1331 lines
45 KiB
C#
1331 lines
45 KiB
C#
using System;
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using System.Text;
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using Aitex.Core.RT.Device;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using System.Text.RegularExpressions;
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using Aitex.Core.Common;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using MECF.Framework.Common.CommonData;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.MAG7
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{
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public class Mag7RobotMotionHandler : ITransferMsg
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{
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public bool background { get; protected set; }
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public bool evt { get { return false; } }
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public string deviceID { private get; set; }
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public string _cmd = string.Empty;
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public IDevice Robot { set { _robot = (Robot)value; } }
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protected Robot _robot;
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public Mag7RobotMotionHandler()
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{
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background = false;
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}
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public virtual string package(params object[] args)
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{
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return "";
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}
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public bool unpackage(string type, string[] items)
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{
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if (type.Equals(ProtocolTag.resp_tag_excute))
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{
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update(items);
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return true;
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}
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if (type.Equals(ProtocolTag.resp_tag_error))
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{
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processError(items);
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return true;
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}
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return !background;
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}
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protected virtual void update(string[] data)
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{
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}
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protected virtual void processError(string[] data)
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{
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}
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}
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public class RbHomeHandler : Mag7RobotMotionHandler
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{
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public RbHomeHandler()
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{
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background = true;
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}
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public override string package(params object[] args)
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{
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updateBefore();
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return "HOME ALL";
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}
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protected void updateBefore()
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{
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_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
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_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
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_robot.CmdBladeTarget = $"{_robot.Name}.A";
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_robot.CmdBlade1Extend = "0";
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_robot.CmdBlade2Extend = "0";
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_robot.MoveInfo = new RobotMoveInfo()
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{
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Action = RobotAction.Moving,
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ArmTarget = RobotArm.Both,
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BladeTarget = "ArmA.System",
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};
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}
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protected override void update(string[] data)
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{
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_robot.Initalized = true;
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_robot.Swap = false;
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}
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}
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public class RbStopHandler : Mag7RobotMotionHandler
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{
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public RbStopHandler()
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{
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background = true;
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}
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//$,<UNo>(,<SeqNo>),CSTP,<Sw>(,<Sum>)<CR>
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public override string package(params object[] args)
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{
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return "PAUSE";
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}
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}
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public class PickHandler : Mag7RobotMotionHandler
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{
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private ModuleName _chamber;
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private int _slot;
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private Hand _hand;
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public PickHandler()
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{
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background = true;
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}
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/// <summary>
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/// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
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//[[RO r_offset] [TO t_offset] [ZO z_offset]]
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// [ALTWAFSPD(Y | N)]
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// [EX NO_VIA|RE NO_VIA]
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// [STRT(NR | R1 | R2 | VIA)]
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// [(GRIP(OFF | ON)]
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// [ENRT [(NR | R1 | R2 | VIA)]
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// [(GRIP(OFF | ON)]
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// In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
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public override string package(params object[] args)
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{
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// PICK<CR>
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_chamber = (ModuleName)args[0];
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_slot = (int)args[1];
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_hand = (Hand)args[2];
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updateBefore();
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return string.Format("PICK {0} ARM {1}",
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Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
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Mag7RobotConvertor.hand2string(_hand));
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}
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private void updateBefore()
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{
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_robot.Blade1Target = _chamber;
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_robot.Blade2Target = _chamber;
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
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_robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
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string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
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_robot.MoveInfo = new RobotMoveInfo()
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{
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Action = RobotAction.Picking,
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ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
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BladeTarget = target,
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};
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}
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protected override void update(string[] data)
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = "0";
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_robot.CmdBlade2Extend = "0";
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_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
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_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
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string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
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_robot.MoveInfo = new RobotMoveInfo()
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{
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Action = RobotAction.Moving,
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ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
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BladeTarget = target,
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};
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}
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protected override void processError(string[] data)
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{
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try
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{
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int error = int.Parse(data[1]);
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = "0";
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_robot.CmdBlade2Extend = "0";
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_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
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_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
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/* Error 740: Error prior to a PICK: Wafer Sensed.
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Error 741: Error after a PICK: No Wafer Sensed.
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Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
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Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
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Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
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Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
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Error 772: Broken wafer encountered.
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Defect or breakage of a substrate is detected. If this error is reported on an unbroken wafer,increase the BREAK_THR parameter.
