141 lines
12 KiB
XML
141 lines
12 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
|
|
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
|
|
<VersionID Name="V1.0.1.1"/>
|
|
<Dig_In>
|
|
<DI_ITEM Index="0" Name="DI_LLDoorClosed" BufferOffset="0" Addr="0" Description=""/>
|
|
<DI_ITEM Index="1" Name="DI_LLDoorOpened" BufferOffset="1" Addr="1" Description=""/>
|
|
<DI_ITEM Index="2" Name="DI_PreHeatStationDoorClosed" BufferOffset="2" Addr="2" Description=""/>
|
|
<DI_ITEM Index="3" Name="DI_PreHeatStationDoorOpened" BufferOffset="3" Addr="3" Description=""/>
|
|
<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description=""/>
|
|
<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description=""/>
|
|
<DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description=""/>
|
|
<DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description=""/>
|
|
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description=""/>
|
|
<DI_ITEM Index="13" Name="DI_LLLidClosed" BufferOffset="13" Addr="13" Description=""/>
|
|
<DI_ITEM Index="14" Name="DI_BufferLidClosed" BufferOffset="14" Addr="14" Description=""/>
|
|
<DI_ITEM Index="15" Name="DI_PreHeatStationLidClosed" BufferOffset="15" Addr="15" Description=""/>
|
|
<DI_ITEM Index="16" Name="DI_TMatATM" BufferOffset="16" Addr="16" Description=""/>
|
|
<DI_ITEM Index="17" Name="DI_LoadLockAtATM" BufferOffset="17" Addr="17" Description=""/>
|
|
<DI_ITEM Index="18" Name="DI_TMUnderVac" BufferOffset="18" Addr="18" Description=""/>
|
|
<DI_ITEM Index="19" Name="DI_LoadLockUnderVAC" BufferOffset="19" Addr="19" Description=""/>
|
|
<DI_ITEM Index="20" Name="DI_CDAPressureSWReady" BufferOffset="20" Addr="20" Description=""/>
|
|
<DI_ITEM Index="21" Name="DI_WaterFlowSWReady" BufferOffset="21" Addr="21" Description=""/>
|
|
<DI_ITEM Index="22" Name="DI_ArPressureSWReady" BufferOffset="22" Addr="22" Description=""/>
|
|
<DI_ITEM Index="23" Name="DI_VacRobotNotExtendToReactorA" BufferOffset="23" Addr="23" Description=""/>
|
|
<DI_ITEM Index="24" Name="DI_VacRobotNotExtendToReactorB" BufferOffset="24" Addr="24" Description=""/>
|
|
<DI_ITEM Index="27" Name="DI_VacRobotNotExtendToPreHeaterStation" BufferOffset="27" Addr="27" Description=""/>
|
|
<DI_ITEM Index="28" Name="DI_VacRobotNotExtendToLoadLock" BufferOffset="28" Addr="28" Description=""/>
|
|
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description=""/>
|
|
<DI_ITEM Index="32" Name="DI_ReactorAVACSW" BufferOffset="32" Addr="32" Description=""/>
|
|
<DI_ITEM Index="33" Name="DI_ReactorAATMSW " BufferOffset="33" Addr="33" Description=""/>
|
|
<DI_ITEM Index="34" Name="DI_ReactorBVACSW" BufferOffset="34" Addr="34" Description=""/>
|
|
<DI_ITEM Index="35" Name="DI_ReactorBATMSW " BufferOffset="35" Addr="35" Description=""/>
|
|
<DI_ITEM Index="38" Name="DI_LoaderLidLocked" BufferOffset="38" Addr="38" Description=""/>
|
|
<DI_ITEM Index="39" Name="DI_LoaderLidUnLocked " BufferOffset="39" Addr="39" Description=""/>
|
|
