329 lines
12 KiB
C#
329 lines
12 KiB
C#
using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using Aitex.Core.RT.Log;
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namespace Mainframe.TMs
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{
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public class TMRobotPlaceRoutine : TMBaseRoutine
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{
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enum RoutineStep
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{
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WaitOpenSlitValveInterlock,
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OpenSlitValve,
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CheckBeforePlace,
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Place,
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PrepareTransfer,
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Extend,
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Handoff,
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HandoffDelay,
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Retract,
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UpdateWaferInfoByHandoff,
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RequestWaferPresent,
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BeforePlaceRequestWaferPresent,
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AfterPlaceRequestWaferPresent,
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CheckWaferInfoByRobotSensor,
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BeforePlaceCheckWaferInfoByRobotSensor,
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AfterPlaceCheckWaferInfoByRobotSensor,
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RequestAWCData,
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SetRobortExtendToDo,
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ClearRobortExtendToDo,
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WaitCloseSlitValveInterlock,
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CloseSlitValve,
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WaitPMSensor,
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PostTransfer,
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OpenShutter,
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CloseShutter,
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Delay1,
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Delay2,
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VceMoveToSlot,
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RobotGotoNotWait,
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PrepareTransferNotWait,
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CheckRobotReady,
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CheckTransferPrepared,
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TimeDelay1
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}
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private ModuleName _target;
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private int _targetSlot;
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private RobotArmEnum _blade;
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private int _placeTimeout;
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private int _postTransferTimeout;
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private bool _requestAWCData;
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private double _shutterAndSlitValveMotionInterval;
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private bool _autoHand;
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private TMSlitValveRoutine _openSlitValveRoutine = new TMSlitValveRoutine();
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private TMSlitValveRoutine _closeSlitValveRoutine = new TMSlitValveRoutine();
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//private VCEMoveToSlotRoutine _vceMoveToSlotRoutine;
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private bool _isShutterAndSlitValveMotionOneByOne;
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private SicTM _tm;
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public TMRobotPlaceRoutine()
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{
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Module = "TMRobot";
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Name = "Place";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}");
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}
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public void Init(ModuleName target, int targetSlot, RobotArmEnum blade)
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{
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Init(target, targetSlot, blade, false);
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}
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public void Init(ModuleName target, int targetSlot, int blade)
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{
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Init(target, targetSlot, blade == 0 ? RobotArmEnum.Blade1 : RobotArmEnum.Blade2, false);
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}
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public void Init(ModuleName target, int targetSlot)
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{
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Init(target, targetSlot, RobotArmEnum.Blade1, true);
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}
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private void Init(ModuleName target, int targetSlot, RobotArmEnum blade, bool autoHand)
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{
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_autoHand = autoHand;
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_target = target;
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_targetSlot = targetSlot;
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_blade = blade;
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_openSlitValveRoutine.Init(target.ToString(), true);
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_closeSlitValveRoutine.Init(target.ToString(), false);
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (RobotDevice.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not place, TMRobot Is Not IDLE");
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return Result.FAIL;
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}
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_placeTimeout = SC.GetValue<int>("TMRobot.PlaceTimeout");
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//if (ModuleHelper.IsPm(_target))
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//{
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// _postTransferTimeout = SC.GetValue<int>($"{_target}.PostTransferTimeout");
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// _shutterAndSlitValveMotionInterval = SC.GetValue<double>($"{_target}.ShutterAndSlitValveMotionInterval");
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// _isShutterAndSlitValveMotionOneByOne = SC.GetValue<bool>($"{_target}.ShutterAndSlitValveMotionOneByOne");
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// CoralPM pm = DEVICE.GetDevice<CoralPM>(_target.ToString());
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// if (!pm.PickPlaceCheck(out string reason, false))
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// {
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// EV.PostWarningLog(Module, $"Can not place, {reason}");
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// return Result.FAIL;
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// }
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//}
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_requestAWCData = SC.GetValue<bool>("System.RequestAWCDataAfterPlace");
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if (!WaferManager.Instance.CheckNoWafer(_target, _targetSlot))
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{
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EV.PostWarningLog(Module, $"Can not place, should no wafer at {_target}, {_targetSlot + 1}");
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return Result.FAIL;
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}
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if (_autoHand)
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{
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if (WaferManager.Instance.CheckHasWafer(Module, 0))
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{
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_blade = RobotArmEnum.Blade1;
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}
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else if (WaferManager.Instance.CheckHasWafer(Module, 1))
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{
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_blade = RobotArmEnum.Blade2;
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}
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else
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{
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EV.PostWarningLog(Module, $"Can not place, Robot both arm no wafer");
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return Result.FAIL;
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}
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}
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int slot = _blade == RobotArmEnum.Blade1 ? 0 : 1;
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if (!WaferManager.Instance.CheckHasWafer(Module, slot))
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{
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EV.PostWarningLog(Module, $"Can not place, Robot arm {slot + 1} no wafer");
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return Result.FAIL;
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}
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//Place之前先,根据Sensor检测是否有盘
