1139 lines
52 KiB
C#
1139 lines
52 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Diagnostics.Eventing.Reader;
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using Aitex.Core.Backend;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Log;
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using Aitex.Core.Util;
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using Aitex.Core.WCF;
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using MECF.Framework.Common.PLC;
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using SicSimulator.Views;
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namespace SicSimulator.Instances
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{
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public class SimulatorSystem : Singleton<SimulatorSystem>
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{
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private PeriodicJob _thread;
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Random _rd = new Random();
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public SimulatorSystem()
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{
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}
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public void Initialize()
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{
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SetDefaultValue("PM1");
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SetDefaultValue("PM2");
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SetTMDefaultValue("TM");
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Singleton<DataManager>.Instance.Initialize(false);
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WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorAdsPlcService) });
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_thread = new PeriodicJob(200, OnMonitor, nameof(SimulatorSystem), true);
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}
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private void SetTMDefaultValue(string mod)
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{
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IO.DI["DI_LoadLifterCYDown"].Value = true;
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IO.DI["DI_UnloadStationLifterCYDown"].Value = true;
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IO.DI["DI_LoadWafeCYOpened"].Value = true;
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IO.DI["DI_LoadTrayCYOpend"].Value = true;
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IO.DI["DI_UnloadStationWaferCYOpened"].Value = true;
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IO.DI["DI_LoadLeftGateINTK"].Value = false;
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IO.DI["DI_LoadRightGateINTK"].Value = false;
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IO.DI["DI_LdRotationMoveDone"].Value = true;
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IO.DI["DI_TMDryPump1Alarm"].Value = true;
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IO.DI["DI_TMDryPump1Warning"].Value = true;
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IO.DI["DI_TMDryPump1Running"].Value = true;
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IO.DI["DI_TMDryPump2Alarm"].Value = true;
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IO.DI["DI_TMDryPump2Warning"].Value = true;
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IO.DI["DI_TMDryPump2Running"].Value = true;
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IO.DI["DI_LoadDoorClosed"].Value = true;
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IO.DI["DI_ReactorADoorClosed"].Value = true;
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IO.DI["DI_RobotOnBackPos"].Value = true;
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IO.AI["AI_TMPressure1"].Value = 320;
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IO.AI["AI_LoadPressure"].Value = 1020;
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IO.AI["AI_UnloadPressure"].Value = 300;
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IO.DI["DI_TMPressure1VAC"].Value = true;
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//SlitValve
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IO.DI["DI_LoadDoorClosed"].Value = true;
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IO.DI["DI_ReactorADoorClosed"].Value = true;
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IO.DI["DI_ReactorBDoorClosed"].Value = true;
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IO.DI["DI_UnloadStationDoorClosed"].Value = true;
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IO.DI["DI_BufferStationDoorClosed"].Value = true;
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IO.DI["DI_UnloadSubStationDoorClosed"].Value = true;
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IO.DI["DI_LoadLSideDoorClosed"].Value = true;
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IO.DI["DI_LoadRSideDoorClosed"].Value = true;
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IO.DI["DI_LoadDoorOpened"].Value = false;
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IO.DI["DI_ReactorADoorOpened"].Value = false;
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IO.DI["DI_ReactorBDoorOpened"].Value = false;
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IO.DI["DI_BufferStationDoorOpened"].Value = false;
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IO.DI["DI_UnloadStationDoorOpened"].Value = false;
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IO.DI["DI_UnloadSubStationDoorOpened"].Value = false;
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IO.DI["DI_LoadLSideDoorOpened"].Value = false;
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IO.DI["DI_LoadRSideDoorOpened"].Value = false;
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//Lid
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IO.DI["DI_TMLidClosed"].Value = true;
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IO.DI["DI_LoadLidClosed"].Value = true;
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IO.DI["DI_BufferStationLidClosed"].Value = true;
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IO.DI["DI_UnloadStationLidClosed"].Value = true;
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IO.DI["DI_WaferCassetLeftInch6"].Value = true;
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IO.DI["DI_WaferCassetRightInch6"].Value = true;
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IO.DI["DI_TrayCassetInch6"].Value = true;
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IO.DI["DI_LdRotationBusy"].Value = false;
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IO.DO["DO_LdRotationServoOn"].Value = true;
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IO.DI["DI_LdRotationServoOn"].Value = true;
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}
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private void SetDefaultValue(string mod)
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{
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IO.DI[$"{mod}.DI_ConfinementRingDone"].Value = true;
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IO.DI[$"{mod}.DI_DryPumpAlarm"].Value = true;