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*/
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if (error == 741 || error == 742 || error == 745) // not picked the wafer
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{
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}
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else if (error == 772) // not picked the wafer
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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}
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else //picked but error
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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}
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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}
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}
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}
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public class PickExtendHandler : Mag7RobotMotionHandler
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{
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private ModuleName _chamber;
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private int _slot;
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private Hand _hand;
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public PickExtendHandler()
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{
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background = true;
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}
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/// <summary>
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/// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
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//[[RO r_offset] [TO t_offset] [ZO z_offset]]
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// [ALTWAFSPD(Y | N)]
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// [EX NO_VIA|RE NO_VIA]
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// [STRT(NR | R1 | R2 | VIA)]
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// [(GRIP(OFF | ON)]
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// [ENRT [(NR | R1 | R2 | VIA)]
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// [(GRIP(OFF | ON)]
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// In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
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public override string package(params object[] args)
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{
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// PICK<CR>
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_chamber = (ModuleName)args[0];
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_slot = (int)args[1];
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_hand = (Hand)args[2];
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updateBefore();
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return string.Format("PICK {0} ARM {1} ENRT NR",
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Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
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Mag7RobotConvertor.hand2string(_hand));
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}
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private void updateBefore()
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{
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
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_robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
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_robot.Blade1Target = _chamber;
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_robot.Blade2Target = _chamber;
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string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
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_robot.MoveInfo = new RobotMoveInfo()
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{
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Action = RobotAction.Picking,
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ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
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BladeTarget = target,
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};
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}
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protected override void processError(string[] data)
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{
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try
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{
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int error = int.Parse(data[1]);
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = "0";
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_robot.CmdBlade2Extend = "0";
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_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
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_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
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/* Error 740: Error prior to a PICK: Wafer Sensed.
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Error 741: Error after a PICK: No Wafer Sensed.
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Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
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Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
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Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
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Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
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*/
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if (error == 741 || error == 742 || error == 745) // not picked the wafer
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{
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}
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else if (error == 772) // not picked the wafer
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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}
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else //picked but error
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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}
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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}
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}
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}
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public class PickRetractHandler : Mag7RobotMotionHandler
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{
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private ModuleName _chamber;
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private int _slot;
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private Hand _hand;
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public PickRetractHandler()
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{
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background = true;
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}
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/// <summary>
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/// PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> <PAN L|R> <CW|CCW>
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//[[RO r_offset] [TO t_offset] [ZO z_offset]]
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// [ALTWAFSPD(Y | N)]
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// [EX NO_VIA|RE NO_VIA]
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// [STRT(NR | R1 | R2 | VIA)]
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// [(GRIP(OFF | ON)]
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// [ENRT [(NR | R1 | R2 | VIA)]
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// [(GRIP(OFF | ON)]
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// In MAG6 Compatibility, entering the word ARM is optional and SLOT starts with 1; in VT5 Compatibility, ARM is required and SLOT starts with 0.
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public override string package(params object[] args)
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{
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// PICK<CR>
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_chamber = (ModuleName)args[0];
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_slot = (int)args[1];
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_hand = (Hand)args[2];
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updateBefore();
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return string.Format("PICK {0} ARM {1} STRT NR",
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Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
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Mag7RobotConvertor.hand2string(_hand));
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}
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private void updateBefore()
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{
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = "0";
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_robot.CmdBlade2Extend = "0";
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_robot.Blade1Target = _chamber;
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_robot.Blade2Target = _chamber;
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string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
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_robot.MoveInfo = new RobotMoveInfo()
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{
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Action = RobotAction.Moving,
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ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
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BladeTarget = target,
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};
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}
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protected override void update(string[] data)
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{
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_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
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_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
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}
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protected override void processError(string[] data)
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{
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try
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{
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int error = int.Parse(data[1]);
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string arm = _hand == Hand.Blade1 ? "A" : "B";
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_robot.CmdBladeTarget = $"{_chamber}.{arm}";
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_robot.CmdBlade1Extend = "0";
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_robot.CmdBlade2Extend = "0";
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_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
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_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
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/* Error 740: Error prior to a PICK: Wafer Sensed.
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Error 741: Error after a PICK: No Wafer Sensed.
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Error 742: EX wafer sensor error prior to a PICK: No Wafer Sensed.
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Error 743: EX wafer sensor error after a PICK: Wafer Sensed.
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Error 744: R_MT wafer sensor error on PICK: Wafer Sensed during Extend.
