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Mainframe工程更名为SicModules。

This commit is contained in:
DESKTOP-GPE37UV\THINKAPD 2023-04-13 15:35:13 +08:00
parent adf70bf2b1
commit 5da921c88e
160 changed files with 670 additions and 1006 deletions
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12
Modules/Mainframe/Aligners/AlignerModule.cs
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@ -1,20 +1,20 @@
using Aitex.Core.RT.DataCenter;
using System;
using System.Threading;
using System.Threading.Tasks;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
using System;
using System.Threading;
using System.Threading.Tasks;
using SicModules.Aligners.Routines;
namespace Mainframe.Aligners
namespace SicModules.Aligners
{
public class AlignerModule : AlignerModuleBase
{

3
Modules/Mainframe/Aligners/AlignerModuleBase.cs
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@ -5,9 +5,8 @@ using MECF.Framework.Common.Fsm;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
using System;
namespace Mainframe.Aligners
namespace SicModules.Aligners
{
public abstract class AlignerModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
{

8
Modules/Mainframe/Aligners/AlignerAlignRoutine.cs → Modules/Mainframe/Aligners/Routines/AlignerAlignRoutine.cs
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@ -1,10 +1,10 @@
using Aitex.Core.RT.Routine;
using System.Diagnostics;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Diagnostics;
using SicModules.Aligners.Routines.Base;
namespace Mainframe.Aligners
namespace SicModules.Aligners.Routines
{
public class AlignerAlignRoutine :AlignerBaseRoutine
{

6
Modules/Mainframe/Aligners/AlignerHomeRoutine.cs → Modules/Mainframe/Aligners/Routines/AlignerHomeRoutine.cs
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@ -1,8 +1,8 @@

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using SicModules.Aligners.Routines.Base;
namespace Mainframe.Aligners
namespace SicModules.Aligners.Routines
{
public class AlignerHomeRoutine : AlignerBaseRoutine
{

6
Modules/Mainframe/Aligners/AlignerBaseRoutine.cs → Modules/Mainframe/Aligners/Routines/Base/AlignerBaseRoutine.cs
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@ -1,11 +1,11 @@
using Aitex.Core.RT.Device;
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
using System;
namespace Mainframe.Aligners
namespace SicModules.Aligners.Routines.Base
{
public class AlignerBaseRoutine : ModuleRoutine, IRoutine
{

6
Modules/Mainframe/Aligners/SicAligner.cs
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@ -1,8 +1,8 @@
using MECF.Framework.Common.Equipment;
using System.Xml;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligner;
using System.Xml;
namespace Mainframe.Aligners
namespace SicModules.Aligners
{
public class SicAligner : Aligner
{

14
Modules/Mainframe/Buffers/BufferModule.cs
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@ -1,4 +1,7 @@
using Aitex.Core.RT.DataCenter;
using System;
using System.Threading;
using System.Threading.Tasks;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
@ -8,14 +11,9 @@ using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading;
using System.Threading.Tasks;
using SicModules.Buffers.Routines;
namespace Mainframe.Buffers
namespace SicModules.Buffers
{
public class BufferModule : BufferModuleBase
{

7
Modules/Mainframe/Buffers/BufferModuleBase.cs
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@ -5,13 +5,8 @@ using MECF.Framework.Common.Fsm;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
namespace Mainframe.Buffers
namespace SicModules.Buffers
{
public abstract class BufferModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
{

5
Modules/Mainframe/Buffers/BufferCoolingRoutine.cs → Modules/Mainframe/Buffers/Routines/BufferCoolingRoutine.cs
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@ -3,12 +3,9 @@ using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners;
namespace Mainframe.Buffers
namespace SicModules.Buffers.Routines
{
public class BufferCoolingRoutine : ModuleRoutine, IRoutine
{

4
Modules/Mainframe/Buffers/BufferHomeRoutine.cs → Modules/Mainframe/Buffers/Routines/BufferHomeRoutine.cs
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@ -1,11 +1,9 @@
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners;
namespace Mainframe.Buffers
namespace SicModules.Buffers.Routines
{
class BufferHomeRoutine : ModuleRoutine, IRoutine
{

13
Modules/Mainframe/Buffers/SicBuffer.cs
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@ -1,20 +1,9 @@
using System.Xml;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Buffers;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
namespace Mainframe.Buffers
namespace SicModules.Buffers
{
public class SicBuffer : Buffer
{

6
Modules/Mainframe/Cassettes/CassetteModule.cs
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@ -1,4 +1,5 @@
using Aitex.Core.Common;
using System;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
@ -10,9 +11,8 @@ using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using System;
namespace Mainframe.Cassettes
namespace SicModules.Cassettes
{
public class CassetteModule : CassetteModuleBase
{

2
Modules/Mainframe/Cassettes/CassetteModuleBase.cs
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@ -6,7 +6,7 @@ using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
namespace Mainframe.Cassettes
namespace SicModules.Cassettes
{
public abstract class CassetteModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
{

5
Modules/Mainframe/Cassettes/SicCassette.cs
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@ -1,9 +1,8 @@

using System.Xml;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Cassette;
using System.Xml;
namespace Mainframe.Cassettes
namespace SicModules.Cassettes
{
public class SicCassette : Cassette
{