<DI_ITEM Index="40" Name="DI_TMFastRoughingClosed" BufferOffset="40" Addr="40" Description=""/>
|
|
<DI_ITEM Index="41" Name="DI_LLFastRoughingClosed" BufferOffset="41" Addr="41" Description=""/>
|
|
<DI_ITEM Index="42" Name="DI_ForelineBasePressureReady" BufferOffset="42" Addr="42" Description=""/>
|
|
<DI_ITEM Index="43" Name="DI_DryPumpAlarm" BufferOffset="43" Addr="43" Description=""/>
|
|
<DI_ITEM Index="44" Name="DI_DryPumpRuning" BufferOffset="44" Addr="44" Description=""/>
|
|
<DI_ITEM Index="45" Name="DI_LLWaferPresence" BufferOffset="45" Addr="45" Description=""/>
|
|
<DI_ITEM Index="46" Name="DI_BufferWaferPresence" BufferOffset="46" Addr="46" Description=""/>
|
|
<DI_ITEM Index="49" Name="DI_DryPumpWarning" BufferOffset="49" Addr="49" Description=""/>
|
|
<DI_ITEM Index="64" Name="DI_LLSlowRoughOpen_FB" BufferOffset="64" Addr="64" Description="V84"/>
|
|
<DI_ITEM Index="65" Name="DI_LLFastRoughOpen_FB" BufferOffset="65" Addr="65" Description="V83"/>
|
|
<DI_ITEM Index="66" Name="DI_TMSlowRoughOpen_FB" BufferOffset="66" Addr="66" Description="V82"/>
|
|
<DI_ITEM Index="67" Name="DI_TMFastRoughOpen_FB" BufferOffset="67" Addr="67" Description="V81"/>
|
|
<DI_ITEM Index="68" Name="DI_LLSlowVentOpen_FB" BufferOffset="68" Addr="68" Description="V80"/>
|
|
<DI_ITEM Index="69" Name="DI_LLFastVentOpen_FB" BufferOffset="69" Addr="69" Description="V79"/>
|
|
<DI_ITEM Index="70" Name="DI_TMN2PurgeOpen_FB" BufferOffset="70" Addr="70" Description="V77"/>
|
|
<DI_ITEM Index="71" Name="DI_TMFastVentOpen_FB" BufferOffset="71" Addr="71" Description="V78"/>
|
|
<DI_ITEM Index="72" Name="DI_TMTOLLVentOpen_FB" BufferOffset="72" Addr="72" Description="V85"/>
|
|
<DI_ITEM Index="73" Name="DI_LLDoorClose_FB" BufferOffset="73" Addr="73" Description=""/>
|
|
<DI_ITEM Index="75" Name="DI_PreHeatChamberDoorClose_FB" BufferOffset="75" Addr="75" Description=""/>
|
|
<DI_ITEM Index="76" Name="DI_PreHeatChamberDoorOpen_FB" BufferOffset="76" Addr="76" Description=""/>
|
|
<DI_ITEM Index="77" Name="DI_RectorADoorClose_FB" BufferOffset="77" Addr="77" Description=""/>
|
|
<DI_ITEM Index="78" Name="DI_RectorADoorOpen_FB" BufferOffset="78" Addr="78" Description=""/>
|
|
<DI_ITEM Index="79" Name="DI_RectorBDoorClose_FB" BufferOffset="79" Addr="79" Description=""/>
|
|
<DI_ITEM Index="80" Name="DI_RectorBDoorOpen_FB" BufferOffset="80" Addr="80" Description=""/>
|
|
<DI_ITEM Index="81" Name="DI_TMRoughBypass_FB" BufferOffset="81" Addr="81" Description=""/>
|
|
<DI_ITEM Index="82" Name="DI_VacRobotEstop_FB" BufferOffset="82" Addr="82" Description=""/>
|
|
<DI_ITEM Index="83" Name="DI_VacRobotExtenLLEnable_FB" BufferOffset="83" Addr="83" Description=""/>
|
|
<DI_ITEM Index="84" Name="DI_VacRobotExtendBufferEnable_FB" BufferOffset="84" Addr="84" Description=""/>
|
|
<DI_ITEM Index="85" Name="DI_VacRobotExtendPMAEnable_FB" BufferOffset="85" Addr="85" Description=""/>
|
|
<DI_ITEM Index="94" Name="DI_LoadLockDoorOpen_FB" BufferOffset="94" Addr="94" Description=""/>
|
|
|
|