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IO.DI[$"{mod}.DI_DryPump1Warning"].Value = true;
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IO.DI[$"{mod}.DI_DryPump1Running"].Value = true;
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IO.DI[$"{mod}.DI_ServoReady"].Value = true;
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IO.AI[$"{mod}.AI_ForelinePress"].FloatValue = 310.010f;
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IO.AI[$"{mod}.AI_ChamPress"].FloatValue = 310.010f;
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IO.AI[$"{mod}.AI_ActualPressure"].FloatValue = 310.010f;
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IO.DI[$"{mod}.DI_EPV2-1FB"].Value = true;
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IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true;
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IO.DI[$"{mod}.DI_HeaterTempUpLimitSW"].Value = false;
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IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_DryPump1Running"].Value = true;
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IO.DI[$"{mod}.DI_ChamLidPushButtonLocal"].Value = true;
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IO.DI[$"{mod}.DI_ChamMoveBodyDown"].Value = true;
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IO.DI[$"{mod}.DI_ChamMoveBodyFront"].Value = true;
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IO.DI[$"{mod}.DI_ChamMoveBodyUpLatchFW"].Value = false;
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IO.DI[$"{mod}.DI_ChamMoveBodyEndLatchBW"].Value = true;
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IO.DI[$"{mod}.DI_SHLidClosed"].Value = true;
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IO.DI[$"{mod}.DI_MiddleLidClosed"].Value = true;
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IO.DI[$"{mod}.DI_SHLidTighten"].Value = true;
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IO.DI[$"{mod}.DI_MiddleLidTighten"].Value = true;
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IO.DI[$"{mod}.DI_SHLidSwingLock"].Value = true;
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IO.DI[$"{mod}.DI_MiddleLidSwingLock"].Value = true;
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IO.DI[$"{mod}.DI_ConfinementRingDown"].Value = true;
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IO.DI[$"{mod}.DI_SHGasConnectorLoosen"].Value = false;
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IO.DI[$"{mod}.DI_SHGasConnectorTighten"].Value = true;
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IO.DO[$"{mod}.DO_CleanRoutineSucceed"].Value = true;
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IO.DI[$"{mod}.DI_PSUEnableFB"].Value = true;
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IO.AO[$"{mod}.AO_ValveModeSetpoint"].FloatValue = (float)2.222;
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IO.DI[$"{mod}.DI_ChamLidClosed"].Value = true;
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IO.DI[$"{mod}.DI_ChamCabDoorClosed"].Value = true;
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IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true;
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IO.DI[$"{mod}.DI_ChamAtSafeProcessPressSW"].Value = false;
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IO.DI[$"{mod}.DI_DORPressATMSW"].Value = false;
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IO.DI[$"{mod}.DI_HeaterTempLowLimitSW"].Value = true;
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IO.DI[$"{mod}.DI_ConfinementRingUp"].Value = true;
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IO.DI[$"{mod}.DI_SHFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_PowerRackExhaustDPSW"].Value = true;
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IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true;
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IO.DI[$"{mod}.DI_ChamBottomFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_PowerRod1FlowSW"].Value = true;
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IO.DI[$"{mod}.DI_PowerRod2FlowSW"].Value = true;
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IO.DI[$"{mod}.DI_ForelineFlow2SW"].Value = true;
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IO.DI[$"{mod}.DI_ElectrodeWFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_TMPumpFIowSW"].Value = true;
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IO.DI[$"{mod}.DI_TransformerFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_GBH2DetectorSW"].Value = true;
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IO.DI[$"{mod}.DI_GBHCLDetectorSW"].Value = true;
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IO.DI[$"{mod}.DI_GBDoorClosed"].Value = true;
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IO.DI[$"{mod}.DI_PumpExhaustPressSW"].Value = true;
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IO.DI[$"{mod}.DI_PMATMSW"].Value = true;
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IO.DI[$"{mod}.DI_ScrubberIntlkSW"].Value = true;
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IO.DI[$"{mod}.DI_FacilityIntlkSW"].Value = true;
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IO.DI[$"{mod}.DI_PowerRackWaterLeakSW"].Value = true;
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IO.DI[$"{mod}.DI_ChamBottomPlateSW"].Value = true;
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#region TC
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//IO.AI[$"{mod}.AI_L1WorkingOP"].FloatValue = 10;
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//IO.AI[$"{mod}.AI_L2WorkingOP"].FloatValue = 10;
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//IO.AI[$"{mod}.AI_L3WorkingOP"].FloatValue = 10;
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//IO.AI[$"{mod}.AI_L1PV"].FloatValue = 20;
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//IO.AI[$"{mod}.AI_L2PV"].FloatValue = 20;
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//IO.AI[$"{mod}.AI_L3PV"].FloatValue = 20;
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//IO.AI[$"{mod}.AI_L1TempHighAlarm"].FloatValue = 30;
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//IO.AI[$"{mod}.AI_L2TempHighAlarm"].FloatValue = 30;
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//IO.AI[$"{mod}.AI_L3TempHighAlarm"].FloatValue = 30;
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//IO.AI[$"{mod}.AI_L1TempLowAlarm"].FloatValue = 25;
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//IO.AI[$"{mod}.AI_L2TempLowAlarm"].FloatValue = 25;
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//IO.AI[$"{mod}.AI_L3TempLowAlarm"].FloatValue = 25;
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//IO.AO[$"{mod}.AO_L1LoopMode"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L2LoopMode"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L3LoopMode"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L1TargetSP"].FloatValue = 20;
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//IO.AO[$"{mod}.AO_L2TargetSP"].FloatValue = 20;
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//IO.AO[$"{mod}.AO_L3TargetSP"].FloatValue = 20;
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//IO.AO[$"{mod}.AO_L1TargetOP"].FloatValue = 30;
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//IO.AO[$"{mod}.AO_L2TargetOP"].FloatValue = 30;
