Mainframe工程更名为SicModules。
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@ -1,20 +1,20 @@
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using Aitex.Core.RT.DataCenter;
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using System;
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using System.Threading;
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using System.Threading.Tasks;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Fsm;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.Util;
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using Aitex.Core.Utilities;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
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using System;
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using System.Threading;
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using System.Threading.Tasks;
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using SicModules.Aligners.Routines;
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namespace Mainframe.Aligners
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namespace SicModules.Aligners
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{
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public class AlignerModule : AlignerModuleBase
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{
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@ -5,9 +5,8 @@ using MECF.Framework.Common.Fsm;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
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using System;
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namespace Mainframe.Aligners
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namespace SicModules.Aligners
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{
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public abstract class AlignerModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
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{
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@ -1,10 +1,10 @@
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using Aitex.Core.RT.Routine;
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using System.Diagnostics;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using System;
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using System.Diagnostics;
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using SicModules.Aligners.Routines.Base;
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namespace Mainframe.Aligners
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namespace SicModules.Aligners.Routines
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{
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public class AlignerAlignRoutine :AlignerBaseRoutine
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{
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@ -1,8 +1,8 @@
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using SicModules.Aligners.Routines.Base;
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namespace Mainframe.Aligners
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namespace SicModules.Aligners.Routines
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{
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public class AlignerHomeRoutine : AlignerBaseRoutine
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{
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@ -1,11 +1,11 @@
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using Aitex.Core.RT.Device;
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using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Routine;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
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using System;
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namespace Mainframe.Aligners
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namespace SicModules.Aligners.Routines.Base
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{
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public class AlignerBaseRoutine : ModuleRoutine, IRoutine
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{
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@ -1,8 +1,8 @@
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using MECF.Framework.Common.Equipment;
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using System.Xml;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligner;
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using System.Xml;
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namespace Mainframe.Aligners
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namespace SicModules.Aligners
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{
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public class SicAligner : Aligner
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{
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@ -1,4 +1,7 @@
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using Aitex.Core.RT.DataCenter;
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using System;
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using System.Threading;
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using System.Threading.Tasks;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Fsm;
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@ -8,14 +11,9 @@ using Aitex.Core.Utilities;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading;
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using System.Threading.Tasks;
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using SicModules.Buffers.Routines;
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namespace Mainframe.Buffers
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namespace SicModules.Buffers
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{
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public class BufferModule : BufferModuleBase
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{
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@ -5,13 +5,8 @@ using MECF.Framework.Common.Fsm;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace Mainframe.Buffers
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namespace SicModules.Buffers