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Error 745: R_MT wafer sensor error on PICK: No Wafer Sensed during Retract.
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*/
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if (error == 741 || error == 742 || error == 745) // not picked the wafer
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{
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}
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else if (error == 772) // not picked the wafer
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferDuplicated(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferDuplicated(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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}
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else //picked but error
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{
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if (_hand == Hand.Both)
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
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WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
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}
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else
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{
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WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)_hand);
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}
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}
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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}
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}
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}
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public class PlaceHandler : Mag7RobotMotionHandler
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{
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private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
|
|
public PlaceHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
updateBefore();
|
|
return string.Format("PLACE {0} ARM {1}",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|
_robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|
|
|
string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
|
|
|
|
_robot.MoveInfo = new RobotMoveInfo()
|
|
{
|
|
Action = RobotAction.Placing,
|
|
ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
|
|
BladeTarget = target,
|
|
};
|
|
}
|
|
|
|
|
|
protected override void update(string[] data)
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
|
|
|
|
string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
|
|
|
|
_robot.MoveInfo = new RobotMoveInfo()
|
|
{
|
|
Action = RobotAction.Moving,
|
|
ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
|
|
BladeTarget = target,
|
|
};
|
|
}
|
|
|
|
|
|
protected override void processError(string[] data)
|
|
{
|
|
try
|
|
{
|
|
int error = int.Parse(data[1]);
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
|
|
/* Error 730: Error prior to PLACE: No Wafer Sensed.
|
|
Error 731: Error after a PLACE: Wafer Sensed.
|
|
Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
|
|
WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
|
|
Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
|
|
Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
|
|
Error 735: R_MT wafer sensor failure.
|
|
Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
|
|
*/
|
|
|
|
if (error == 731 || error == 732 || error == 736) // not placed the wafer
|
|
{
|
|
|
|
}
|
|
else if (error == 772) // not picked the wafer
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
}
|
|
else //placed but error
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
}
|
|
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
}
|
|
|
|
}
|
|
}
|
|
public class PlaceExtendHandler : Mag7RobotMotionHandler
|
|
{
|
|
private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
|
|
public PlaceExtendHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
updateBefore();
|
|
return string.Format("PLACE {0} ARM {1} ENRT NR",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|
_robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|
|
|
|
|
string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
|
|
|
|
_robot.MoveInfo = new RobotMoveInfo()
|
|
{
|
|
Action = RobotAction.Placing,
|
|
ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
|
|
BladeTarget = target,
|
|
};
|
|
}
|
|
|
|
|
|
protected override void update(string[] data)
|
|
{
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
}
|
|
|
|
protected override void processError(string[] data)
|
|
{
|
|
try
|
|
{
|
|
int error = int.Parse(data[1]);
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
|
|
/* Error 730: Error prior to PLACE: No Wafer Sensed.
|
|
Error 731: Error after a PLACE: Wafer Sensed.
|
|
Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
|
|
WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
|
|
Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
|
|
Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
|
|
Error 735: R_MT wafer sensor failure.
|
|
Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
|
|
*/
|
|
|
|
if (error == 731 || error == 732 || error == 736) // not placed the wafer
|
|
{
|
|
|
|
}
|
|
else if (error == 772) // not picked the wafer
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
}
|
|
else //placed but error
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
}
|
|
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
}
|
|
|
|
}
|
|
}
|
|
public class PlaceRetractHandler : Mag7RobotMotionHandler
|
|
{
|
|
private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
|
|
public PlaceRetractHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
updateBefore();
|
|
return string.Format("PLACE {0} ARM {1} STRT NR",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
|
|
string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
|
|
|
|
_robot.MoveInfo = new RobotMoveInfo()
|
|
{
|
|
Action = RobotAction.Moving,
|
|
ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
|
|
BladeTarget = target,
|
|
};
|
|
}
|
|
|
|
|
|
protected override void update(string[] data)
|
|
{
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
}
|
|
|
|
|
|
|
|
protected override void processError(string[] data)
|
|
{
|
|
try
|
|
{
|
|
int error = int.Parse(data[1]);
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
|
|
/* Error 730: Error prior to PLACE: No Wafer Sensed.
|
|
Error 731: Error after a PLACE: Wafer Sensed.
|
|
Error 732: EX wafer sensor error prior to a PLACE: Wafer Sensed.
|
|
WAVE II 1.2P: Error after PLACE: Arm Extended and Wafer Sensed
|
|
Error 733: EX wafer sensor error prior to a PLACE: No Wafer Sensed.