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//IO.AO[$"{mod}.AO_L3TargetOP"].FloatValue = 30;
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//IO.AO[$"{mod}.AO_L1IPCST"].FloatValue = 40;
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//IO.AO[$"{mod}.AO_L2IPCST"].FloatValue = 40;
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//IO.AO[$"{mod}.AO_L3IPCST"].FloatValue = 40;
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//IO.AO[$"{mod}.AO_L1IPCST"].FloatValue = 70;
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//IO.AO[$"{mod}.AO_L2IPCST"].FloatValue = 70;
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//IO.AO[$"{mod}.AO_L3IPCST"].FloatValue = 70;
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//IO.AO[$"{mod}.AO_TCPyroMode"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L1TempHighLimit"].FloatValue = 90;
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//IO.AO[$"{mod}.AO_L2TempHighLimit"].FloatValue = 90;
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//IO.AO[$"{mod}.AO_L3TempHighLimit"].FloatValue = 90;
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//IO.AO[$"{mod}.AO_L1TempLowLimit"].FloatValue = 80;
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//IO.AO[$"{mod}.AO_L2TempLowLimit"].FloatValue = 80;
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//IO.AO[$"{mod}.AO_L3TempLowLimit"].FloatValue = 80;
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//IO.AI[$"{mod}.AI_L1WorkingOP2"].FloatValue = 10;
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//IO.AI[$"{mod}.AI_L2WorkingOP2"].FloatValue = 10;
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//IO.AI[$"{mod}.AI_L3WorkingOP2"].FloatValue = 10;
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//IO.AI[$"{mod}.AI_L1PV2"].FloatValue = 20;
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//IO.AI[$"{mod}.AI_L2PV2"].FloatValue = 20;
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//IO.AI[$"{mod}.AI_L3PV2"].FloatValue = 20;
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//IO.AI[$"{mod}.AI_L1TempHighAlarm2"].FloatValue = 30;
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//IO.AI[$"{mod}.AI_L2TempHighAlarm2"].FloatValue = 30;
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//IO.AI[$"{mod}.AI_L3TempHighAlarm2"].FloatValue = 30;
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//IO.AI[$"{mod}.AI_L1TempLowAlarm2"].FloatValue = 25;
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//IO.AI[$"{mod}.AI_L2TempLowAlarm2"].FloatValue = 25;
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//IO.AI[$"{mod}.AI_L3TempLowAlarm2"].FloatValue = 25;
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//IO.AO[$"{mod}.AO_L1LoopMode2"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L2LoopMode2"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L3LoopMode2"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L1TargetSP2"].FloatValue = 20;
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//IO.AO[$"{mod}.AO_L2TargetSP2"].FloatValue = 20;
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//IO.AO[$"{mod}.AO_L3TargetSP2"].FloatValue = 20;
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//IO.AO[$"{mod}.AO_L1TargetOP2"].FloatValue = 30;
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//IO.AO[$"{mod}.AO_L2TargetOP2"].FloatValue = 30;
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//IO.AO[$"{mod}.AO_L3TargetOP2"].FloatValue = 30;
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//IO.AO[$"{mod}.AO_L1RecipeValue2"].FloatValue = 40;
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//IO.AO[$"{mod}.AO_L2RecipeValue2"].FloatValue = 40;
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//IO.AO[$"{mod}.AO_L3RecipeValue2"].FloatValue = 40;
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//IO.AO[$"{mod}.AO_L1IPCST2"].FloatValue = 70;
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//IO.AO[$"{mod}.AO_L2IPCST2"].FloatValue = 70;
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//IO.AO[$"{mod}.AO_L3IPCST2"].FloatValue = 70;
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//IO.AO[$"{mod}.AO_TCPyroMode2"].FloatValue = 1;
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//IO.AO[$"{mod}.AO_L1TempHighLimit2"].FloatValue = 90;
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//IO.AO[$"{mod}.AO_L2TempHighLimit2"].FloatValue = 90;
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//IO.AO[$"{mod}.AO_L3TempHighLimit2"].FloatValue = 90;
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//IO.AO[$"{mod}.AO_L1TempLowLimit2"].FloatValue = 80;
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//IO.AO[$"{mod}.AO_L2TempLowLimit2"].FloatValue = 80;
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//IO.AO[$"{mod}.AO_L3TempLowLimit2"].FloatValue = 80;
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#endregion
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IO.DI[$"{mod}.DI_PMH2DetectorSW"].Value = true;
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IO.DI[$"{mod}.DI_ProcessStopSW"].Value = false;
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IO.DI[$"{mod}.DI_GBWaterLeakSW"].Value = true;
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IO.DI[$"{mod}.DI_MainCBStatusSW"].Value = true;
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IO.DI[$"{mod}.DI_ReactorWaterLeakSW"].Value = true;
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IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true;
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IO.DI[$"{mod}.DI_ChamMiddleFlow2SW"].Value = true;
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IO.DI[$"{mod}.DI_PumpExhaustDPSW"].Value = true;
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IO.DI[$"{mod}.DI_SpareSW"].Value = true;
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IO.DI[$"{mod}.DI_TMTopLidFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_H2PressureSW"].Value = true;
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IO.DI[$"{mod}.DI_TCSAlarm"].Value = true;
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IO.DI[$"{mod}.DI_GBExhaustDPSW"].Value = true;
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IO.DI[$"{mod}.DI_PMAExhaustDPSW"].Value = true;
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IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true;
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IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true;
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IO.DI[$"{mod}.DI_GN2InletPressSW"].Value = true;
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IO.DI[$"{mod}.DI_ArInletPressSW"].Value = true;
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IO.DI[$"{mod}.DI_FacilityWarningSW"].Value = true;
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//IO.DI[$"{mod}.DI_InletTotalTempHighSW"].Value = true;
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//IO.DI[$"{mod}.DI_DryPumpFlowSW"].Value = true;
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IO.DI[$"{mod}.DI_EMOStatusSW"].Value = true;
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IO.DO[$"{mod}.DO_UPSEnable"].Value = true;
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IO.DO[$"{mod}.DO_UPSLowBattery"].Value = true;