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{
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public abstract class BufferModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
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{
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@ -3,12 +3,9 @@ using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners;
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namespace Mainframe.Buffers
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namespace SicModules.Buffers.Routines
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{
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public class BufferCoolingRoutine : ModuleRoutine, IRoutine
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{
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using System;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners;
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namespace Mainframe.Buffers
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namespace SicModules.Buffers.Routines
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{
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class BufferHomeRoutine : ModuleRoutine, IRoutine
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{
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using System.Xml;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Fsm;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Buffers;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
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namespace Mainframe.Buffers
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namespace SicModules.Buffers
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{
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public class SicBuffer : Buffer
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{
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using Aitex.Core.Common;
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using System;
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using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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@ -10,9 +11,8 @@ using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using System;
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namespace Mainframe.Cassettes
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namespace SicModules.Cassettes
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{
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public class CassetteModule : CassetteModuleBase
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{
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@ -6,7 +6,7 @@ using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
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namespace Mainframe.Cassettes
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namespace SicModules.Cassettes
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{
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public abstract class CassetteModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
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{
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using System.Xml;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Cassette;
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using System.Xml;
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namespace Mainframe.Cassettes
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namespace SicModules.Cassettes
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{
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public class SicCassette : Cassette
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{
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<?xml version="1.0" encoding="utf-8"?>
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<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
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<IoInterLocks assembly="Mainframe" classType="Mainframe.Devices.IoInterLock">
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<IoInterLocks assembly="SicModules" classType="SicModules.Devices.IoInterLock">
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<IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit=""
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doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM"
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aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
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<WcfPlc id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<TcAdses assembly="Mainframe" classType="Mainframe.Devices.SicAds">
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<TcAdses assembly="SicModules" classType="SicModules.Devices.SicAds">
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<TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</TcAdses>
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</IoSensors>
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<IoPumps classType="Mainframe.Devices.IoPump" assembly="Mainframe">
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<IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
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<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning"/>
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<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
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</IoPumps>
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<IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10"/>
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</IoClaws>
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<TMRobots assembly="Mainframe" classType="Mainframe.TMs.SicTMRobot">
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<TMRobots assembly="SicModules" classType="SicModules.TMs.SicTMRobot">
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<TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
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</TMRobots>
