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Sic03-8inch/Modules/SicPM1/Config/DeviceModelPM1.xml

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<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<IoTCs classType="Aitex.Core.RT.Device.Devices.IoTC" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoTC id="TC1" display="TC1" schematicId="TC1" aioType="float" aiL1WorkingOPFeedBack="AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack="AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_PSUOuterWorkingOP" aiL1PVFeedBack="AI_PSUInnerPV" aiL2PVFeedBack="AI_PSUMiddlePV" aiL3PVFeedBack="AI_PSUOuterPV" diL1TempHighAlarmFeedBack="DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack="DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_PSUOuterTempHAlarm" diL1TempLowAlarmFeedBack="DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack="DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_PSUOuterTempLAlarm" aoHeaterModeSetPoint="AO_PSUHeaterMode" aoPowerRefSetPoint="AO_PSUPowerRef" aoL1RatioSetPoint="AO_PSUInnerRatio" aoL2RatioSetPoint="AO_PSUMiddleRatio" aoL3RatioSetPoint="AO_PSUOuterRatio" aoL1RatedSetPoint="AO_PSUInnerRatedValue" aoL2RatedSetPoint="AO_PSUMiddleRatedValue" aoL3RatedSetPoint="AO_PSUOuterRatedValue" aoL1LoopModeSetPoint="AO_PSUInnerLoopMode" aoL2LoopModeSetPoint="AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint="AO_PSUOuterLoopMode" aoL1TargetSPSetPoint="AO_PSUInnerTargetSP" aoL2TargetSPSetPoint="AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint="AO_PSUOuterTargetSP" aoL1TargetOPSetPoint="AO_PSUInnerTargetOP" aoL2TargetOPSetPoint="AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint="AO_PSUOuterTargetOP" aoL1RecipeValueSetPoint="AO_PSUInnerRecipeValue" aoL2RecipeValueSetPoint="AO_PSUMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_PSUOuterRecipeValue" aoL1InputTempSetPoint="AO_PSUInnerPyroTemp" aoL2InputTempSetPoint="AO_PSUMiddlePyroTemp" aoL3InputTempSetPoint="AO_PSUOuterPyroTemp" aoTCPyroModeSetPoint="AO_PSUTCPyroMode" aoL1VoltageLimited="AO_PSUInnerVoltageLimited" aoL2VoltageLimited="AO_PSUMiddleVoltageLimited" aoL3VoltageLimited="AO_PSUOuterVoltageLimited" aoL1TempHighLimitSetPoint="AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint="AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_PSUOuterTempHighLimit" aoL1TempLowLimitSetPoint="AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint="AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN="AI_PSUTC" aoPSU1Y="AO_PSU1Y" aoPSU2Y="AO_PSU2Y" aoPSU3Y="AO_PSU3Y" />
<IoTC id="TC2" display="TC2" schematicId="TC2" aioType="float" aiL1WorkingOPFeedBack="AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack="AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_SCRLowerWorkingOP" aiL1PVFeedBack="AI_SCRUpperPV" aiL2PVFeedBack="AI_SCRMiddlePV" aiL3PVFeedBack="AI_SCRLowerPV" diL1TempHighAlarmFeedBack="DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack="DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_SCRLowerTempHAlarm" diL1TempLowAlarmFeedBack="DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack="DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_SCRLowerTempLAlarm" aoHeaterModeSetPoint="AO_SCRHeaterMode" aoPowerRefSetPoint="AO_SCRPowerRef" aoL1RatioSetPoint="AO_SCRUpperRatio" aoL2RatioSetPoint="AO_SCRMiddleRatio" aoL3RatioSetPoint="AO_SCRLowerRatio" aoL1RatedSetPoint="AO_SCRUpperRatedValue" aoL2RatedSetPoint="AO_SCRMiddleRatedValue" aoL3RatedSetPoint="AO_SCRLowerRatedValue" aoL1LoopModeSetPoint="AO_SCRUpperLoopMode" aoL2LoopModeSetPoint="AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint="AO_SCRLowerLoopMode" aoL1TargetSPSetPoint="AO_SCRUpperTargetSP" aoL2TargetSPSetPoint="AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint="AO_SCRLowerTargetSP" aoL1TargetOPSetPoint="AO_SCRUpperTargetOP" aoL2TargetOPSetPoint="AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint="AO_SCRLowerTargetOP" aoL1RecipeValueSetPoint="AO_SCRUpperRecipeValue" aoL2RecipeValueSetPoint="AO_SCRMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_SCRLowerRecipeValue" aoL1InputTempSetPoint="AO_SCRUpperPyroTemp" aoL2InputTempSetPoint="AO_SCRMiddlePyroTemp" aoL3InputTempSetPoint="AO_SCRLowerPyroTemp" aoTCPyroModeSetPoint="AO_SCRTCPyroMode" aoL1VoltageLimited="AO_SCRUpperVoltageLimited" aoL2VoltageLimited="AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited="AO_SCRLowerVoltageLimited" aoL1TempHighLimitSetPoint="AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint="AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_SCRLowerTempHighLimit" aoL1TempLowLimitSetPoint="AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint="AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN="AI_SCRTC" />
</IoTCs>
<IoOmronTemps classType="Aitex.Core.RT.Device.Devices.IoOmronTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoTC id="OmronTemp" display="OmronTemp" schematicId="OmronTemp" aioType="float" aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6="" aoCH7="" aoCH8="" aoCH9="" aoCH10="" aoCH11="" aoCH12="" doLineHeaterEnable="DO_LineHeaterEnable" />
</IoOmronTemps>
<IoPSUs classType="Aitex.Core.RT.Device.Devices.IoPSU" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPSU id="PSU1" display="PSU1" schematicId="PSU1" aioType="float" aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower" aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms" doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant" diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66 PSU1 Alarm[DI-320]" diCommunicationError="DI_PSU1dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
<IoPSU id="PSU2" display="PSU2" schematicId="PSU2" aioType="float" aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower" aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms" doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant" diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67 PSU2 Alarm[DI-321]" diCommunicationError="DI_PSU2dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
<IoPSU id="PSU3" display="PSU3" schematicId="PSU3" aioType="float" aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower" iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms" doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant" diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68 PSU3 Alarm[DI-322]" diCommunicationError="DI_PSU3dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
</IoPSUs>
<IoSCRs classType="Aitex.Core.RT.Device.Devices.IoSCR" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSCR id="SCR1" display="SCR1" schematicId="SCR1" aioType="float" aiVoltage="AI_SCR1Voltage" aiArms="AI_SCR1Arms" aiPower="AI_SCR1Power" diStatus="DI_SCR1Status" doReset="DO_SCR1Reset" doStatus="DO_SCR1Enable" diAlarm="DI_SCR1Alarm" AlarmText="" />
<IoSCR id="SCR2" display="SCR2" schematicId="SCR2" aioType="float" aiVoltage="AI_SCR2Voltage" aiArms="AI_SCR2Arms" aiPower="AI_SCR2Power" diStatus="DI_SCR2Status" doReset="DO_SCR2Reset" doStatus="DO_SCR2Enable" diAlarm="DI_SCR2Alarm" AlarmText="" />
<IoSCR id="SCR3" display="SCR3" schematicId="SCR3" aioType="float" aiVoltage="AI_SCR3Voltage" aiArms="AI_SCR3Arms" aiPower="AI_SCR3Power" diStatus="DI_SCR3Status" doReset="DO_SCR3Reset" doStatus="DO_SCR3Enable" diAlarm="DI_SCR3Alarm" AlarmText="" />
</IoSCRs>
<IoUPSs classType="Aitex.Core.RT.Device.Devices.IoUPS" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoUPS id="UPS" display="UPS" schematicId="UPS" doEnable="DO_UPSEnable" doLowBattery="DO_UPSLowBattery" />
</IoUPSs>
<IoHeats classType="Aitex.Core.RT.Device.Devices.IoHeat" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoHeat module="" id="PMHeatEnable" display="HeatEnable" schematicId="HeatEnable" diEnable="DI_PSUEnableFB" doEnable="DO_HeaterEnable" />
</IoHeats>
