276 lines
10 KiB
C#
276 lines
10 KiB
C#
|
using Aitex.Core.RT.Device;
|
|||
|
using Aitex.Core.RT.Device.Devices;
|
|||
|
using Aitex.Core.RT.Device.Unit;
|
|||
|
using Aitex.Core.RT.Event;
|
|||
|
using Aitex.Core.RT.Routine;
|
|||
|
using Aitex.Core.RT.SCCore;
|
|||
|
using MECF.Framework.Common.Equipment;
|
|||
|
using System.Collections.Generic;
|
|||
|
using System.Diagnostics;
|
|||
|
|
|||
|
namespace SicPM1.Routines
|
|||
|
{
|
|||
|
public class PMVacIdleRoutine : PMBaseRoutine
|
|||
|
{
|
|||
|
private enum RoutineStep
|
|||
|
{
|
|||
|
RotationEnable,
|
|||
|
HeatEnable,
|
|||
|
VentPumpClose,
|
|||
|
ArSupply,
|
|||
|
|
|||
|
SetGroupB,
|
|||
|
SetGroupC,
|
|||
|
SetGroupE,
|
|||
|
SetGroupF,
|
|||
|
SetGroupH,
|
|||
|
SetGroupD,
|
|||
|
SetGroupG,
|
|||
|
SetGroupK,
|
|||
|
SetGroupJ,
|
|||
|
|
|||
|
SetM1to16,
|
|||
|
SetPC,
|
|||
|
SetGroupI, //V87-96
|
|||
|
SetM2to40,
|
|||
|
SetM2to40_1,
|
|||
|
MfcAll,
|
|||
|
|
|||
|
SetGasOut,
|
|||
|
SetTv,
|
|||
|
SetTv1,
|
|||
|
WaitTv1,
|
|||
|
|
|||
|
SetGasIn1, //V65,V67,V68
|
|||
|
OpenFinal1, //V91-96
|
|||
|
SetMfcFinal1, //M32-38
|
|||
|
|
|||
|
SetGasIn2,
|
|||
|
SetGroupJOpen,
|
|||
|
|
|||
|
OpenFinal2,
|
|||
|
SetMfcFinal2,
|
|||
|
|
|||
|
PumpDownTimeout,
|
|||
|
SetTvMode,
|
|||
|
|
|||
|
SetEPV1,
|
|||
|
SetEPV2,
|
|||
|
SetTVEnable,
|
|||
|
SetTVPressMode,
|
|||
|
SetTvPositionToZero,
|
|||
|
SetMFCMode,
|
|||
|
SetPCMode,
|
|||
|
|
|||
|
SetTvOpen,
|
|||
|
SetTvModeToPress,
|
|||
|
SetTVto1050,
|
|||
|
OpenGasIn1,
|
|||
|
SetV65,
|
|||
|
CloseGasIn1,
|
|||
|
CloseFinanl1,
|
|||
|
CloseFinanl2,
|
|||
|
SetGroupV38,
|
|||
|
|
|||
|
SetV76,
|
|||
|
SetV75,
|
|||
|
SetGroupV25,
|
|||
|
SetV31,
|
|||
|
SetV32,
|
|||
|
SetV35V36,
|
|||
|
SetTVPositionMode,
|
|||
|
SetTVPositionMax,
|
|||
|
|
|||
|
CloseM32M35M37,
|
|||
|
CloseM36,
|
|||
|
CloseM38,
|
|||
|
|
|||
|
TimeDelay1,
|
|||
|
TimeDelay2,
|
|||
|
TimeDelay3,
|
|||
|
TimeDelay4,
|
|||
|
TimeDelay5,
|
|||
|
TimeDelay6,
|
|||
|
TimeDelay7,
|
|||
|
TimeDelay8,
|
|||
|
TimeDelay9,
|
|||
|
TimeDelay10,
|
|||
|
TimeDelay11,
|
|||
|
TimeDelay12,
|
|||
|
TimeDelay13,
|
|||
|
TimeDelay14,
|
|||
|
}
|
|||
|
|
|||
|
private PM1Module _pm1Module;
|
|||
|
private IoThrottleValve2 _IoThrottle;
|
|||
|
private IoInterLock _pmIoInterLock;
|
|||
|
|
|||
|
List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
|
|||
|
|
|||
|
private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
|
|||
|
private int _rotationCloseTimeout; //旋转停止超时
|
|||
|
private int _IoValueOpenCloseTimeout = 10; //开关超时时间
|
|||
|
private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
|
|||
|
|
|||
|
private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
|
|||
|
private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
|
|||
|
|
|||
|
private double _vacPumpBasePressure;
|
|||
|
private int _routineTimeOut;
|
|||
|
//private int _EPV2OpenDelayTime = 9;
|
|||
|
|
|||
|
private Stopwatch _swTimer = new Stopwatch();
|
|||
|
public PMVacIdleRoutine(ModuleName module, PM1Module pm1) : base(module, pm1)
|
|||
|
{
|
|||
|
Module = module.ToString();
|
|||
|
_pm1Module = pm1;
|
|||
|
Name = "VacIdle";
|
|||
|
|
|||
|
_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
|
|||
|
_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
|
|||
|
}
|
|||
|
|
|||
|
public override Result Start(params object[] objs)
|
|||
|
{
|
|||
|
Reset();
|
|||
|
|
|||
|
_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
|
|||
|
_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
|
|||
|
_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
|
|||
|
|
|||
|
_vacPumpBasePressure = SC.GetValue<double>($"PM.{Module}.Pump.PumpPressure");
|
|||
|