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<WaferRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicWaferRobot">
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<WaferRobots assembly="SicModules" classType="SicModules.EFEMs.SicWaferRobot">
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<WaferRobot id="WaferRobot" module="WaferRobot" display="" schematicId="" unit="" />
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</WaferRobots>
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<TrayRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicTrayRobot">
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<TrayRobots assembly="SicModules" classType="SicModules.EFEMs.SicTrayRobot">
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<TrayRobot id="TrayRobot" module="TrayRobot" display="" schematicId="" unit="" />
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</TrayRobots>
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<Aligners assembly="Mainframe" classType="Mainframe.Aligners.SicAligner">
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<Aligners assembly="SicModules" classType="SicModules.Aligners.SicAligner">
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<Aligner id="Aligner" module="Aligner" display="" schematicId="" unit="" />
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</Aligners>
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<Cassettes assembly="Mainframe" classType="Mainframe.Cassettes.SicCassette">
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<Cassettes assembly="SicModules" classType="SicModules.Cassettes.SicCassette">
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<Cassette id="CassAL" module="CassAL" display="" schematicId="" unit="" />
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<Cassette id="CassAR" module="CassAR" display="" schematicId="" unit="" />
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<Cassette id="CassBL" module="CassBL" display="" schematicId="" unit="" />
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</Cassettes>
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<LoadRotations assembly="Mainframe" classType="Mainframe.Devices.IoLoadRotation">
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<LoadRotations assembly="SicModules" classType="SicModules.Devices.IoLoadRotation">
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<LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
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diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
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diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
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aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
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</LoadRotations>
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<TMs assembly="Mainframe" classType="Mainframe.TMs.SicTM">
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<TMs assembly="SicModules" classType="SicModules.TMs.SicTM">
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<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp"/>
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</TMs>
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<EFEMs assembly="Mainframe" classType="Mainframe.EFEMs.SicEFEM">
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<EFEMs assembly="SicModules" classType="SicModules.EFEMs.SicEFEM">
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<Buffer id="EFEM" module="EFEM" display="" schematicId="" unit="" />
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</EFEMs>
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<LLs assembly="Mainframe" classType="Mainframe.LLs.SicLoadLock">
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<LLs assembly="SicModules" classType="SicModules.LLs.SicLoadLock">
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<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
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</LLs>
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<Unloads assembly="Mainframe" classType="Mainframe.UnLoads.SicUnLoad">
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<Unloads assembly="SicModules" classType="SicModules.UnLoads.SicUnLoad">
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<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
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</Unloads>
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<Buffers assembly="Mainframe" classType="Mainframe.Buffers.SicBuffer">
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<Buffers assembly="SicModules" classType="SicModules.Buffers.SicBuffer">
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<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
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</Buffers>
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using Aitex.Core.RT.DataCenter;
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using System;
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using System.Xml;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.SCCore;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using System.Xml;
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namespace Mainframe.Devices
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namespace SicModules.Devices
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{
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public class IoInterLock : BaseDevice, IDevice
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{
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using Aitex.Core.RT.DataCenter;
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using System.Xml;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.RT.EquipmentLibrary.Core.Extensions;
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using System.Threading;
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using System.Xml;
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namespace Mainframe.Devices
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namespace SicModules.Devices
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{
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public class IoLoadRotation : BaseDevice, IDevice
