Sic03-8inch/Modules/Mainframe/LLs/Routines/LoadLockVentRoutine.cs

163 lines
4.9 KiB
C#

using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.Devices;
using SicModules.LLs.Routines.Base;
namespace SicModules.LLs.Routines
{
public class LoadLockVentRoutine : LoadLockBaseRoutine
{
enum RoutineStep
{
SlowVent,
FastVent,
VentDelay,
CloseSlowVentValve,
CloseFastVentValve,
CloseValveDelay,
}
private double _ventBasePressure;
private int _slowVentTimeout;
private int _ventDelayTime;
private int _routineTimeOut;
private IoInterLock _tmIoInterLock;
private bool _useSettingValue;
private Stopwatch _swTimer = new Stopwatch();
public LoadLockVentRoutine(ModuleName module)
{
Module = module.ToString();
Name = "Vent";
_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
}
public void Init()
{
_useSettingValue = false;
}
public void Init(double basePressure, int ventDelayTime)
{
_ventBasePressure = basePressure;
_ventDelayTime = ventDelayTime;
_useSettingValue = true;
}
public override Result Start(params object[] objs)
{
Reset();
string reason;
if (LoadLockDevice.CheckAtm())
{
EV.PostInfoLog(Module, $"{LoadLockDevice.Module} in atm, vent skipped");
return Result.DONE;
}
if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(LoadLockDevice.Module)))
{
EV.PostAlarmLog(Module, $"can not vent, slit valve is open");
return Result.FAIL;
}
if (!LoadLockDevice.CheckLidClose())
{
EV.PostAlarmLog(Module, $"can not vent, lid is open");
return Result.FAIL;
}
if (!LoadLockDevice.SetFastPumpValve(false, out reason))
{
EV.PostAlarmLog(Module, $"can not vent, TM fast pump value can not close");
return Result.FAIL;
}
if (!LoadLockDevice.SetFastPumpValve(false, out reason)
|| !LoadLockDevice.SetSlowPumpValve(false, out reason))
{
EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
return Result.FAIL;
}
if (!TMDevice.SetTmToLLVent(false, out _))
{
EV.PostAlarmLog(Module, $"can not vent,can not close v85!");
}
if (!_tmIoInterLock.SetLLVentRoutineRunning(true, out reason))
{
EV.PostAlarmLog(Module, $"can not vent,{reason}");
return Result.FAIL;
}
_slowVentTimeout = SC.GetValue<int>("LoadLock.Vent.SlowVentTimeout");
if (!_useSettingValue)
{
_ventBasePressure = SC.GetValue<double>("LoadLock.Vent.VentBasePressure");
_ventDelayTime = SC.GetValue<int>("LoadLock.Vent.VentDelayTime");
}
_routineTimeOut = SC.GetValue<int>("LoadLock.Vent.RoutineTimeOut");
_swTimer.Restart();
Notify("Start");
return Result.RUN;
}
public override Result Monitor()
{
try
{
CheckRoutineTimeOut();
SlowVent((int)RoutineStep.SlowVent, _ventBasePressure, _slowVentTimeout);
TimeDelay((int)RoutineStep.VentDelay, _ventDelayTime);
CloseVentValveAndWait((int)RoutineStep.CloseSlowVentValve);
}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException)
{
LoadLockDevice.SetSlowVentValve(false, out _);
LoadLockDevice.SetFastVentValve(false, out _);
return Result.FAIL;
}
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
_tmIoInterLock.DoLLVentUpRoutineRunning = false;
return Result.DONE;
}
public override void Abort()
{
_tmIoInterLock.DoLLVentUpRoutineRunning = false;
base.Abort();
}
private void CheckRoutineTimeOut()
{
if (_routineTimeOut > 10)
{
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
{
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
throw (new RoutineFaildException());
}
}
}
}
}