diff --git a/Modules/Mainframe/PMs/PMModule.cs b/Modules/Mainframe/PMs/PMModule.cs
index 27d693e..f39c529 100644
--- a/Modules/Mainframe/PMs/PMModule.cs
+++ b/Modules/Mainframe/PMs/PMModule.cs
@@ -658,6 +658,7 @@ namespace SicModules.PMs
 
             //VacIdle
             Transition(STATE.Idle, MSG.VacIdle, FsmVacIdle, STATE.ToVacIdle);
+            Transition(STATE.VacIdle, MSG.VacIdle, FsmVacIdle, STATE.ToVacIdle);
 
             Transition(STATE.ToVacIdle, FSM_MSG.TIMER, FsmMonitorTask, STATE.VacIdle);
             Transition(STATE.ToVacIdle, MSG.Abort, FsmAbortTask, STATE.Idle);
diff --git a/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs b/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
index 26dfe8b..bb90838 100644
--- a/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
+++ b/Modules/Mainframe/PMs/Routines/PMMfcRorRoutine.cs
@@ -46,6 +46,7 @@ namespace SicModules.PMs.Routines
 
             SetEPV2_1,
             SetEPV2_2,
+            SetEPV2_3,
             SetTVEnable_1,
             SetTVEnable_2,
             SetTVPressMode_1,
@@ -319,7 +320,7 @@ namespace SicModules.PMs.Routines
                 if (_flag2)
                 {
                     //打开EPV2
-                    SetIoValueByGroup((int)RoutineStep.SetEPV2_2, IoGroupName.EPV2, true, _IoValueTimeout);
+                    SetIoValueByGroup((int)RoutineStep.SetEPV2_3, IoGroupName.EPV2, true, _IoValueTimeout);
 
                     //设置蝶阀Enable
                     SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_2, _IoThrottle, 5);
@@ -664,7 +665,7 @@ namespace SicModules.PMs.Routines
             {
                 if (_mfcData.MeanDifferencePressure - _mfcData.MaintainPressureDifference > 0)
                 {
-                    _mfcData.Volume = 100000 * (_mfcData.SetFlow * 0.001 / Vm * R * _mfcData.Temperature) /
+                    _mfcData.Volume = 1000000 * (_mfcData.SetFlow * 0.001 / Vm * R * _mfcData.Temperature) /
                   ((_mfcData.MeanDifferencePressure - _mfcData.MaintainPressureDifference) / (_mfcData.Interval / 60.0) / 0.01);
 
                     //保留2位小数
@@ -713,7 +714,7 @@ namespace SicModules.PMs.Routines
             {
                 if (_mfcData.SetFlow != 0)
                 {
-                    _mfcData.ActualFlow = ((_mfcData.MeanDifferencePressure - _mfcData.MaintainPressureDifference) / (0.01 * (_mfcData.Interval / 60.0))) * (_mfcData.Volume / 100000.0 / (R * _mfcData.Temperature)) * Vm;
+                    _mfcData.ActualFlow = ((_mfcData.MeanDifferencePressure - _mfcData.MaintainPressureDifference) / (0.01 * (_mfcData.Interval / 60.0))) * (_mfcData.Volume / 1000000.0 / (R * _mfcData.Temperature)) * Vm * 1000;
 
                     _mfcData.Deviation = (_mfcData.ActualFlow / _mfcData.SetFlow - 1) * 100;
                     //保留2位小数
@@ -721,7 +722,7 @@ namespace SicModules.PMs.Routines
                     _mfcData.Volume = Math.Round(_mfcData.Volume, 2);
 
                     //大于3%的MFC为超标
-                    _mfcData.IsOverStandard = Math.Abs(_mfcData.Deviation - 3) > 0;
+                    _mfcData.IsOverStandard = Math.Abs(_mfcData.Deviation) - 3 > 0;
 