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{
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using Aitex.Core.Common.DeviceData;
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using System;
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using System.Xml;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Event;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Pumps;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using System.Xml;
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namespace Mainframe.Devices
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namespace SicModules.Devices
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{
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public class IoPump: BaseDevice, IDevice
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{
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using System.Xml;
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using Aitex.Core.RT.SCCore;
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namespace Mainframe.Devices
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namespace SicModules.Devices
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{
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public class SicAds : TcAds
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{
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using Aitex.Core.RT.Device;
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using System;
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using System.Collections.Generic;
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using System.Xml;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Log;
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using Aitex.Core.Util;
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using MECF.Framework.Common.IOCore;
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using MECF.Framework.Common.PLC;
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using MECF.Framework.RT.Core.IoProviders;
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using System;
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using System.Collections.Generic;
|
||||
using System.Xml;
|
||||
|
||||
namespace Mainframe.Devices
|
||||
namespace SicModules.Devices
|
||||
{
|
||||
public partial class SiemensIoProvider : IoProvider
|
||||
{
|
||||
|
|
|
@ -4,15 +4,13 @@ using System.Text.RegularExpressions;
|
|||
using System.Xml;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Communications;
|
||||
using MECF.Framework.Common.Event;
|
||||
using MECF.Framework.Common.PLC;
|
||||
using MECF.Framework.RT.Core.IoProviders.Siemens;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes;
|
||||
|
||||
namespace Mainframe.Devices
|
||||
namespace SicModules.Devices
|
||||
{
|
||||
|
||||
|
||||
|
|
|
@ -1,17 +1,16 @@
|
|||
using Aitex.Core.RT.DataCenter;
|
||||
using System;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Fsm;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.Util;
|
||||
using Aitex.Core.Utilities;
|
||||
using Aitex.Sorter.Common;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using System;
|
||||
using SicModules.EFEMs.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public class EFEMModule : EFEMModuleBase
|
||||
{
|
||||
|
|
|
@ -5,9 +5,8 @@ using MECF.Framework.Common.Fsm;
|
|||
using MECF.Framework.Common.Schedulers;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
|
||||
using System;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public abstract class EFEMModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
|
||||
{
|
||||
|
|
|
@ -1,20 +1,20 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.Devices;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
|
||||
using System;
|
||||
using static MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase.RobotBaseDevice;
|
||||
using IoInterLock = SicModules.Devices.IoInterLock;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines.Base
|
||||
{
|
||||
public class EfemBaseRoutine : ModuleRoutine, IRoutine
|
||||
{
|
||||
|
@ -32,7 +32,7 @@ namespace Mainframe.EFEMs
|
|||
public IoSensor _cassALWaferConvex; //凸片检测
|
||||
public IoSensor _cassARWaferConvex; //凸片检测
|
||||
public IoSensor _cassBLWaferConvex; //凸片检测
|
||||
private Mainframe.Devices.IoInterLock _tmIoInterLock;
|
||||
private IoInterLock _tmIoInterLock;
|
||||
|
||||
public IoLift4 _llLift;
|
||||
public IoClaw _loadWaferClaw;
|
||||
|
@ -71,7 +71,7 @@ namespace Mainframe.EFEMs
|
|||
_cassAL6Inch = DEVICE.GetDevice<IoSensor>($"TM.CassALInch6Sensor");
|
||||
_cassAR6Inch = DEVICE.GetDevice<IoSensor>($"TM.CassARInch6Sensor");
|
||||
_cassBL6Inch = DEVICE.GetDevice<IoSensor>($"TM.CassBLInch6Sensor");
|
||||
_tmIoInterLock = DEVICE.GetDevice<Mainframe.Devices.IoInterLock>("TM.IoInterLock");
|
||||
_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
|
||||
|
||||
_llLift= DEVICE.GetDevice<IoLift4>($"LoadLock.LLLift");
|
||||
_unLoadLift= DEVICE.GetDevice<IoLift4>($"UnLoad.UnLoadLift");
|
|
@ -1,9 +1,8 @@
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class EFEMHomeRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -1,16 +1,19 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.LLs;
|
||||
using Mainframe.TMs;
|
||||
using Mainframe.UnLoads;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad;
|
||||
using System;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
using SicModules.LLs;
|
||||
using SicModules.LLs.Routines;
|
||||
using SicModules.TMs;
|
||||
using SicModules.UnLoads;
|
||||
using SicModules.UnLoads.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class EfemSlitValveRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -1,9 +1,9 @@
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class TrayRobotHomeRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -3,9 +3,9 @@ using Aitex.Core.RT.Log;
|
|||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class TrayRobotMapRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -2,12 +2,13 @@
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.LLs;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