<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoValve id="V27" display="PumpBypass" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PumpBypassFB(V27)" doOpen="DO_PumpBypass(V27)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V32" display="ArSupply" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ArSupplyFB(V32)" doOpen="DO_ArSupply(V32)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33" display="H2ArSwitch" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33s" display="H2ArSwitch" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2ArLine1FB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V36" display="H2ArLine2" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2ArLine2FB(V36)" doOpen="DO_H2ArLine2(V36)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37" display="N2.Switch" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37s" display="N2.Switch" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39" display="Diluted N2 Run" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DilutedN2Run/VentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39s" display="Diluted N2 Vent" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DilutedN2Run/VentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40" display="High N2 Run" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HighN2Run/VentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40s" display="High N2 Vent" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_HighN2Run/VentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V41" display="TMA Run" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMARunFB(V41)" doOpen="DO_TMARun(V41)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V42" display="TMA Vent" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TMAVentFB(V42)" doOpen="DO_TMAVent(V42)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43" display="TMARelease" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAReleaseFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43s" display="TMARelease" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAReleaseFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V45" display="TMABypass" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TMABypassFB(V45)" doOpen="DO_TMABypass(V45)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46" display="TMAVac" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAVacFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46s" display="TMAVac" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAVacFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48" display="TCSRelease" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSReleaseFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48s" display="TCSRelease" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSReleaseFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V49" display="TCSBypass" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TCSBypassFB(V49)" doOpen="DO_TCSBypass(V49)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50" display="TCSVac" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSVacFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50s" display="TCSVac" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSVacFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51" display="HCLSwitch" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HCLSwitchFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51s" display="HCLSwitch" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_HCLSwitchFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52" display="SiH4Switch" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SiH4SwitchFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52s" display="SiH4Switch" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SiH4SwitchFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53" display="TCSRun" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSRunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53s" display="TCSVent" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TCSRunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54" display="HCLRun" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HCLRun/VentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54s" display="HCLVent" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_HCLRun/VentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V55" display="SiH4Run" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SiH4RunFB(V55)" doOpen="DO_SiH4Run(V55)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V56" display="SiH4Vent" schematicId="V56" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SiH4VentFB(V56)" doOpen="DO_SiH4Vent(V56)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58" display="C2H4Switch" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4SwitchFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58s" display="C2H4Switch" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59" display="C2H4Run" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4RunFB(V59)" doOpen="DO_C2H4Run(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V60" display="C2H4Vent" schematicId="V60" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4VentFB(V60)" doOpen="DO_C2H4Vent(V60)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V61" display="DoppingFinal" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DoppingFinalFB(V61)" doOpen="DO_DoppingFinal(V61)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V62" display="SilaneFinal" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SilaneFinalFB(V62)" doOpen="DO_SilaneFinal(V62)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V63" display="PropaneFinal" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PropaneFinalFB(V63)" doOpen="DO_PropaneFinal(V63)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_ChamBodyArPurgeFB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V72" display="GasBoxVentPump" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasBoxVentPumpFB(V72)" doOpen="DO_GasBoxVentPump(V72)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V73" display="MOVac" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MOVacFB(V73)" doOpen="DO_MOVac(V73)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V74" display="GasboxLeakCheck" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakCheckFB(V74)" doOpen="DO_GasboxLeakCheck(V74)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V75" display="DORVac" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacFB(V75)" doOpen="DO_DORVac(V75)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V76" display="DORRefill" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORRefillFB(V76)" doOpen="DO_DORRefill(V76)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V87" display="SHPurgeFinal" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeFinalFB(V87)" doOpen="DO_SHPurgeFinal(V87)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V88" display="OuterGasFinal" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OuterGasFinalFB(V88)" doOpen="DO_OuterGasFinal(V88)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V89" display="InnerGasFinal" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_InnerGasFinalFB(V89)" doOpen="DO_InnerGasFinal(V89)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V90" display="MiddleGasFinal" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MiddleGasFinalFB(V90)" doOpen="DO_MiddleGasFinal(V90)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V91" display="OpticPurgeFinal" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OpticPurgeFinalFB(V91)" doOpen="DO_OpticPurgeFinal(V91)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V92" display="GasRingPurgeFinal" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasRingPurgeFinalFB(V92)" doOpen="DO_GasRingPurgeFinal(V92)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V93" display="ChamberPurgeFinal" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ChamberPurgeFinalFB(V93)" doOpen="DO_ChamberPurgeFinal(V93)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V94" display="RotationUpPurgeFinal" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_RotationUpPurgeFinalFB(V94)" doOpen="DO_RotationUpPurgeFinal(V94)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V95" display="ConfinementRingFinal" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ConfinementRingFinalFB(V95)" doOpen="DO_ConfinementRingFinal(V95)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V96" display="HeaterWFFinal" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HeaterWFFinalFB(V96)" doOpen="DO_HeaterWFFinal(V96)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_OpenLidPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2-1FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
<IoValve id="HeatEnable" display="HeatEnable" schematicId="HeatEnable" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PSUEnableFB" doOpen="DO_HeaterEnable" diCloseSensor="" diOpenSensor="" />
<IoValve id="V99" display="C2H4SwitchHTPurge" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="V99s" display="C2H4SwitchHTPurge" schematicId="V99s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="V25" display="GasBoxVentBypass" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_GasBoxVentBypass(V25)" diCloseSensor="" diOpenSensor="" />
</IoValves>
<IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float" aiStatus="AI_TVmode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure" aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure" doTVValveEnable="DO_TVEnable" diTVValveEnable="" />
</IoThrottleValves>
<IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoMfc3 id="Mfc1" display="Mfc1" schematicId="Mfc1" unit="sccm" aiActMode="AI_M1ActMode" aoSetMode="AO_M1CtrlMode" aiFlow="AI_M1" aoFlow="AO_M1" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01Offline" AlarmText="Alarm101 MFC01 Offline[DI-351]" />
<IoMfc3 id="Mfc2" display="Mfc2" schematicId="Mfc2" unit="sccm" aiActMode="AI_M2ActMode" aoSetMode="AO_M2CtrlMode" aiFlow="AI_M2" aoFlow="AO_M2" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC02Offline" AlarmText="Alarm102 MFC02 Offline[DI-352]" />
<IoMfc3 id="Mfc3" display="Mfc3" schematicId="Mfc3" unit="sccm" aiActMode="AI_M3ActMode" aoSetMode="AO_M3CtrlMode" aiFlow="AI_M3" aoFlow="AO_M3" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC03Offline" AlarmText="Alarm103 MFC03 Offline[DI-353]" />