28
Modules/Mainframe/Config/TM/DeviceModelSystem.xml
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@ -1,6 +1,6 @@
<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
<IoInterLocks assembly="Mainframe" classType="Mainframe.Devices.IoInterLock">
<IoInterLocks assembly="SicModules" classType="SicModules.Devices.IoInterLock">
<IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit=""
doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM"
aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
@ -34,7 +34,7 @@
<WcfPlc id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
</WcfPlcs>
<TcAdses assembly="Mainframe" classType="Mainframe.Devices.SicAds">
<TcAdses assembly="SicModules" classType="SicModules.Devices.SicAds">
<TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
</TcAdses>
@ -104,7 +104,7 @@
</IoSensors>
<IoPumps classType="Mainframe.Devices.IoPump" assembly="Mainframe">
<IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning"/>
<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
</IoPumps>
@ -159,29 +159,29 @@
<IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10"/>
</IoClaws>
<TMRobots assembly="Mainframe" classType="Mainframe.TMs.SicTMRobot">
<TMRobots assembly="SicModules" classType="SicModules.TMs.SicTMRobot">
<TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
</TMRobots>
<WaferRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicWaferRobot">
<WaferRobots assembly="SicModules" classType="SicModules.EFEMs.SicWaferRobot">
<WaferRobot id="WaferRobot" module="WaferRobot" display="" schematicId="" unit="" />
</WaferRobots>
<TrayRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicTrayRobot">
<TrayRobots assembly="SicModules" classType="SicModules.EFEMs.SicTrayRobot">
<TrayRobot id="TrayRobot" module="TrayRobot" display="" schematicId="" unit="" />
</TrayRobots>
<Aligners assembly="Mainframe" classType="Mainframe.Aligners.SicAligner">
<Aligners assembly="SicModules" classType="SicModules.Aligners.SicAligner">
<Aligner id="Aligner" module="Aligner" display="" schematicId="" unit="" />
</Aligners>
<Cassettes assembly="Mainframe" classType="Mainframe.Cassettes.SicCassette">
<Cassettes assembly="SicModules" classType="SicModules.Cassettes.SicCassette">
<Cassette id="CassAL" module="CassAL" display="" schematicId="" unit="" />
<Cassette id="CassAR" module="CassAR" display="" schematicId="" unit="" />
<Cassette id="CassBL" module="CassBL" display="" schematicId="" unit="" />
</Cassettes>
<LoadRotations assembly="Mainframe" classType="Mainframe.Devices.IoLoadRotation">
<LoadRotations assembly="SicModules" classType="SicModules.Devices.IoLoadRotation">
<LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
@ -193,23 +193,23 @@
aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
</LoadRotations>
<TMs assembly="Mainframe" classType="Mainframe.TMs.SicTM">
<TMs assembly="SicModules" classType="SicModules.TMs.SicTM">
<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp"/>
</TMs>
<EFEMs assembly="Mainframe" classType="Mainframe.EFEMs.SicEFEM">
<EFEMs assembly="SicModules" classType="SicModules.EFEMs.SicEFEM">
<Buffer id="EFEM" module="EFEM" display="" schematicId="" unit="" />
</EFEMs>
<LLs assembly="Mainframe" classType="Mainframe.LLs.SicLoadLock">
<LLs assembly="SicModules" classType="SicModules.LLs.SicLoadLock">
<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
</LLs>
<Unloads assembly="Mainframe" classType="Mainframe.UnLoads.SicUnLoad">
<Unloads assembly="SicModules" classType="SicModules.UnLoads.SicUnLoad">
<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
</Unloads>
<Buffers assembly="Mainframe" classType="Mainframe.Buffers.SicBuffer">
<Buffers assembly="SicModules" classType="SicModules.Buffers.SicBuffer">
<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
</Buffers>

13
Modules/Mainframe/Devices/IoInterLock.cs
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@ -1,16 +1,11 @@
using Aitex.Core.RT.DataCenter;
using System;
using System.Xml;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.SCCore;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Xml;
namespace Mainframe.Devices
namespace SicModules.Devices
{
public class IoInterLock : BaseDevice, IDevice
{

8
Modules/Mainframe/Devices/IoLoadRotation.cs
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@ -1,15 +1,13 @@
using Aitex.Core.RT.DataCenter;
using System.Xml;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.RT.EquipmentLibrary.Core.Extensions;
using System.Threading;
using System.Xml;
namespace Mainframe.Devices
namespace SicModules.Devices
{
public class IoLoadRotation : BaseDevice, IDevice
{

16
Modules/Mainframe/Devices/IoPump.cs
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@ -1,23 +1,15 @@
using Aitex.Core.Common.DeviceData;
using System;
using System.Xml;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Event;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Pumps;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Xml;
namespace Mainframe.Devices
namespace SicModules.Devices
{
public class IoPump: BaseDevice, IDevice
{

3
Modules/Mainframe/Devices/SicAds.cs
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@ -1,7 +1,6 @@
using System.Xml;
using Aitex.Core.RT.SCCore;
namespace Mainframe.Devices
namespace SicModules.Devices
{
public class SicAds : TcAds
{

10
Modules/Mainframe/Devices/SiemensIoProvider.cs
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@ -1,15 +1,15 @@
using Aitex.Core.RT.Device;
using System;
using System.Collections.Generic;
using System.Xml;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using MECF.Framework.Common.IOCore;
using MECF.Framework.Common.PLC;
using MECF.Framework.RT.Core.IoProviders;
using System;
using System.Collections.Generic;
using System.Xml;
namespace Mainframe.Devices
namespace SicModules.Devices
{
public partial class SiemensIoProvider : IoProvider
{

4
Modules/Mainframe/Devices/TcAds.cs
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@ -4,15 +4,13 @@ using System.Text.RegularExpressions;
using System.Xml;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Communications;
using MECF.Framework.Common.Event;
using MECF.Framework.Common.PLC;
using MECF.Framework.RT.Core.IoProviders.Siemens;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes;
namespace Mainframe.Devices
namespace SicModules.Devices
{