                     _endTime = DateTime.Now.ToString("yyyy/MM/dd HH:mm:ss");
 
diff --git a/SicUI/Models/PMs/PMMfcRorView.xaml b/SicUI/Models/PMs/PMMfcRorView.xaml
index 9230dfa..9aad6e8 100644
--- a/SicUI/Models/PMs/PMMfcRorView.xaml
+++ b/SicUI/Models/PMs/PMMfcRorView.xaml
@@ -57,7 +57,7 @@
             <ColumnDefinition />
         </Grid.ColumnDefinitions>
         <Grid.RowDefinitions>
-            <RowDefinition Height="280" />
+            <RowDefinition Height="300" />
             <RowDefinition Height="180" />
             <RowDefinition Height="90" />
             <RowDefinition Height="*" />
@@ -111,6 +111,9 @@
                     <Border>
                         <TextBlock Text="MFC设定流量(sccm)" />
                     </Border>
+                    <Border>
+                        <TextBlock Text="腔体体积(ml)" />
+                    </Border>
 
                 </StackPanel>
                 <StackPanel Width="120" HorizontalAlignment="Left">
@@ -177,6 +180,13 @@
                             Text="{Binding StandardMfcRorData.SetFlow, StringFormat=0.00}"
                             TextAlignment="Center" />
                     </Border>
+                    <Border Background="#FFD6D6D6" Style="{StaticResource InfBorder}">
+                        <TextBlock
+                            HorizontalAlignment="Center"
+                            VerticalAlignment="Center"
+                            Text="{Binding StandardMfcRorData.Volume, StringFormat=0.00}"
+                            TextAlignment="Center" />
+                    </Border>
                 </StackPanel>
             </StackPanel>
 
@@ -378,7 +388,7 @@
         <DataGrid
             Grid.RowSpan="3"
             Grid.Column="1"
-            Width="1393"
+            Width="1293"
             HorizontalAlignment="Left"
             AlternationCount="2"
             AutoGenerateColumns="False"
@@ -410,12 +420,6 @@
                     Header="结束时间"
                     IsReadOnly="True" />
 
-                <DataGridTextColumn
-                    Width="100"
-                    Binding="{Binding MaintainPressureDifference, StringFormat=0.00}"
-                    Header="腔体压差"
-                    IsReadOnly="True" />
-
                 <DataGridTextColumn
                     Width="100"
                     Binding="{Binding Pressure1, StringFormat=0.00}"
diff --git a/SicUI/Models/PMs/PMMfcRorViewModel.cs b/SicUI/Models/PMs/PMMfcRorViewModel.cs
index ef92469..09c399a 100644
--- a/SicUI/Models/PMs/PMMfcRorViewModel.cs
+++ b/SicUI/Models/PMs/PMMfcRorViewModel.cs
@@ -79,8 +79,6 @@ namespace SicUI.Models.PMs
             //MFC默认的设定流量为量程的一半
             SelectedMfcRorData.SetFlow = SelectedMfcRorData.Scale / 2.0;
 
-            SelectedMfcRorData.ActualFlow = SelectedMfcRorData.SetFlow;
-
             SelectedMfcRorData.BasePressure = 400;
 
             SelectedMfcRorData.Volume = StandardMfcRorData != null ? StandardMfcRorData.Volume  : 0;
@@ -98,6 +96,11 @@ namespace SicUI.Models.PMs
                 return;
             }
 
+            if(SelectedMfcRorData.IsStandardMfc)
+            {
+                SelectedMfcRorData.ActualFlow = SelectedMfcRorData.SetFlow;
+            }
+
             InvokeClient.Instance.Service.DoOperation($"{SystemName}.MfcRor", JsonConvert.SerializeObject(SelectedMfcRorData));
         }
 
diff --git a/SicUI/Models/PMs/PMOperationView.xaml b/SicUI/Models/PMs/PMOperationView.xaml
index 44c79c3..c2f041f 100644
--- a/SicUI/Models/PMs/PMOperationView.xaml
+++ b/SicUI/Models/PMs/PMOperationView.xaml
@@ -14,9 +14,9 @@
     xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006"
     xmlns:pm="clr-namespace:SicUI.Models.PMs"
     xmlns:system="clr-namespace:System;assembly=mscorlib"
+    d:Background="#91b0cd"
     d:DesignHeight="780"
     d:DesignWidth="1920"
-    d:Background="#91b0cd"
     mc:Ignorable="d">
     <UserControl.Resources>
         <pm:InverseBoolConverter x:Key="InverseBoolConverter" />
@@ -67,77 +67,77 @@
         <Color x:Key="EdgeColorLightGreen">#00ae9d</Color>
 