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if (!SC.GetValue<bool>("System.IsSimulatorMode"))
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{
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if (ModuleHelper.IsLoadLock(_target) && SensorLLWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place, LoadLock sensor has wafer");
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return Result.FAIL;
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}
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if (ModuleHelper.IsBuffer(_target) && SensorBufferWaferPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,Buffer sensor check has wafer");
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return Result.FAIL;
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}
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}
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//if (ModuleHelper.IsVCE(_target))
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//{
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// var vce = DEVICE.GetDevice<CoralVCE>(_target.ToString());
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// if (!vce.CheckEnableTransfer(EnumTransferType.Place))
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// {
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// EV.PostWarningLog(Module, $"can not place, {_target} not ready for transfer");
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// return Result.FAIL;
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// }
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// _vceMoveToSlotRoutine = new VCEMoveToSlotRoutine(_target.ToString());
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// _vceMoveToSlotRoutine.Init(_targetSlot);
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//}
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//if (ModuleHelper.IsPm(_target))
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//{
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// PM pm = DEVICE.GetDevice<PM>(_target.ToString());
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// if (!pm.CheckEnableTransfer(EnumTransferType.Place, out string reason))
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// {
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// EV.PostWarningLog(Module, $"can not place, {_target} not ready for transfer");
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// return Result.FAIL;
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// }
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//}
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Notify($"Start, Place to {_target} slot {_targetSlot + 1}, by {(_blade == RobotArmEnum.Blade1 ? "Blade1" : "Blade2")}");
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return Result.RUN;
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}
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public override void Abort()
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{
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_tm.CloseAllVentPumpValue();
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if (!IsPicking)
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{
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RobotDevice.Stop();
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}
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Notify("Abort");
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}
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public override Result Monitor()
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{
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try
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{
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WaitSlitValveOpenInterlock((int)RoutineStep.WaitOpenSlitValveInterlock, TMDevice.GetSlitValve(_target), _placeTimeout);
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// if (ModuleHelper.IsPm(_target))
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{
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RobotGotoNotWait((int)RoutineStep.RobotGotoNotWait, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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if (_isShutterAndSlitValveMotionOneByOne)
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{
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Delay((int)RoutineStep.Delay1, _shutterAndSlitValveMotionInterval);
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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}
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else
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{
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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}
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
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}
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if (_target == ModuleName.VCEA || _target == ModuleName.VCEB)
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
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CheckBeforePlace((int)RoutineStep.CheckBeforePlace, _target, _targetSlot, _blade);
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RobotRequestWaferPresent((int)RoutineStep.BeforePlaceRequestWaferPresent, RobotDevice, _blade, _placeTimeout);
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CheckWaferInfoByRobotRQ((int)RoutineStep.BeforePlaceCheckWaferInfoByRobotSensor, RobotDevice, _blade, 1000);
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WaitPMReadySensor((int)RoutineStep.WaitPMSensor, _target, 5);
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SetRobortExtendToDO((int)RoutineStep.SetRobortExtendToDo, _target, 2);
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//if (ModuleHelper.IsVCE(_target))
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//{
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// RobotGotoNotWait((int)RoutineStep.RobotGotoNotWait, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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// ExecuteRoutine((int)RoutineStep.VceMoveToSlot, _vceMoveToSlotRoutine);
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//}
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//if (ModuleHelper.IsPm(_target) && DEVICE.GetDevice<PM>(_target.ToString()).IsActiveHandoff)
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//{
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// CheckTransferPrepared((int)RoutineStep.CheckTransferPrepared, DEVICE.GetDevice<PM>(_target.ToString()), EnumTransferType.Place, _placeTimeout);
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// //PrepareTransfer((int)RoutineStep.PrepareTransfer, DEVICE.GetDevice<PM>(_target.ToString()), EnumTransferType.Place, _placeTimeout);
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// PlaceExtend((int)RoutineStep.Extend, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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// TransferHandoff((int)RoutineStep.Handoff, DEVICE.GetDevice<PM>(_target.ToString()), EnumTransferType.Place, _placeTimeout);
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// Delay((int)RoutineStep.HandoffDelay, 2);
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// UpdateWaferInfoDueHandoff((int)RoutineStep.UpdateWaferInfoByHandoff, ModuleHelper.Converter(Module), _blade == RobotArmEnum.Blade1 ? 0 : 1, _target, _targetSlot);
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// PlaceRetract((int)RoutineStep.Retract, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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//}
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//else
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{
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CheckRobotReady((int)RoutineStep.CheckRobotReady, RobotDevice, _placeTimeout);
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Place((int)RoutineStep.Place, RobotDevice, _target, _targetSlot, _blade, _placeTimeout);
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IsPicking = false;
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}
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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RobotRequestWaferPresent((int)RoutineStep.RequestWaferPresent, RobotDevice, _blade, _placeTimeout);
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CheckWaferInfoByRobotRQ((int)RoutineStep.CheckWaferInfoByRobotSensor, RobotDevice, _blade, 1000);
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if (_requestAWCData)
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{
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RobotRequestWaferAWCData((int)RoutineStep.RequestAWCData, RobotDevice, _placeTimeout);
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}
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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ExecuteRoutine((int)RoutineStep.CloseSlitValve, _closeSlitValveRoutine);
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//if (ModuleHelper.IsPm(_target))
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//{
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// PostTransfer((int)RoutineStep.PostTransfer, Singleton<RouteManager>.Instance.GetPMEntity(_target), DEVICE.GetDevice<PM>(_target.ToString()), EnumTransferType.Pick, _postTransferTimeout);
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//}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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RobotDevice.Stop();
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return Result.FAIL;
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}
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Notify($"Finish, Place to {_target} slot {_targetSlot + 1}, by {_blade}");
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return Result.DONE;
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}
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}
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}
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