;
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private TM _tm;
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private IoSensor _bufferLid;
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private IoSensor _tmLid;
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private Devices.IoPump _pumpType;
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private LoadLock _ll;
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private IoInterLock _tmIoInterLock;
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private Stopwatch _swTimer = new Stopwatch();
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private int _routineTimeOut;
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private int _purgeCount;
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private bool isAtmMode = false;
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public TMPurgeRoutine()
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{
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Module = ModuleName.TM.ToString();
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Name = "Purge";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ Module}");
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_ll = DEVICE.GetDevice<SicLoadLock>($"LoadLock.LoadLock");
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_bufferLid = DEVICE.GetDevice<IoSensor>($"TM.BufferLidClosed");
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_tmLid = DEVICE.GetDevice<IoSensor>($"TM.TMLidClosed");
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_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump");
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_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
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_pumpRoutine = new TMPumpRoutine();
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_ventRoutine = new TMVentRoutine();
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}
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public Result Start(params object[] objs)
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{
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Reset();
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_purgeCount = SC.GetValue<int>("TM.Purge.CyclePurgeCount");
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_routineTimeOut = SC.GetValue<int>("TM.Purge.RoutineTimeOut");
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_pumpRoutine.Init(SC.GetValue<double>("TM.Purge.PumpBasePressure"), SC.GetValue<int>("TM.Purge.PumpDelayTime"));
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_ventRoutine.Init(SC.GetValue<double>("TM.Purge.VentBasePressure"), SC.GetValue<int>("TM.Purge.VentDelayTime"));
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ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1 };
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foreach (var moduleName in modules)
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{
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if (!_tm.CheckSlitValveClose(moduleName))
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{
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EV.PostAlarmLog(Module, $"Can not Purge, {moduleName} slit valve not closed");
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return Result.FAIL;
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}
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}
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if (!_ll.SetFastPumpValve(false, out string reason))
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{
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EV.PostAlarmLog(Module, $"Can not Purge,LL fastPump can not close");
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return Result.FAIL;
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}
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if (!_bufferLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not Purge,Buffer lid is not open");
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return Result.FAIL;
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}
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if (!_tmLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not Purge,TM lid is not open");
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return Result.FAIL;
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}
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if (_pumpType.IsAlarm)
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{
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EV.PostAlarmLog(Module, $"can not Purge,TM pump alarm");
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return Result.FAIL;
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}
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if (!_pumpType.IsRunning)
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{
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EV.PostAlarmLog(Module, $"can not Purge,TM pump is not running");
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return Result.FAIL;
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}
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if (!_tmIoInterLock.SetTMPurgeRoutineRunning(true, out reason))
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{
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EV.PostAlarmLog(Module, $"can not Purge,{reason}");
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return Result.FAIL;
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}
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isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public Result Monitor()
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{
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try
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{
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if (isAtmMode)
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{
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return Result.DONE;
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}
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CheckRoutineTimeOut();
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Loop((int)RoutineStep.StartLoop, _purgeCount);
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ExecuteRoutine((int)RoutineStep.LoopPump, _pumpRoutine);
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ExecuteRoutine((int)RoutineStep.LoopVent, _ventRoutine);
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EndLoop((int)RoutineStep.StopLoop);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoTmCyclePurgeRoutineRunning = false;
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return Result.DONE;
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}
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public void Abort()
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{
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_tmIoInterLock.DoTmCyclePurgeRoutineRunning = false;
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_pumpRoutine.Abort();
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_ventRoutine.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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Notify($"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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