using Aitex.Core.RT.Device; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; namespace Mainframe.TMs.Routines { public class TMServoRoutine : TMBaseRoutine { enum RoutineStep { ChamberBalance, OpenTMToLLVent, CheckPressureCondition, SetSlitValve, LLRoutine, Delay, Delay1, CloseTMToLLVent, PumpDownToBase, } private TMPressureBalanceRoutine _balanceRoutine; private TMPressureBalancePidRoutine _pidBalanceRoutine; private SicTM _tm; private bool _needPressureBalance; private bool _userPidBalance; public TMServoRoutine() { Module = ModuleName.TM.ToString(); Name = "ServoPressure"; _tm = DEVICE.GetDevice($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}"); } public override Result Start(params object[] objs) { Reset(); _balanceRoutine = new TMPressureBalanceRoutine(); _pidBalanceRoutine = new TMPressureBalancePidRoutine(); _balanceRoutine.Init(ModuleName.PM1); _pidBalanceRoutine.Init(ModuleName.PM1); _needPressureBalance = SC.GetValue("TM.NeedPressureBalance"); _userPidBalance = SC.GetValue("TM.PressureBalanceUsePid"); ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1, ModuleName.UnLoad}; foreach (var moduleName in modules) { if (!_tm.CheckSlitValveClose(moduleName)) { EV.PostAlarmLog(Module, $"Can not pump, {moduleName} slit valve not closed"); return Result.FAIL; } } string reason; if (!_tm.SetFastPumpValve(false, out reason) || !_tm.SetFastVentValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } if (SC.GetValue("System.IsATMMode")) { return Result.DONE; } Notify("Start"); return Result.RUN; } public override Result Monitor() { try { if (_userPidBalance) { ExecuteRoutine((int)RoutineStep.ChamberBalance, _pidBalanceRoutine); } else { ExecuteRoutine((int)RoutineStep.ChamberBalance, _balanceRoutine); } } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify("Finished"); return Result.DONE; } public override void Abort() { if (_userPidBalance) { _pidBalanceRoutine.Abort(); } else { _balanceRoutine.Abort(); } } } }