354 lines
12 KiB
C#
354 lines
12 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Sorter.Common;
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using Mainframe.Devices;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using SicPM.Devices;
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namespace Mainframe.TMs
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{
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public class TMRobotPickRoutine : TMBaseRoutine
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{
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enum RoutineStep
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{
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WaitOpenSlitValveInterlock,
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OpenSlitValve,
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CheckBeforePick,
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PrepareTransfer,
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PrepareTransferNotWait,
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Pick,
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QueryOffset,
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Extend,
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Handoff,
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HandoffDelay,
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Retract,
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UpdateWaferInfoByHandoff,
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RequestWaferPresent,
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BeforePickRequestWaferPresent,
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AfterPickRequestWaferPresent,
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RequestAWCData,
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CheckWaferInfoByRobotSensor,
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BeforePickCheckWaferInfoByRobotSensor,
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AfterPickCheckWaferInfoByRobotSensor,
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WaitCloseSlitValveInterlock,
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CloseSlitValve,
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SetRobortExtendToDo,
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ClearRobortExtendToDo,
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WaitPMSensor,
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PostTransfer,
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OpenShutter,
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CloseShutter,
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Delay1,
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Delay2,
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VceMoveToSlot,
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RobotGotoNotWait,
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CheckRobotReady,
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CheckTransferPrepared,
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SetConfinementRingUp,
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TimeDelay1,
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TimeDelay20,
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TimeDelay50,
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}
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private ModuleName _target;
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private int _targetSlot;
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private RobotArmEnum _blade;
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private int _pickTimeout;
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private bool _autoHand;
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private int _postTransferTimeout;
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private double _shutterAndSlitValveMotionInterval;
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private bool _requestAWCData;
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private SicTM _tm;
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private TMSlitValveRoutine _openSlitValveRoutine = new TMSlitValveRoutine();
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private TMSlitValveRoutine _closeSlitValveRoutine = new TMSlitValveRoutine();
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// private VCEMoveToSlotRoutine _vceMoveToSlotRoutine;
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private bool _isShutterAndSlitValveMotionOneByOne;
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private bool _pmPostTrasferEnableHeat =true;
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private IoConfinementRing _confinementRing;
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public TMRobotPickRoutine()
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{
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Module = "TMRobot";
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Name = "Pick";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}");
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}
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public void Init(ModuleName source, int sourceSlot, RobotArmEnum blade)
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{
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Init(source, sourceSlot, blade, false);
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}
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public void Init(ModuleName source, int sourceSlot, int blade)
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{
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Init(source, sourceSlot, blade == 0 ? RobotArmEnum.Blade1 : RobotArmEnum.Blade2, false);
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}
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public void Init(ModuleName source, int sourceSlot)
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{
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Init(source, sourceSlot, RobotArmEnum.Blade1, true);
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}
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private void Init(ModuleName source, int sourceSlot, RobotArmEnum blade, bool autoHand)
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{
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_autoHand = autoHand;
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_target = source;
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_targetSlot = sourceSlot;
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_blade = blade;
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_openSlitValveRoutine.Init(source.ToString(), true, _pmPostTrasferEnableHeat);
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_closeSlitValveRoutine.Init(source.ToString(), false, _pmPostTrasferEnableHeat);
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_confinementRing = DEVICE.GetDevice<IoConfinementRing>("PM1.ConfinementRing");
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}
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public void Init(ModuleName source, int sourceSlot, int blade, bool autoHand,bool pmPostTrasferEnableHeat)
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{
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_pmPostTrasferEnableHeat = pmPostTrasferEnableHeat;
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Init(source, sourceSlot, RobotArmEnum.Blade1, autoHand);
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (RobotDevice.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not pick, TMRobot Is Not IDLE");
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return Result.FAIL;
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}
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_pickTimeout = SC.GetValue<int>("TMRobot.PickTimeout");
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//if (ModuleHelper.IsPm(_target))
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//{
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// _postTransferTimeout = SC.GetValue<int>($"{_target}.PostTransferTimeout");
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// _shutterAndSlitValveMotionInterval = SC.GetValue<double>($"{_target}.ShutterAndSlitValveMotionInterval");
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// _isShutterAndSlitValveMotionOneByOne = SC.GetValue<bool>($"{_target}.ShutterAndSlitValveMotionOneByOne");
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// //CoralPM pm = DEVICE.GetDevice<CoralPM>(_target.ToString());
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// if (!pm.PickPlaceCheck(out string reason, false))
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// {
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// EV.PostWarningLog(Module, $"Can not place, {reason}");
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// return Result.FAIL;
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// }
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//}
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_requestAWCData = SC.GetValue<bool>("System.RequestAWCDataAfterPick");
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if (!WaferManager.Instance.CheckHasWafer(_target, _targetSlot))
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{
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EV.PostWarningLog(Module, $"Can not pick, No wafer at {_target}, {_targetSlot + 1}");
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return Result.FAIL;
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}
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if (_autoHand)
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{
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if (WaferManager.Instance.CheckNoWafer(Module, 0))
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{