|
|
Error 734: R_MT wafer sensor error on PLACE: No wafer sensed during Extend.
|
|
Error 735: R_MT wafer sensor failure.
|
|
Error 736: R_MT wafer sensor error on PLACE: Wafer sensed during Retract.
|
|
*/
|
|
|
|
if (error == 731 || error == 732 || error == 736) // not placed the wafer
|
|
{
|
|
|
|
}
|
|
else if (error == 772) // not picked the wafer
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferDuplicated(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
}
|
|
else //placed but error
|
|
{
|
|
if (_hand == Hand.Both)
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)_hand, _chamber, _slot);
|
|
}
|
|
}
|
|
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
}
|
|
}
|
|
}
|
|
|
|
public class ExchangHandler : Mag7RobotMotionHandler
|
|
{
|
|
private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
|
|
|
|
public ExchangHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// Picks from designated arm and places using other arm.<CR>
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
if (_hand == Hand.Blade1)
|
|
_hand = Hand.Blade2;
|
|
else
|
|
_hand = Hand.Blade1;
|
|
|
|
updateBefore();
|
|
|
|
|
|
return string.Format("SWAP {0} {1}",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
_robot.Swap = true;
|
|
_robot.PlaceBalde = _hand;
|
|
}
|
|
|
|
protected override void update(string[] data)
|
|
{
|
|
if (_hand == Hand.Blade2)
|
|
{
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2);
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1, _chamber, _slot);
|
|
}
|
|
else
|
|
{
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_robot.Name), (int)Hand.Blade1);
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_robot.Name), (int)Hand.Blade2, _chamber, _slot);
|
|
}
|
|
|
|
_robot.Swap = false;
|
|
_robot.Blade1Target = ModuleHelper.Converter(_robot.Name);
|
|
_robot.Blade2Target = ModuleHelper.Converter(_robot.Name);
|
|
}
|
|
}
|
|
|
|
public class GotoHandler : Mag7RobotMotionHandler
|
|
{
|
|
private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
public GotoHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// Moves to a specified station-referenced location.< CR >
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
|
|
updateBefore();
|
|
return string.Format("GOTO N {0} ARM {1} R RE Z DN",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
|
|
string target = (_hand == Hand.Blade2 ? "ArmB" : "ArmA") + "." + _chamber;
|
|
|
|
_robot.MoveInfo = new RobotMoveInfo()
|
|
{
|
|
Action = RobotAction.Moving,
|
|
ArmTarget = _hand == Hand.Blade1 ? RobotArm.ArmA : RobotArm.ArmB,
|
|
BladeTarget = target,
|
|
};
|
|
}
|
|
}
|
|
|
|
|
|
public class ExtendHandler : Mag7RobotMotionHandler
|
|
{
|
|
private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
public ExtendHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// Moves to a specified station-referenced location.< CR >
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
|
|
updateBefore();
|
|
return string.Format("GOTO N {0} ARM {1} R EX Z DN",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|
_robot.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|
}
|
|
}
|
|
|
|
public class RetractHandler : Mag7RobotMotionHandler
|
|
{
|
|
private ModuleName _chamber;
|
|
private int _slot;
|
|
private Hand _hand;
|
|
public RetractHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
// Moves to a specified station-referenced location.< CR >
|
|
_chamber = (ModuleName)args[0];
|
|
_slot = (int)args[1];
|
|
_hand = (Hand)args[2];
|
|
|
|
updateBefore();
|
|
return string.Format("GOTO N {0} ARM {1} R RE Z DN",
|
|