9
Modules/Mainframe/EFEMs/EFEMModule.cs
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@ -1,17 +1,16 @@
using Aitex.Core.RT.DataCenter;
using System;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using System;
using SicModules.EFEMs.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public class EFEMModule : EFEMModuleBase
{

3
Modules/Mainframe/EFEMs/EFEMModuleBase.cs
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@ -5,9 +5,8 @@ using MECF.Framework.Common.Fsm;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
using System;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public abstract class EFEMModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
{

12
Modules/Mainframe/EFEMs/EfemBaseRoutine.cs → Modules/Mainframe/EFEMs/Routines/Base/EfemBaseRoutine.cs
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@ -1,20 +1,20 @@
using Aitex.Core.RT.Device;
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.Devices;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
using System;
using static MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase.RobotBaseDevice;
using IoInterLock = SicModules.Devices.IoInterLock;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines.Base
{
public class EfemBaseRoutine : ModuleRoutine, IRoutine
{
@ -32,7 +32,7 @@ namespace Mainframe.EFEMs
public IoSensor _cassALWaferConvex; //凸片检测
public IoSensor _cassARWaferConvex; //凸片检测
public IoSensor _cassBLWaferConvex; //凸片检测
private Mainframe.Devices.IoInterLock _tmIoInterLock;
private IoInterLock _tmIoInterLock;
public IoLift4 _llLift;
public IoClaw _loadWaferClaw;
@ -71,7 +71,7 @@ namespace Mainframe.EFEMs
_cassAL6Inch = DEVICE.GetDevice<IoSensor>($"TM.CassALInch6Sensor");
_cassAR6Inch = DEVICE.GetDevice<IoSensor>($"TM.CassARInch6Sensor");
_cassBL6Inch = DEVICE.GetDevice<IoSensor>($"TM.CassBLInch6Sensor");
_tmIoInterLock = DEVICE.GetDevice<Mainframe.Devices.IoInterLock>("TM.IoInterLock");
_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
_llLift= DEVICE.GetDevice<IoLift4>($"LoadLock.LLLift");
_unLoadLift= DEVICE.GetDevice<IoLift4>($"UnLoad.UnLoadLift");

5
Modules/Mainframe/EFEMs/EFEMHomeRoutine.cs → Modules/Mainframe/EFEMs/Routines/EFEMHomeRoutine.cs
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@ -1,9 +1,8 @@
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.EFEMs.Routines.Base;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class EFEMHomeRoutine : EfemBaseRoutine
{

15
Modules/Mainframe/EFEMs/EfemSlitValveRoutine.cs → Modules/Mainframe/EFEMs/Routines/EfemSlitValveRoutine.cs
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@ -1,16 +1,19 @@
using Aitex.Core.RT.Device;
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.LLs;
using Mainframe.TMs;
using Mainframe.UnLoads;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad;
using System;
using SicModules.EFEMs.Routines.Base;
using SicModules.LLs;
using SicModules.LLs.Routines;
using SicModules.TMs;
using SicModules.UnLoads;
using SicModules.UnLoads.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class EfemSlitValveRoutine : EfemBaseRoutine
{

4
Modules/Mainframe/EFEMs/TrayRobotHomeRoutine.cs → Modules/Mainframe/EFEMs/Routines/TrayRobotHomeRoutine.cs
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@ -1,9 +1,9 @@
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.EFEMs.Routines.Base;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class TrayRobotHomeRoutine : EfemBaseRoutine
{

4
Modules/Mainframe/EFEMs/TrayRobotMapRoutine.cs → Modules/Mainframe/EFEMs/Routines/TrayRobotMapRoutine.cs
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@ -3,9 +3,9 @@ using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using SicModules.EFEMs.Routines.Base;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class TrayRobotMapRoutine : EfemBaseRoutine
{

5
Modules/Mainframe/EFEMs/TrayRobotPickRoutine.cs → Modules/Mainframe/EFEMs/Routines/TrayRobotPickRoutine.cs
View File

@ -2,12 +2,13 @@
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.LLs;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using SicModules.EFEMs.Routines.Base;
using SicModules.LLs.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class TrayRobotPickRoutine : EfemBaseRoutine
{

8
Modules/Mainframe/EFEMs/TrayRobotPlaceRoutine.cs → Modules/Mainframe/EFEMs/Routines/TrayRobotPlaceRoutine.cs
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@ -3,14 +3,14 @@ using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.Devices;
using Mainframe.LLs;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using System;
using SicModules.Devices;
using SicModules.EFEMs.Routines.Base;
using SicModules.LLs.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class TrayRobotPlaceRoutine : EfemBaseRoutine
{

4
Modules/Mainframe/EFEMs/WaferRobotHomeRoutine.cs → Modules/Mainframe/EFEMs/Routines/WaferRobotHomeRoutine.cs
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@ -1,9 +1,9 @@
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.EFEMs.Routines.Base;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class WaferRobotHomeRoutine : EfemBaseRoutine
{

4
Modules/Mainframe/EFEMs/WaferRobotMapRoutine.cs → Modules/Mainframe/EFEMs/Routines/WaferRobotMapRoutine.cs
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@ -3,9 +3,9 @@ using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.EFEMs.Routines.Base;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class WaferRobotMapRoutine : EfemBaseRoutine
{