<IoMfc3 id="Mfc4" display="Mfc4" schematicId="Mfc4" unit="sccm" aiActMode="AI_M4ActMode" aoSetMode="AO_M4CtrlMode" aiFlow="AI_M4" aoFlow="AO_M4" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC04Offline" AlarmText="Alarm104 MFC04 Offline[DI-354]" />
<IoMfc3 id="Mfc5" display="Mfc5" schematicId="Mfc5" unit="sccm" aiActMode="AI_M5ActMode" aoSetMode="AO_M5CtrlMode" aiFlow="AI_M5" aoFlow="AO_M5" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC05Offline" AlarmText="Alarm105 MFC05 Offline[DI-355]" />
<IoMfc3 id="Mfc6" display="Mfc6" schematicId="Mfc6" unit="sccm" aiActMode="AI_M6ActMode" aoSetMode="AO_M6CtrlMode" aiFlow="AI_M6" aoFlow="AO_M6" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC06Offline" AlarmText="Alarm106 MFC06 Offline[DI-356]" />
<IoMfc3 id="Mfc7" display="Mfc7" schematicId="Mfc7" unit="sccm" aiActMode="AI_M7ActMode" aoSetMode="AO_M7CtrlMode" aiFlow="AI_M7" aoFlow="AO_M7" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC07Offline" AlarmText="Alarm107 MFC07 Offline[DI-357]" />
<IoMfc3 id="Mfc8" display="Mfc8" schematicId="Mfc8" unit="sccm" aiActMode="AI_M8ActMode" aoSetMode="AO_M8CtrlMode" aiFlow="AI_M8" aoFlow="AO_M8" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC08Offline" AlarmText="Alarm108 MFC08 Offline[DI-358]" />
<IoMfc3 id="Mfc9" display="Mfc9" schematicId="Mfc9" unit="sccm" aiActMode="AI_M9ActMode" aoSetMode="AO_M9CtrlMode" aiFlow="AI_M9" aoFlow="AO_M9" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC09Offline" AlarmText="Alarm109 MFC09 Offline[DI-359]" />
<IoMfc3 id="Mfc10" display="Mfc10" schematicId="Mfc10" unit="sccm" aiActMode="AI_M10ActMode" aoSetMode="AO_M10CtrlMode" aiFlow="AI_M10" aoFlow="AO_M10" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10Offline" AlarmText="Alarm110 MFC10 Offline[DI-360]" />
<IoMfc3 id="Mfc11" display="Mfc11" schematicId="Mfc11" unit="sccm" aiActMode="AI_M11ActMode" aoSetMode="AO_M11CtrlMode" aiFlow="AI_M11" aoFlow="AO_M11" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11Offline" AlarmText="Alarm111 MFC11 Offline[DI-361]" />
<IoMfc3 id="Mfc12" display="Mfc12" schematicId="Mfc12" unit="sccm" aiActMode="AI_M12ActMode" aoSetMode="AO_M12CtrlMode" aiFlow="AI_M12" aoFlow="AO_M12" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12Offline" AlarmText="Alarm112 MFC12 Offline[DI-362]" />
<IoMfc3 id="Mfc13" display="Mfc13" schematicId="Mfc13" unit="sccm" aiActMode="AI_M13ActMode" aoSetMode="AO_M13CtrlMode" aiFlow="AI_M13" aoFlow="AO_M13" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13Offline" AlarmText="Alarm113 MFC13 Offline[DI-363]" />
<IoMfc3 id="Mfc14" display="Mfc14" schematicId="Mfc14" unit="sccm" aiActMode="AI_M14ActMode" aoSetMode="AO_M14CtrlMode" aiFlow="AI_M14" aoFlow="AO_M14" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14Offline" AlarmText="Alarm114 MFC14 Offline[DI-364]" />
<IoMfc3 id="Mfc15" display="Mfc15" schematicId="Mfc15" unit="sccm" aiActMode="AI_M15ActMode" aoSetMode="AO_M15CtrlMode" aiFlow="AI_M15" aoFlow="AO_M15" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15Offline" AlarmText="Alarm115 MFC15 Offline[DI-365]" />
<IoMfc3 id="Mfc16" display="Mfc16" schematicId="Mfc16" unit="sccm" aiActMode="AI_M16ActMode" aoSetMode="AO_M16CtrlMode" aiFlow="AI_M16" aoFlow="AO_M16" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16Offline" AlarmText="Alarm116 MFC16 Offline[DI-366]" />
<IoMfc3 id="Mfc19" display="Mfc19" schematicId="Mfc19" unit="sccm" aiActMode="AI_M19ActMode" aoSetMode="AO_M19CtrlMode" aiFlow="AI_M19" aoFlow="AO_M19" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC19Offline" AlarmText="Alarm119 MFC19 Offline[DI-369]" />
<IoMfc3 id="Mfc20" display="Mfc20" schematicId="Mfc20" unit="sccm" aiActMode="AI_M20ActMode" aoSetMode="AO_M20CtrlMode" aiFlow="AI_M20" aoFlow="AO_M20" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC20Offline" AlarmText="Alarm120 MFC20 Offline[DI-370]" />
<IoMfc3 id="Mfc22" display="Mfc22" schematicId="Mfc22" unit="sccm" aiActMode="AI_M22ActMode" aoSetMode="AO_M22CtrlMode" aiFlow="AI_M22" aoFlow="AO_M22" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC22Offline" AlarmText="Alarm122 MFC22 Offline[DI-372]" />
<IoMfc3 id="Mfc23" display="Mfc23" schematicId="Mfc23" unit="sccm" aiActMode="AI_M23ActMode" aoSetMode="AO_M23CtrlMode" aiFlow="AI_M23" aoFlow="AO_M23" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC23Offline" AlarmText="Alarm123 MFC23 Offline[DI-373]" />
<IoMfc3 id="Mfc25" display="Mfc25" schematicId="Mfc25" unit="sccm" aiActMode="AI_M25ActMode" aoSetMode="AO_M25CtrlMode" aiFlow="AI_M25" aoFlow="AO_M25" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC25Offline" AlarmText="Alarm125 MFC25 Offline[DI-375]" />
<IoMfc3 id="Mfc26" display="Mfc26" schematicId="Mfc26" unit="sccm" aiActMode="AI_M26ActMode" aoSetMode="AO_M26CtrlMode" aiFlow="AI_M26" aoFlow="AO_M26" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC26Offline" AlarmText="Alarm126 MFC26 Offline[DI-376]" />
<IoMfc3 id="Mfc27" display="Mfc27" schematicId="Mfc27" unit="sccm" aiActMode="AI_M27ActMode" aoSetMode="AO_M27CtrlMode" aiFlow="AI_M27" aoFlow="AO_M27" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC27Offline" AlarmText="Alarm127 MFC27 Offline[DI-377]" />
<IoMfc3 id="Mfc28" display="Mfc28" schematicId="Mfc28" unit="sccm" aiActMode="AI_M28ActMode" aoSetMode="AO_M28CtrlMode" aiFlow="AI_M28" aoFlow="AO_M28" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC28Offline" AlarmText="Alarm128 MFC28 Offline[DI-378]" />
<IoMfc3 id="Mfc29" display="Mfc29" schematicId="Mfc29" unit="sccm" aiActMode="AI_M29ActMode" aoSetMode="AO_M29CtrlMode" aiFlow="AI_M29" aoFlow="AO_M29" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC29Offline" AlarmText="Alarm129 MFC29 Offline[DI-379]" />
<IoMfc3 id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="" AlarmText="" />
<IoMfc3 id="Mfc31" display="Mfc31" schematicId="Mfc31" unit="sccm" aiActMode="AI_M31ActMode" aoSetMode="AO_M31CtrlMode" aiFlow="AI_M31" aoFlow="AO_M31" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC31Offline" AlarmText="Alarm131 MFC31 Offline[DI-381]" />
<IoMfc3 id="Mfc32" display="Mfc32" schematicId="Mfc32" unit="sccm" aiActMode="AI_M32ActMode" aoSetMode="AO_M32CtrlMode" aiFlow="AI_M32" aoFlow="AO_M32" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC32Offline" AlarmText="Alarm132 MFC32 Offline[DI-382]" />
<IoMfc3 id="Mfc33" display="Mfc33" schematicId="Mfc33" unit="sccm" aiActMode="AI_M33ActMode" aoSetMode="AO_M33CtrlMode" aiFlow="AI_M33" aoFlow="AO_M33" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC33Offline" AlarmText="Alarm133 MFC33 Offline[DI-383]" />
<IoMfc3 id="Mfc35" display="Mfc35" schematicId="Mfc35" unit="sccm" aiActMode="AI_M35ActMode" aoSetMode="AO_M35CtrlMode" aiFlow="AI_M35" aoFlow="AO_M35" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC35Offline" AlarmText="Alarm135 MFC35 Offline[DI-385]" />
<IoMfc3 id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36Offline" AlarmText="Alarm136 MFC36 Offline[DI-386]" />
<IoMfc3 id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" AlarmText="Alarm137 MFC37 Offline[DI-387]" />
<IoMfc3 id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" AlarmText="Alarm138 MFC38 Offline[DI-388]" />
</IoMfcs>
<IoPressureMeters classType="Aitex.Core.RT.Device.Devices.IoPressure" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPressureMeter id="Pressure1" display="PC1" schematicId="Pressure1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC01Offline" AlarmText="Alarm141 PC1 Offline[DI-391]" />
<IoPressureMeter id="Pressure2" display="PC2" schematicId="Pressure2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve" aiActMode="AI_PC2ActMode" aoSetMode="AO_PC2CtrlMode" aiValue="AI_PressCtrl2" aoValue="AO_PressCtrl2" formatString="0.0" diAlarm="DI_PC02Offline" AlarmText="Alarm142 PC2 Offline[DI-392]" />
<IoPressureMeter id="Pressure3" display="PC3" schematicId="Pressure3" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC3Valve" aiActMode="AI_PC3ActMode" aoSetMode="AO_PC3CtrlMode" aiValue="AI_PressCtrl3" aoValue="AO_PressCtrl3" formatString="0.0" diAlarm="DI_PC03Offline" AlarmText="Alarm143 PC3 Offline[DI-393]" />
<IoPressureMeter id="Pressure4" display="PC4" schematicId="Pressure4" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC4Valve" aiActMode="AI_PC4ActMode" aoSetMode="AO_PC4CtrlMode" aiValue="AI_PressCtrl4" aoValue="AO_PressCtrl4" formatString="0.0" diAlarm="DI_PC04Offline" AlarmText="Alarm144 PC4 Offline[DI-394]" />
<IoPressureMeter id="Pressure5" display="PC5" schematicId="Pressure5" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC5Valve" aiActMode="AI_PC5ActMode" aoSetMode="AO_PC5CtrlMode" aiValue="AI_PressCtrl5" aoValue="AO_PressCtrl5" formatString="0.0" diAlarm="DI_PC05Offline" AlarmText="Alarm145 PC5 Offline[DI-395]" />
<IoPressureMeter id="Pressure6" display="PC6" schematicId="Pressure6" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC6Valve" aiActMode="AI_PC6ActMode" aoSetMode="AO_PC6CtrlMode" aiValue="AI_PressCtrl6" aoValue="AO_PressCtrl6" formatString="0.0" diAlarm="DI_PC06Offline" AlarmText="Alarm146 PC6 Offline[DI-396]" />