         <Style x:Key="WaterTempBackground" TargetType="Border">
-            <Setter Property="BorderBrush" Value="{DynamicResource Table_BD}"/>
-            <Setter Property="BorderThickness" Value="0,0,1,1"/>
-            <Setter Property="Padding" Value="5,1"/>
-            <Setter Property="ToolTip.Content" Value="{Binding AlarmHigh}"/>
+            <Setter Property="BorderBrush" Value="{DynamicResource Table_BD}" />
+            <Setter Property="BorderThickness" Value="0,0,1,1" />
+            <Setter Property="Padding" Value="5,1" />
+            <Setter Property="ToolTip.Content" Value="{Binding AlarmHigh}" />
             <Style.Triggers>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="false"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="false"/>
+                        <Condition Binding="{Binding IsWarning}" Value="false" />
+                        <Condition Binding="{Binding IsAlarm}" Value="false" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Background" Value="Transparent"/>
+                    <Setter Property="Background" Value="Transparent" />
                 </MultiDataTrigger>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="true"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="false"/>
+                        <Condition Binding="{Binding IsWarning}" Value="true" />
+                        <Condition Binding="{Binding IsAlarm}" Value="false" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Background" Value="#f4b575"/>
+                    <Setter Property="Background" Value="#f4b575" />
                 </MultiDataTrigger>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="False"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="True"/>
+                        <Condition Binding="{Binding IsWarning}" Value="False" />
+                        <Condition Binding="{Binding IsAlarm}" Value="True" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Background" Value="#f49f9f"/>
+                    <Setter Property="Background" Value="#f49f9f" />
                 </MultiDataTrigger>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="True"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="True"/>
+                        <Condition Binding="{Binding IsWarning}" Value="True" />
+                        <Condition Binding="{Binding IsAlarm}" Value="True" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Background" Value="#f49f9f"/>
+                    <Setter Property="Background" Value="#f49f9f" />
                 </MultiDataTrigger>
             </Style.Triggers>
         </Style>
 
         <Style x:Key="WaterTempForeground" TargetType="TextBlock">
-            <Setter Property="HorizontalAlignment" Value="Center"/>
-            <Setter Property="VerticalAlignment" Value="Center"/>
-            <Setter Property="FontFamily" Value="Arial"/>
-            <Setter Property="FontSize" Value="14"/>
-            <Setter Property="TextWrapping" Value="Wrap"/>
-            <Setter Property="Text" Value="{Binding Value, StringFormat=0.00}"/>
+            <Setter Property="HorizontalAlignment" Value="Center" />
+            <Setter Property="VerticalAlignment" Value="Center" />
+            <Setter Property="FontFamily" Value="Arial" />
+            <Setter Property="FontSize" Value="14" />
+            <Setter Property="TextWrapping" Value="Wrap" />
+            <Setter Property="Text" Value="{Binding Value, StringFormat=0.00}" />
             <Style.Triggers>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="false"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="false"/>
+                        <Condition Binding="{Binding IsWarning}" Value="false" />
+                        <Condition Binding="{Binding IsAlarm}" Value="false" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Foreground" Value="{DynamicResource FG_Black}"/>
+                    <Setter Property="Foreground" Value="{DynamicResource FG_Black}" />
                 </MultiDataTrigger>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="true"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="false"/>
+                        <Condition Binding="{Binding IsWarning}" Value="true" />
+                        <Condition Binding="{Binding IsAlarm}" Value="false" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Foreground" Value="#e66e2e"/>
+                    <Setter Property="Foreground" Value="#e66e2e" />
                 </MultiDataTrigger>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="False"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="True"/>
+                        <Condition Binding="{Binding IsWarning}" Value="False" />
+                        <Condition Binding="{Binding IsAlarm}" Value="True" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Foreground" Value="#ff0f0f"/>
+                    <Setter Property="Foreground" Value="#ff0f0f" />
                 </MultiDataTrigger>
                 <MultiDataTrigger>
                     <MultiDataTrigger.Conditions>
-                        <Condition Binding="{Binding IsWarning}" Value="True"/>
-                        <Condition Binding="{Binding IsAlarm}" Value="True"/>
+                        <Condition Binding="{Binding IsWarning}" Value="True" />
+                        <Condition Binding="{Binding IsAlarm}" Value="True" />
                     </MultiDataTrigger.Conditions>
-                    <Setter Property="Foreground" Value="#ff0f0f"/>
+                    <Setter Property="Foreground" Value="#ff0f0f" />
                 </MultiDataTrigger>
             </Style.Triggers>
         </Style>
@@ -1232,7 +1232,7 @@
                                     <deviceControl:AITSensor
                                         HorizontalAlignment="Center"
                                         VerticalAlignment="Center"
-                                         CustomColorOff="Red"
+                                        CustomColorOff="Red"
                                         CustomColorOn="Lime"
                                         DeviceData="{Binding Sensor8}"
                                         IsCustomRender="True" />
@@ -1240,9 +1240,7 @@
                             </Grid>
                         </TabItem>
                         <TabItem Header="Cooling Water">
-                            <TabControl
-                                Margin="0,0,0,0"
-                                Background="Transparent">
+                            <TabControl Margin="0,0,0,0" Background="Transparent">
                                 <TabItem
                                     FontFamily="Arial"
                                     FontSize="12"
@@ -1353,8 +1351,7 @@
                                             Grid.Column="3"
                                             DataContext="{Binding SHFlowTemp}"
                                             Style="{StaticResource WaterTempBackground}">
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
                                         <Border
                                             Grid.Row="2"
@@ -1392,8 +1389,7 @@
                                             Grid.Column="3"
                                             DataContext="{Binding ChamberTopFlowTemp}"
                                             Style="{StaticResource WaterTempBackground}">
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}"/>
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
 