8
Modules/Mainframe/EFEMs/WaferRobotPickRoutine.cs → Modules/Mainframe/EFEMs/Routines/WaferRobotPickRoutine.cs
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@ -4,14 +4,14 @@ using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.Aligners;
using Mainframe.LLs;
using Mainframe.UnLoads;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using SicModules.EFEMs.Routines.Base;
using SicModules.LLs.Routines;
using SicModules.UnLoads.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class WaferRobotPickRoutine : EfemBaseRoutine
{

13
Modules/Mainframe/EFEMs/WaferRobotPlaceRoutine.cs → Modules/Mainframe/EFEMs/Routines/WaferRobotPlaceRoutine.cs
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@ -1,18 +1,15 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.LLs;
using Mainframe.UnLoads;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using System;
using SicModules.EFEMs.Routines.Base;
using SicModules.LLs.Routines;
using SicModules.UnLoads.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs.Routines
{
public class WaferRobotPlaceRoutine : EfemBaseRoutine
{

7
Modules/Mainframe/EFEMs/SicEFEM.cs
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@ -1,12 +1,11 @@
using Aitex.Core.RT.Device;
using System.Xml;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM;
using System.Collections.Generic;
using System.Xml;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public class SicEFEM : EFEM
{

11
Modules/Mainframe/EFEMs/SicTrayRobot.cs
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@ -1,13 +1,8 @@
using MECF.Framework.Common.Equipment;
using System.Xml;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.HwinRobot;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Xml;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public class SicTrayRobot : HwinRobotB
{

11
Modules/Mainframe/EFEMs/SicWaferRobot.cs
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@ -1,13 +1,8 @@
using MECF.Framework.Common.Equipment;
using System.Xml;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.HwinRobot;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Xml;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public class SicWaferRobot : HwinRobot
{

10
Modules/Mainframe/EFEMs/TrayRobotModule.cs
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@ -1,18 +1,16 @@
using Aitex.Core.RT.DataCenter;
using System;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Fsm;
using MECF.Framework.Common.Schedulers;
using System;
using SicModules.EFEMs.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public class TrayRobotModule : ModuleFsmDevice, IModuleDevice
{

10
Modules/Mainframe/EFEMs/WaferRobotModule.cs
View File

@ -1,18 +1,16 @@
using Aitex.Core.RT.DataCenter;
using System;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Fsm;
using MECF.Framework.Common.Schedulers;
using System;
using SicModules.EFEMs.Routines;
namespace Mainframe.EFEMs
namespace SicModules.EFEMs
{
public class WaferRobotModule : ModuleFsmDevice, IModuleDevice
{

16
Modules/Mainframe/LLs/LoadLockModule.cs
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@ -1,25 +1,21 @@
using Aitex.Core.RT.DataCenter;
using System;
using System.Threading;
using System.Threading.Tasks;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using Mainframe.TMs;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading;
using System.Threading.Tasks;
using SicModules.LLs.Routines;
namespace Mainframe.LLs
namespace SicModules.LLs
{
public class LoadLockModule : LoadLockModuleBase
{

2
Modules/Mainframe/LLs/LoadLockModuleBase.cs
View File

@ -6,7 +6,7 @@ using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
namespace Mainframe.LLs
namespace SicModules.LLs
{
public abstract class LoadLockModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
{

38
Modules/Mainframe/LLs/LoadLockBaseRoutine.cs → Modules/Mainframe/LLs/Routines/Base/LoadLockBaseRoutine.cs
View File

@ -1,17 +1,17 @@
using System;
using System.Collections.Generic;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using Mainframe.TMs;
using Aitex.Core.RT.Device.Unit;
using Mainframe.Devices;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MachineVision.Keyence;
using Aitex.Core.RT.Device.Devices;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using SicModules.Devices;
using SicModules.TMs;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines.Base
{
public class LoadLockBaseRoutine : ModuleRoutine, IRoutine
{
@ -50,9 +50,9 @@ namespace Mainframe.LLs
private IoClaw _llWaferClaw = null;
private IoClaw _llTrayClaw = null;
private KeyenceCVX300F _loadCCD = null;
public IoSensor _loadTrayHomeSensor; //Tray定位
public IoSensor _loadWaferPlaced; //上下对射，检测Wafer有无
public IoSensor _loadTrayPlaced; //检测托盘有无
public IoSensor _loadTrayHomeSensor; //Tray定位
public IoSensor _loadWaferPlaced; //上下对射，检测Wafer有无
public IoSensor _loadTrayPlaced; //检测托盘有无
public LoadLockBaseRoutine() : base(ModuleName.LoadLock.ToString())
@ -264,12 +264,12 @@ namespace Mainframe.LLs
{
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
{
//不做任何动作
//不做任何动作
return true;
},
() =>
{
//检测Rotation电机Error
//检测Rotation电机Error
if (_llRotation.IsServoError)
{
Stop($"Set {Module} Rotation Servo Error");
@ -330,20 +330,20 @@ namespace Mainframe.LLs
// return true;
// }, () =>
// {
// //检测到未放好Sensor信号
// //检测到未放好Sensor信号
// if (!_loadWaferPlaced.Value)
// {
// //失败后Stop电机
// //失败后Stop电机
// _llRotation.Stop(out _);
// Stop($"Set {Module} Rotation One Circle Wafter check sensor fail [TM DI-35]");
// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
// return true;
// }
// //检测Rotation电机Error
// //检测Rotation电机Error
// if (_llRotation.IsServoError)
// {
// //失败后Stop电机
// //失败后Stop电机
// _llRotation.Stop(out _);
// Stop($"Set {Module} Rotation Servo Error");
// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
@ -392,20 +392,20 @@ namespace Mainframe.LLs
}, () =>
{
DISensroQueuen.Enqueue(_loadWaferPlaced.Value);
//检测到未放好Sensor信号
//检测到未放好Sensor信号
//if (!_loadWaferPlaced.Value)
//{
// //失败后Stop电机
// //失败后Stop电机
// _llRotation.Stop(out _);
// Stop($"Set {Module} Rotation One Circle Wafter check sensor fail [TM DI-35]");
// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
// return true;
//}
//检测Rotation电机Error
//检测Rotation电机Error
if (_llRotation.IsServoError)
{
//失败后Stop电机
//失败后Stop电机
_llRotation.Stop(out _);
Stop($"Set {Module} Rotation Servo Error");
return null;

