76 lines
1.4 KiB
C#
76 lines
1.4 KiB
C#
using Aitex.Core.RT.Device;
|
|
using MECF.Framework.Common.Equipment;
|
|
|
|
namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM
|
|
{
|
|
public class EFEM : BaseDevice, IDevice, IEFEM
|
|
{
|
|
|
|
public virtual double AtmPressureBase { get; }
|
|
public virtual bool IsMapped { get; set; }
|
|
|
|
public EFEM(string module) : base(module, module, module, module)
|
|
{
|
|
}
|
|
|
|
|
|
public virtual bool Initialize()
|
|
{
|
|
return true;
|
|
}
|
|
|
|
public void Monitor()
|
|
{
|
|
|
|
|
|
}
|
|
|
|
public void Terminate()
|
|
{
|
|
|
|
}
|
|
|
|
|
|
public virtual void Reset()
|
|
{
|
|
|
|
}
|
|
|
|
public virtual bool IsEnableTransferWafer(out string reason)
|
|
{
|
|
|
|
reason = "";
|
|
return true;
|
|
}
|
|
|
|
public virtual bool IsEnableMapWafer(out string reason)
|
|
{
|
|
|
|
reason = "";
|
|
return true;
|
|
}
|
|
|
|
public virtual void ConfirmWaferPresent()
|
|
{
|
|
|
|
}
|
|
|
|
public virtual bool CheckSlitValveOpen(ModuleName module, ModuleName robot)
|
|
{
|
|
return true;
|
|
}
|
|
|
|
public virtual bool CheckSlitValveClose(ModuleName module, ModuleName robot)
|
|
{
|
|
return true;
|
|
}
|
|
|
|
|
|
public virtual bool SetSlitValve(ModuleName module, ModuleName robot, bool isOpen, out string reason)
|
|
{
|
|
reason = string.Empty;
|
|
return true;
|
|
}
|
|
}
|
|
}
|