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IO.DI[$"{mod}.DI_SuspectorCheck"].Value = false;
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IO.DI[$"{mod}.DI_GasPipeTempCtrlAlarm"].Value = true;
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IO.DI[$"{mod}.DI_ConfinementRingServoOn"].Value = true;
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IO.DO[$"{mod}.DO_ConfinementRingServoOn"].Value = true;
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IO.DO[$"{mod}.DO_HeaterEnable"].Value = true;
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IO.DO[$"{mod}.DO_EPV2"].Value = true;
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IO.DI[$"{mod}.DI_ReactorHCLDetectorSW"].Value = true;
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//IO.DO[$"{mod}.DO_SHFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_ChamTopFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_ChamMiddleFlow1Temp"].Value = true;
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//IO.DO[$"{mod}.DO_ChamMiddleFlow2Temp"].Value = true;
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//IO.DO[$"{mod}.DO_ChamBottomFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_ChamBottomPlateTemp"].Value = true;
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//IO.DO[$"{mod}.DO_PowerRod1FlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_PowerRod2FlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_ForelineFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_ElectrodeWFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_TMPump1and2FlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_TransformerFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_TMTopLidFlowTemp"].Value = true;
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//IO.DO[$"{mod}.DO_TMBufferFlowTemp"].Value = true;
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}
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private bool OnMonitor()
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{
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try
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{
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MonitorPressureTM();
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MonitorPressureLoad();
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MonitorPressureUnLoad();
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MonitorSlitValveFlow();
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MonitorTMValve();
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MonitorPm("PM1");
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MonitorPm("PM2");
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MonitorValve("PM1");
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MonitorValve("PM2");
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MonitorFlowRamp("PM1");
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MonitorFlowRamp("PM2");
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MonitorGasConnector("PM1");
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MonitorLid("PM1");
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MonitorLidSwing("PM1");
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MonitorConfinementRing("PM1");
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MonitorGasConnector("PM2");
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MonitorLid("PM2");
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MonitorLidSwing("PM2");
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MonitorConfinementRing("PM2");
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MonitorChamberMoveBody("PM1");
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MonitorChamberMoveBodyUp("PM1");
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MonitorHeater("PM1");
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MonitorRotation("PM1");
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MonitorChamberMoveBody("PM2");
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MonitorChamberMoveBodyUp("PM2");
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MonitorHeater("PM2");
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MonitorRotation("PM2");
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}
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catch (Exception e)
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{
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LOG.Write(e);
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}
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return true;
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}
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void MonitorFlowRamp(string pm)
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{
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var rampList = new List<Tuple<string, string>>
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{
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new Tuple<string, string>(
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"AI_M1",
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"AO_M1"
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),
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new Tuple<string, string>(
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"AI_M2",
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"AO_M2"
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),
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new Tuple<string, string>("AI_M3","AO_M3"),
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new Tuple<string, string>("AI_M4","AO_M4"),
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new Tuple<string, string>("AI_M5","AO_M5"),
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new Tuple<string, string>("AI_M6","AO_M6"),
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new Tuple<string, string>("AI_M7","AO_M7"),
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new Tuple<string, string>("AI_M8","AO_M8"),
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new Tuple<string, string>("AI_M9","AO_M9"),
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new Tuple<string, string>("AI_M10","AO_M10"),
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new Tuple<string, string>("AI_M11","AO_M11"),
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new Tuple<string, string>("AI_M12","AO_M12"),
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new Tuple<string, string>("AI_M13","AO_M13"),
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new Tuple<string, string>("AI_M14","AO_M14"),
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new Tuple<string, string>("AI_M15","AO_M15"),
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new Tuple<string, string>("AI_M16","AO_M16"),
|
||
new Tuple<string, string>("AI_M19","AO_M19"),
|
||
new Tuple<string, string>("AI_M20","AO_M20"),
|
||
new Tuple<string, string>("AI_M22","AO_M22"),
|
||
new Tuple<string, string>("AI_M23","AO_M23"),
|
||
new Tuple<string, string>("AI_M25","AO_M25"),
|
||
new Tuple<string, string>("AI_M26","AO_M26"),
|
||
new Tuple<string, string>("AI_M27","AO_M27"),
|
||
new Tuple<string, string>("AI_M28","AO_M28"),
|
||
new Tuple<string, string>("AI_M29","AO_M29"),
|
||
new Tuple<string, string>("AI_M40","AO_M40"),
|
||