<DI_ITEM Index="100" Name="DI_LoaderLockTest" BufferOffset="100" Addr="100" Description=""/>
|
|
</Dig_In>
|
|
<Dig_Out>
|
|
<DO_ITEM Index="0" Name="DO_LLSlowRoughOpen" BufferOffset="0" Addr="0" Description="V84"/>
|
|
<DO_ITEM Index="1" Name="DO_LLFastRoughOpen" BufferOffset="1" Addr="1" Description="V83"/>
|
|
<DO_ITEM Index="2" Name="DO_TMSlowRoughOpen" BufferOffset="2" Addr="2" Description="V82"/>
|
|
<DO_ITEM Index="3" Name="DO_TMFastRoughOpen" BufferOffset="3" Addr="3" Description="V81"/>
|
|
<DO_ITEM Index="4" Name="DO_LLSlowVentOpen" BufferOffset="4" Addr="4" Description="V80"/>
|
|
<DO_ITEM Index="5" Name="DO_LLFastVentOpen" BufferOffset="5" Addr="5" Description="V79"/>
|
|
<DO_ITEM Index="6" Name="DO_TMSlowVentOpen" BufferOffset="6" Addr="6" Description="V77"/>
|
|
<DO_ITEM Index="7" Name="DO_TMFastVentOpen" BufferOffset="7" Addr="7" Description="V78"/>
|
|
<DO_ITEM Index="8" Name="DO_TMTOLLVentOpen" BufferOffset="8" Addr="8" Description="V85"/>
|
|
<DO_ITEM Index="9" Name="DO_LLDoorClose" BufferOffset="9" Addr="9" Description=""/>
|
|
<DO_ITEM Index="10" Name="DO_LLDoorOpen" BufferOffset="10" Addr="10" Description=""/>
|
|
<DO_ITEM Index="11" Name="DO_PreHeatChamberDoorClose" BufferOffset="11" Addr="11" Description=""/>
|
|
<DO_ITEM Index="12" Name="DO_PreHeatChamberDoorOpen" BufferOffset="12" Addr="12" Description=""/>
|
|
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description=""/>
|
|
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description=""/>
|
|
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description=""/>
|
|
<DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description=""/>
|
|
<DO_ITEM Index="17" Name="DO_TMRoughBypass" BufferOffset="17" Addr="17" Description=""/>
|
|
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description=""/>
|
|
<DO_ITEM Index="19" Name="DO_VacRobotExtenLLEnable" BufferOffset="19" Addr="19" Description=""/>
|
|
<DO_ITEM Index="20" Name="DO_VacRobotExtendBufferEnable" BufferOffset="20" Addr="20" Description=""/>
|
|
<DO_ITEM Index="21" Name="DO_VacRobotExtendPM1Enable" BufferOffset="21" Addr="21" Description=""/>
|
|
<DO_ITEM Index="28" Name="DO_LoaderLidLock" BufferOffset="28" Addr="28" Description=""/>
|
|
<DO_ITEM Index="29" Name="DO_LoaderLidUnLock" BufferOffset="29" Addr="29" Description=""/>
|
|
<DO_ITEM Index="33" Name="DO_RectorAATMTransferReady" BufferOffset="33" Addr="33" Description=""/>
|
|
<DO_ITEM Index="34" Name="DO_RectorAProcessTransferReady" BufferOffset="34" Addr="34" Description=""/>
|
|
<DO_ITEM Index="35" Name="DO_RectorBATMTransferReady" BufferOffset="35" Addr="35" Description=""/>
|
|
<DO_ITEM Index="36" Name="DO_RectorBProcessTransferReady" BufferOffset="36" Addr="36" Description=""/>
|
|
<DO_ITEM Index="37" Name="DO_PreheatATMTransferReady" BufferOffset="37" Addr="37" Description=""/>
|
|
<DO_ITEM Index="38" Name="DO_PreheatProcessTransferReady" BufferOffset="38" Addr="38" Description=""/>
|
|
<DO_ITEM Index="40" Name="DO_TMWaferPresenceLL" BufferOffset="40" Addr="40" Description=""/>