7
Modules/Mainframe/LLs/LoadHomeRoutine.cs → Modules/Mainframe/LLs/Routines/LoadHomeRoutine.cs
View File

@ -1,10 +1,11 @@
using Aitex.Core.RT.Log;
using System;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadHomeRoutine : LoadLockBaseRoutine
{

7
Modules/Mainframe/LLs/LoadLockClawRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockClawRoutine.cs
View File

@ -1,10 +1,9 @@
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockClawRoutine : LoadLockBaseRoutine
{

8
Modules/Mainframe/LLs/LoadLockGroupRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockGroupRoutine.cs
View File

@ -1,12 +1,10 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using System.Linq;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MachineVision.Keyence;
using System.Linq;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockGroupRoutine : LoadLockBaseRoutine
{

8
Modules/Mainframe/LLs/LoadLockLeakCheckRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockLeakCheckRoutine.cs
View File

@ -1,17 +1,15 @@
using System;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.Devices;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using SicModules.Devices;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockLeakCheckRoutine : LoadLockBaseRoutine
{

7
Modules/Mainframe/LLs/LoadLockLiftRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockLiftRoutine.cs
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@ -1,9 +1,8 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockLiftRoutine : LoadLockBaseRoutine
{

6
Modules/Mainframe/LLs/LoadLockPrepareTransferRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockPrepareTransferRoutine.cs
View File

@ -1,10 +1,10 @@
using System;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockPrepareTransferRoutine : LoadLockBaseRoutine
{

12
Modules/Mainframe/LLs/LoadLockPumpRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockPumpRoutine.cs
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@ -1,17 +1,13 @@
using System;
using System.Text;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using Mainframe.Devices;
using Mainframe.TMs;
using System.Diagnostics;
using SicModules.Devices;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockPumpRoutine : LoadLockBaseRoutine
{

13
Modules/Mainframe/LLs/LoadLockPurgeRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockPurgeRoutine.cs
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@ -1,18 +1,13 @@
using System;
using System.Diagnostics;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.Devices;
using Mainframe.TMs;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using SicModules.Devices;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockPurgeRoutine : LoadLockBaseRoutine
{

11
Modules/Mainframe/LLs/LoadLockServoToRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockServoToRoutine.cs
View File

@ -1,18 +1,11 @@
using System;
using System.Text;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using Mainframe.Devices;
using Mainframe.TMs;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockServoToRoutine : LoadLockBaseRoutine
{

8
Modules/Mainframe/LLs/LoadLockTrayAlignerRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockTrayAlignerRoutine.cs
View File

@ -1,10 +1,6 @@
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockTrayAlignerRoutine:LoadLockBaseRoutine
{

9
Modules/Mainframe/LLs/LoadLockTrayClawRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockTrayClawRoutine.cs
View File

@ -1,14 +1,9 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Reflection;
using System.Text;
using System.Threading.Tasks;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockTrayClawRoutine : LoadLockBaseRoutine
{

11
Modules/Mainframe/LLs/LoadLockVentRoutine.cs → Modules/Mainframe/LLs/Routines/LoadLockVentRoutine.cs
View File

@ -1,16 +1,13 @@
using System;
using System.Diagnostics;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Mainframe.Devices;
using Mainframe.TMs;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using SicModules.Devices;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadLockVentRoutine : LoadLockBaseRoutine
{

9
Modules/Mainframe/LLs/LoadRotationHomeOffsetRoutine.cs → Modules/Mainframe/LLs/Routines/LoadRotationHomeOffsetRoutine.cs
View File

@ -1,14 +1,9 @@
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadRotationHomeOffsetRoutine : LoadLockBaseRoutine
{

11
Modules/Mainframe/LLs/LoadSeparateRoutine.cs → Modules/Mainframe/LLs/Routines/LoadSeparateRoutine.cs
View File

@ -1,14 +1,9 @@
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using SicModules.LLs.Routines.Base;
namespace Mainframe.LLs
namespace SicModules.LLs.Routines
{
public class LoadSeparateRoutine : LoadLockBaseRoutine
{

13
Modules/Mainframe/LLs/SicLoadLock.cs
View File

@ -1,18 +1,17 @@
using Aitex.Core.Common;
using System;
using System.Xml;
using Aitex.Core.Common;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Mainframe.Devices;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using System;
using System.Xml;
using SicModules.Devices;
namespace Mainframe.LLs
namespace SicModules.LLs
{
public class SicLoadLock : LoadLock
{
@ -85,7 +84,7 @@ namespace Mainframe.LLs
_balancePressureDiff = SC.GetValue<double>("TM.PressureBalance.BalanceMaxDiffPressure");
_IoLoadRotation = DEVICE.GetDevice<Mainframe.Devices.IoLoadRotation>("Load.Rotation");
_IoLoadRotation = DEVICE.GetDevice<IoLoadRotation>("Load.Rotation");
return base.Initialize();
}

