86 lines
1.9 KiB
C#
86 lines
1.9 KiB
C#
using Aitex.Core.RT.Device.Unit;
|
|
using Aitex.Core.RT.Routine;
|
|
using Aitex.Core.RT.SCCore;
|
|
using SicModules.LLs.Routines.Base;
|
|
|
|
namespace SicModules.LLs.Routines
|
|
{
|
|
public class LoadLockClawRoutine : LoadLockBaseRoutine
|
|
{
|
|
enum RoutineStep
|
|
{
|
|
LiftMove,
|
|
ClawMove,
|
|
}
|
|
|
|
private bool _llCalw;
|
|
private bool _isWaferClaw;
|
|
private int _clawMoveTimeOut = 30;
|
|
|
|
public LoadLockClawRoutine()
|
|
{
|
|
Name = "Claw";
|
|
}
|
|
|
|
public void Init(bool isWaferClaw,bool clawed)
|
|
{
|
|
_llCalw = clawed;
|
|
_isWaferClaw = isWaferClaw;
|
|
}
|
|
|
|
public override Result Start(params object[] objs)
|
|
{
|
|
Reset();
|
|
|
|
if (_isWaferClaw)
|
|
{
|
|
if ((_llCalw && WaferClaw.State == ClawStateEnum.Clamp) || (!_llCalw && WaferClaw.State == ClawStateEnum.Open))
|
|
{
|
|
return Result.DONE;
|
|
}
|
|
}
|
|
else
|
|
{
|
|
if ((_llCalw && TrayClaw.State == ClawStateEnum.Clamp) || (!_llCalw && TrayClaw.State == ClawStateEnum.Open))
|
|
{
|
|
return Result.DONE;
|
|
}
|
|
}
|
|
|
|
_clawMoveTimeOut = SC.GetValue<int>("LoadLock.ClawMoveTimeOut");
|
|
|
|
Notify("Start");
|
|
return Result.RUN;
|
|
}
|
|
|
|
|
|
public override Result Monitor()
|
|
{
|
|
try
|
|
{
|
|
|
|
ClawMove((int)RoutineStep.ClawMove, (_isWaferClaw ? WaferClaw : TrayClaw), _llCalw, _clawMoveTimeOut);
|
|
}
|
|
catch (RoutineBreakException)
|
|
{
|
|
return Result.RUN;
|
|
}
|
|
catch (RoutineFaildException)
|
|
{
|
|
return Result.FAIL;
|
|
}
|
|
|
|
Notify("Finished");
|
|
|
|
return Result.DONE;
|
|
}
|
|
|
|
public override void Abort()
|
|
{
|
|
|
|
}
|
|
|
|
|
|
}
|
|
}
|