using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using System; using System.Diagnostics; namespace Mainframe.Aligners { public class AlignerAlignRoutine :AlignerBaseRoutine { enum RoutineStep { CheckWafer, OpenVacuum, MoveToMeasure, Aligner, CloseVacuum, TimeDelay1, } private Stopwatch _swTimer = new Stopwatch(); private int _alignerTimeOut = 60; public AlignerAlignRoutine() { Module = ModuleName.Aligner.ToString(); Name = "Align"; } public override Result Start(params object[] objs) { Reset(); _swTimer.Restart(); _alignerTimeOut= SC.GetValue("HiWinAligner.AlignerTimeout"); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { if (SC.GetValue($"System.IsSimulatorMode")) { TimeDelay((int)RoutineStep.TimeDelay1, 3); return Result.DONE; } CheckHaveWafer((int)RoutineStep.CheckWafer, 10); OpenVacuum((int)RoutineStep.OpenVacuum, 3); //移动到测量中心 AlignerMoveToMeasure((int)RoutineStep.MoveToMeasure, 20); DoAliger((int)RoutineStep.Aligner, _alignerTimeOut); CloseVacuum((int)RoutineStep.CloseVacuum, 3); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); return Result.DONE; } } }