1.修改Ramp时间
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@ -259,7 +259,7 @@ namespace SicModules.PMs.Routines
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if(_pmModule.GetChamberPressure() >980)
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{
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//设置对应的MFC流量为0
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SetMfcFlow((int)RoutineStep.SetMfcFlow_3, _mfcData.Name, 0, 3000);
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SetMfcFlow((int)RoutineStep.SetMfcFlow_3, _mfcData.Name, 0, 3);
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TimeDelay((int)RoutineStep.TimeDelay10, 3);
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@ -309,7 +309,7 @@ namespace SicModules.PMs.Routines
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PreSetMfcFlow((int)RoutineStep.PreSetMfcFlow);
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//设定MFC流量
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SetMfcFlow((int)RoutineStep.SetMfcFlow_1, _mfcData.Name, _mfcData.SetFlow, 3000);
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SetMfcFlow((int)RoutineStep.SetMfcFlow_1, _mfcData.Name, _mfcData.SetFlow, 3);
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TimeDelay((int)RoutineStep.TimeDelay5, 3);
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//记录第一次压力值
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