TM执行完Purge后，将TM腔气压调节至PM传盘平衡压力。

Modules/Mainframe/TMs/Routines/TMPressureBalanceRoutine.cs

@@ -66,7 +66,7 @@ namespace Mainframe.TMs.Routines
         {
             if (ModuleHelper.IsPm(_paramTarget))
             {
-                _balancePressure = SC.GetValue<double>($"TM.PressureBalance.BalancePressure") + +SC.GetValue<double>("TM.TMPressureBigThanPM");                
+                _balancePressure = SC.GetValue<double>($"TM.PressureBalance.BalancePressure") + SC.GetValue<double>("TM.TMPressureBigThanPM");                
             }
             else 
             {

Modules/Mainframe/TMs/Routines/TMPurgeRoutine.cs

@@ -37,7 +37,8 @@ namespace Mainframe.TMs.Routines
             OpenSlowVent,
             OpenFastVent,
             TimeStayATM,
-            CloseSlowVent
+            CloseSlowVent,
+            ToBalancePressure
         }
 
 
@@ -65,6 +66,7 @@ namespace Mainframe.TMs.Routines
         private int _fastVentTime;
 
 
+
         private double _mfc60Default1;
         private double _mfc60Default2;
 
@@ -75,6 +77,10 @@ namespace Mainframe.TMs.Routines
 
         private bool _useSettingValue = false;
 
+
+        private TMPressureBalanceRoutine _balanceRoutine;
+
+
         public TMPurgeRoutine()
         {
             Module = ModuleName.TM.ToString();
@@ -96,12 +102,6 @@ namespace Mainframe.TMs.Routines
         {
             _purgeCount = purgeCount;
             _pumpDelayTime = pumpDelayTime;
-
-            _pumpBasePressure = SC.GetValue<double>("TM.Purge.PumpBasePressure");
-            _ventBasePressure = SC.GetValue<double>("TM.Purge.VentBasePressure");
-            _ventDelayTime = SC.GetValue<int>("TM.Purge.PumpDelayTime");
-
-            _useSettingValue = true;
         }
         
         public override Result Start(params object[] objs)
@@ -117,6 +117,9 @@ namespace Mainframe.TMs.Routines
                 _ventDelayTime = SC.GetValue<int>("TM.Purge.PumpDelayTime");
             }
             
+            _balanceRoutine = new TMPressureBalanceRoutine();
+            _balanceRoutine.Init(ModuleName.PM1);
+
             _routineTimeOut = SC.GetValue<int>("TM.Purge.RoutineTimeOut");
 
             _slowFastPumpSwitchPressure = SC.GetValue<double>("TM.Purge.SlowFastPumpSwitchPressure");
@@ -251,6 +254,9 @@ namespace Mainframe.TMs.Routines
 
                 //关闭V77
                 CloseSlowVentValve((int)RoutineStep.CloseSlowVent, _tm);
+
+                // 预抽气到PM平衡压力，防止PM由于等待压力导致降温过度
+                ExecuteRoutine((int)RoutineStep.ToBalancePressure, _balanceRoutine);
             }
             catch (RoutineBreakException)
             {

SicRT/Properties/AssemblyInfo.cs

@@ -51,6 +51,6 @@ using System.Windows;
 // 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
 // 方法是按如下所示使用“*”: :
 
-[assembly: AssemblyVersion("1.2.5.18")]
-[assembly: AssemblyFileVersion("1.2.5.18")]
+[assembly: AssemblyVersion("1.2.5.20")]
+[assembly: AssemblyFileVersion("1.2.5.20")]
 

SicRT/ReleaseNotes.md

@@ -1,6 +1,30 @@
 # Sic 系统更新历史记录
 
 
+## Version 1.2.5.20
+
+**2023-02-22**
+
+- Bug修复
+  - 
+
+- 新特性
+  - TM执行完Purge后，将大气压调节至PM传盘平衡压力
+
+
+
+## Version 1.2.5.19
+
+**2023-02-22**
+
+- Bug修复
+  - 修正当LL压力为大气压时，TM无法取放盘的问题。
+
+- 新特性
+  - 当PM在ProcessIdle状态时，允许TM机械手取放PM盘片。
+  - 优化TM机械手取放按钮使能状态逻辑，当目标模组Online时，不可取放。
+
+
 ## Version 1.2.5.18
 
 **2023-02-21**

SicUI/Properties/AssemblyInfo.cs

@@ -54,7 +54,7 @@ using System.Windows;
 // You can specify all the values or you can default the Build and Revision Numbers 
 // by using the '*' as shown below:
 
-[assembly: AssemblyVersion("1.2.5.18")]
-[assembly: AssemblyFileVersion("1.2.5.18")]
+[assembly: AssemblyVersion("1.2.5.20")]
+[assembly: AssemblyFileVersion("1.2.5.20")]