using System; using System.Collections.Generic; using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; using SicModules.PMs.Routines.Base; namespace SicModules.PMs.Routines.Recipe { public class PrePMMacroRoutine : PMBaseRoutine { public enum RoutineStep { SetServoUp, SetChamberPressure, EnableRotation, OpenH2Valve, EnableHeater, PcCalibartion, RunStepOne, Wait, CheckCondition, } private string _recipeName; private bool _isCleanRecipe; private bool _withWafer; private Guid _guidProcess; private bool _isDryRun; private bool _isPSUHeaterJumpMode; private bool _isSCRHeaterJumpMode; private bool _isMFCJumpMode; private int _delayTimeRamp; private double _targetPressure; private IoInterLock _pmInterLock; private PMServoToPressure _pmServoToPressure; private PMPcCalibrationRoutine _pmPcCalibrationRoutine; public PrePMMacroRoutine(ModuleName module, PMModule pm1) : base(module, pm1) { Module = module.ToString(); Name = "PrePMMacro"; _pmInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); _pmServoToPressure = new PMServoToPressure(module, pm1); _pmPcCalibrationRoutine = new PMPcCalibrationRoutine(module, pm1); } public void Init(string recipeName, bool isClean, bool withWafer) { _recipeName = recipeName; _isCleanRecipe = isClean; _withWafer = withWafer; } public override Result Start(params object[] objs) { Reset(); if (!RecipeParser.Parse(_recipeName, Module, out var recipeHead, out var recipeSteps, out string reason)) { Stop($"Load recipe {_recipeName} failed, {reason}"); return Result.FAIL; } if (!_withWafer && WaferManager.Instance.CheckHasWafer(PmDevice.Module, 0)) { EV.PostWarningLog(Module, $"can not run waferless process, Has wafer at {Module}"); return Result.FAIL; } if (_withWafer && !WaferManager.Instance.CheckHasWafer(PmDevice.Module, 0)) { EV.PostWarningLog(Module, $"can not run process, no wafer at {Module}"); return Result.FAIL; } if (!PmDevice.Pump.IsOn || PmDevice.Pump.IsError) { EV.PostWarningLog(Module, $"can not run process, pump state is not correct"); return Result.FAIL; } //Recipe Routine先打开加热 PmDevice.SetHeatEnable(true); //if (!PMDevice._ioThrottleValve.TVValveEnable) //{ // EV.PostWarningLog(Module, $"can not run process, TV is not enable"); // return Result.FAIL; //} //if (PMDevice._ioThrottleValve.ControlModeFeedback != PressureCtrlMode.TVPressureCtrl) //{ // EV.PostWarningLog(Module, $"can not run process, TV is not Pressure Ctrol Mode"); // return Result.FAIL; //} //if (!PMDevice.CheckIOValueByGroup(IoGroupName.I, true)) //{ // EV.PostAlarmLog(Module, $"can not run process,I valves is not open!"); // return Result.FAIL; //} //if (!PMDevice.CheckIOValueByGroup(IoGroupName.E, false)) //{ // EV.PostAlarmLog(Module, $"can not run process,E valves is not closed!"); // return Result.FAIL; //} //if (!PMDevice.CheckIOValueByGroup(IoGroupName.K, false)) //{ // EV.PostAlarmLog(Module, $"can not run process,K valves is not closed!"); // return Result.FAIL; //} //if (!PMDevice.CheckIOValueByGroup(IoGroupName.VentPump, true)) //{ // EV.PostAlarmLog(Module, $"can not run process,V72 is not open!"); // return Result.FAIL; //} //if (!PMDevice.PSU1.AllHeatEnable) //{ // EV.PostAlarmLog(Module, $"can not run process,Heater is disable!"); // return Result.FAIL; //} if (!_pmInterLock.SetPMPreProcessRunning(true, out reason)) { EV.PostAlarmLog(Module, $"can not run preProcess, {reason}"); return Result.FAIL; } _isDryRun = SC.GetValue($"PM.{Module}.DryRun.IsDryRun"); _delayTimeRamp = SC.GetValue($"PM.{Module}.PreProcess.RampDelayTime"); _targetPressure = SC.GetValue($"PM.{Module}.PreProcess.ChamberPressure"); _pmServoToPressure.Init(_targetPressure); _guidProcess = Guid.NewGuid(); PmDevice.RecipeRunningInfo.RecipeName = _recipeName; PmDevice.RecipeRunningInfo.Head = recipeHead; PmDevice.RecipeRunningInfo.RecipeStepList = recipeSteps; Notify($"Start"); return Result.RUN; } public override Result Monitor() { try { // // ExecuteRoutine((int)RoutineStep.SetChamberPressure, _pmServoToPressure); // // EnableRotation((int)RoutineStep.EnableRotation, 5); // // OpenH2Valve((int)RoutineStep.OpenH2Valve, PMDevice, 2); // // EnableHeater((int)RoutineStep.EnableHeater, PMDevice, 5); //ExecuteRoutine((int)RoutineStep.PcCalibartion, _pmPcCalibrationRoutine); //NoteInProcess((int)Routine.NoteInProcess,0); //if (_isSlitDoorOpened) //ExecuteRoutine((int)Routine.CloseSlitValve, _closeSlitValveRoutine); //关闭所有阀门 // CloseAllValves((int)Routine.CloseAllVavle, 10); //if (!