8
Modules/Mainframe/PMs/PM1.cs
View File

@ -1,12 +1,6 @@
using MECF.Framework.Common.Equipment;
using SicPM;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
namespace Mainframe.PMs
namespace SicModules.PMs
{
public class PM1: PMModule
{

8
Modules/Mainframe/PMs/PM2.cs
View File

@ -1,12 +1,6 @@
using MECF.Framework.Common.Equipment;
using SicPM;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
namespace Mainframe.PMs
namespace SicModules.PMs
{
public class PM2: PMModule
{

11
Modules/Mainframe/PMs/Support/PMModule.cs → Modules/Mainframe/PMs/PMModule.cs
View File

@ -2,10 +2,8 @@
using System.Linq;
using System.Threading;
using System.Threading.Tasks;
using System.Xml;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
@ -18,12 +16,11 @@ using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
using SicPM.RecipeExecutions;
using SicPM.RecipeRoutine;
using SicPM.Routines;
using SicModules.PMs.RecipeExecutions;
using SicModules.PMs.Routines;
using SicModules.PMs.Routines.Recipe;
namespace SicPM
namespace SicModules.PMs
{
public partial class PMModule : PMModuleBase, IRecipeExecutor
{

29
Modules/Mainframe/PMs/Support/PMModuleDevice.cs → Modules/Mainframe/PMs/PMModuleDevice.cs
View File

@ -1,26 +1,23 @@
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.Utilities;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Event;
using MECF.Framework.Common.Schedulers;
using System;
using System;
using System.Collections.Concurrent;
using System.Collections.Generic;
using System.Linq;
using System.Reflection;
using System.Threading.Tasks;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.PLC;
using Aitex.Core.Util;
using Aitex.Core.RT.IOCore;
using Aitex.Sorter.Common;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Event;
using MECF.Framework.Common.PLC;
using MECF.Framework.Common.Schedulers;
namespace SicPM
namespace SicModules.PMs
{
public enum IoGroupName

18
Modules/Mainframe/PMs/Support/PMModuleInterlock.cs → Modules/Mainframe/PMs/PMModuleInterlock.cs
View File

@ -1,21 +1,7 @@
using System;
using System.Collections.Generic;
using System.Linq;
using System.Reflection;
using System.Threading.Tasks;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.Utilities;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Event;
using Aitex.Core.RT.OperationCenter;
using MECF.Framework.Common.OperationCenter;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
namespace SicPM
namespace SicModules.PMs
{
public partial class PMModule
{

13
Modules/Mainframe/PMs/Support/RecipeExecutions/CleanRecipe.cs → Modules/Mainframe/PMs/RecipeExecutions/CleanRecipe.cs
View File

@ -1,4 +1,5 @@
using Aitex.Core.Common.DeviceData;
using System;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
@ -6,15 +7,11 @@ using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using SicPM.Routines;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using SicModules.PMs.Routines;
using SicModules.PMs.Routines.Base;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class CleanRecipe : PMBaseRoutine
{

4
Modules/Mainframe/PMs/Support/RecipeExecutions/Fdc.cs → Modules/Mainframe/PMs/RecipeExecutions/Fdc.cs
View File

@ -2,8 +2,6 @@
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Xml;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Log;
@ -12,7 +10,7 @@ using Aitex.Core.Util;
using MECF.Framework.Common.CommonData;
using MECF.Framework.Common.SCCore;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class Fdc
{

8
Modules/Mainframe/PMs/Support/RecipeExecutions/IRecipeDBCallback.cs → Modules/Mainframe/PMs/RecipeExecutions/IRecipeDBCallback.cs
View File

@ -1,11 +1,7 @@
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Collections.Generic;
using MECF.Framework.Common.CommonData;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public interface IRecipeDBCallback
{

8
Modules/Mainframe/PMs/Support/RecipeExecutions/IRecipeExecutor.cs → Modules/Mainframe/PMs/RecipeExecutions/IRecipeExecutor.cs
View File

@ -1,10 +1,4 @@
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public interface IRecipeExecutor
{

8
Modules/Mainframe/PMs/Support/RecipeExecutions/PostProcess.cs → Modules/Mainframe/PMs/RecipeExecutions/PostProcess.cs
View File

@ -1,19 +1,15 @@
using System;
using System.Collections.Generic;
using System.Diagnostics;
using System.Reflection;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Equipment;
using SicPM.Routines;
using SicModules.PMs.Routines.Base;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class PostProcess : PMBaseRoutine
{

7
Modules/Mainframe/PMs/Support/RecipeExecutions/PreProcess.cs → Modules/Mainframe/PMs/RecipeExecutions/PreProcess.cs
View File

@ -11,13 +11,12 @@ using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.OperationCenter;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using SicPM.Routines;
using static SicPM.PMModule;
using SicModules.PMs.Routines;
using SicModules.PMs.Routines.Base;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class PreProcess : PMBaseRoutine
{

12
Modules/Mainframe/PMs/Support/RecipeExecutions/Process.cs → Modules/Mainframe/PMs/RecipeExecutions/Process.cs
View File

@ -1,4 +1,6 @@
using Aitex.Core.Common;
using System;
using System.Collections.Generic;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
@ -11,15 +13,11 @@ using Aitex.Core.RT.Tolerance;
using Aitex.Core.Util;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.OperationCenter;
using MECF.Framework.Common.SubstrateTrackings;
using SicPM.Routines;
using System;
using System.Collections.Generic;
using System.Xml;
using SicModules.PMs.Routines.Base;
using static Aitex.Core.RT.Device.PmDevices.DicMode;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public enum RecipeContinueMode
{

