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1.修改Ramp时间

This commit is contained in:
HCL 2023-06-28 14:12:26 +08:00
parent 834f792651
commit 9099a692d1
1 changed files with 2 additions and 2 deletions
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4
Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
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@ -259,7 +259,7 @@ namespace SicModules.PMs.Routines
if(_pmModule.GetChamberPressure() >980)
{
//设置对应的MFC流量为0
SetMfcFlow((int)RoutineStep.SetMfcFlow_3, _mfcData.Name, 0, 3000);
SetMfcFlow((int)RoutineStep.SetMfcFlow_3, _mfcData.Name, 0, 3);
TimeDelay((int)RoutineStep.TimeDelay10, 3);
@ -309,7 +309,7 @@ namespace SicModules.PMs.Routines
PreSetMfcFlow((int)RoutineStep.PreSetMfcFlow);
//设定MFC流量
SetMfcFlow((int)RoutineStep.SetMfcFlow_1, _mfcData.Name, _mfcData.SetFlow, 3000);
SetMfcFlow((int)RoutineStep.SetMfcFlow_1, _mfcData.Name, _mfcData.SetFlow, 3);
TimeDelay((int)RoutineStep.TimeDelay5, 3);
//记录第一次压力值