@@ -1434,9 +1430,8 @@
                                             Grid.Row="3"
                                             Grid.Column="3"
                                             DataContext="{Binding ChamberMid1FlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
 
@@ -1474,9 +1469,8 @@
                                             Grid.Row="4"
                                             Grid.Column="3"
                                             DataContext="{Binding ChamberMid2FlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}"  />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
 
@@ -1514,9 +1508,8 @@
                                             Grid.Row="5"
                                             Grid.Column="3"
                                             DataContext="{Binding ChamberBottomFlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
                                         <Border
@@ -1553,9 +1546,8 @@
                                             Grid.Row="6"
                                             Grid.Column="3"
                                             DataContext="{Binding ChamberBottomPlateTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
                                         <Border
@@ -1592,9 +1584,8 @@
                                             Grid.Row="7"
                                             Grid.Column="3"
                                             DataContext="{Binding PowerRod1FlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}"  />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
                                     </Grid>
                                 </TabItem>
@@ -1704,8 +1695,7 @@
                                             Grid.Column="2"
                                             DataContext="{Binding PowerRod2FlowTemp}"
                                             Style="{StaticResource WaterTempBackground}">
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}"/>
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
                                         <Border
                                             Grid.Row="2"
@@ -1740,9 +1730,8 @@
                                             Grid.Row="2"
                                             Grid.Column="2"
                                             DataContext="{Binding ForelineFlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
 
@@ -1779,9 +1768,8 @@
                                             Grid.Row="3"
                                             Grid.Column="2"
                                             DataContext="{Binding ElectrodeWFlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}"  />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
 
@@ -1817,9 +1805,8 @@
                                             Grid.Row="4"
                                             Grid.Column="2"
                                             DataContext="{Binding TMPumpFlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}"  />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
 
@@ -1856,9 +1843,8 @@
                                             Grid.Row="5"
                                             Grid.Column="2"
                                             DataContext="{Binding TMTopLidFlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
 
                                         <Border
@@ -1893,10 +1879,10 @@
                                             Grid.Row="6"
                                             Grid.Column="2"
                                             DataContext="{Binding SpareTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock  Style="{StaticResource WaterTempForeground}"/>
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
-                                        
+
                                         <Border
                                             Grid.Row="7"
                                             Grid.Column="0"
@@ -1930,9 +1916,8 @@
                                             Grid.Row="7"
                                             Grid.Column="2"
                                             DataContext="{Binding TransformerFlowTemp}"
-                                            Style="{StaticResource WaterTempBackground}" >
-                                            <TextBlock
-                                                Style="{StaticResource WaterTempForeground}" />
+                                            Style="{StaticResource WaterTempBackground}">
+                                            <TextBlock Style="{StaticResource WaterTempForeground}" />
                                         </Border>
                                     </Grid>
                                 </TabItem>