_isATMMode) //{ // // ExecuteRoutine((int)Routine.Pump, _pumptRoutine); // //SetThrottlePressureControlMode((int)Routine.SetThrottlePressureControlMode, _throttleValve); //} //End((int)Routine.End, "Preprocess finished"); //NoteProcessComplete((int)Routine.NoteProcessComplete, 0); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { //NoteProcessFailed((int)Routine.NoteProcessFailed); return Result.FAIL; } catch (Exception ex) { LOG.Write(ex, String.Format("Preprocess Monitor has exception")); throw (ex); } _pmInterLock.SetPMPreProcessRunning(false, out string reason); Notify("Finished"); return Result.DONE; } protected void EnableHeater(int id, PMModuleBase pm, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {pm.Name} Heater Enable"); if (!pm.EnableHeater(true, out string reason)) { Stop($"Set {pm.Name} Heater Enable failed, {reason}"); return false; } return true; }, () => { return pm.CheckHeaterEnable(); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } if (ret.Item2 == Result.TIMEOUT) { Stop($"Set {pm.Name} Heater Enable timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void RunStepOne(int id, PMModuleBase pm, int delayTime) { Tuple ret = Execute(id, () => { Notify($"Run {pm.Name} recipe step one"); string reason = string.Empty; //执行工艺程序命令 foreach (var recipeCmd in PmDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands.Keys) { if (recipeCmd == "SusHeaterSetMode") { if (PmDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd] == "Jump") _isPSUHeaterJumpMode = true; else _isPSUHeaterJumpMode = false; continue; } if (recipeCmd == "WWHeaterSetMode") { if (PmDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd] == "Jump") _isSCRHeaterJumpMode = true; else _isSCRHeaterJumpMode = false; continue; } if (recipeCmd == "FlowSetMode") { if (PmDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd] == "Jump") _isMFCJumpMode = true; else _isMFCJumpMode = false; continue; } if (IsCmdSkip(recipeCmd)) continue; if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out reason, PmDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd])) { Stop($"Can not execute {recipeCmd}, {reason}"); return false; } else { int time = delayTime * 1000; if (recipeCmd.StartsWith("TC1") && _isPSUHeaterJumpMode) { time = 1; } if (recipeCmd.StartsWith("TC2") && _isSCRHeaterJumpMode) { time = 1; } if (recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp") && _isMFCJumpMode) { time = 1; } //if (recipeCmd == "Pressure5.Ramp") //{ // double pc5Pressure = Convert.ToDouble(PMDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd]) + _pc5Offset; // OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, pc5Pressure.ToString()); //} //else if (recipeCmd == "Pressure6.Ramp") //{ // double pc6Pressure = Convert.ToDouble(PMDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd]) + _pc6Offset; // OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, pc6Pressure.ToString()); //} //else if (recipeCmd == "Pressure7.Ramp") //{ // double pc7Pressure = Convert.ToDouble(PMDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd]) + _pc7Offset; // OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, pc7Pressure.ToString()); //} //else { OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, PmDevice.RecipeRunningInfo.RecipeStepList[0].RecipeCommands[recipeCmd]); } } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } public void Wait(int id, string stepName, int delayTime) { Tuple ret = Delay(id, () => { Notify($"Wait for {delayTime} seconds"); _stepSpan = new TimeSpan(0, 0, 0, (int)delayTime); _stepStartTime = DateTime.Now; _stepName = stepName; return true; }, delayTime * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void CheckCondition(int id, PMModuleBase pm, Dictionary recipeCommands) { //Tuple ret = Execute(id, () => //{ // Notify($"Run {pm.Name} check condition"); // if (!pm.CheckPreProcessCondition(recipeCommands, out string reason)) // { // Stop(reason); // return false; // } // return true; //}); //if (ret.Item1) //{ // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else // { // throw (new RoutineBreakException()); // } //} string reason = String.Empty; Tuple ret = Wait(id, () => { if (!pm.CheckPreProcessCondition(recipeCommands, out reason)) { return false; } return true; }, 60 * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { Stop(reason); throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop(reason); throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void NoteInProcess(int id, int slot) { Tuple ret = Execute(id, () => { Notify($"Update process information, process in {ModuleName.PM1} start"); ModuleName mod = ModuleName.PM1; WaferManager.Instance.UpdateWaferProcessStatus(mod, slot, EnumWaferProcessStatus.InProcess); //_pm.OnProcessStart(_guidProcess.ToString(), _recipeName, false); return true; }); if (ret.Item1) { throw (new RoutineBreakException()); } } protected void NoteProcessComplete(int id, int slot) { Tuple ret = Execute(id, () => { Notify($"Update process information, process in {ModuleName.PM1} completed"); ModuleName mod = ModuleName.PM1; WaferManager.Instance.UpdateWaferProcessStatus(mod, slot, EnumWaferProcessStatus.Completed); return true; }); if (ret.Item1) { throw (new RoutineBreakException()); } } public void Exit() { } public override void Abort() { _pmInterLock.SetPMPreProcessRunning(false, out string reason); PmDevice.AbortRunProcess(out reason); //_pm.StopAllGasFlow(out string reason); //_pm.SetPowerOnOff(false, out reason); //_pm.SetPower(0, false); //_pm.CloseValvesForPumping(out reason); //_executor.RecipeRunningInfo.Step = 0; //_executor.RecipeRunningInfo.ElapsedTime = 0; } } }