new Tuple<string, string>("AI_M31","AO_M31"),
|
||
new Tuple<string, string>("AI_M32","AO_M32"),
|
||
new Tuple<string, string>("AI_M33","AO_M33"),
|
||
|
||
new Tuple<string, string>("AI_M35","AO_M35"),
|
||
new Tuple<string, string>("AI_M36","AO_M36"),
|
||
new Tuple<string, string>("AI_M37","AO_M37"),
|
||
new Tuple<string, string>("AI_M38","AO_M38"),
|
||
|
||
new Tuple<string, string>("AI_PressCtrl1","AO_PressCtrl1"),
|
||
new Tuple<string, string>("AI_PressCtrl2","AO_PressCtrl2"),
|
||
new Tuple<string, string>("AI_PressCtrl3","AO_PressCtrl3"),
|
||
new Tuple<string, string>("AI_PressCtrl4","AO_PressCtrl4"),
|
||
new Tuple<string, string>("AI_PressCtrl5","AO_PressCtrl5"),
|
||
new Tuple<string, string>("AI_PressCtrl6","AO_PressCtrl6"),
|
||
new Tuple<string, string>("AI_PressCtrl7","AO_PressCtrl7"),
|
||
|
||
|
||
|
||
//new Tuple<string, string>(
|
||
// "AI_Gas2Flow",
|
||
// "AO_Gas2Flow"
|
||
//),
|
||
|
||
//new Tuple<string, string>(
|
||
// "AI_Gas3Flow",
|
||
// "AO_Gas3Flow"
|
||
//),
|
||
|
||
//new Tuple<string, string>(
|
||
// "AI_Gas4Flow",
|
||
// "AO_Gas4Flow"
|
||
//),
|
||
};
|
||
|
||
foreach (var item in rampList)
|
||
{
|
||
float setpoint = 0;
|
||
float result = 0;
|
||
float current = 0;
|
||
if (IO.AI[$"{pm}.{item.Item1}"] != null)
|
||
{
|
||
current = IO.AI[$"{pm}.{item.Item1}"].FloatValue;
|
||
setpoint = IO.AO[$"{pm}.{item.Item2}"].FloatValue;
|
||
}
|
||
|
||
|
||
if (current >= setpoint)
|
||
{
|
||
result = current - 50;
|
||
if (result < setpoint)
|
||
result = setpoint;
|
||
}
|
||
if (current < setpoint)
|
||
{
|
||
result = current + 50;
|
||
if (result > setpoint)
|
||
result = setpoint;
|
||
}
|
||
|
||
result = result + (float)_rd.NextDouble();
|
||
|
||
IO.AI[$"{pm}.{item.Item1}"].FloatValue = result;
|
||
}
|
||
}
|
||
public object locker = new object();
|
||
private void MonitorPm(string pm)
|
||
{
|
||
IO.AI[$"{pm}.AI_TVmode"].FloatValue = IO.AO[$"{pm}.AO_ValveModeSetpoint"].FloatValue;
|
||
IO.AI[$"{pm}.AI_HeartBeat"].FloatValue = IO.AO[$"{pm}.AO_HeartBeat"].FloatValue;
|
||
|
||
IO.AI[$"{pm}.AI_ActualPositon"].FloatValue = IO.AO[$"{pm}.AO_SetpointPositon"].FloatValue;
|
||
|
||
//蝶阀开启,跟着蝶阀的设置值走
|
||
if (IO.DO[$"{pm}.DO_TVEnable"].Value)
|
||
{
|
||
if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue > IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue)
|
||
{
|
||
if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue - 10 < IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue)
|
||
{
|
||
IO.AI[$"{pm}.AI_ActualPressure"].FloatValue -= 10;
|
||
}
|
||
else
|
||
{
|
||
IO.AI[$"{pm}.AI_ActualPressure"].FloatValue = IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue;
|
||
}
|
||
}
|
||
else if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue < IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue)
|
||
{
|
||
if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue + 10 < IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue)
|
||
{
|
||
IO.AI[$"{pm}.AI_ActualPressure"].FloatValue += 10;
|
||
}
|
||
else
|
||
{
|
||
IO.AI[$"{pm}.AI_ActualPressure"].FloatValue = IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue;
|
||
}
|
||
}
|
||
}
|
||
else
|
||
{
|
||
//判断是否有进气(V89到V97是否有开阀)
|
||
if (IO.DI[$"{pm}.DI_InnerGasFinalFB(V89)"].Value || IO.DI[$"{pm}.DI_MiddleGasFinalFB(V90)"].Value || IO.DI[$"{pm}.DI_OpticPurgeFinalFB(V91)"].Value || IO.DI[$"{pm}.DI_GasRingPurgeFinalFB(V92)"].Value
|
||
|| IO.DI[$"{pm}.DI_ChamberPurgeFinalFB(V93)"].Value || IO.DI[$"{pm}.DI_RotationUpPurgeFinalFB(V94)"].Value || IO.DI[$"{pm}.DI_ConfinementRingFinalFB(V95)"].Value || IO.DI[$"{pm}.DI_HeaterWFFinalFB(V96)"].Value)
|
||
{
|
||
if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue < 1200)
|
||
{
|
||
IO.AI[$"{pm}.AI_ActualPressure"].FloatValue += 10;
|
||
}
|
||
}
|
||
}
|
||
|
||
//蝶阀Ramp有Bug,设置AO值可以化解
|
||
if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue >= 1100)
|
||
{
|
||
IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue = IO.AI[$"{pm}.AI_ActualPressure"].FloatValue;
|
||
}
|
||
|
||
IO.AI[$"{pm}.AI_ChamPress"].FloatValue = IO.AI[$"{pm}.AI_ActualPressure"].FloatValue;
|
||
|
||
//V27自动打开
|
||
if (IO.AI[$"{pm}.AI_ChamPress"].FloatValue > 1020 && IO.DO[$"{pm}.DO_PumpBypass(V27)"].Value != true)
|
||
{
|
||
IO.DO[$"{pm}.DO_PumpBypass(V27)"].Value = true;
|
||
}
|
||
if (IO.AI[$"{pm}.AI_ChamPress"].FloatValue < 900 && IO.DO[$"{pm}.DO_PumpBypass(V27)"].Value)
|
||
{
|
||
IO.DO[$"{pm}.DO_PumpBypass(V27)"].Value = false;
|
||
}
|
||
|
||
//设置PT2的压力比PT1的小20
|
||
|
||
IO.AI[$"{pm}.AI_ForelinePress"].FloatValue = IO.AI[$"{pm}.AI_ChamPress"].FloatValue - 20 > 0 ? IO.AI[$"{pm}.AI_ChamPress"].FloatValue - 20 : 0;
|
||
|
||
}
|
||
|
||
private void MonitorPressureLoad()
|
||
{
|
||
IO.DI["DI_LoadPressureATM"].Value = IO.AI["AI_LoadPressure"].Value > 960;
|
||
IO.DI["DI_LoadPressureVAC"].Value = IO.AI["AI_LoadPressure"].Value < 310;
|
||
|
||
bool isSlowPum = IO.DI["DI_LoadSlowPumpFB"].Value;
|
||
bool isFastPump = IO.DI["DI_LoadFastPumpFB"].Value;
|
||
bool isSlowVent = IO.DI["DI_LoadVentFB"].Value;
|
||
|
||
//200毫秒调用一次，10秒内实现从0到1020
|
||
double pressure = IO.AI["AI_LoadPressure"].Value;
|
||
|
||
if (isFastPump || isSlowPum)
|
||
{
|
||
if (pressure > 350)
|
||
{
|
||
pressure -= 10;
|
||
}
|
||
else if (pressure >= 250 && pressure <= 350)
|
||
{
|
||
pressure -= 4;
|
||
}
|
||
else
|
||
{
|
||
pressure -= 10;
|
||
}
|
||
}
|
||
else if (isSlowVent)
|
||
{
|
||
if (pressure > 320)
|
||
{
|
||
pressure += 10;
|
||
}
|
||
else if (pressure >= 290 && pressure <= 320)
|
||
{
|
||
pressure += 1;
|
||
}
|
||
else
|
||
{
|
||
pressure += 10;
|
||
}
|
||
}
|
||
|
||
if (pressure < 0)
|
||
pressure = 0;
|
||
if (pressure > 1020)
|
||
pressure = 1020;
|
||
|
||
if (!isFastPump && pressure < 1)
|
||
pressure = 0;
|
||
|
||
IO.AI["AI_LoadPressure"].Value = Convert.ToInt16(pressure);
|
||
}
|
||
|
||
private void MonitorPressureUnLoad()
|
||
{
|
||
IO.DI["DI_UnloadSlowPumpFB"].Value = IO.DO["DO_UnloadSlowPump"].Value;
|
||
IO.DI["DI_UnloadFastPumpFB"].Value = IO.DO["DO_UnloadFastPump"].Value;
|
||
|
||
bool isSlowPum = IO.DI["DI_UnloadSlowPumpFB"].Value;
|
||
bool isFastPump = IO.DI["DI_UnloadFastPumpFB"].Value;
|
||
bool isSlowVent = IO.DI["DI_UnloadVentFB"].Value;
|
||
|
||
//200毫秒调用一次
|
||
double pressure = IO.AI["AI_UnloadPressure"].Value;
|
||
|
||
if (isFastPump || isSlowPum)
|
||
{
|
||
if (pressure > 400)
|
||
{
|
||
pressure -= 10;
|
||
}
|
||
else if (pressure >= 300 && pressure <= 400)
|
||
{
|
||
pressure -= 4;
|
||
}
|
||
else
|
||
{
|
||
pressure -= 10;
|
||
}
|
||
}
|
||
else if (isSlowVent)
|
||
{
|
||
if (pressure > 320)
|
||
{
|
||
pressure += 10;
|
||
}
|
||
else if (pressure >= 290 && pressure <= 320)
|
||
{
|
||
pressure += 1;
|
||
}
|
||
else
|
||
{
|
||
pressure += 10;
|
||
}
|
||
}
|
||
|
||
if (pressure < 0)
|
||
pressure = 0;
|
||
if (pressure > 1020)
|
||
pressure = 1020;
|
||
|
||
if (!isFastPump && pressure < 1)
|
||
pressure = 0;
|
||
|
||
IO.AI["AI_UnloadPressure"].Value = Convert.ToInt16(pressure);
|
||
}
|
||
|
||
private void MonitorPressureTM()
|
||
{
|
||
IO.DI["DI_LdRotationServoOn"].Value = IO.DO["DO_LdRotationServoOn"].Value;
|
||
|
||
IO.DI["DI_TMPressure1ATM"].Value = IO.AI["AI_TMPressure1"].Value>960;
|
||
IO.DI["DI_TMPressure1VAC"].Value = IO.AI["AI_TMPressure1"].Value < 310;
|
||
|
||