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_blade = RobotArmEnum.Blade1;
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}
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else if (WaferManager.Instance.CheckNoWafer(Module, 1))
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{
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_blade = RobotArmEnum.Blade2;
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}
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else
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{
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EV.PostWarningLog(Module, $"Can not pick, Robot both arm has wafer");
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return Result.FAIL;
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}
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}
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int slot = _blade == RobotArmEnum.Blade1 ? 0 : 1;
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if (!WaferManager.Instance.CheckNoWafer(Module, slot))
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{
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EV.PostWarningLog(Module, $"Can not pick, Robot arm {slot + 1} has wafer");
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return Result.FAIL;
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}
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//Pick之前先,根据Sensor检测是否有盘
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if (!SC.GetValue<bool>("System.IsSimulatorMode"))
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{
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if (ModuleHelper.IsLoadLock(_target) && !SensorLLWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick, LoadLock sensor check no wafer");
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return Result.FAIL;
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}
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if (ModuleHelper.IsBuffer(_target) && !SensorBufferWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,Buffer sensor check no wafer");
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return Result.FAIL;
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}
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}
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//if (ModuleHelper.IsVCE(_target))
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//{
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// var vce = DEVICE.GetDevice<CoralVCE>(_target.ToString());
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// if (!vce.CheckEnableTransfer(EnumTransferType.Pick))
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// {
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// EV.PostWarningLog(Module, $"can not pick, {_target} not ready for transfer");
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// return Result.FAIL;
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// }
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// _vceMoveToSlotRoutine = new VCEMoveToSlotRoutine(_target.ToString());
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// _vceMoveToSlotRoutine.Init(_targetSlot);
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//}
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//if (ModuleHelper.IsPm(_target))
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//{
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// SicPM pm = DEVICE.GetDevice<SicPM>(_target.ToString());
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// if (!pm.CheckEnableTransfer(EnumTransferType.Pick, out string reason))
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// {
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// EV.PostWarningLog(Module, $"can not pick, {_target} not ready for transfer");
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// return Result.FAIL;
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// }
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//}
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Notify($"Start, Pick from {_target} slot {_targetSlot + 1}, by {(_blade == RobotArmEnum.Blade1 ? "Blade1" : "Blade2")}");
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IsPicking = false;
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return Result.RUN;
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}
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public override void Abort()
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{
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_tm.CloseAllVentPumpValue();
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if (!IsPicking)
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{
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RobotDevice.Stop();
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}
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Notify("Abort");
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}
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public override Result Monitor()
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{
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try
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{
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WaitSlitValveOpenInterlock((int)RoutineStep.WaitOpenSlitValveInterlock, TMDevice.GetSlitValve(_target), _pickTimeout);
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/// if (ModuleHelper.IsPm(_target))
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{
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RobotGotoNotWait((int)RoutineStep.RobotGotoNotWait, RobotDevice, _target, _targetSlot, _blade, _pickTimeout);
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if (_isShutterAndSlitValveMotionOneByOne)
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{
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Delay((int)RoutineStep.Delay1, _shutterAndSlitValveMotionInterval);
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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}
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else
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{
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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}
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _pickTimeout);
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}
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if (_target == ModuleName.VCEA || _target == ModuleName.VCEB)
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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CheckBeforePick((int)RoutineStep.CheckBeforePick, _target, _targetSlot, _blade);
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RobotRequestWaferPresent((int)RoutineStep.BeforePickRequestWaferPresent, RobotDevice, _blade, _pickTimeout);
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CheckWaferInfoByRobotRQ((int)RoutineStep.AfterPickCheckWaferInfoByRobotSensor, RobotDevice, _blade, 1000);
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WaitPMReadySensor((int)RoutineStep.WaitPMSensor, _target, 5);
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SetRobortExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _pickTimeout);
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Pick((int)RoutineStep.Pick, RobotDevice, _target, _targetSlot, _blade, _pickTimeout);
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IsPicking = false;
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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RobotRequestWaferPresent((int)RoutineStep.RequestWaferPresent, RobotDevice, _blade, _pickTimeout);
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CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, 1000);
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if (_requestAWCData)
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{
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RobotRequestWaferAWCData((int)RoutineStep.RequestAWCData, RobotDevice, _pickTimeout);
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}
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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ExecuteRoutine((int)RoutineStep.CloseSlitValve, _closeSlitValveRoutine);
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//if (ModuleHelper.IsPm(_target))
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//{
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// PostTransfer((int)RoutineStep.PostTransfer, Singleton<RouteManager>.Instance.GetPMEntity(_target), DEVICE.GetDevice<PM>(_target.ToString()), EnumTransferType.Pick, _postTransferTimeout);
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//}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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RobotDevice.Stop();
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return Result.FAIL;
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}
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Notify($"Finished, Pick from {_target} slot {_targetSlot + 1}, by {_blade}");
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return Result.DONE;
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}
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public void SetConfinementRingUp(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Set Confinement RingUp");
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OP.DoOperation($"{_target}.ServoUp");
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return true;
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}, () =>
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{
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return _confinementRing.IsUp;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Set Confinement RingUp timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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