|
|
<DO_ITEM Index="41" Name="DO_TMWaferPresenceA" BufferOffset="41" Addr="41" Description=""/>
|
|
<DO_ITEM Index="42" Name="DO_TMWaferPresenceB" BufferOffset="42" Addr="42" Description=""/>
|
|
<DO_ITEM Index="43" Name="DO_TMWaferPresenceBuf" BufferOffset="43" Addr="43" Description=""/>
|
|
<DO_ITEM Index="44" Name="DO_TMWaferPresencePreheat" BufferOffset="44" Addr="44" Description=""/>
|
|
<DO_ITEM Index="47" Name="DO_ForelineBasePressureReady" BufferOffset="47" Addr="47" Description=""/>
|
|
<DO_ITEM Index="48" Name="DO_TMatATM" BufferOffset="48" Addr="48" Description=""/>
|
|
<DO_ITEM Index="49" Name="DO_LLAtATM" BufferOffset="49" Addr="49" Description=""/>
|
|
<DO_ITEM Index="50" Name="DO_TMUnderVac" BufferOffset="50" Addr="50" Description=""/>
|
|
<DO_ITEM Index="51" Name="DO_LLUnderVAC" BufferOffset="51" Addr="51" Description=""/>
|
|
<DO_ITEM Index="52" Name="DO_TMAtProcessPress" BufferOffset="52" Addr="52" Description=""/>
|
|
<DO_ITEM Index="53" Name="DO_LLAtProcessPress" BufferOffset="53" Addr="53" Description=""/>
|
|
<DO_ITEM Index="54" Name="DO_LLTempReady" BufferOffset="54" Addr="54" Description=""/>
|
|
<DO_ITEM Index="55" Name="DO_BufferTempReady" BufferOffset="55" Addr="55" Description=""/>
|
|
<DO_ITEM Index="58" Name="DO_TmCyclePurgeRoutineRunning" BufferOffset="58" Addr="58" Description=""/>
|
|
<DO_ITEM Index="59" Name="DO_TmLeakCheckRoutineRunning" BufferOffset="59" Addr="59" Description=""/>
|
|
<DO_ITEM Index="60" Name="DO_TmPumpDownRoutineRunning" BufferOffset="60" Addr="60" Description=""/>
|
|
<DO_ITEM Index="61" Name="DO_TmServoPressRoutineRunning" BufferOffset="61" Addr="61" Description=""/>
|
|
<DO_ITEM Index="62" Name="DO_TmVentUpRoutineRunning" BufferOffset="62" Addr="62" Description=""/>
|
|
<DO_ITEM Index="63" Name="DO_LLCyclePurgeRoutineRunning" BufferOffset="63" Addr="63" Description=""/>
|
|
<DO_ITEM Index="64" Name="DO_LLLeakCheckRoutineRunning" BufferOffset="64" Addr="64" Description=""/>
|
|
<DO_ITEM Index="65" Name="DO_LLPumpDownRoutineRunning" BufferOffset="65" Addr="65" Description=""/>
|
|
<DO_ITEM Index="66" Name="DO_LLVentUpRoutineRunning" BufferOffset="66" Addr="66" Description=""/>
|
|
<DO_ITEM Index="67" Name="DO_PM1LidClosed" BufferOffset="67" Addr="67" Description=""/>
|
|
|
|
</Dig_Out>
|
|
|
|
<Ana_In>
|
|
<AI_ITEM Index="0" Name="AI_TMPressure" BufferOffset="0" Addr="0" Description=""/>
|
|
<AI_ITEM Index="1" Name="AI_LLPressure" BufferOffset="1" Addr="1" Description=""/>
|
|
<AI_ITEM Index="2" Name="AI_ForelinePressure" BufferOffset="2" Addr="2" Description=""/>
|
|
<AI_ITEM Index="3" Name="AI_MFCFlowValue" BufferOffset="3" Addr="3" Description=""/>
|
|
<AI_ITEM Index="6" Name="AI_LLTemp" BufferOffset="6" Addr="6" Description=""/>
|
|
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description=""/>
|
|
</Ana_In>
|
|
|
|
<Ana_Out>
|
|
<AO_ITEM Index="8" Name="AO_MFC40SetPoint" BufferOffset="8" Addr="8" Description=""/>
|
|
</Ana_Out>
|
|
|
|
</IO_DEFINE>
|
|
|