<IoPressureMeter id="Pressure7" display="PC7" schematicId="Pressure7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve" aiActMode="AI_PC7ActMode" aoSetMode="AO_PC7CtrlMode" aiValue="AI_PressCtrl7" aoValue="AO_PressCtrl7" formatString="0.0" diAlarm="DI_PC07Offline" AlarmText="Alarm147 PC7 Offline[DI-397]" />
<IoPressureMeter id="PT1" display="PT1" schematicId="PT1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ChamPress" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT2" display="PT2" schematicId="PT2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ForelinePress" aoValue="" formatString="0.0" />
</IoPressureMeters>
<IoWaterFlows classType="Aitex.Core.RT.Device.Devices.IoWaterFlow" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoWaterFlow id="SHFlowTemp" module="" display="SHFlow Temp" schematicId="SHFlowTemp" unit="" aioType="float" aiFeedback="AI_SHFlowTemp" diFlowSW="DI_SHFlowSW" />
<IoWaterFlow id="ChamTopFlowTemp" module="" display="ChamTopFlowTemp" schematicId="ChamTopFlowTemp" unit="" aioType="float" aiFeedback="AI_ChamTopFlowTemp" diFlowSW="DI_ChamTopFlowSW" />
<IoWaterFlow id="ChamMiddleFlowTemp" module="" display="ChamMiddleFlow Temp" schematicId="ChamMiddleFlowTemp" unit="" aioType="float" aiFeedback="AI_ChamMiddleFlow1Temp" diFlowSW="DI_ChamMiddleFlow1SW" />
<IoWaterFlow id="ChamMiddleFlow2Temp" module="" display="ChamMiddleFlow2 Temp" schematicId="ChamMiddleFlow2Temp" unit="" aioType="float" aiFeedback="AI_ChamMiddleFlow2Temp" diFlowSW="DI_ChamMiddleFlow2SW" />
<IoWaterFlow id="ChamBottomFlowTemp" module="" display="ChamBottomFlow Temp" schematicId="ChamBottomFlowTemp" unit="" aioType="float" aiFeedback="AI_ChamBottomFlowTemp" diFlowSW="DI_ChamBottomFlowSW" />
<IoWaterFlow id="BottomPlateFlowTemp" module="" display="BottomPlateFlow Temp" schematicId="BottomPlateFlowTemp" unit="" aioType="float" aiFeedback="" diFlowSW="" />
<IoWaterFlow id="PowerRod1FlowTemp" module="" display="PowerRod1Flow Temp" schematicId="PowerRod1FlowTemp" unit="" aioType="float" aiFeedback="AI_PowerRod1FlowTemp" diFlowSW="DI_PowerRod1FlowSW" />
<IoWaterFlow id="PowerRod2FlowTemp" module="" display="PowerRod2Flow Temp" schematicId="PowerRod2FlowTemp" unit="" aioType="float" aiFeedback="AI_PowerRod2FlowTemp" diFlowSW="DI_PowerRod2FlowSW" />
<IoWaterFlow id="ForelineColdTrapFlowTemp" module="" display="Foreline ColdTrap Flow Temp" schematicId="ForelineColdTrapFlowTemp" unit="" aioType="float" aiFeedback="AI_ForelineFlow2SW" diFlowSW="DI_ForelineFlow2SW" />
<IoWaterFlow id="InSituFlowTemp" module="" display="InSituFlow Temp" schematicId="InSituFlowTemp" unit="" aioType="float" aiFeedback="AI_ElectrodeWFlowTemp" diFlowSW="DI_ElectrodeWFlowSW" />
<IoWaterFlow id="TMPump1FlowTemp" module="" display="TMPump1FlowTemp" schematicId="TMPump1FlowTemp" unit="" aioType="float" aiFeedback="AI_TMPumpFIowSW" diFlowSW="DI_TMPumpFIowSW" />
<IoWaterFlow id="TMPump2FlowTemp" module="" display="TMPump2FlowTemp" schematicId="TMPump2FlowTemp" unit="" aioType="float" aiFeedback="AI_ForelineFlow1SW" diFlowSW="DI_ForelineFlow1SW" />
<IoWaterFlow id="TMFlow1Temp" module="" display="InletTotalFlow Temp" schematicId="InletTotalFlowTemp" unit="" aioType="float" aiFeedback="AI_TMTopLidFlowTemp" diFlowSW="DI_TMBufferFlowSW" />
<IoWaterFlow id="TMFlow2Temp" module="" display="InletTotalFlow2 Temp" schematicId="InletTotalFlow2Temp" unit="" aioType="float" aiFeedback="AI_TMBufferFlowTemp" diFlowSW="DI_TMTopLidFlowSW" />
<IoWaterFlow id="TransformerFlowTemp" module="" display="TransformerFlow Temp" schematicId="TransformerFlowTemp" unit="" aioType="float" aiFeedback="AI_TransformerFlowTemp" diFlowSW="DI_TransformerFlowSW" />
</IoWaterFlows>
<IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPumpFlow="DI_DryPumpFlowSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
</IoPumps>
<IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPTOffsetAndK id="PT1OffsetAndK" module="" display="PT1" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset" aoK="AO_PT1_K" />
<IoPTOffsetAndK id="PT2OffsetAndK" module="" display="PT2" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_Offset" aoK="AO_PT2_K" />
<IoPTOffsetAndK id="PT3OffsetAndK" module="" display="PT3" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_Offset" aoK="AO_PT3_K" />
<IoPTOffsetAndK id="PT4OffsetAndK" module="" display="PT4" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_Offset" aoK="AO_PT4_K" />
<IoPTOffsetAndK id="PT9OffsetAndK" module="" display="PT9" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_Offset" aoK="AO_PT9_K" />
<IoPTOffsetAndK id="PT10OffsetAndK" module="" display="PT10" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_Offset" aoK="AO_PT10_K" />
<IoPTOffsetAndK id="AO_AI2_OffsetAndK" module="" display="AI2" schematicId="" unit="" aioType="float" aoOffset="AO_AI2_Offset" />
<IoPTOffsetAndK id="AO_AI3_OffsetAndK" module="" display="AI3" schematicId="" unit="" aioType="float" aoOffset="AO_AI3_Offset" />
<IoPTOffsetAndK id="AO_AI4_OffsetAndK" module="" display="AI4" schematicId="" unit="" aioType="float" aoOffset="AO_AI4_Offset" />
<IoPTOffsetAndK id="AO_AI5_OffsetAndK" module="" display="AI5" schematicId="" unit="" aioType="float" aoOffset="AO_AI5_Offset" />
<IoPTOffsetAndK id="AO_AI6_OffsetAndK" module="" display="AI6" schematicId="" unit="" aioType="float" aoOffset="AO_AI6_Offset" />
<IoPTOffsetAndK id="AO_AI7_OffsetAndK" module="" display="AI7" schematicId="" unit="" aioType="float" aoOffset="AO_AI7_Offset" />
<IoPTOffsetAndK id="AO_AI8_OffsetAndK" module="" display="AI8" schematicId="" unit="" aioType="float" aoOffset="AO_AI8_Offset" />
<IoPTOffsetAndK id="AO_AI9_OffsetAndK" module="" display="AI9" schematicId="" unit="" aioType="float" aoOffset="AO_AI9_Offset" />
<IoPTOffsetAndK id="AO_AI10_OffsetAndK" module="" display="AI10" schematicId="" unit="" aioType="float" aoOffset="AO_AI10_Offset" />
<IoPTOffsetAndK id="AO_AI11_OffsetAndK" module="" display="AI11" schematicId="" unit="" aioType="float" aoOffset="AO_AI11_Offset" />
<IoPTOffsetAndK id="AO_AI12_OffsetAndK" module="" display="AI12" schematicId="" unit="" aioType="float" aoOffset="AO_AI12_Offset" />
<IoPTOffsetAndK id="AO_AI13_OffsetAndK" module="" display="AI13" schematicId="" unit="" aioType="float" aoOffset="AO_AI13_Offset" />
<IoPTOffsetAndK id="AO_AI14_OffsetAndK" module="" display="AI14" schematicId="" unit="" aioType="float" aoOffset="AO_AI14_Offset" />
<IoPTOffsetAndK id="AO_AI15_OffsetAndK" module="" display="AI15" schematicId="" unit="" aioType="float" aoOffset="AO_AI15_Offset" />
</IoPTOffsetAndKs>
<DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSucceed" infoText="" warningText="" alarmText="" />
</DoSensors>
<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText="Alarm2 Chamber Press Above ATM [DI-4]" />
<IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamAtSafeProcessPressSW" infoText="Information1 Chamber At Safe Process Press [DI-5]" warningText="" alarmText="" />
<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMATMSW" infoText="Information3 PM At ATM [DI-9]" warningText="" alarmText="" />
<IoSensor id="SensorHeaterTempBelow900CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_HeaterTempLowLimitSW" infoText="Information4 Heater Temp Below 900C [DI-11]" warningText="" alarmText="" />
<IoSensor id="SensorConfinementRingUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingUp" infoText="Information5 Confinement Ring At Up Position [DI-12]" warningText="" alarmText="" />
<IoSensor id="SensorSusceptorAtSafeSpeed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SusceptorAtSafeSpeed" infoText="Information6 Susceptor At Safe Speed [DI-13]" warningText="" alarmText="" />
<IoSensor id="SensorChamLidPushButtonLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidPushButtonLocal" infoText="Information7 Chamer Lid Push Button On Local Mode [DI-49]" warningText="" alarmText="" />
<IoSensor id="SensorConfinementRingDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingDown" infoText="Information8 Confinement Ring At Down position [DI-50]" warningText="" alarmText="" />
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning1 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
<IoSensor id="SensorInletTotalFlowLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowLowSW" infoText="" warningText="" alarmText="Alarm16 Chamber Cooling Water Pressure Low [DI-27]" />
<IoSensor id="SensorInletTotalFlowHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowHighSW" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure High [DI-28]" />
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
<IoSensor id="SensorTCSAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TCSAlarm" infoText="" warningText="" alarmText="Alarm28 TCS.Alarm [DI-43]" />
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
<IoSensor id="SensorTMFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMBufferFlowSW" infoText="" warningText="Warning5 TM Buffer Low Flow -U13 [DI-47]" alarmText="" />
<IoSensor id="SensorReactorHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorHCLDetectorSW" infoText="" warningText="" alarmText="Alarm31 ReactorHCLDetector [DI-52]" />