using SicModules.LLs.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class TrayRobotPickRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -3,14 +3,14 @@ using Aitex.Core.RT.Event;
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.Devices;
|
||||
using Mainframe.LLs;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||||
using System;
|
||||
using SicModules.Devices;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
using SicModules.LLs.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class TrayRobotPlaceRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -1,9 +1,9 @@
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class WaferRobotHomeRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -3,9 +3,9 @@ using Aitex.Core.RT.Log;
|
|||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class WaferRobotMapRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -4,14 +4,14 @@ using Aitex.Core.RT.Event;
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.Aligners;
|
||||
using Mainframe.LLs;
|
||||
using Mainframe.UnLoads;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
using SicModules.LLs.Routines;
|
||||
using SicModules.UnLoads.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class WaferRobotPickRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -1,18 +1,15 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.LLs;
|
||||
using Mainframe.UnLoads;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
|
||||
using System;
|
||||
using SicModules.EFEMs.Routines.Base;
|
||||
using SicModules.LLs.Routines;
|
||||
using SicModules.UnLoads.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs.Routines
|
||||
{
|
||||
public class WaferRobotPlaceRoutine : EfemBaseRoutine
|
||||
{
|
|
@ -1,12 +1,11 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Xml;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM;
|
||||
using System.Collections.Generic;
|
||||
using System.Xml;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public class SicEFEM : EFEM
|
||||
{
|
||||
|
|
|
@ -1,13 +1,8 @@
|
|||
using MECF.Framework.Common.Equipment;
|
||||
using System.Xml;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.HwinRobot;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Xml;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public class SicTrayRobot : HwinRobotB
|
||||
{
|
||||
|
|
|
@ -1,13 +1,8 @@
|
|||
using MECF.Framework.Common.Equipment;
|
||||
using System.Xml;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.HwinRobot;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Xml;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public class SicWaferRobot : HwinRobot
|
||||
{
|
||||
|
|
|
@ -1,18 +1,16 @@
|
|||
using Aitex.Core.RT.DataCenter;
|
||||
using System;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Fsm;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.Util;
|
||||
using Aitex.Core.Utilities;
|
||||
using Aitex.Sorter.Common;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Fsm;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using System;
|
||||
using SicModules.EFEMs.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public class TrayRobotModule : ModuleFsmDevice, IModuleDevice
|
||||
{
|
||||
|
|
|
@ -1,18 +1,16 @@
|
|||
using Aitex.Core.RT.DataCenter;
|
||||
using System;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Fsm;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.Util;
|
||||
using Aitex.Core.Utilities;
|
||||
using Aitex.Sorter.Common;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Fsm;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using System;
|
||||
using SicModules.EFEMs.Routines;
|
||||
|
||||
namespace Mainframe.EFEMs
|
||||
namespace SicModules.EFEMs
|
||||
{
|
||||
public class WaferRobotModule : ModuleFsmDevice, IModuleDevice
|
||||
{
|
||||
|
|
|
@ -1,25 +1,21 @@
|
|||
using Aitex.Core.RT.DataCenter;
|
||||
using System;
|
||||
using System.Threading;
|
||||
using System.Threading.Tasks;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Fsm;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Aitex.Core.Util;
|
||||
using Aitex.Core.Utilities;
|
||||
using Aitex.Sorter.Common;
|
||||
using Mainframe.TMs;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading;
|
||||
using System.Threading.Tasks;
|
||||
using SicModules.LLs.Routines;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs
|
||||
{
|
||||
public class LoadLockModule : LoadLockModuleBase
|
||||
{
|
||||
|
|
|
@ -6,7 +6,7 @@ using MECF.Framework.Common.Schedulers;
|
|||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs
|
||||
{
|
||||
public abstract class LoadLockModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
|
||||
{
|
||||
|
|
|
@ -1,17 +1,17 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
||||
using Mainframe.TMs;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Mainframe.Devices;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MachineVision.Keyence;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
||||
using SicModules.Devices;
|
||||
using SicModules.TMs;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines.Base
|
||||
{
|
||||
public class LoadLockBaseRoutine : ModuleRoutine, IRoutine
|
||||
{
|
||||
|
@ -50,9 +50,9 @@ namespace Mainframe.LLs
|
|||
private IoClaw _llWaferClaw = null;
|
||||
private IoClaw _llTrayClaw = null;
|
||||
private KeyenceCVX300F _loadCCD = null;
|
||||
public IoSensor _loadTrayHomeSensor; //Tray定位
|
||||
public IoSensor _loadWaferPlaced; //上下对射,检测Wafer有无
|
||||
public IoSensor _loadTrayPlaced; //检测托盘有无
|
||||
public IoSensor _loadTrayHomeSensor; //Tray定位
|
||||
public IoSensor _loadWaferPlaced; //上下对射,检测Wafer有无
|
||||
public IoSensor _loadTrayPlaced; //检测托盘有无
|
||||
|
||||
|
||||
public LoadLockBaseRoutine() : base(ModuleName.LoadLock.ToString())
|
||||
|
@ -264,12 +264,12 @@ namespace Mainframe.LLs
|
|||
{
|
||||
Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
|
||||
{
|
||||
//不做任何动作
|
||||
//不做任何动作
|
||||
return true;
|
||||
},
|
||||
() =>
|
||||
{
|
||||
//检测Rotation电机Error
|
||||
//检测Rotation电机Error
|
||||
if (_llRotation.IsServoError)
|
||||
{
|
||||
Stop($"Set {Module} Rotation Servo Error");
|
||||
|
@ -330,20 +330,20 @@ namespace Mainframe.LLs
|
|||
// return true;
|
||||
// }, () =>
|
||||
// {
|
||||
// //检测到未放好Sensor信号
|
||||
// //检测到未放好Sensor信号
|
||||