Mag7RobotConvertor.MapModuleSlot(_chamber, _slot),
|
|
Mag7RobotConvertor.hand2string(_hand));
|
|
}
|
|
|
|
private void updateBefore()
|
|
{
|
|
_robot.Blade1Target = _chamber;
|
|
_robot.Blade2Target = _chamber;
|
|
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|
_robot.CmdBladeTarget = $"{_chamber}.{arm}";
|
|
_robot.CmdBlade1Extend = "0";
|
|
_robot.CmdBlade2Extend = "0";
|
|
}
|
|
}
|
|
|
|
public class RbSetSpeedHandler : Mag7RobotMotionHandler
|
|
{
|
|
private int _speed = 0;
|
|
public RbSetSpeedHandler()
|
|
{
|
|
background = false;
|
|
}
|
|
|
|
public override string package(params object[] args)
|
|
{
|
|
_speed = (int)args[0];
|
|
|
|
string speed = "LOSPD";
|
|
switch (_speed)
|
|
{
|
|
case 1: //low
|
|
speed = "LOSPD";
|
|
break;
|
|
case 2: //Medium
|
|
speed = "MESPD";
|
|
break;
|
|
case 3: //high
|
|
speed = "HISPD";
|
|
break;
|
|
}
|
|
return string.Format(" SET LOSPD Y", speed);
|
|
}
|
|
}
|
|
|
|
|
|
public class RbSetCommunicationHandler : Mag7RobotMotionHandler
|
|
{
|
|
public RbSetCommunicationHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
//SET COMM [M/B (MON|PKT)] [FLOW (SEQ|BKG|BKG+|MULTI|MULTI_DEV)]
|
|
//[LF(ON | OFF)]
|
|
//[ECHO(ON | OFF)]
|
|
//[CHECKSUM(ON | OFF)]
|
|
//[ERRLVL err_level]
|
|
//[DREP(AUT | REQ)]
|
|
//[ERR_REP(AUT | REQ)]
|
|
//[RR(ON | OFF)]
|
|
public override string package(params object[] args)
|
|
{
|
|
return string.Format("SET COMM {0} {1} {2} {3} {4}",
|
|
"M/B PKT", // packet mode
|
|
"FLOW SEQ", // sequential mode
|
|
"ECHO OFF", // echo off
|
|
"LF OFF", //LF off
|
|
"CHECKSUM OFF" // echo off
|
|
|
|
);
|
|
}
|
|
}
|
|
|
|
public class RbSetLoadHandler : Mag7RobotMotionHandler
|
|
{
|
|
public RbSetLoadHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
//SET LOAD <<(ARM)>[(A | B)]> <PAN L|R> (?|ON|OFF)
|
|
//RQ LOAD <<(ARM)>[(A | B)]> <PAN L|R>
|
|
public override string package(params object[] args)
|
|
{
|
|
Hand hand = (Hand)args[0];
|
|
|
|
return string.Format("SET LOAD {0} OFF", hand == Hand.Blade1 ? "A" : "B");
|
|
}
|
|
}
|
|
|
|
public class RbCheckLoadHandler : Mag7RobotMotionHandler
|
|
{
|
|
public RbCheckLoadHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
//CHECK LOAD[station] [(A | B)] <PAN L|R> [[INTLCK ALL| (DIS|ENB)]| [EX_ENABLE
|
|
// (DIS | ENB)] |[SBIT_SLVL_SEN(DIS | ENB)] |[VLV_SEN(DIS | ENB)]
|
|
public override string package(params object[] args)
|
|
{
|
|
ModuleName module = (ModuleName)args[0];
|
|
int slot = (int)args[1];
|
|
|
|
return string.Format("CHECK LOAD {0} INTLCK ALL DIS", Mag7RobotConvertor.MapModule(module));
|
|
}
|
|
}
|
|
|
|
|
|
public class RbRequestWaferPresentHandler : ITransferMsg
|
|
{
|
|
public RbRequestWaferPresentHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
//RQ WAFER PRESENT <<(ARM)>[(A|B|AB)]>
|
|
public IDevice Robot { get; set; }
|
|
public bool background { get; }
|
|
public bool evt { get; }
|
|
|
|
public string package(params object[] args)
|
|
{
|
|
return string.Format("RQ WAFER PRESENT AB");
|
|
}
|
|
|
|
public bool unpackage(string type, string[] items)
|
|
{
|
|
//WAFER PRESENT Y N
|
|
if (type.Equals(ProtocolTag.resp_tag_excute))
|
|
{
|
|
return true;
|
|
}
|
|
|
|
|
|
if (items.Length == 4)
|
|
{
|
|
if (items[2] == "Y")
|
|
((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Normal);
|
|
if (items[2] == "?")
|
|
((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Unknown);
|
|
if (items[2] == "N")
|
|
((Robot)Robot).NotifyWaferPresent(Hand.Blade1, WaferStatus.Empty);
|
|
|
|
if (items[3] == "Y")
|
|
((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Normal);
|
|
if (items[3] == "?")