<IoSensor id="SensorUPS1Enable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1Enable" infoText="" warningText="" alarmText="Alarm40 UPS1.Enable [DI-78]" />
<IoSensor id="SensorUPS2Enable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS2Enable" infoText="" warningText="" alarmText="Alarm41 UPS2.Enable [DI-79]" />
<IoSensor id="SensorUPS1LowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1LowBattery" infoText="" warningText="" alarmText="Alarm43 UPS1.LowBattery [DI-84]" />
<IoSensor id="SensorUPS2LowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS2LowBattery" infoText="" warningText="" alarmText="Alarm44 UPS2.LowBattery [DI-85]" />
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning10 DryPump1 Warning [DI-67]" alarmText="" />
<IoSensor id="SensorEMOStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_EMOStatusSW" infoText="" warningText="" alarmText="Alarm37 EMOStatus [DI-70]" />
<IoSensor id="SensorPRWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackWaterLeakSW" infoText="" warningText="Warning11 Power Rack Water Leak [DI-77]" alarmText="" />
<IoSensor id="SensorSHLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHLidClosed" infoText="" warningText="Warning13 SH Lid Opened [DI-106]" alarmText="" />
<IoSensor id="SensorMiddleLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MiddleLidClosed" infoText="" warningText="Warning14 Middle Lid Opened [DI-120]" alarmText="" />
<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="Info13 PSU1 Status Is Off[DI-296]" warningText="Warning16 PSU1 Status Is Off[DI-296]" alarmText="" />
<IoSensor id="SensorPSU2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU2Status" infoText="Info14 PSU2 Status Is Off[DI-297]" warningText="Warning17 PSU2 Status Is Off[DI-297]" alarmText="" />
<IoSensor id="SensorPSU3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU3Status" infoText="Info15 PSU3 Status Is Off[DI-298]" warningText="Warning18 PSU3 Status Is Off[DI-298]" alarmText="" />
<IoSensor id="SensorSCR1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR1Status" infoText="Info16 SCR1 Status Is Off[DI-302]" warningText="Warning19 SCR1 Status Is Off[DI-302]" alarmText="" />
<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="Info17 SCR2 Status Is Off[DI-303]" warningText="Warning20 SCR2 Status Is Off[DI-303]" alarmText="" />
<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="Info18 SCR3 Status Is Off[DI-304]" warningText="Warning21 SCR3 Status Is Off[DI-304]" alarmText="" />
<IoSensor id="SensorPSUInnerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempHAlarm" infoText="" warningText="Warning22 PSU Inner.Temp High [DI-305]" alarmText="" />
<IoSensor id="SensorPSUMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempHAlarm" infoText="" warningText="Warning23 PSU Middle.Temp High [DI-306]" alarmText="" />
<IoSensor id="SensorPSUOuterTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempHAlarm" infoText="" warningText="Warning24 PSU Outer.Temp High [DI-307]" alarmText="" />
<IoSensor id="SensorSCRUpperTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempHAlarm" infoText="" warningText="Warning25 SCR Upper TempHigh [DI-311]" alarmText="" />
<IoSensor id="SensorSCRMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempHAlarm" infoText="" warningText="Warning26 SCR Middle TempHigh [DI-312]" alarmText="" />
<IoSensor id="SensorSCRLowerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempHAlarm" infoText="" warningText="Warning27 SCR Lower TempHigh [DI-313]" alarmText="" />
<IoSensor id="SensorChamLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidClosed" infoText="" warningText="" alarmText="Alarm1 Chamber Lid Opened [DI-0]" />
<IoSensor id="SensorMiddleFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow2SW" infoText="" warningText="" alarmText="Alarm30Chamber Middle2 Cooling Water Flow Abnormal U4[DI-46]" />
<IoSensor id="SensorHeaterTempUp1680CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HeaterTempUpLimitSW" infoText="" warningText="" alarmText="Alarm3 Heater Controller1 Present Temp High [DI-10]" />
<IoSensor id="SensorSHFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHFlowSW" infoText="" warningText="" alarmText="Alarm4 SH Cooling Water Low Flow -U1 [DI-15]" />
<IoSensor id="SensorChamTopFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW" infoText="" warningText="" alarmText="Alarm5 Chamber Top Cooling Water Low Flow -U2 [DI-16]" />
<IoSensor id="SensorChamMiddleFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW" infoText="" warningText="" alarmText="Alarm6 Chamber Middle1 Cooling Water Flow Abnormal -U3 [DI-17]" />
<IoSensor id="SensorChamBottomFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW" infoText="" warningText="" alarmText="Alarm7 Chamber Bottom Cooling Water Flow Abnormal -U5 [DI-18]" />
<IoSensor id="SensorTMPump2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ForelineFlow1SW" infoText="Information39 Spare Water Low Flow -U6 [DI-19]" warningText="" alarmText="" />
<IoSensor id="SensorPowerRodFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW" infoText="" warningText="" alarmText="Alarm9 Power Rod1 Cooling Water Low Flow -U7 [DI-20]" />
<IoSensor id="SensorPowerRodFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW" infoText="" warningText="" alarmText="Alarm10 Power Rod2 Cooling Water Low Flow -U8 [DI-21]" />
<IoSensor id="SensorForelineFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ForelineFlow2SW" infoText="" warningText="" alarmText="Alarm11 Foreline Cooling Water Low Flow -U9 [DI-22]" />
<IoSensor id="SensorInSituFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ElectrodeWFlowSW" infoText="" warningText="" alarmText="Alarm12 Electrode-W Cooling Water Low Flow -U10 [DI-23]" />
<IoSensor id="SensorTMPump1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMPumpFIowSW" infoText="" warningText="Alarm13 TMPump1 Cooling Water Low Flow -U11 [DI-24]" alarmText="" />
<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm14 Transformer Cooling Water Low Flow -U14 [DI-25]" />
<!--<IoSensor id="SensorTMFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMTopLidFlowSW" infoText="" warningText="" alarmText="Alarm15 TM Pump Low Flow -U12 [DI-26]" />-->
<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm19 PM H2 Leak Detect [DI-30]" />
<IoSensor id="SensorGBHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBHCLDetectorSW" infoText="" warningText="" alarmText="Alarm20 Gasbox HCL Leak Detect [DI-31]" />
<IoSensor id="SensorGBExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW" infoText="" warningText="" alarmText="Alarm21 Gasbox Exhaust DP Error [DI-32]" />
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
<IoSensor id="SensorDryPumpAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpAlarm" infoText="" warningText="" alarmText="Alarm22 DryPump.Alarm [DI-36]" />
<IoSensor id="SensorPumpExhaustPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW" infoText="" warningText="" alarmText="Alarm23 Pump Exhaust Pressure Abnormal [DI-38]" />
<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="" alarmText="Alarm24 PM Exhaust DP Error [DI-39]" />
<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="" alarmText="Alarm25 Pump Exhaust DP Error [DI-40]" />
<IoSensor id="SensorScrubberIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW" infoText="" warningText="" alarmText="Alarm26 Scrubber System Error [DI-41]" />
<IoSensor id="SensorFacilityIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW" infoText="" warningText="" alarmText="Alarm27 Facility Error [DI-42]" />
<IoSensor id="SensorServoDriverFaultSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoDriverFaultSW" infoText="" warningText="" alarmText="Alarm29 Rotation Servo Driver Error [DI-45]" />
<IoSensor id="SensorGN2InletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_GN2InletPressSW" infoText="" warningText="" alarmText="Alarm32 Gasbox N2 Pressure Low [DI-55]" />
<IoSensor id="SensorArInletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ArInletPressSW" infoText="" warningText="" alarmText="Alarm33 Gasbox Ar Pressure Low [DI-56]" />
<IoSensor id="SensorH2PressureSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_H2PressureSW" infoText="" warningText="" alarmText="Alarm34 Gasbox H2 Pressure Low [DI-57]" />
<IoSensor id="SensorGBH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2DetectorSW" infoText="" warningText="" alarmText="Alarm35 Gasbox H2 Leak Detect [DI-59]" />
<IoSensor id="SensorDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Running" infoText="" warningText="" alarmText="Alarm36 DryPump1 Not Running [DI-65]" />
<IoSensor id="SensorFacilityWarningSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityWarningSW" infoText="" warningText="" alarmText="Alarm38 Facility Equipment Alarm [DI-72]" />
<IoSensor id="SensorMainCBStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MainCBStatusSW" infoText="" warningText="" alarmText="Alarm39 Main CB Status Off [DI-76]" />