// if (!_loadWaferPlaced.Value)
|
||||
// {
|
||||
// //失败后Stop电机
|
||||
// //失败后Stop电机
|
||||
// _llRotation.Stop(out _);
|
||||
// Stop($"Set {Module} Rotation One Circle Wafter check sensor fail [TM DI-35]");
|
||||
// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
|
||||
// return true;
|
||||
// }
|
||||
|
||||
// //检测Rotation电机Error
|
||||
// //检测Rotation电机Error
|
||||
// if (_llRotation.IsServoError)
|
||||
// {
|
||||
// //失败后Stop电机
|
||||
// //失败后Stop电机
|
||||
// _llRotation.Stop(out _);
|
||||
// Stop($"Set {Module} Rotation Servo Error");
|
||||
// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
|
||||
|
@ -392,20 +392,20 @@ namespace Mainframe.LLs
|
|||
}, () =>
|
||||
{
|
||||
DISensroQueuen.Enqueue(_loadWaferPlaced.Value);
|
||||
//检测到未放好Sensor信号
|
||||
//检测到未放好Sensor信号
|
||||
//if (!_loadWaferPlaced.Value)
|
||||
//{
|
||||
// //失败后Stop电机
|
||||
// //失败后Stop电机
|
||||
// _llRotation.Stop(out _);
|
||||
// Stop($"Set {Module} Rotation One Circle Wafter check sensor fail [TM DI-35]");
|
||||
// WaitMoveOneCircleDoneResult = Result.VERIFYFAIL;
|
||||
// return true;
|
||||
//}
|
||||
|
||||
//检测Rotation电机Error
|
||||
//检测Rotation电机Error
|
||||
if (_llRotation.IsServoError)
|
||||
{
|
||||
//失败后Stop电机
|
||||
//失败后Stop电机
|
||||
_llRotation.Stop(out _);
|
||||
Stop($"Set {Module} Rotation Servo Error");
|
||||
return null;
|
|
@ -1,10 +1,11 @@
|
|||
using Aitex.Core.RT.Log;
|
||||
using System;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadHomeRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,10 +1,9 @@
|
|||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockClawRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,12 +1,10 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using System.Linq;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MachineVision.Keyence;
|
||||
using System.Linq;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockGroupRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,17 +1,15 @@
|
|||
using System;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.Devices;
|
||||
using MECF.Framework.Common.DBCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
||||
using SicModules.Devices;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockLeakCheckRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,9 +1,8 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockLiftRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,10 +1,10 @@
|
|||
using System;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockPrepareTransferRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,17 +1,13 @@
|
|||
using System;
|
||||
using System.Text;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using Mainframe.Devices;
|
||||
using Mainframe.TMs;
|
||||
using System.Diagnostics;
|
||||
using SicModules.Devices;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockPumpRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,18 +1,13 @@
|
|||
using System;
|
||||
using System.Diagnostics;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.Devices;
|
||||
using Mainframe.TMs;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
||||
using SicModules.Devices;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockPurgeRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,18 +1,11 @@
|
|||
using System;
|
||||
using System.Text;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
||||
using Mainframe.Devices;
|
||||
using Mainframe.TMs;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockServoToRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,10 +1,6 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockTrayAlignerRoutine:LoadLockBaseRoutine
|
||||
{
|
|
@ -1,14 +1,9 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Reflection;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockTrayClawRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,16 +1,13 @@
|
|||
using System;
|
||||
using System.Diagnostics;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Mainframe.Devices;
|
||||
using Mainframe.TMs;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using SicModules.Devices;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadLockVentRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,14 +1,9 @@
|
|||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadRotationHomeOffsetRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,14 +1,9 @@
|
|||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using SicModules.LLs.Routines.Base;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs.Routines
|
||||
{
|
||||
public class LoadSeparateRoutine : LoadLockBaseRoutine
|
||||
{
|
|
@ -1,18 +1,17 @@
|
|||
using Aitex.Core.Common;
|
||||
using System;
|
||||
using System.Xml;
|
||||
using Aitex.Core.Common;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Aitex.Core.Util;
|
||||
using Mainframe.Devices;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using System;
|
||||
using System.Xml;
|
||||
using SicModules.Devices;
|
||||
|
||||
namespace Mainframe.LLs
|
||||
namespace SicModules.LLs
|
||||
{
|
||||
public class SicLoadLock : LoadLock
|
||||
{
|
||||
|
@ -85,7 +84,7 @@ namespace Mainframe.LLs
|
|||
|
||||
_balancePressureDiff = SC.GetValue<double>("TM.PressureBalance.BalanceMaxDiffPressure");
|
||||
|
||||
_IoLoadRotation = DEVICE.GetDevice<Mainframe.Devices.IoLoadRotation>("Load.Rotation");
|
||||
_IoLoadRotation = DEVICE.GetDevice<IoLoadRotation>("Load.Rotation");
|
||||
|
||||
return base.Initialize();
|
||||
}
|
||||
|
|
|
@ -1,12 +1,6 @@
|
|||
using MECF.Framework.Common.Equipment;
|
||||
using SicPM;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace Mainframe.PMs
|
||||
namespace SicModules.PMs
|
||||
{
|
||||
public class PM1: PMModule
|
||||
{
|
||||
|
|
|
@ -1,12 +1,6 @@
|
|||
using MECF.Framework.Common.Equipment;
|
||||
using SicPM;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace Mainframe.PMs
|
||||
namespace SicModules.PMs
|
||||
{
|
||||
public class PM2: PMModule
|
||||
{
|
||||
|
|
|
@ -2,10 +2,8 @@
|
|||
using System.Linq;
|
||||
using System.Threading;
|
||||
using System.Threading.Tasks;
|
||||
using System.Xml;
|
||||
using Aitex.Core.Common;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Fsm;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