bool isSlowPum = IO.DI["DI_TMSlowPumpFB"].Value;
|
||
bool isSlowVent = IO.DI["DI_TMVentFB"].Value;
|
||
bool isFastPump = IO.DI["DI_TMFastPumpFB"].Value;
|
||
|
||
if (IO.DI["DI_ReactorADoorOpened"].Value || IO.DI["PM1.DI_TMPressBalanceFB(V70)"].Value)
|
||
{
|
||
IO.AI["AI_TMPressure1"].Value = Convert.ToInt16(IO.AI[$"PM1.AI_ChamPress"].FloatValue);
|
||
return;
|
||
}
|
||
if (IO.DI["DI_ReactorBDoorOpened"].Value || IO.DI["PM2.DI_TMPressBalanceFB(V70)"].Value)
|
||
{
|
||
IO.AI["AI_TMPressure1"].Value = Convert.ToInt16(IO.AI[$"PM2.AI_ChamPress"].FloatValue);
|
||
return;
|
||
}
|
||
else if(IO.DI["DI_TMLoadBanlanceFB"].Value)
|
||
{
|
||
IO.AI["AI_LoadPressure"].Value = IO.AI["AI_TMPressure1"].Value;
|
||
}
|
||
else if (IO.DI["DI_TMToUnloadBanlanceFB"].Value)
|
||
{
|
||
IO.AI["AI_TMPressure1"].Value = IO.AI["AI_UnloadPressure"].Value;
|
||
}
|
||
else
|
||
{
|
||
//200毫秒调用一次
|
||
double pressure = IO.AI["AI_TMPressure1"].Value;
|
||
|
||
if (isFastPump || isSlowPum)
|
||
{
|
||
if (pressure > 350)
|
||
{
|
||
pressure -= 10;
|
||
}
|
||
else if (pressure >= 250 && pressure <= 350)
|
||
{
|
||
pressure -= 4;
|
||
}
|
||
else
|
||
{
|
||
pressure -= 10;
|
||
}
|
||
}
|
||
else if (isSlowVent)
|
||
{
|
||
if (pressure > 320)
|
||
{
|
||
pressure += 10;
|
||
}
|
||
else if (pressure >= 290 && pressure <= 320)
|
||
{
|
||
pressure += 1;
|
||
}
|
||
else
|
||
{
|
||
pressure += 10;
|
||
}
|
||
}
|
||
|
||
if (pressure < 0)
|
||
pressure = 0;
|
||
if (pressure > 1020)
|
||
pressure = 1020;
|
||
|
||
if (!isFastPump && pressure < 1)
|
||
pressure = 0;
|
||
|
||
IO.AI["AI_TMPressure1"].Value = Convert.ToInt16(pressure);
|
||
|
||
if (IO.AI["AI_LoadPressure"].FloatValue > 960)
|
||
{
|
||
IO.DI["DI_LoadPressureATM"].Value = true;
|
||
}
|
||
else
|
||
{
|
||
IO.DI["DI_LoadPressureATM"].Value = false;
|
||
}
|
||
|
||
if (IO.AI["AI_TMPressure1"].FloatValue > 960)
|
||
{
|
||
IO.DI["DI_TMPressure1ATM"].Value = false; //此信号是反过来的
|
||
}
|
||
else
|
||
{
|
||
IO.DI["DI_TMPressure1ATM"].Value = true;
|
||
}
|
||
}
|
||
}
|
||
|
||
private void MonitorSlitValveFlow()
|
||
{
|
||
|
||
if (IO.DO["DO_LoadDoorClose"].Value != IO.DO["DO_LoadDoorOpen"].Value)
|
||
{
|
||
IO.DI["DI_LoadDoorOpened"].Value = IO.DO["DO_LoadDoorOpen"].Value;
|
||
IO.DI["DI_LoadDoorClosed"].Value = IO.DO["DO_LoadDoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_RectorADoorClose"].Value != IO.DO["DO_RectorADoorOpen"].Value)
|
||
{
|
||
IO.DI["DI_ReactorADoorOpened"].Value = IO.DO["DO_RectorADoorOpen"].Value;
|
||
IO.DI["DI_ReactorADoorClosed"].Value = IO.DO["DO_RectorADoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_RectorBDoorClose"].Value != IO.DO["DO_RectorBDoorOpen"].Value)
|
||
{
|
||
IO.DI["DI_ReactorBDoorOpened"].Value = IO.DO["DO_RectorBDoorOpen"].Value;
|
||
IO.DI["DI_ReactorBDoorClosed"].Value = IO.DO["DO_RectorBDoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_UnloadStationDoorOpen"].Value != IO.DO["DO_UnloadStationDoorClose"].Value)
|
||
{
|
||
IO.DI["DI_UnloadStationDoorOpened"].Value = IO.DO["DO_UnloadStationDoorOpen"].Value;
|
||
IO.DI["DI_UnloadStationDoorClosed"].Value = IO.DO["DO_UnloadStationDoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_BufferStationDoorOpen"].Value != IO.DO["DO_BufferStationDoorClose"].Value)
|
||
{
|
||
IO.DI["DI_BufferStationDoorOpened"].Value = IO.DO["DO_BufferStationDoorOpen"].Value;
|
||
IO.DI["DI_BufferStationDoorClosed"].Value = IO.DO["DO_BufferStationDoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_UnloadSubStationDoorOpen"].Value != IO.DO["DO_UnloadSubStationDoorClose"].Value)
|
||
{
|
||
IO.DI["DI_UnloadSubStationDoorOpened"].Value = IO.DO["DO_UnloadSubStationDoorOpen"].Value;
|
||
IO.DI["DI_UnloadSubStationDoorClosed"].Value = IO.DO["DO_UnloadSubStationDoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_LoadLSideDoorOpen"].Value != IO.DO["DO_LoadLSideDoorClose"].Value)
|
||
{
|
||
IO.DI["DI_LoadLSideDoorOpened"].Value = IO.DO["DO_LoadLSideDoorOpen"].Value;
|
||
IO.DI["DI_LoadLSideDoorClosed"].Value = IO.DO["DO_LoadLSideDoorClose"].Value;
|
||
}
|
||
|
||
if (IO.DO["DO_LoadRSideDoorOpen"].Value != IO.DO["DO_LoadRSideDoorClose"].Value)
|
||
{
|
||
IO.DI["DI_LoadRSideDoorOpened"].Value = IO.DO["DO_LoadRSideDoorOpen"].Value;
|
||
IO.DI["DI_LoadRSideDoorClosed"].Value = IO.DO["DO_LoadRSideDoorClose"].Value;
|
||
}
|
||
}
|
||
|
||
|
||
private int time1 = 0;
|
||
private int time2 = 0;
|
||
private int time3 = 0;
|
||
private int time4 = 0;
|
||
private int time5 = 0;
|
||
|
||
private void MonitorTMValve()
|
||
{
|
||
IO.DI["DI_VacRobotExtendBufferEnableFB"].Value = IO.DO["DO_VacRobotExtendBufferEnable"].Value;
|
||
IO.DI["DI_VacRobotExtenLoadEnableFB"].Value = IO.DO["DO_VacRobotExtenLoadEnable"].Value;
|
||
IO.DI["DI_VacRobotExtendPMAEnableFB"].Value = IO.DO["DO_VacRobotExtendPMAEnable"].Value;
|
||
IO.DI["DI_VacRobotExtendPMBEnableFB"].Value = IO.DO["DO_VacRobotExtendPMBEnable"].Value;
|
||
IO.DI["DI_VacRobotExtendUnloadEnableFB"].Value = IO.DO["DO_VacRobotExtendUnloadEnable"].Value;
|
||
|
||
|
||
IO.DI["DI_ATMRobotExtendUnloadEnableFB"].Value = IO.DO["DO_ATMRobotExtendUnloadEnable"].Value;
|
||
IO.DI["DI_ATMRobotExtendLoadLSideEnableFB"].Value = IO.DO["DO_ATMRobotExtendLoaLSideEnable"].Value;
|
||
IO.DI["DI_ATMRobotExtendLoadRSideEnableFB"].Value = IO.DO["DO_ATMRobotExtendLoaRSideEnable"].Value;
|
||
|
||
|
||
IO.DI["DI_LoadSlowPumpFB"].Value = IO.DO["DO_LoadSlowPump"].Value;
|
||
IO.DI["DI_LoadFastPumpFB"].Value = IO.DO["DO_LoadFastPump"].Value;
|
||
IO.DI["DI_TMSlowPumpFB"].Value = IO.DO["DO_TMSlowPump"].Value;
|
||
IO.DI["DI_TMFastPumpFB"].Value = IO.DO["DO_TMFastPump"].Value;
|
||
IO.DI["DI_BufferVentFB"].Value = IO.DO["DO_BufferVent"].Value;
|
||
IO.DI["DI_LoadVentFB"].Value = IO.DO["DO_LoadVent"].Value;
|
||
IO.DI["DI_TMVentFB"].Value = IO.DO["DO_TMVent"].Value;
|
||
IO.DI["DI_UnloadVentFB"].Value = IO.DO["DO_UnloadVent"].Value;
|
||
IO.DI["DI_TMLoadBanlanceFB"].Value = IO.DO["DO_TMLoadBanlance"].Value;
|
||
|
||
|
||
IO.DI["DI_VacRobotExtenLoadEnableFB"].Value = IO.DO["DO_VacRobotExtenLoadEnable"].Value;
|
||
IO.DI["DI_VacRobotExtendBufferEnableFB"].Value = IO.DO["DO_VacRobotExtendBufferEnable"].Value;
|
||
IO.DI["DI_VacRobotExtendPMAEnableFB"].Value = IO.DO["DO_VacRobotExtendPMAEnable"].Value;
|
||
|
||
|
||
if (IO.DO["DO_LoadLifterCYUp"].Value != IO.DO["DO_LoadLifterCYDown"].Value)
|
||
{
|
||
time1++;
|
||
if (time1 > 10)
|
||
{
|
||
time1 = 0;
|
||
IO.DI["DI_LoadLifterCYUp"].Value = IO.DO["DO_LoadLifterCYUp"].Value;
|
||
IO.DI["DI_LoadLifterCYDown"].Value = IO.DO["DO_LoadLifterCYDown"].Value;
|
||
}
|
||
}
|
||
if (IO.DO["DO_LoadWaferCYClamp"].Value != IO.DO["DO_LoadWaferCYOpen"].Value)
|
||
{
|
||
time2++;
|
||
if (time2 > 10)
|
||
{
|
||
time2 = 0;
|
||
IO.DI["DI_LoadWaferCYClamped"].Value = IO.DO["DO_LoadWaferCYClamp"].Value;
|
||
IO.DI["DI_LoadWafeCYOpened"].Value = IO.DO["DO_LoadWaferCYOpen"].Value;
|
||
}
|
||
}
|
||
if (IO.DO["DO_LoadTrayCYClamp"].Value != IO.DO["DO_LoadTrayCYOpen"].Value)
|
||
{
|
||
time3++;
|
||
if (time3 > 10)
|
||
{
|
||
time3 = 0;
|
||
IO.DI["DI_LoadTrayCYClamped"].Value = IO.DO["DO_LoadTrayCYClamp"].Value;
|
||
IO.DI["DI_LoadTrayCYOpend"].Value = IO.DO["DO_LoadTrayCYOpen"].Value;
|
||
}
|
||
}
|
||
if (IO.DO["DO_UnloadStationWaferCYClamp"].Value != IO.DO["DO_UnloadStationWaferCYOpen"].Value)
|
||
{
|
||
time4++;
|
||