|
|
((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Unknown);
|
|
if (items[3] == "N")
|
|
((Robot)Robot).NotifyWaferPresent(Hand.Blade2, WaferStatus.Empty);
|
|
}
|
|
else
|
|
{
|
|
EV.PostWarningLog(Robot.Module, $"Request Wafer Present return unexpected feedback");
|
|
return false;
|
|
}
|
|
|
|
return false;
|
|
}
|
|
}
|
|
|
|
|
|
public class RRequestAWCDataHandler : ITransferMsg
|
|
{
|
|
public RRequestAWCDataHandler()
|
|
{
|
|
background = true;
|
|
}
|
|
//RQ WAF_CEN DATA
|
|
public IDevice Robot { get; set; }
|
|
public bool background { get; }
|
|
public bool evt { get; }
|
|
|
|
public string package(params object[] args)
|
|
{
|
|
return string.Format("RQ WAF_CEN DATA");
|
|
}
|
|
|
|
public bool unpackage(string type, string[] items)
|
|
{
|
|
//WAF_CEN DATA SENS 1 r_pos_Striping_edge t_pos_Striping_edge r_pos_trailing_edge t_pos_trailing_edge OFFSET r_offset t_offset
|
|
if (type.Equals(ProtocolTag.resp_tag_excute))
|
|
{
|
|
return true;
|
|
}
|
|
|
|
if (items.Length >= 15)
|
|
{
|
|
if (int.TryParse(items[13], out int rOffset) && int.TryParse(items[14], out int tOffset))
|
|
((Robot)Robot).NotifyAWCData(rOffset, tOffset);
|
|
}
|
|
else
|
|
{
|
|
EV.PostWarningLog(Robot.Module, $"Request Wafer center find data return error feedback");
|
|
return false;
|
|
}
|
|
|
|
return false;
|
|
}
|
|
}
|
|
|
|
|
|
public class RBQueryStateHandler : ITransferMsg
|
|
{
|
|
public bool background { get; protected set; }
|
|
public bool evt { get { return false; } }
|
|
public string deviceID { private get; set; }
|
|
|
|
public string _cmd = string.Empty;
|
|
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|
protected Robot _device;
|
|
|
|
public RBQueryStateHandler()
|
|
{
|
|
background = false;
|
|
}
|
|
|
|
//$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
|
|
|
|
public string package(params object[] args)
|
|
{
|
|
return ",RSTS,";
|
|
}
|
|
|
|
public bool unpackage(string type, string[] items)
|
|
{
|
|
|
|
return !background;
|
|
}
|
|
}
|
|
|
|
public class RbEventHandler : ITransferMsg
|
|
{
|
|
public bool background { get { return false; } }
|
|
public bool evt { get { return true; } }
|
|
public string deviceID { private get; set; }
|
|
|
|
public string _cmd = string.Empty;
|
|
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|
protected Robot _device;
|
|
|
|
public RbEventHandler()
|
|
{
|
|
}
|
|
|
|
//$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
|
|
|
|
public string package(params object[] args)
|
|
{
|
|
return "";
|
|
}
|
|
|
|
public bool unpackage(string type, string[] items)
|
|
{
|
|
return true;
|
|
}
|
|
}
|
|
|
|
public class RBQueryPositionHandler : ITransferMsg
|
|
{
|
|
public bool background { get; protected set; }
|
|
public bool evt { get { return false; } }
|
|
public string deviceID { private get; set; }
|
|
|
|
public string _cmd = string.Empty;
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|
protected Robot _device;
|
|
|
|
public RBQueryPositionHandler()
|
|
{
|
|
background = false;
|
|
|
|
}
|
|
|
|
//RQ POS ABS ALL
|
|
//POS ABS(A|B) rVal tVal zVal sVal wVal waVal wbVal
|
|
|
|
public string package(params object[] args)
|
|
{
|
|
return "RQ POS ABS ALL";
|
|
}
|
|
|
|
public bool unpackage(string type, string[] items)
|
|
{
|
|
//POS ABS (A|B) rVal tVal zVal sVal wVal waVal wbVal
|
|
//Radial: rVal
|
|
//Theta:tVal
|
|
//Z:zVal
|
|
//S:sVal
|
|
//W:wVal
|
|
//WA:waVal
|
|
//WB:wbVal
|
|
if (items.Length == 9)
|
|
{
|
|
_device.Rotation = int.Parse(items[1]);
|
|
|
|
return true;
|
|
}
|
|
|
|
return !background;
|
|
}
|
|
}
|
|
}
|