<IoSensor id="SensorProcessStopSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ProcessStopSW" infoText="" warningText="" alarmText="Alarm42 Process Stop [DI-81]" />
<IoSensor id="SensorPSU1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1Alarm" infoText="" warningText="" alarmText="Alarm66 PSU1.Alarm [DI-320]" />
<IoSensor id="SensorPSU2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2Alarm" infoText="" warningText="" alarmText="Alarm67 PSU2.Alarm [DI-321]" />
<IoSensor id="SensorPSU3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3Alarm" infoText="" warningText="" alarmText="Alarm68 PSU3.Alarm [DI-322]" />
<IoSensor id="SensorSCR1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR1Alarm" infoText="" warningText="" alarmText="Alarm69 SCR1.Alarm [DI-323]" />
<IoSensor id="SensorSCR2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR2Alarm" infoText="" warningText="" alarmText="Alarm70 SCR2.Alarm [DI-324]" />
<IoSensor id="SensorSCR3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR3Alarm" infoText="" warningText="" alarmText="Alarm71 SCR3.Alarm [DI-325]" />
<IoSensor id="SensorPSUTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUdpCommunicationError" infoText="" warningText="" alarmText="Alarm72 PSU dp Communication Error [DI-328]" />
<IoSensor id="SensorSCRTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRTCDPCommunicationError" infoText="" warningText="" alarmText="Alarm73 SCR dp Communication Error [DI-329]" />
<IoSensor id="SensorPSU1dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1dpCommunicationError" infoText="" warningText="" alarmText="Alarm74 PSU-1 dp Communication Error [DI-330]" />
<IoSensor id="SensorPSU2dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2dpCommunicationError" infoText="" warningText="" alarmText="Alarm75 PSU-2 dp Communication Error [DI-331]" />
<IoSensor id="SensorPSU3dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3dpCommunicationError" infoText="" warningText="" alarmText="Alarm76 PSU-3 dp Communication Error [DI-332]" />
<IoSensor id="SensorSCRdpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRdpCommunicationError" infoText="" warningText="" alarmText="Alarm77 SCR dp Communication Error [DI-333]" />
<IoSensor id="SensorHearbeatTimeout" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HearbeatTimeout" infoText="" warningText="" alarmText="Alarm100 PM Hearbeat Timeout [DI-350]" />
<IoSensor id="SensorMFC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC01Offline" infoText="" warningText="" alarmText="Alarm101 MFC01 Offline [DI-351]" />
<IoSensor id="SensorMFC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC02Offline" infoText="" warningText="" alarmText="Alarm102 MFC02 Offline [DI-352]" />
<IoSensor id="SensorMFC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC03Offline" infoText="" warningText="" alarmText="Alarm103 MFC03 Offline [DI-353]" />
<IoSensor id="SensorMFC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC04Offline" infoText="" warningText="" alarmText="Alarm104 MFC04 Offline [DI-354]" />
<IoSensor id="SensorMFC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC05Offline" infoText="" warningText="" alarmText="Alarm105 MFC05 Offline [DI-355]" />
<IoSensor id="SensorMFC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC06Offline" infoText="" warningText="" alarmText="Alarm106 MFC06 Offline [DI-356]" />
<IoSensor id="SensorMFC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC09Offline" infoText="" warningText="" alarmText="Alarm109 MFC09 Offline [DI-359]" />
<IoSensor id="SensorMFC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC10Offline" infoText="" warningText="" alarmText="Alarm110 MFC10 Offline [DI-360]" />
<IoSensor id="SensorMFC11Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC11Offline" infoText="" warningText="" alarmText="Alarm111 MFC11 Offline [DI-361]" />
<IoSensor id="SensorMFC12Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC12Offline" infoText="" warningText="" alarmText="Alarm112 MFC12 Offline [DI-362]" />
<IoSensor id="SensorMFC13Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC13Offline" infoText="" warningText="" alarmText="Alarm113 MFC13 Offline [DI-363]" />
<IoSensor id="SensorMFC14Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC14Offline" infoText="" warningText="" alarmText="Alarm114 MFC14 Offline [DI-364]" />
<IoSensor id="SensorMFC15Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC15Offline" infoText="" warningText="" alarmText="Alarm115 MFC15 Offline [DI-365]" />
<IoSensor id="SensorMFC16Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC16Offline" infoText="" warningText="" alarmText="Alarm116 MFC16 Offline [DI-366]" />
<IoSensor id="SensorMFC19Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC19Offline" infoText="" warningText="" alarmText="Alarm119 MFC19 Offline [DI-369]" />
<IoSensor id="SensorMFC20Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC20Offline" infoText="" warningText="" alarmText="Alarm120 MFC20 Offline [DI-370]" />
<IoSensor id="SensorMFC22Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC22Offline" infoText="" warningText="" alarmText="Alarm122 MFC22 Offline [DI-372]" />
<IoSensor id="SensorMFC23Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC23Offline" infoText="" warningText="" alarmText="Alarm123 MFC23 Offline [DI-373]" />
<IoSensor id="SensorMFC26Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC26Offline" infoText="" warningText="" alarmText="Alarm126 MFC26 Offline [DI-376]" />
<IoSensor id="SensorMFC27Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC27Offline" infoText="" warningText="" alarmText="Alarm127 MFC27 Offline [DI-377]" />
<IoSensor id="SensorMFC28Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC28Offline" infoText="" warningText="" alarmText="Alarm128 MFC28 Offline [DI-378]" />
<IoSensor id="SensorMFC29Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC29Offline" infoText="" warningText="" alarmText="Alarm129 MFC29 Offline [DI-379]" />
<IoSensor id="SensorMFC31Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC31Offline" infoText="" warningText="" alarmText="Alarm131 MFC31 Offline [DI-381]" />
<IoSensor id="SensorMFC32Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC32Offline" infoText="" warningText="" alarmText="Alarm132 MFC32 Offline [DI-382]" />
<IoSensor id="SensorMFC33Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC33Offline" infoText="" warningText="" alarmText="Alarm133 MFC33 Offline [DI-383]" />
<IoSensor id="SensorMFC35Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC35Offline" infoText="" warningText="" alarmText="Alarm135 MFC35 Offline [DI-385]" />
<IoSensor id="SensorMFC36Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC36Offline" infoText="" warningText="" alarmText="Alarm136 MFC36 Offline [DI-386]" />
<IoSensor id="SensorMFC37Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC37Offline" infoText="" warningText="" alarmText="Alarm137 MFC37 Offline [DI-387]" />
<IoSensor id="SensorMFC38Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC38Offline" infoText="" warningText="" alarmText="Alarm138 MFC38 Offline [DI-388]" />
<IoSensor id="SensorMFC40Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC40Offline" infoText="" warningText="" alarmText="Alarm140 MFC40 Offline [DI-390]" />
<IoSensor id="SensorPC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC01Offline" infoText="" warningText="" alarmText="Alarm141 PC1 Offline [DI-391]" />
<IoSensor id="SensorPC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC02Offline" infoText="" warningText="" alarmText="Alarm142 PC2 Offline [DI-392]" />
<IoSensor id="SensorPC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC03Offline" infoText="" warningText="" alarmText="Alarm143 PC3 Offline [DI-393]" />
<IoSensor id="SensorPC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC04Offline" infoText="" warningText="" alarmText="Alarm144 PC4 Offline [DI-394]" />
<IoSensor id="SensorPC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC05Offline" infoText="" warningText="" alarmText="Alarm145 PC5 Offline [DI-395]" />
<IoSensor id="SensorPC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC06Offline" infoText="" warningText="" alarmText="Alarm146 PC6 Offline [DI-396]" />
<IoSensor id="SensorPC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC07Offline" infoText="" warningText="" alarmText="Alarm147 PC7 Offline [DI-397]" />
<IoSensor id="SensorReactorSuspectorCheck" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorSuspectorCheck" infoText="Information9 ReactorSuspectorCheck [DI-51]" warningText="" alarmText="" />
<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DORPressVacSW" infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="" alarmText="" />
<IoSensor id="SensorShutterDownLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterDownLimitSW" infoText="" warningText="" alarmText="" />
<IoSensor id="SensorTransformerOTSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TransformerOTSW" infoText="" warningText="" alarmText="" />