if (time4 > 10)
|
||
{
|
||
time4 = 0;
|
||
IO.DI["DI_UnloadStationWaferCYClamped"].Value = IO.DO["DO_UnloadStationWaferCYClamp"].Value;
|
||
IO.DI["DI_UnloadStationWaferCYOpened"].Value = IO.DO["DO_UnloadStationWaferCYOpen"].Value;
|
||
}
|
||
}
|
||
if (IO.DO["DO_UnloadStationLifterCYUp"].Value != IO.DO["DO_UnloadStationLifterCYDown"].Value)
|
||
{
|
||
time5++;
|
||
if (time5 > 10)
|
||
{
|
||
time5 = 0;
|
||
IO.DI["DI_UnloadStationLifterCYUp"].Value = IO.DO["DO_UnloadStationLifterCYUp"].Value;
|
||
IO.DI["DI_UnloadStationLifterCYDown"].Value = IO.DO["DO_UnloadStationLifterCYDown"].Value;
|
||
}
|
||
}
|
||
|
||
//IO.DI["DI_LdRotationServoOn"].Value = IO.DO["DO_LdRotationServoOn"].Value;
|
||
|
||
}
|
||
|
||
private void MonitorValve(string pm)
|
||
{
|
||
|
||
IO.DI[$"{pm}.DI_DORPressATMSW"].Value = IO.DI[$"{pm}.DI_DORRefillFB(V76)"].Value;
|
||
IO.DI[$"{pm}.DI_PSUEnableFB"].Value = IO.DO[$"{pm}.DO_HeaterEnable"].Value;
|
||
|
||
IO.DI[$"{pm}.DI_InnerHeaterEnableFB"].Value = IO.DO[$"{pm}.DO_PSU1Enable"].Value;
|
||
IO.DI[$"{pm}.DI_MiddleHeaterEnableFB"].Value = IO.DO[$"{pm}.DO_PSU2Enable"].Value;
|
||
IO.DI[$"{pm}.DI_OuterHeaterEnableFB"].Value = IO.DO[$"{pm}.DO_PSU3Enable"].Value;
|
||
|
||
//IO.DI[$"{pm}.DI_SCR1Status"].Value = IO.DO[$"{pm}.DO_SCR1Enable"].Value;
|
||
//IO.DI[$"{pm}.DI_SCR2Status"].Value = IO.DO[$"{pm}.DO_SCR2Enable"].Value;
|
||
//IO.DI[$"{pm}.DI_SCR3Status"].Value = IO.DO[$"{pm}.DO_SCR3Enable"].Value;
|
||
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyUpDownEnableFB"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyUpDownEnable"].Value;
|
||
|
||
IO.DI[$"{pm}.DI_PumpBypassFB(V27)"].Value = IO.DO[$"{pm}.DO_PumpBypass(V27)"].Value;
|
||
IO.DI[$"{pm}.DI_H2SupplyFB(V31)"].Value = IO.DO[$"{pm}.DO_H2Supply(V31)"].Value;
|
||
IO.DI[$"{pm}.DI_ArSupplyFB(V32)"].Value = IO.DO[$"{pm}.DO_ArSupply(V32)"].Value;
|
||
IO.DI[$"{pm}.DI_SHH2/ArSwitchFB(V33)"].Value = IO.DO[$"{pm}.DO_SHH2/ArSwitch(V33)"].Value;
|
||
IO.DI[$"{pm}.DI_H2ArLine1FB(V35)"].Value = IO.DO[$"{pm}.DO_H2ArLine1(V35)"].Value;
|
||
IO.DI[$"{pm}.DI_H2ArLine2FB(V36)"].Value = IO.DO[$"{pm}.DO_H2ArLine2(V36)"].Value;
|
||
//IO.DI[$"{pm}.DI_DoppingDilute_FB"].Value = IO.DO[$"{pm}.DO_HighN2Flow"].Value;
|
||
IO.DI[$"{pm}.DI_DilutedN2Run/VentFB(V39)"].Value = IO.DO[$"{pm}.DO_DilutedN2Run/Vent(V39)"].Value;
|
||
IO.DI[$"{pm}.DI_HighN2Run/VentFB(V40)"].Value = IO.DO[$"{pm}.DO_HighN2Run/Vent(V40)"].Value;
|
||
IO.DI[$"{pm}.DI_TMARunFB(V41)"].Value = IO.DO[$"{pm}.DO_TMARun(V41)"].Value;
|
||
IO.DI[$"{pm}.DI_TMAVentFB(V42)"].Value = IO.DO[$"{pm}.DO_TMAVent(V42)"].Value;
|
||
IO.DI[$"{pm}.DI_TMAReleaseFB(V43)"].Value = IO.DO[$"{pm}.DO_TMARelease(V43)"].Value;
|
||
IO.DI[$"{pm}.DI_TMABypassFB(V45)"].Value = IO.DO[$"{pm}.DO_TMABypass(V45)"].Value;
|
||
IO.DI[$"{pm}.DI_TMAVacFB(V46)"].Value = IO.DO[$"{pm}.DO_TMAVac(V46)"].Value;
|
||
IO.DI[$"{pm}.DI_TCSReleaseFB(V48)"].Value = IO.DO[$"{pm}.DO_TCSRelease(V48)"].Value;
|
||
IO.DI[$"{pm}.DI_TCSBypassFB(V49)"].Value = IO.DO[$"{pm}.DO_TCSBypass(V49)"].Value;
|
||
IO.DI[$"{pm}.DI_TCSVacFB(V50)"].Value = IO.DO[$"{pm}.DO_TCSVac(V50)"].Value;
|
||
IO.DI[$"{pm}.DI_HCLSwitchFB(V51)"].Value = IO.DO[$"{pm}.DO_HCLSwitch(V51)"].Value;
|
||
IO.DI[$"{pm}.DI_SiH4SwitchFB(V52)"].Value = IO.DO[$"{pm}.DO_SiH4Switch(V52)"].Value;
|
||
IO.DI[$"{pm}.DI_TCSRun/VentFB(V53)"].Value = IO.DO[$"{pm}.DO_TCSRun/Vent(V53)"].Value;
|
||
IO.DI[$"{pm}.DI_HCLRun/VentFB(V54)"].Value = IO.DO[$"{pm}.DO_HCLRun/Vent(V54)"].Value;
|
||
IO.DI[$"{pm}.DI_SiH4RunFB(V55)"].Value = IO.DO[$"{pm}.DO_SiH4Run(V55)"].Value;
|
||
IO.DI[$"{pm}.DI_SiH4VentFB(V56)"].Value = IO.DO[$"{pm}.DO_SiH4Vent(V56)"].Value;
|
||
IO.DI[$"{pm}.DI_C2H4SwitchFB(V58)"].Value = IO.DO[$"{pm}.DO_C2H4Switch(V58)"].Value;
|
||
IO.DI[$"{pm}.DI_C2H4RunFB(V59)"].Value = IO.DO[$"{pm}.DO_C2H4Run(V59)"].Value;
|
||
IO.DI[$"{pm}.DI_C2H4VentFB(V60)"].Value = IO.DO[$"{pm}.DO_C2H4Vent(V60)"].Value;
|
||
IO.DI[$"{pm}.DI_DoppingFinalFB(V61)"].Value = IO.DO[$"{pm}.DO_DoppingFinal(V61)"].Value;
|
||
IO.DI[$"{pm}.DI_SilaneFinalFB(V62)"].Value = IO.DO[$"{pm}.DO_SilaneFinal(V62)"].Value;
|
||
IO.DI[$"{pm}.DI_PropaneFinalFB(V63)"].Value = IO.DO[$"{pm}.DO_PropaneFinal(V63)"].Value;
|
||
//IO.DI[$"{pm}.DI_GasRingH2Purge_FB"].Value = IO.DO[$"{pm}.DO_GasRingH2Purge"].Value;
|
||
//IO.DI[$"{pm}.DI_GasRingArPurge_FB"].Value = IO.DO[$"{pm}.DO_GasRingArPurge"].Value;
|
||
IO.DI[$"{pm}.DI_ChamBodyArPurgeFB(V68)"].Value = IO.DO[$"{pm}.DO_ChamBodyArPurge(V68)"].Value;
|
||
IO.DI[$"{pm}.DI_ReactorLeakCheckFB(V69)"].Value = IO.DO[$"{pm}.DO_ReactorLeakCheck(V69)"].Value;
|
||
IO.DI[$"{pm}.DI_TMPressBalanceFB(V70)"].Value = IO.DO[$"{pm}.DO_TMPressBalance(V70)"].Value;
|
||
//IO.DI[$"{pm}.DI_CarryGasFinal_FB"].Value = IO.DO[$"{pm}.DO_CarryGasFinal(V97)"].Value;
|
||
IO.DI[$"{pm}.DI_GasBoxVentPumpFB(V72)"].Value = IO.DO[$"{pm}.DO_GasBoxVentPump(V72)"].Value;
|
||
IO.DI[$"{pm}.DI_MOVacFB(V73)"].Value = IO.DO[$"{pm}.DO_MOVac(V73)"].Value;
|
||
IO.DI[$"{pm}.DI_GasboxLeakCheckFB(V74)"].Value = IO.DO[$"{pm}.DO_GasboxLeakCheck(V74)"].Value;
|
||
IO.DI[$"{pm}.DI_DORVacFB(V75)"].Value = IO.DO[$"{pm}.DO_DORVac(V75)"].Value;
|
||
IO.DI[$"{pm}.DI_DORRefillFB(V76)"].Value = IO.DO[$"{pm}.DO_DORRefill(V76)"].Value;
|
||
IO.DI[$"{pm}.DI_SHPurgeFinalFB(V87)"].Value = IO.DO[$"{pm}.DO_SHPurgeFinal(V87)"].Value;
|
||
IO.DI[$"{pm}.DI_OuterGasFinalFB(V88)"].Value = IO.DO[$"{pm}.DO_OuterGasFinal(V88)"].Value;
|
||
IO.DI[$"{pm}.DI_InnerGasFinalFB(V89)"].Value = IO.DO[$"{pm}.DO_InnerGasFinal(V89)"].Value;
|
||
IO.DI[$"{pm}.DI_MiddleGasFinalFB(V90)"].Value = IO.DO[$"{pm}.DO_MiddleGasFinal(V90)"].Value;
|
||
IO.DI[$"{pm}.DI_OpticPurgeFinalFB(V91)"].Value = IO.DO[$"{pm}.DO_GasRingPurgeFinal(V92)"].Value;
|
||
IO.DI[$"{pm}.DI_GasRingPurgeFinalFB(V92)"].Value = IO.DO[$"{pm}.DO_OpticPurgeFinal(V91)"].Value;
|
||
IO.DI[$"{pm}.DI_ChamberPurgeFinalFB(V93)"].Value = IO.DO[$"{pm}.DO_ChamberPurgeFinal(V93)"].Value;
|
||
IO.DI[$"{pm}.DI_RotationUpPurgeFinalFB(V94)"].Value = IO.DO[$"{pm}.DO_RotationUpPurgeFinal(V94)"].Value;
|
||
IO.DI[$"{pm}.DI_ConfinementRingFinalFB(V95)"].Value = IO.DO[$"{pm}.DO_ConfinementRingFinal(V95)"].Value;
|
||
IO.DI[$"{pm}.DI_HeaterWFFinalFB(V96)"].Value = IO.DO[$"{pm}.DO_HeaterWFFinal(V96)"].Value;
|
||
IO.DI[$"{pm}.DI_N2SwitchFB(V37)"].Value = IO.DO[$"{pm}.DO_N2Switch(V37)"].Value;
|
||
|
||
|
||
//IO.DI[$"{pm}.DI_CarrierGasH2_FB"].Value = IO.DO[$"{pm}.DO_CarrierGasH2"].Value;
|
||
//IO.DI[$"{pm}.DI_CarrierGasAr_FB"].Value = IO.DO[$"{pm}.DO_CarrierGasAr"].Value;
|
||
|
||
|
||
|
||
IO.DI[$"{pm}.DI_OpticPurgeFinalFB(V91)"].Value = IO.DO[$"{pm}.DO_OpticPurgeFinal(V91)"].Value;
|
||
IO.DI[$"{pm}.DI_GasRingPurgeFinalFB(V92)"].Value = IO.DO[$"{pm}.DO_GasRingPurgeFinal(V92)"].Value;
|
||
|
||
//IO.DI[$"{pm}.DI_GasBoxVentBypass"].Value = IO.DO[$"{pm}.DO_GasBoxVentBypass(V25)"].Value;
|
||
//IO.DI[$"{pm}.DI_C2H4SwitchHTPurge"].Value = IO.DO[$"{pm}.DO_C2H4SwitchHTPurge"].Value;
|
||
|
||
IO.DI[$"{pm}.DI_EPV1-1FB"].Value = IO.DO[$"{pm}.DO_EPV1"].Value;
|
||
IO.DI[$"{pm}.DI_EPV2-1FB"].Value = IO.DO[$"{pm}.DO_EPV2"].Value;
|
||
|
||
IO.AI[$"{pm}.AI_PressCtrl1"].Value = IO.AO[$"{pm}.AO_PressCtrl1"].Value;
|
||
IO.AI[$"{pm}.AI_PressCtrl2"].Value = IO.AO[$"{pm}.AO_PressCtrl2"].Value;
|
||
IO.AI[$"{pm}.AI_PressCtrl3"].Value = IO.AO[$"{pm}.AO_PressCtrl3"].Value;
|
||
IO.AI[$"{pm}.AI_PressCtrl4"].Value = IO.AO[$"{pm}.AO_PressCtrl4"].Value;
