using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.DBCore; using MECF.Framework.Common.Equipment; using SicPM.Devices; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM.Routines { public class PMLeakCheckRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetPC, SetGroupJ, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM291519to26, OpenFinal2, CloseFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTvMode, SetTVEnable, SetTVPressMode, SetTv1, WaitTv1, SetM2toM40, SetTVPositionMode, SetTVPositionMax, SetTVPressMode1, SetM2TOM40Default, SetM2toM40_1, SetTvOpen, SetTvModeToPress, SetTVtoCurrent, RoutinePre, SetPressureUp, SetPressureDown, WaitPressureDown, WaitPressureUp, VentPumpOpen, PressureToMax, PressureToMin, StartLoop, EndLoop, SetMfc28to31, SetReactorPress, CloseFinanl1, CloseFinanl2, CloseEPV2, SetTVCloseMode2, CLoseTvvvv, SetEPVVV2, CLoseEPV1, CheckPM1000, WaitPressUpTo1000, WaitPressUpTo1020, SetPressUpOrDown1, SetPressUpOrDown2, SetMfc28to40Special, WaitPmPressureUp, SetMfc28to40Default, SetV75, SetV76, SetV751, SetV761, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitPressUpTo20, SetMfc291519to38, WaitPressUpTo0, SetMfc291519to38ToDefault, WaitPressDownTo20, SetPmPressureTo20, CloseMfcFinal1, CloseMfcFinal2, CloseMfc2915, CheckFinal1Open, DoLeakCheck, CalcLeakCheck, SetTVClose, CloseTV, CloseV27, CloseV28, CloseV69, CloseV70, SetGroupV25, SetV31, SetV32, SetV35V36, SetV92V93V95, SetV94, SetV96, SetV68, SetM32M35M37, SetM36, SetM38, CloseM32M35M37, CloseM36, CloseM38, CloseGasIn1, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay13, TimeDelay14, TimeDelay20, TimeDelay21, TimeDelay22, } enum LeakCheckType { ChamberOnly, ChamberAndGasline, ChamberAndGaslineToFacility, } private ModuleName moduleName; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private double _pressureMax; //Loop压力上限可设置600-800） private double _pressureMin; //Loop压力下限可设置 0-400） private int _pressureLoopCount; //Loop次数 private int _pressureMinDelay; private int _pressureMaxDelay; private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _paramContinuePumpTime; private int _paramLeakCheckTime ; private double _beginPressure; private double _beginTime; private int _calTimes; //第几次计算LeakCheck的值（每60秒计算一次） private double _leakSpec; private int _routineTimeOut; //private int _EPV2OpenDelayTime = 9; private bool _useSettingValue = false; private Stopwatch _swTimer = new Stopwatch(); public int ElapsedTime { get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; } } public PMLeakCheckRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); Name = "Leak Check"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); } internal void Init(int pumpTime, int leakCheckTime) { _paramContinuePumpTime = pumpTime; _paramLeakCheckTime = leakCheckTime; _useSettingValue = true; } internal void Init() { _useSettingValue = false; } public override Result Start(params object[] objs) { //if (!PMDevice.CheckSlitValveClose()) //{ // EV.PostAlarmLog(Module, "PM SlitValve is not Closed!"); // return Result.FAIL; //} Reset(); _swTimer.Restart(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.LeakCheck.CyclePurgeCount"); _pressureMin = SC.GetValue($"PM.{Module}.LeakCheck.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.LeakCheck.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.LeakCheck.PumpTimeout"); _pressureMax = SC.GetValue($"PM.{Module}.LeakCheck.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.LeakCheck.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.LeakCheck.VentTimeout"); _routineTimeOut = SC.GetValue($"PM.{Module}.LeakCheck.RoutineTimeOut"); //_EPV2OpenDelayTime = SC.GetValue($"PM.{Module}.TimeDelayAlterEPV2Open"); if (!_useSettingValue) { _paramContinuePumpTime = SC.GetValue($"PM.{Module}.LeakCheck.ContinuePumpTime"); _paramLeakCheckTime = SC.GetValue($"PM.{Module}.LeakCheck.LeakCheckDelayTime"); } _leakSpec = SC.GetValue($"PM.{Module}.LeakCheck.LeakSpec"); if (!PMDevice.SetIOValueByGroup(IoGroupName.V70, false)) { EV.PostAlarmLog(Module,"Can not close V70-1"); return Result.FAIL; } Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //打开V35,打开V36 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); //关闭B/C/E/F/H/K 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); //打开D/G 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); //设置MFC和PC的模式 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); //M1-M16设定为default值(M2、M9、M15除外) SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); //设置所有PC到默认值 SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //设置M2,M9,M15,M19-M26 3s ramp 到default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3); //打开V68 SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //打开J阀门 SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay1, 3); //设置蝶阀Enable SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); //伺服压力设定值到0mbar SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout); //M2、M9、M15、M19-M40 MFC 3s ramp到0 SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 3); //等待腔体压力Pump到设定值 WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pmPressureMaxDiff, _throttleTimeout); //蝶阀设置为位置模式,开度设置为最大 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5); //循环开始 Loop((int)RoutineStep.StartLoop, _pressureLoopCount); //M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值 SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3); //使用动态流量伺服到300mbar SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Uping); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _pressureMaxDelay); //M2、M9、M15、M19-M40 MFC 3s ramp 0 SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3); //伺服到0mbar SetThrottlePressureAndWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay3, _pressureMinDelay); EndLoop((int)RoutineStep.EndLoop); //依次关闭Final1 SetIoValueByGroup((int)RoutineStep.CloseGasIn1, IoGroupName.GasIn1, false, _IoValueOpenCloseTimeout); Delay((int)RoutineStep.TimeDelay4, 5); //关闭M32,M35,M36,M37,M38 SetMfcByGroup((int)RoutineStep.CloseM32M35M37, MfcGroupName.M32M35M37, 0, 5); SetMfcByGroup((int)RoutineStep.CloseM36, MfcGroupName.M36, 0, 5); SetMfcByGroup((int)RoutineStep.CloseM38, MfcGroupName.M38, 0, 5); Delay((int)RoutineStep.TimeDelay5, 5); //关闭Final1阀 SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout); //关闭Final2 SetIoValueByGroup((int)RoutineStep.CloseFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); //延时 TimeDelay((int)RoutineStep.TimeDelay6, _paramContinuePumpTime); //先关蝶阀,再关闭EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay7, 1); SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); //计算漏率 DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime); CalcLeackCheckPerMinute(_paramLeakCheckTime); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } _swTimer.Stop(); return Result.DONE; } public override void Abort() { Stop($"{Module} leak check aborted"); _swTimer.Stop(); PMDevice._ioThrottleValve.StopRamp(); PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All)); PMDevice.SetRotationServo(0, 0); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } public void DoLeakCheck(int id, double time) { Tuple ret = Execute(id, () => { Notify($"Keep pressure for {time} seconds"); _beginTime = _swTimer.ElapsedMilliseconds; _beginPressure = PMDevice.ChamberPressure; _calTimes = 1; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } //Tuple ret = Delay(id, () => //{ // Notify($"Keep pressure for {time} seconds"); // _beginPressure = PMDevice.ChamberPressure; // mbar // return true; //}, time * 1000); //if (ret.Item1) //{ // if (ret.Item2 == Result.RUN) // { // throw (new RoutineBreakException()); // } //} } public void CalcLeackCheckPerMinute(int time) { //大于LeakCheck时间, if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time) { int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000); double endPressure = PMDevice.ChamberPressure; double leakSpan = endPressure - _beginPressure; double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0); if (leakRate > _leakSpec) { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module); EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); } else { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module); EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); } } else { if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes) { _calTimes++; int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000); double endPressure = PMDevice.ChamberPressure; double leakSpan = endPressure - _beginPressure; double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0); if (leakRate > _leakSpec) { EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}"); throw (new RoutineFaildException()); } EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}"); } throw (new RoutineBreakException()); } } public void CalcLeakCheck(int id, int time) { Tuple ret = Execute(id, () => { double endPressure = PMDevice.ChamberPressure; double leakSpan = endPressure - _beginPressure; double leakRate = (endPressure - _beginPressure) / (time / 60.0); if (leakRate > _leakSpec) { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module); EV.PostInfoLog(Module,$"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); return false; } else { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module); EV.PostInfoLog(Module,$"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); return true; } }); } } }