_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.RoutineTimeOut");
|
|||
|
|
|||
|
if (!_pmIoInterLock.SetPMVacIdleRountingRunning(true, out var reason))
|
|||
|
{
|
|||
|
EV.PostAlarmLog(Module, $"can not run VACIdle, {reason}");
|
|||
|
return Result.FAIL;
|
|||
|
}
|
|||
|
|
|||
|
_swTimer.Restart();
|
|||
|
Notify("Start");
|
|||
|
return Result.RUN;
|
|||
|
}
|
|||
|
|
|||
|
public override Result Monitor()
|
|||
|
{
|
|||
|
try
|
|||
|
{
|
|||
|
CheckRoutineTimeOut();
|
|||
|
|
|||
|
//关闭V76,打开V75
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//旋转停止,加热停止
|
|||
|
SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
|
|||
|
SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
|
|||
|
|
|||
|
//关闭V72,打开V25
|
|||
|
SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//打开V31,打开V32
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//打开V35,打开V36
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//关闭B/C/E/F/H/K 阀门
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//打开D/G 阀门
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//设置MFC和PC的模式
|
|||
|
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
|
|||
|
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
|
|||
|
|
|||
|
//M1-M16设定为default值(M2、M9、M15除外)
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
|
|||
|
|
|||
|
//M2、M9、M15、M19-M40 MFC 3s ramp 到 default值
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetM2to40_1, MfcGroupName.M2toM40, 3);
|
|||
|
|
|||
|
//设置所有PC到默认值
|
|||
|
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
|
|||
|
|
|||
|
//打开V68
|
|||
|
SetIoValueByGroup((int)RoutineStep.OpenGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//打开J阀门
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
////打开V65
|
|||
|
//SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//打开EPV2
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay5, 3);
|
|||
|
|
|||
|
//设置蝶阀Enable
|
|||
|
SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
|
|||
|
|
|||
|
//设置蝶阀为压力模式
|
|||
|
SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
|
|||
|
|
|||
|
//伺服压力设定值到0mbar
|
|||
|
SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _vacPumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
|
|||
|
|
|||
|
//M2、M9、M15、M19-M40 MFC 3s ramp到0
|
|||
|
SetMfcByGroup((int)RoutineStep.SetM2to40, MfcGroupName.M2toM40, 0, 3);
|
|||
|
|
|||
|
//等待腔体压力Pump到设定值
|
|||
|
WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _vacPumpBasePressure, _pmPressureMaxDiff,_throttleTimeout);
|
|||
|
|
|||
|
//蝶阀设置为位置模式,开度设置为最大
|
|||
|
SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
|
|||
|
SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
|
|||
|
|
|||
|
}
|
|||
|
catch (RoutineBreakException)
|
|||
|
{
|
|||
|
return Result.RUN;
|
|||
|
}
|
|||
|
catch (RoutineFaildException)
|
|||
|
{
|
|||
|
return Result.FAIL;
|
|||
|
}
|
|||
|
|
|||
|
_pmIoInterLock.SetPMVacIdleRountingRunning(false, out string reason);
|
|||
|
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
|||
|
_swTimer.Stop();
|
|||
|
|
|||
|
return Result.DONE;
|
|||
|
}
|
|||
|
|
|||
|
public override void Abort()
|
|||
|
{
|
|||
|
_pmIoInterLock.SetPMVacIdleRountingRunning(false, out string reason);
|
|||
|
_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
|
|||
|
PmDevice.SetRotationServo(0, 0);
|
|||
|
|
|||
|
base.Abort();
|
|||
|
}
|
|||
|
|
|||
|
private void CheckRoutineTimeOut()
|
|||
|
{
|
|||
|
if (_routineTimeOut > 10)
|
|||
|
{
|
|||
|
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
|||
|
{
|
|||
|
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
|
|||
|
throw (new RoutineFaildException());
|
|||
|
}
|
|||
|
}
|
|||
|
}
|
|||
|
}
|
|||
|
}
|