|
||
IO.AI[$"{pm}.AI_PressCtrl5"].Value = IO.AO[$"{pm}.AO_PressCtrl5"].Value;
|
||
IO.AI[$"{pm}.AI_PressCtrl6"].Value = IO.AO[$"{pm}.AO_PressCtrl6"].Value;
|
||
IO.AI[$"{pm}.AI_PressCtrl7"].Value = IO.AO[$"{pm}.AO_PressCtrl7"].Value;
|
||
}
|
||
|
||
int timeMoveUp = 0;
|
||
int timeMove = 0;
|
||
R_TRIG _UpTrig = new R_TRIG();
|
||
|
||
private void MonitorChamberMoveBodyUp(string pm)
|
||
{
|
||
if (IO.DO[$"{pm}.DO_ChamMoveBodyUp"].Value != IO.DO[$"{pm}.DO_ChamMoveBodyDown"].Value)
|
||
{
|
||
timeMoveUp++;
|
||
if (timeMoveUp > 20)
|
||
{
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyUp"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyUp"].Value;
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyDown"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyDown"].Value;
|
||
}
|
||
}
|
||
if (timeMoveUp > 20)
|
||
{
|
||
timeMoveUp = 0;
|
||
}
|
||
}
|
||
|
||
R_TRIG forwardLatch_R = new R_TRIG();
|
||
R_TRIG backLatchLatch_R = new R_TRIG();
|
||
private void MonitorChamberMoveBody(string pm)
|
||
{
|
||
if (IO.DO[$"{pm}.DO_ChamMoveBodyForward"].Value != IO.DO[$"{pm}.DO_ChamMoveBodyBackward"].Value)
|
||
{
|
||
timeMove++;
|
||
if (timeMove > 20)
|
||
{
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyFront"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyForward"].Value;
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyEnd"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyBackward"].Value;
|
||
}
|
||
}
|
||
|
||
forwardLatch_R.CLK = IO.DO[$"{pm}.DO_ChamMoveBodyBrakerForward"].Value;
|
||
if (forwardLatch_R.Q)
|
||
{
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyUpLatchFW"].Value = true;
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyEndLatchBW"].Value = false;
|
||
backLatchLatch_R.RST = true;
|
||
}
|
||
|
||
backLatchLatch_R.CLK = IO.DO[$"{pm}.DO_ChamMoveBodyBrakerBackward"].Value;
|
||
if (backLatchLatch_R.Q)
|
||
{
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyEndLatchBW"].Value = true;
|
||
IO.DI[$"{pm}.DI_ChamMoveBodyUpLatchFW"].Value = false;
|
||
forwardLatch_R.RST = true;
|
||
}
|
||
|
||
if (timeMove > 20)
|
||
{
|
||
timeMove = 0;
|
||
}
|
||
}
|
||
|
||
private void MonitorHeater(string pm)
|
||
{
|
||
IO.DI[$"{pm}.DI_PSU1Status"].Value = IO.DO[$"{pm}.DO_PSU1Enable"].Value;
|
||
IO.DI[$"{pm}.DI_PSU2Status"].Value = IO.DO[$"{pm}.DO_PSU2Enable"].Value;
|
||
IO.DI[$"{pm}.DI_PSU3Status"].Value = IO.DO[$"{pm}.DO_PSU3Enable"].Value;
|
||
IO.DI[$"{pm}.DI_SCR1Status"].Value = IO.DO[$"{pm}.DO_SCR1Enable"].Value;
|
||
IO.DI[$"{pm}.DI_SCR2Status"].Value = IO.DO[$"{pm}.DO_SCR2Enable"].Value;
|
||
IO.DI[$"{pm}.DI_SCR3Status"].Value = IO.DO[$"{pm}.DO_SCR3Enable"].Value;
|
||
|
||
//IO.AI[$"{pm}.AI_PresentLoop1Temp"].FloatValue = IO.AO[$"{pm}.AO_SetpointLoop1Temp"].FloatValue;
|
||
//IO.AI[$"{pm}.AI_Loop1ControlMode"].FloatValue = IO.AO[$"{pm}.AO_Loop1ControlMode"].FloatValue;
|
||
//IO.AI[$"{pm}.AI_Loop1ActualPower"].FloatValue = IO.AO[$"{pm}.AO_Loop1ManualOP"].FloatValue;
|
||
//IO.DI[$"{pm}.DI_InnerHeaterEnable"].Value = IO.DO[$"{pm}.DO_InnerHeaterEnable"].Value;
|
||
|
||
//IO.AI[$"{pm}.AI_PresentLoop2Temp"].FloatValue = IO.AO[$"{pm}.AO_SetpointLoop2Temp"].FloatValue;
|
||
//IO.AI[$"{pm}.AI_Loop2ControlMode"].FloatValue = IO.AO[$"{pm}.AO_Loop2ControlMode"].FloatValue;
|
||
//IO.AI[$"{pm}.AI_Loop2ActualPower"].FloatValue = IO.AO[$"{pm}.AO_Loop2ManualOP"].FloatValue;
|
||
//IO.DI[$"{pm}.DI_MiddleHeaterEnable"].Value = IO.DO[$"{pm}.DO_MiddleHeaterEnable"].Value;
|
||
|
||
//IO.AI[$"{pm}.AI_PresentLoop3Temp"].FloatValue = IO.AO[$"{pm}.AO_SetpointLoop3Temp"].FloatValue;
|
||
//IO.AI[$"{pm}.AI_Loop3ControlMode"].FloatValue = IO.AO[$"{pm}.AO_Loop3ControlMode"].FloatValue;
|
||
//IO.AI[$"{pm}.AI_Loop3ActualPower"].FloatValue = IO.AO[$"{pm}.AO_Loop3ManualOP"].FloatValue;
|
||
//IO.DI[$"{pm}.DI_OuterHeaterEnable"].Value = IO.DO[$"{pm}.DO_OuterHeaterEnable"].Value;
|
||
}
|
||
private void MonitorGasConnector(string pm)
|
||
{
|
||
if (IO.DO[$"{pm}.DO_SHGasConnectorLoosen"].Value != IO.DO[$"{pm}.DO_SHGasConnectorTighten"].Value)
|
||
{
|
||
IO.DI[$"{pm}.DI_SHGasConnectorLoosen"].Value = IO.DO[$"{pm}.DO_SHGasConnectorLoosen"].Value;
|
||
IO.DI[$"{pm}.DI_SHGasConnectorTighten"].Value = IO.DO[$"{pm}.DO_SHGasConnectorTighten"].Value;
|
||
}
|
||
}
|
||
|
||
private void MonitorLid(string pm)
|
||
{
|
||
|
||
if (IO.DO[$"{pm}.DO_SHLidLoosen"].Value != IO.DO[$"{pm}.DO_SHLidTighten"].Value)
|
||
{
|
||
timeMove++;
|
||
if (timeMove > 20)
|
||
{
|
||
IO.DI[$"{pm}.DI_SHLidLoosen"].Value = IO.DO[$"{pm}.DO_SHLidLoosen"].Value;
|
||
IO.DI[$"{pm}.DI_SHLidTighten"].Value = IO.DO[$"{pm}.DO_SHLidTighten"].Value;
|
||
IO.DI[$"{pm}.DI_SHLidClosed"].Value = IO.DO[$"{pm}.DO_SHLidTighten"].Value;
|
||
}
|
||
return;
|
||
}
|
||
if (IO.DO[$"{pm}.DO_MiddleLidLoosen"].Value != IO.DO[$"{pm}.DO_MiddleLidTighten"].Value)
|
||
{
|
||
timeMove++;
|
||
if (timeMove > 20)
|
||
{
|
||
IO.DI[$"{pm}.DI_MiddleLidLoosen"].Value = IO.DO[$"{pm}.DO_MiddleLidLoosen"].Value;
|
||
IO.DI[$"{pm}.DI_MiddleLidTighten"].Value = IO.DO[$"{pm}.DO_MiddleLidTighten"].Value;
|
||
IO.DI[$"{pm}.DI_MiddleLidClosed"].Value = IO.DO[$"{pm}.DO_MiddleLidTighten"].Value;
|
||
}
|
||
return;
|
||
}
|
||
if (timeMove > 20)
|
||
{
|
||
timeMove = 0;
|
||
}
|
||
}
|
||
|
||
private void MonitorLidSwing(string pm)
|
||
{
|
||
|
||
if (IO.DO[$"{pm}.DO_SHLidSwingLock"].Value != IO.DO[$"{pm}.DO_SHLidSwingUnlock"].Value)
|
||
{
|
||
IO.DI[$"{pm}.DI_SHLidSwingLock"].Value = IO.DO[$"{pm}.DO_SHLidSwingLock"].Value;
|
||
IO.DI[$"{pm}.DI_SHLidSwingUnlock"].Value = IO.DO[$"{pm}.DO_SHLidSwingUnlock"].Value;
|
||
}
|
||
if (IO.DO[$"{pm}.DO_MiddleLidSwingLock"].Value != IO.DO[$"{pm}.DO_MiddleLidSwingUnlock"].Value)
|
||
{
|
||
IO.DI[$"{pm}.DI_MiddleLidSwingLock"].Value = IO.DO[$"{pm}.DO_MiddleLidSwingLock"].Value;
|
||
IO.DI[$"{pm}.DI_MiddleLidSwingUnlock"].Value = IO.DO[$"{pm}.DO_MiddleLidSwingUnlock"].Value;
|
||
}
|
||
|
||
}
|
||
|
||
|
||
private void MonitorConfinementRing(string pm)
|
||
{
|
||
if (IO.DO[$"{pm}.DO_ConfinementRingMoveDown"].Value != IO.DO[$"{pm}.DO_ConfinementRingMoveUp"].Value)
|
||
{
|
||
IO.DI[$"{pm}.DI_ConfinementRingDone"].Value = true;
|
||
IO.DI[$"{pm}.DI_ConfinementRingDown"].Value = IO.DO[$"{pm}.DO_ConfinementRingMoveDown"].Value;
|
||
//IO.DI[$"{pm}.DI_ConfinementRingUp"].Value = IO.DO[$"{pm}.DO_ConfinementRingMoveUp"].Value;
|
||
}
|
||
|
||
if(IO.DI[$"{pm}.DI_ConfinementRingUp"].Value)
|
||
{
|
||
IO.AI[$"{pm}.AI_ConfinementRingCurPos"].FloatValue = IO.AO[$"{pm}.AO_ConfinementRingUpPos"].FloatValue;
|
||
}
|
||
|
||
if (IO.DI[$"{pm}.DI_ConfinementRingDown"].Value)
|
||
{
|
||
IO.AI[$"{pm}.AI_ConfinementRingCurPos"].FloatValue = IO.AO[$"{pm}.AO_ConfinementRingDownPos"].FloatValue;
|
||
}
|
||
|
||
IO.AI[$"{pm}.AI_ConfinementRingUpPos"].FloatValue = IO.AO[$"{pm}.AO_ConfinementRingUpPos"].FloatValue;
|
||
IO.AI[$"{pm}.AI_ConfinementRingDownPos"].FloatValue = IO.AO[$"{pm}.AO_ConfinementRingDownPos"].FloatValue;
|
||
}
|
||
|
||
|
||
|
||
private void MonitorRotation(string pm)
|
||
{
|
||
IO.AI[$"{pm}.AI_ActualSpeed"].FloatValue = IO.AO[$"{pm}.AO_SpindleSpeed"].FloatValue;
|
||
|
||
IO.DI[$"{pm}.DI_ConfinementRingServoOn"].Value = IO.DO[$"{pm}.DO_ConfinementRingServoOn"].Value;
|
||
|
||
}
|
||
|
||
public void Terminate()
|
||
{
|
||
_thread.Stop();
|
||
}
|
||
}
|
||
}
|