<IoSensor id="SensorManualLidOPLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidOPLocal" infoText="Information10 ManualLidOP.Local[DI-88]" warningText="" alarmText="" />
<IoSensor id="SensorManualLidUpPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidUpPB" infoText="Information11 ManualLidUp.PB[DI-89]" warningText="" alarmText="" />
<IoSensor id="SensorManualLidDownPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidDownPB" infoText="Information12 ManualLidDown.PB[DI-90]" warningText="" alarmText="" />
<IoSensor id="SensorManualLidUpLockPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidUpLockPB" infoText="Information13 ManualLidUpLock.PB[DI-91]" warningText="" alarmText="" />
<IoSensor id="SensorManualLidForwardPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidForwardPB" infoText="Information14 ManualLidForward.PB[DI-92]" warningText="" alarmText="" />
<IoSensor id="SensorManualLidBackwardPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidBackwardPB" infoText="Information15 ManualLidBackward.PB[DI-93]" warningText="" alarmText="" />
<IoSensor id="SensorChamMoveBodyUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUp" infoText="Information16 ChamMoveBody.Up[DI-96]" warningText="" alarmText="" />
<IoSensor id="SensorChamMoveBodyUpLatchFW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUpLatchFW" infoText="Information17 ChamMoveBody.Up.LatchFW[DI-97]" warningText="" alarmText="" />
<IoSensor id="SensorChamMoveBodyDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyDown" infoText="Information18 ChamMoveBody.Down[DI-98]" warningText="" alarmText="" />
<IoSensor id="SensorChamMoveBodyFront" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyFront" infoText="Information19 ChamMoveBody.Front[DI-99]" warningText="" alarmText="" />
<IoSensor id="SensorChamMoveBodyEnd" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEnd" infoText="Information20 ChamMoveBody.End[DI-100]" warningText="" alarmText="" />
<IoSensor id="SensorChamMoveBodyEndLatchBW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEndLatchBW" infoText="Information21 ChamMoveBody.End.LatchBW[DI-101]" warningText="" alarmText="" />
<IoSensor id="SensorSHGasConnectorLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorLoosen" infoText="Information22 SH.GasConnector.Loosen[DI-102]" warningText="" alarmText="" />
<IoSensor id="SensorSHGasConnectorTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorTighten" infoText="Information23 SH.GasConnector.Tighten[DI-103]" warningText="" alarmText="" />
<IoSensor id="SensorSHLidLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidLoosen" infoText="Information24 SH.Lid.Loosen[DI-104]" warningText="" alarmText="" />
<IoSensor id="SensorSHLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidTighten" infoText="Information25 SH.Lid.Tighten[DI-105]" warningText="" alarmText="" />
<IoSensor id="SensorSHLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingLock" infoText="Information26 SH.Lid.Swing.Lock[DI-107]" warningText="" alarmText="" />
<IoSensor id="SensorSHLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingUnlock" infoText="Information27 SH.Lid.Swing.Unlock[DI-108]" warningText="" alarmText="" />
<IoSensor id="SensorMiddleLidLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidLoosen" infoText="Information28 Middle.Lid.Loosen[DI-118]" warningText="" alarmText="" />
<IoSensor id="SensorMiddleLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten" infoText="Information29 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information30 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information31 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
<IoSensor id="SensorServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoReady" infoText="" warningText="Warning15 Servo Not Ready [DI-288]" alarmText="" />
<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
<IoSensor id="SensorPSUMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempLAlarm" infoText="Information33 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
<IoSensor id="SensorPSUOuterTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempLAlarm" infoText="Information34 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
<IoSensor id="SensorSCRUpperTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempLAlarm" infoText="Information35 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
<IoSensor id="SensorSCRMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempLAlarm" infoText="Information36 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
<IoSensor id="SensorSCRLowerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempLAlarm" infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />
<IoSensor id="SensorConfinementRingServoON" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoON" infoText="Information38 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
<IoSensor id="SensorConfinementRingServoError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoError" infoText="" warningText="Warning28 ConfinementRingServoError [DI-342]" alarmText="" />
<IoSensor id="SensorChamPressAboveATMSW2" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamPressAboveATMSW2" infoText="" warningText="" alarmText="Alarm98 Chamber Press Above ATM [DI-345]" />
<IoSensor id="SensorEtherCATcomError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_EtherCATcomError" infoText="" warningText="" alarmText="Alarm99 EtherCATcomError [DI-349]" />
<IoSensor id="SensorMFC25Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC25Offline" infoText="" warningText="" alarmText="Alarm125 MFC25 Offline [DI-375]" />
<IoSensor id="SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow2Temp" infoText="" warningText="" alarmText="Alarm48 Chamber Middle Flow2 Cooling Water Over Temp -U4 [DO195]" />
<IoSensor id="SensorSHFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SHFlowTemp" infoText="" warningText="" alarmText="Alarm45 SH Cooling Water Temp Over Temp -U1 [DO196]" />
<IoSensor id="SensorChamTopFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamTopFlowTemp" infoText="" warningText="" alarmText="Alarm46 Chamber Top Cooling Water Over Temp -U2 [DO197]" />
<IoSensor id="SensorChamMiddleFlow1Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow1Temp" infoText="" warningText="" alarmText="Alarm47 Chamber Middle Flow1 Cooling Water Over Temp -U3 [DO198]" />
<IoSensor id="SensorChamBottomFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamBottomFlowTemp" infoText="" warningText="" alarmText="Alarm49 Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
<IoSensor id="SensorSpareFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare1FlowTemp" infoText="" warningText="" alarmText="Alarm50 Spare Cooling Water Over Temp -U6 [DO200]" />
<IoSensor id="SensorPowerRod1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod1FlowTemp" infoText="" warningText="" alarmText="Alarm51 Power Rod1 Cooling Water Over Temp -U7 [DO201]" />
<IoSensor id="SensorPowerRod2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod2FlowTemp" infoText="" warningText="" alarmText="Alarm52 Power Rod2 Cooling Water Over Temp -U8 [DO202]" />
<IoSensor id="SensorForelineFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ForelineFlowTemp" infoText="" warningText="" alarmText="Alarm53 Foreline Cooling Water Over Temp -U9 [DO203]" />
<IoSensor id="SensorElectrode-WFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ElectrodeWFlowTemp" infoText="" warningText="" alarmText="Alarm54 Electrode-W Cooling Water Over Temp -U10 [DO204]" />
<IoSensor id="SensorTMPump1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TMPump1and2FlowTemp" infoText="" warningText="" alarmText="Alarm55 TMPump1 Cooling Water Over Temp -U11 [DO205]" />
<IoSensor id="SensorTransformerFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TransformerFlowTemp" infoText="" warningText="" alarmText="Alarm58 Transformer Cooling Water Over Temp -U14 [DO206]" />
<IoSensor id="SensorTMTopLidFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TMTopLidFlowTemp" infoText="" warningText="" alarmText="Alarm56 TMTopLid Cooling Water Over Temp -U12 [DO207]" />
<IoSensor id="SensorTMBufferFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TMBufferFlowTemp" infoText="" warningText="" alarmText="Alarm57 TMBuffer Cooling Water Over Temp -U13 [DO208]" />
<IoSensor id="SensorPyroCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_PyroCommunicationError" infoText="" warningText="" alarmText="Alarm59 Pyro Communication Error [DO220]" />
<IoSensor id="SensorTC1PyroWarmMaxDiff" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_TC1PyroWarmMaxDiff" infoText="" warningText="" alarmText="Alarm60 Pyro Warm Max Diff [DO230]" />
<IoSensor id="SensorTC1AETempRasisingFast" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_TC1AETempRasisingFast" infoText="" warningText="" alarmText="Alarm61 PyroTemp Rasising Fast [DO231]" />
</IoSensors>
<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float" aiActualSpeed="AI_ActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC" aoActualSpeedSetPoint="AO_SpindleSpeed" aoAccSpeedSetPoint="AO_SpindleACC" aoDecSpeedSetPoint="AO_SpindleDEC" diServoReady="DI_ServoReady" diServoError="DI_ServoDriverFaultSW" doServoEnable="DO_ServoEnable" doServoInital="DO_ServoInitial" doServoReset="DO_ServoReset" />