|
@ -18,12 +16,11 @@ using MECF.Framework.Common.Equipment;
|
|||
using MECF.Framework.Common.Schedulers;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
|
||||
using SicPM.RecipeExecutions;
|
||||
using SicPM.RecipeRoutine;
|
||||
using SicPM.Routines;
|
||||
using SicModules.PMs.RecipeExecutions;
|
||||
using SicModules.PMs.Routines;
|
||||
using SicModules.PMs.Routines.Recipe;
|
||||
|
||||
namespace SicPM
|
||||
namespace SicModules.PMs
|
||||
{
|
||||
public partial class PMModule : PMModuleBase, IRecipeExecutor
|
||||
{
|
|
@ -1,26 +1,23 @@
|
|||
using Aitex.Core.Common.DeviceData;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.Utilities;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Event;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using System;
|
||||
using System;
|
||||
using System.Collections.Concurrent;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Reflection;
|
||||
using System.Threading.Tasks;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.PLC;
|
||||
using Aitex.Core.Util;
|
||||
using Aitex.Core.RT.IOCore;
|
||||
using Aitex.Sorter.Common;
|
||||
using Aitex.Core.Common.DeviceData;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Aitex.Core.Util;
|
||||
using Aitex.Core.Utilities;
|
||||
using Aitex.Sorter.Common;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Event;
|
||||
using MECF.Framework.Common.PLC;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
|
||||
namespace SicPM
|
||||
namespace SicModules.PMs
|
||||
{
|
||||
|
||||
public enum IoGroupName
|
|
@ -1,21 +1,7 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Reflection;
|
||||
using System.Threading.Tasks;
|
||||
using Aitex.Core.Common.DeviceData;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
using Aitex.Core.Utilities;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Event;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
using MECF.Framework.Common.OperationCenter;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
|
||||
namespace SicPM
|
||||
namespace SicModules.PMs
|
||||
{
|
||||
public partial class PMModule
|
||||
{
|
|
@ -1,4 +1,5 @@
|
|||
using Aitex.Core.Common.DeviceData;
|
||||
using System;
|
||||
using Aitex.Core.Common.DeviceData;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.OperationCenter;
|
||||
|
@ -6,15 +7,11 @@ using Aitex.Core.RT.Routine;
|
|||
using Aitex.Core.Util;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using SicPM.Routines;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
using SicModules.PMs.Routines;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class CleanRecipe : PMBaseRoutine
|
||||
{
|
|
@ -2,8 +2,6 @@
|
|||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Xml;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Log;
|
||||
|
@ -12,7 +10,7 @@ using Aitex.Core.Util;
|
|||
using MECF.Framework.Common.CommonData;
|
||||
using MECF.Framework.Common.SCCore;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class Fdc
|
||||
{
|
|
@ -1,11 +1,7 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Collections.Generic;
|
||||
using MECF.Framework.Common.CommonData;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public interface IRecipeDBCallback
|
||||
{
|
|
@ -1,10 +1,4 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public interface IRecipeExecutor
|
||||
{
|
|
@ -1,19 +1,15 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using System.Reflection;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Aitex.Core.Util;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicPM.Routines;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class PostProcess : PMBaseRoutine
|
||||
{
|
|
@ -11,13 +11,12 @@ using Aitex.Core.RT.Routine;
|
|||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Device.Bases;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.OperationCenter;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
using SicPM.Routines;
|
||||
using static SicPM.PMModule;
|
||||
using SicModules.PMs.Routines;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class PreProcess : PMBaseRoutine
|
||||
{
|
|
@ -1,4 +1,6 @@
|
|||
using Aitex.Core.Common;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using Aitex.Core.Common;
|
||||
using Aitex.Core.RT.DataCenter;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
|
@ -11,15 +13,11 @@ using Aitex.Core.RT.Tolerance;
|
|||
using Aitex.Core.Util;
|
||||
using MECF.Framework.Common.DBCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.OperationCenter;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using SicPM.Routines;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Xml;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
using static Aitex.Core.RT.Device.PmDevices.DicMode;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public enum RecipeContinueMode
|
||||
{
|
|
@ -1,12 +1,10 @@
|
|||
using Aitex.Core.UI.ControlDataContext;
|
||||
using MECF.Framework.Common.DBCore;
|
||||
using System;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using Aitex.Core.UI.ControlDataContext;
|
||||
using MECF.Framework.Common.DBCore;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public partial class Process
|
||||
{
|
|
@ -1,14 +1,10 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Collections.Generic;
|
||||
using MECF.Framework.Common.CommonData;
|
||||
using MECF.Framework.Common.DBCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
class RecipeDBCallback : IRecipeDBCallback
|
||||
{
|
|
@ -1,9 +1,9 @@
|
|||
using Aitex.Core.UI.ControlDataContext;
|
||||
using System;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using Aitex.Core.UI.ControlDataContext;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class RecipeEndDataItem
|
||||
{
|
|
@ -1,4 +1,4 @@
|
|||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class RecipeHead
|
||||
{
|
|
@ -1,6 +1,5 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
using System.Text.RegularExpressions;
|
||||
using System.Xml;
|
||||
using Aitex.Common.Util;
|
||||
|
@ -9,7 +8,7 @@ using Aitex.Core.RT.RecipeCenter;
|
|||
using Aitex.Core.RT.SCCore;
|
||||
using static Aitex.Core.RT.Device.PmDevices.DicMode;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class RecipeDataColumn
|
||||
{
|
|