10
Modules/Mainframe/PMs/Support/RecipeExecutions/ProcessCalculate.cs → Modules/Mainframe/PMs/RecipeExecutions/ProcessCalculate.cs
View File

@ -1,12 +1,10 @@
using Aitex.Core.UI.ControlDataContext;
using MECF.Framework.Common.DBCore;
using System;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using Aitex.Core.UI.ControlDataContext;
using MECF.Framework.Common.DBCore;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public partial class Process
{

8
Modules/Mainframe/PMs/Support/RecipeExecutions/RecipeDBCallback.cs → Modules/Mainframe/PMs/RecipeExecutions/RecipeDBCallback.cs
View File

@ -1,14 +1,10 @@
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Collections.Generic;
using MECF.Framework.Common.CommonData;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
class RecipeDBCallback : IRecipeDBCallback
{

6
Modules/Mainframe/PMs/Support/RecipeExecutions/RecipeEndDataItem.cs → Modules/Mainframe/PMs/RecipeExecutions/RecipeEndDataItem.cs
View File

@ -1,9 +1,9 @@
using Aitex.Core.UI.ControlDataContext;
using System;
using System;
using System.Collections.Generic;
using System.Linq;
using Aitex.Core.UI.ControlDataContext;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class RecipeEndDataItem
{

2
Modules/Mainframe/PMs/Support/RecipeExecutions/RecipeHead.cs → Modules/Mainframe/PMs/RecipeExecutions/RecipeHead.cs
View File

@ -1,4 +1,4 @@
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class RecipeHead
{

3
Modules/Mainframe/PMs/Support/RecipeExecutions/RecipeParser.cs → Modules/Mainframe/PMs/RecipeExecutions/RecipeParser.cs
View File

@ -1,6 +1,5 @@
using System;
using System.Collections.Generic;
using System.IO;
using System.Text.RegularExpressions;
using System.Xml;
using Aitex.Common.Util;
@ -9,7 +8,7 @@ using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.SCCore;
using static Aitex.Core.RT.Device.PmDevices.DicMode;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class RecipeDataColumn
{

3
Modules/Mainframe/PMs/Support/RecipeExecutions/RecipeRunningInfo.cs → Modules/Mainframe/PMs/RecipeExecutions/RecipeRunningInfo.cs
View File

@ -1,8 +1,7 @@
using System;
using System.Collections.Generic;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public enum EnumRecipeRunningState
{

2
Modules/Mainframe/PMs/Support/RecipeExecutions/RecipeStep.cs → Modules/Mainframe/PMs/RecipeExecutions/RecipeStep.cs
View File

@ -1,6 +1,6 @@
using System.Collections.Generic;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public enum EnumEndByCondition
{

16
Modules/Mainframe/PMs/Support/RecipeExecutions/SicRecipeFileContext.cs → Modules/Mainframe/PMs/RecipeExecutions/SicRecipeFileContext.cs
View File

@ -1,17 +1,13 @@
using Aitex.Common.Util;
using System;
using System.Collections.Generic;
using System.IO;
using System.Xml;
using Aitex.Common.Util;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.SCCore;
using System;
using System.Collections.Generic;
using System.IO;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Xml;
namespace SicPM.RecipeExecutions
namespace SicModules.PMs.RecipeExecutions
{
public class SicRecipeFileContext : IRecipeFileContext
{

3
Modules/Mainframe/PMs/Support/Routines/PMBaseRoutine.cs → Modules/Mainframe/PMs/Routines/Base/PMBaseRoutine.cs
View File

@ -2,12 +2,11 @@
using System.Collections.Generic;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
namespace SicPM.Routines
namespace SicModules.PMs.Routines.Base
{
public class PMBaseRoutine : ModuleRoutine, IRoutine
{

9
Modules/Mainframe/PMs/Support/Routines/PMButttomSectionMoveRoutine.cs → Modules/Mainframe/PMs/Routines/PMButttomSectionMoveRoutine.cs
View File

@ -1,16 +1,11 @@
using System;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.Equipment;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMButttomSectionMoveRoutine : PMBaseRoutine
{

7
Modules/Mainframe/PMs/Support/Routines/PMChamberMoveBodyRoutine.cs → Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs
View File

@ -3,14 +3,11 @@ using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.Equipment;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMChamberMoveBodyRoutine : PMBaseRoutine
{

13
Modules/Mainframe/PMs/Support/Routines/PMCleanRoutine.cs → Modules/Mainframe/PMs/Routines/PMCleanRoutine.cs
View File

@ -1,17 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMCleanRoutine : PMBaseRoutine
{

12
Modules/Mainframe/PMs/Support/Routines/PMExchangeMoRoutine.cs → Modules/Mainframe/PMs/Routines/PMExchangeMoRoutine.cs
View File

@ -1,15 +1,15 @@
using Aitex.Core.RT.Device;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMExchangeMoRoutine : PMBaseRoutine
{

4
Modules/Mainframe/PMs/Support/Routines/PMHomeRoutine.cs → Modules/Mainframe/PMs/Routines/PMHomeRoutine.cs
View File

@ -1,11 +1,11 @@
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMHomeRoutine : PMBaseRoutine
{

12
Modules/Mainframe/PMs/Support/Routines/PMLeakCheckRoutine.cs → Modules/Mainframe/PMs/Routines/PMLeakCheckRoutine.cs
View File

@ -1,16 +1,16 @@
using Aitex.Core.RT.Device;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMLeakCheckRoutine : PMBaseRoutine
{

