diff --git a/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs b/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
index ae8db67..beaa35a 100644
--- a/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
@@ -259,7 +259,7 @@ namespace SicModules.PMs.Routines
                 if(_pmModule.GetChamberPressure() >980)
                 {
                     //设置对应的MFC流量为0
-                    SetMfcFlow((int)RoutineStep.SetMfcFlow_3, _mfcData.Name, 0, 3000);
+                    SetMfcFlow((int)RoutineStep.SetMfcFlow_3, _mfcData.Name, 0, 3);
 
                     TimeDelay((int)RoutineStep.TimeDelay10, 3);
 
@@ -309,7 +309,7 @@ namespace SicModules.PMs.Routines
                 PreSetMfcFlow((int)RoutineStep.PreSetMfcFlow);
 
                 //设定MFC流量
-                SetMfcFlow((int)RoutineStep.SetMfcFlow_1, _mfcData.Name, _mfcData.SetFlow, 3000);
+                SetMfcFlow((int)RoutineStep.SetMfcFlow_1, _mfcData.Name, _mfcData.SetFlow, 3);
                 TimeDelay((int)RoutineStep.TimeDelay5, 3);
 
                 //记录第一次压力值