@ -1,8 +1,7 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public enum EnumRecipeRunningState
|
||||
{
|
|
@ -1,6 +1,6 @@
|
|||
using System.Collections.Generic;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public enum EnumEndByCondition
|
||||
{
|
|
@ -1,17 +1,13 @@
|
|||
using Aitex.Common.Util;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
using System.Xml;
|
||||
using Aitex.Common.Util;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.RecipeCenter;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Xml;
|
||||
|
||||
namespace SicPM.RecipeExecutions
|
||||
namespace SicModules.PMs.RecipeExecutions
|
||||
{
|
||||
public class SicRecipeFileContext : IRecipeFileContext
|
||||
{
|
|
@ -2,12 +2,11 @@
|
|||
using System.Collections.Generic;
|
||||
using Aitex.Core.Common.DeviceData;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines.Base
|
||||
{
|
||||
public class PMBaseRoutine : ModuleRoutine, IRoutine
|
||||
{
|
|
@ -1,16 +1,11 @@
|
|||
using System;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.IOCore;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.DataCenter;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMButttomSectionMoveRoutine : PMBaseRoutine
|
||||
{
|
|
@ -3,14 +3,11 @@ using System.Diagnostics;
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.IOCore;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.DataCenter;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMChamberMoveBodyRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,17 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.IOCore;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMCleanRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,15 +1,15 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMExchangeMoRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,11 +1,11 @@
|
|||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMHomeRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,16 +1,16 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.DBCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMLeakCheckRoutine : PMBaseRoutine
|
||||
{
|
|
@ -2,17 +2,11 @@
|
|||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using System.Linq;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.IOCore;
|
||||
using Aitex.Core.RT.Log;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.DataCenter;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMPcCalibrationRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,18 +1,11 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Servo.NAIS;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using static SicPM.PMModule;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
class PMPostTransferRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,20 +1,16 @@
|
|||
using Aitex.Core.Common.DeviceData;
|
||||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Servo.NAIS;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
using static SicPM.PMModule;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Servo.NAIS;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
using static SicModules.PMs.PMModule;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
class PMPrepareTransferRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,14 +1,13 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMProcessAbortRoutine : PMBaseRoutine
|
||||
{
|
|
@ -10,7 +10,7 @@ using MECF.Framework.Common.Equipment;
|
|||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMProcessRoutine : ModuleRoutine, IRoutine
|
||||
{
|
|
@ -1,14 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMPumpRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,15 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMPurgeRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,13 +1,12 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMServoToPressure : PMBaseRoutine
|
||||
{
|
|
@ -1,10 +1,8 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMStopHeatEnableRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,15 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMToAtmIdleRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,13 +1,11 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMToIsolationRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,14 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMToProcessIdleRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,14 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMVacIdleRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,14 +1,14 @@
|
|||
using Aitex.Core.RT.Device;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Device.Devices;
|
||||
using Aitex.Core.RT.Device.Unit;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.Routines
|
||||
namespace SicModules.PMs.Routines
|
||||
{
|
||||
public class PMVentRoutine : PMBaseRoutine
|
||||
{
|
|
@ -1,6 +1,5 @@
|
|||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Diagnostics;
|
||||
using Aitex.Core.Common;
|
||||
using Aitex.Core.Common.DeviceData;
|
||||
using Aitex.Core.RT.Device;
|
||||
|
@ -13,10 +12,10 @@ using Aitex.Core.RT.SCCore;
|
|||
using Aitex.Core.Util;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.SubstrateTrackings;
|
||||
using SicPM.RecipeExecutions;
|
||||
using SicPM.Routines;
|
||||
using SicModules.PMs.RecipeExecutions;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.RecipeRoutine
|
||||
namespace SicModules.PMs.Routines.Recipe
|
||||
{
|
||||
public enum RecipeContinueMode
|
||||
{
|
|
@ -1,16 +1,8 @@
|
|||
using System;
|
||||
using Aitex.Core.RT.Device;
|
||||
using Aitex.Core.RT.Event;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using Aitex.Core.RT.SCCore;
|
||||
using Aitex.Core.RT.Routine;
|
||||
using MECF.Framework.Common.Equipment;
|
||||
using MECF.Framework.Common.Schedulers;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
|
||||
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
|
||||
using SicPM.Routines;
|
||||
using SicModules.PMs.Routines.Base;
|
||||
|
||||
namespace SicPM.RecipeRoutine
|
||||
namespace SicModules.PMs.Routines.Recipe
|
||||
{
|
||||
public class PostPMMacroRoutine : PMBaseRoutine
|
||||
{
|
Some files were not shown because too many files have changed in this diff Show More
Loading…
Reference in New Issue