10
Modules/Mainframe/PMs/Support/Routines/PMPcCalibrationRoutine.cs → Modules/Mainframe/PMs/Routines/PMPcCalibrationRoutine.cs
View File

@ -2,17 +2,11 @@
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.Equipment;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMPcCalibrationRoutine : PMBaseRoutine
{

13
Modules/Mainframe/PMs/Support/Routines/PMPostTransferRoutine.cs → Modules/Mainframe/PMs/Routines/PMPostTransferRoutine.cs
View File

@ -1,18 +1,11 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Servo.NAIS;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using static SicPM.PMModule;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
class PMPostTransferRoutine : PMBaseRoutine
{

16
Modules/Mainframe/PMs/Support/Routines/PMPrepareTransferRoutine.cs → Modules/Mainframe/PMs/Routines/PMPrepareTransferRoutine.cs
View File

@ -1,20 +1,16 @@
using Aitex.Core.Common.DeviceData;
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Servo.NAIS;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using static SicPM.PMModule;
using Aitex.Core.RT.Device.Devices;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Servo.NAIS;
using SicModules.PMs.Routines.Base;
using static SicModules.PMs.PMModule;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
class PMPrepareTransferRoutine : PMBaseRoutine
{

11
Modules/Mainframe/PMs/Support/Routines/PMProcessAbortRoutine.cs → Modules/Mainframe/PMs/Routines/PMProcessAbortRoutine.cs
View File

@ -1,14 +1,13 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMProcessAbortRoutine : PMBaseRoutine
{

2
Modules/Mainframe/PMs/Support/Routines/PMProcessRoutine.cs → Modules/Mainframe/PMs/Routines/PMProcessRoutine.cs
View File

@ -10,7 +10,7 @@ using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMProcessRoutine : ModuleRoutine, IRoutine
{

10
Modules/Mainframe/PMs/Support/Routines/PMPumpRoutine.cs → Modules/Mainframe/PMs/Routines/PMPumpRoutine.cs
View File

@ -1,14 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMPumpRoutine : PMBaseRoutine
{

11
Modules/Mainframe/PMs/Support/Routines/PMPurgeRoutine.cs → Modules/Mainframe/PMs/Routines/PMPurgeRoutine.cs
View File

@ -1,15 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMPurgeRoutine : PMBaseRoutine
{

9
Modules/Mainframe/PMs/Support/Routines/PMServoToPressure.cs → Modules/Mainframe/PMs/Routines/PMServoToPressure.cs
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@ -1,13 +1,12 @@
using Aitex.Core.RT.Device;
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMServoToPressure : PMBaseRoutine
{

8
Modules/Mainframe/PMs/Support/Routines/PMStopHeatEnableRoutine.cs → Modules/Mainframe/PMs/Routines/PMStopHeatEnableRoutine.cs
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@ -1,10 +1,8 @@
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMStopHeatEnableRoutine : PMBaseRoutine
{

11
Modules/Mainframe/PMs/Support/Routines/PMToAtmIdleRoutine.cs → Modules/Mainframe/PMs/Routines/PMToAtmIdleRoutine.cs
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@ -1,15 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMToAtmIdleRoutine : PMBaseRoutine
{

10
Modules/Mainframe/PMs/Support/Routines/PMToIsolationRoutine.cs → Modules/Mainframe/PMs/Routines/PMToIsolationRoutine.cs
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@ -1,13 +1,11 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMToIsolationRoutine : PMBaseRoutine
{

10
Modules/Mainframe/PMs/Support/Routines/PMToProcessIdleRoutine.cs → Modules/Mainframe/PMs/Routines/PMToProcessIdleRoutine.cs
View File

@ -1,14 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMToProcessIdleRoutine : PMBaseRoutine
{

10
Modules/Mainframe/PMs/Support/Routines/PMVacIdleRoutine.cs → Modules/Mainframe/PMs/Routines/PMVacIdleRoutine.cs
View File

@ -1,14 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMVacIdleRoutine : PMBaseRoutine
{

10
Modules/Mainframe/PMs/Support/Routines/PMVentRoutine.cs → Modules/Mainframe/PMs/Routines/PMVentRoutine.cs
View File

@ -1,14 +1,14 @@
using Aitex.Core.RT.Device;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System.Collections.Generic;
using System.Diagnostics;
using SicModules.PMs.Routines.Base;
namespace SicPM.Routines
namespace SicModules.PMs.Routines
{
public class PMVentRoutine : PMBaseRoutine
{

7
Modules/Mainframe/PMs/Support/RecipeRoutine/PMMacroRoutine.cs → Modules/Mainframe/PMs/Routines/Recipe/PMMacroRoutine.cs
View File

@ -1,6 +1,5 @@
using System;
using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.Common;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
@ -13,10 +12,10 @@ using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using SicPM.RecipeExecutions;
using SicPM.Routines;
using SicModules.PMs.RecipeExecutions;
using SicModules.PMs.Routines.Base;
namespace SicPM.RecipeRoutine
namespace SicModules.PMs.Routines.Recipe
{
public enum RecipeContinueMode
{

14
Modules/Mainframe/PMs/Support/RecipeRoutine/PostPMMacroRoutine.cs → Modules/Mainframe/PMs/Routines/Recipe/PostPMMacroRoutine.cs
View File

@ -1,16 +1,8 @@
using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using SicPM.Routines;
using SicModules.PMs.Routines.Base;
namespace SicPM.RecipeRoutine
namespace SicModules.PMs.Routines.Recipe
{
public class PostPMMacroRoutine : PMBaseRoutine
{

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