</SicServos>
<SicAETemps classType="Aitex.Core.RT.Device.Devices.SicAETemp" assembly="MECF.Framework.RT.EquipmentLibrary">
<SicAETemp id="PMAETemp" module="" display="PMAETemp" schematicId="PMAETemp" doPyroCommunicationError="DO_PyroCommunicationError" EnableLogMessage="True" />
</SicAETemps>
<IoSignalTowers classType="Aitex.Core.RT.Device.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSignalTower id="SignalTower" module="PM1" display="SignalTower" schematicId="PMSignalTower" doGreen="DO_TowerGreen" doYellow="DO_TowerYellow" doRed="DO_TowerRed" doBuzzer="DO_Buzzer" />
</IoSignalTowers>
<IoChamberMoveBodys classType="Aitex.Core.RT.Device.Devices.IoChamberMoveBody" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoChamberMoveBody id="ChamberMoveBody" module="" display="ChamberMoveBody" schematicId="ChamberMoveBody" unit="" aioType="" diUpFaceback="DI_ChamMoveBodyUp" diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp" doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward" doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW" diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ManualLidUpPB" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
</IoChamberMoveBodys>
<IoGasConnectors classType="Aitex.Core.RT.Device.Devices.IoGasConnector" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoGasConnector id="GasConnector" module="" display="GasConnector" schematicId="GasConnector" unit="" aioType="" diGasConnectorLoosen="DI_SHGasConnectorLoosen" diGasConnectorTighten="DI_SHGasConnectorTighten" doGasConnectorLoosen="DO_SHGasConnectorLoosen" doGasConnectorTighten="DO_SHGasConnectorTighten" />
</IoGasConnectors>
<IoLids classType="Aitex.Core.RT.Device.Devices.IoLid" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoLid id="SHLid" module="" display="SH Lid" schematicId="SHLid" unit="" aioType="" diLoosenFaceback="DI_SHLidLoosen" diTightenFaceback="DI_SHLidTighten" diClosedFaceback="DI_SHLidClosed" doLoosenSetpoint="DO_SHLidLoosen" doTightenSetpoint="DO_SHLidTighten" />
<IoLid id="MiddleLid" module="" display="Middle Lid" schematicId="MiddleLid" unit="" aioType="" diLoosenFaceback="DI_MiddleLidLoosen" diTightenFaceback="DI_MiddleLidTighten" diClosedFaceback="DI_MiddleLidClosed" doLoosenSetpoint="DO_MiddleLidLoosen" doTightenSetpoint="DO_MiddleLidTighten" />
</IoLids>
<IoLidSwings classType="Aitex.Core.RT.Device.Devices.IoLidSwing" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoLidSwing id="SHLidSwing" module="" display="SH Lid Swing" schematicId="SHLidSwing" unit="" aioType="" diLidLockFaceback="DI_SHLidSwingLock" diLidUnlockFaceback="DI_SHLidSwingUnlock" doLidLockSetpoint="DO_SHLidSwingLock" doLidUnlockSetpoint="DO_SHLidSwingUnlock" />
<IoLidSwing id="MiddleLidSwing" module="" display="Middle Lid Swing" schematicId="MiddleLidSwing" unit="" aioType="" diLidLockFaceback="DI_MiddleLidSwingLock" diLidUnlockFaceback="DI_MiddleLidSwingUnlock" doLidLockSetpoint="DO_MiddleLidSwingLock" doLidUnlockSetpoint="DO_MiddleLidSwingUnlock" />
</IoLidSwings>
<IoConfinementRings classType="Aitex.Core.RT.Device.Devices.IoConfinementRing" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoConfinementRing id="ConfinementRing" module="" display="ConfinementRing" schematicId="ConfinementRing" unit="" aioType="" diRingDownFaceback="DI_ConfinementRingDown" diRingUpFaceback="DI_ConfinementRingUp" diRingDone="DI_ConfinementRingDone" diRingServoOn="DI_ConfinementRingServoOn" diRingHomed="DI_ConfinementRingHomed" diRingBusy="DI_ConfinementRingBusy" diRingServoError="DI_ConfinementRingServoError" doRingServoOn="DO_ConfinementRingServoOn" doRingJogUp="DO_ConfinementRingJogUp" doRingJogDown="DO_ConfinementRingJogDown" doRingStop="DO_ConfinementRingStop" doRingTeachUp="DO_ConfinementRingUpPosTeach" doRingTeachDown="DO_ConfinementRingDownPosTeach" doRingMoveUp="DO_ConfinementRingMoveUp" doRingMoveDown="DO_ConfinementRingMoveDown" aiRingCurPos="AI_ConfinementRingCurPos" aiRingUpPos="AI_ConfinementRingUpPos" aiRingDownPos="AI_ConfinementRingDownPos" aoRingMode="AO_ConfinementRingMode" aoRingSpeed="AO_ConfinementRingSpeed" aoRingDistance="AO_ConfinementRingDistance" doRingServoReset="DO_ConfinementRingServoReset" aoRingUpPos="AO_ConfinementRingUpPos" aoRingDownPos="AO_ConfinementRingDownPos" />
</IoConfinementRings>
<IoHeartBeats classType="Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoHeartBeat id="HeartBeat" display="HeartBeat" schematicId="HeartBeat" aioType="float" ai="AI_HeartBeat" ao="AO_HeartBeat" />
</IoHeartBeats>
<IoC2H4s classType="Aitex.Core.RT.Device.PmDevices.IoC2H4" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoC2H4 id="C2H4" display="" schematicId="" unit="" valve1="V58" valve2="V58s" valve3="V59" valve4="V60" valve5="V63" />
</IoC2H4s>
<IoHCls classType="Aitex.Core.RT.Device.PmDevices.IoHCl" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoHCl id="HCl" display="" schematicId="" unit="" valve1="V51" valve2="V51s" valve3="V54" valve4="V54s" />
</IoHCls>
<IoN2Dilutions classType="Aitex.Core.RT.Device.PmDevices.IoN2Dilution" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoN2Dilution id="N2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
</IoN2Dilutions>
<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V40" valve4="V40s" />
</IoN2HighDopings>
<IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
</IoSiH4s>
<IoTCSs classType="Aitex.Core.RT.Device.PmDevices.IoTCS" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoTCS id="TCS" display="" schematicId="" unit="" valve1="V48" valve2="V48s" valve3="V49" valve4="V53" valve5="V53s" />
</IoTCSs>
<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
</IoTMAs>
<IoSHArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSHArH2Switch id="SHArH2Switch" display="" schematicId="" unit="" valve1="V33" valve2="V33s" valve3="V35" valve4="V36" />
</IoSHArH2Switchs>
<IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
</IoPurgeArH2Switchs>
<IoV99s classType="Aitex.Core.RT.Device.PmDevices.IoV99" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoV99 id="Valve99" display="" schematicId="" unit="" valve1="V99" valve2="V99s" />
</IoV99s>
<IoInterLocks classType="Aitex.Core.RT.Device.Devices.IoInterLock" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoInterLock id="PMInterLock" display="" schematicId="" unit="" doLidOpenRoutineSucceed="DO_PurgeRoutineSucceed"
doLidCloseRoutineSucceed="DO_CleanRoutineSucceed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning"
doPumpDownRoutineRunning="DO_PumpRoutineRunning" doVentRoutineRunning="DO_VentRoutineRunning"
doPostProcessRunning="DO_PostProcessRunning" diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW"
doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed" doProcessIdleRunning="DO_ProcessIdleRunning"
doATMIdleRoutineRunning="DO_ATMIdleRoutineRunning" doVACIdleRoutineRunning="DO_VACIdleRoutineRunning" diPSU1Status="DI_PSU1Status"
diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status" diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
doPSU1Enable="DO_PSU1Enable" doPSU2Enable="DO_PSU2Enable" doPSU3Enable="DO_PSU3Enable" doSCR1Enable="DO_SCR1Enable"
doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable" doTCSSupply="DO_TCSFluidInfusion" aiTempCtrl1="AI_PSUTC"
doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady" diPMATMSW="DI_PMATMSW"
aiActualSpeed="AI_ActualSpeed" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
doPMASlitDoorClosed="DO_SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown"
aiChamPress="AI_ChamPress" doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp"
doSHFlowTemp="DO_SHFlowTemp"
doChamTopFlowTemp="DO_ChamTopFlowTemp"
doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
doChamBottomFlowTemp="DO_ChamBottomFlowTemp"
doSpare1FlowTemp="DO_Spare1FlowTemp"
doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
doPowerRod2FlowTemp="DO_PowerRod2FlowTemp"
doForelineFlowTemp ="DO_ForelineFlowTemp"
doElectrodeWFlowTemp="DO_ElectrodeWFlowTemp"
doTMPump1and2FlowTemp="DO_TMPump1and2FlowTemp"
doTransformerFlowTemp="DO_TransformerFlowTemp"
doTMTopLidFlowTemp="DO_TMTopLidFlowTemp"
doTMBufferFlowTemp="DO_TMBufferFlowTemp"
aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp" aiSHFlowTemp="AI_SHFlowTemp" aiChamTopFlowTemp="AI_ChamTopFlowTemp"
aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp" aiChamBottomFlowTemp="AI_ChamBottomFlowTemp" aiBottomPlateFlowTemp="AI_SpareFlowTemp"
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp" aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp" aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
aiTMPump1FlowTemp="AI_TMPumpFIowSW" aiTMPump2FlowTemp="AI_ForelineFlow1SW" aiTransformerFlowTemp="AI_TransformerFlowTemp"
aiForelineFlowTemp="AI_ForelineFlow2SW" aiTMTopLidTemp="AI_TMTopLidFlowTemp" aiTMBufferFlowTemp="AI_TMBufferFlowTemp"/>
</IoInterLocks>
</DeviceModelDefine>
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