113 lines
12 KiB
XML
113 lines
12 KiB
XML
<?xml version="1.0" encoding="GB2312"?>
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<root>
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<roles>
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<!--2:read and write-->
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<roleItem id="0" name="Manager" autologout="1" logouttime="20">
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Header,3;Overview,3;DataCharting,3;TM,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;WaferHistory,3;ProcessHistory,3;
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DataHistory,3;Statistics,3;Charting,3;Config,3;Account,3;Role,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;
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alarmPM1,3;linkedDevicePM1,3;MFCFlowPM1,3;CommMonitorPM1,3;mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;
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alarmPM2,3;linkedDevicePM2,3;
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Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Surrounding Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;
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6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;
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12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;
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17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;
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22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;
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27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;
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32. Si Source Split Ratio,3;33. Si Source Push Flow (M9),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
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36. Si Source Pre-Split Pressure (PC6),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;40. V99,3;
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41. Balance C Flow (M39),3;42. C Source Split Ratio,3;43. C Source Push Flow (M15),3;44. C Source Inner Flow (M26),3;
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45. C Source Middle Flow (M25),3;46. C Source Pre-Split Pressure (PC7),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;
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49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
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54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;
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59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Flow (M2),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;
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64. Dope Pre-Split Pressure (PC5),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;
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69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. GR Purge Ar/H2 Switch,3;
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74. GR Purge HCl,3;75. GR Purge Main Flow (M32),3;76. GR Purge HCl Flow (M30),3;77. Heater-Up Purge Flow (M33),3;
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78. Chamber Purge Flow (M35),3;79. Rotation-Up Purge Flow (M36),3;80. Shutter Purge Flow (M37),3;81. Heater-WF Purge Flow (M38),3;
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82. Total Vent Flow,3;83. Vent Push Flow (M1),3;84. Vent Pre-Exhaust Pressure (PC4),3;
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</roleItem>
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<roleItem id="1" name="Engineer" autologout="1" logouttime="20">
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Header,3;Overview,3;DataCharting,3;TM,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;WaferHistory,3;ProcessHistory,3;
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DataHistory,3;Statistics,3;Charting,3;Config,3;Account,3;Role,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;
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alarmPM1,3;linkedDevicePM1,3;MFCFlowPM1,3;CommMonitorPM1,3;mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;
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alarmPM2,3;linkedDevicePM2,3;
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Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Surrounding Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;
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6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;
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12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;
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17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;
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22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;
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27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;
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32. Si Source Split Ratio,3;33. Si Source Push Flow (M9),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
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36. Si Source Pre-Split Pressure (PC6),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;40. V99,3;
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41. Balance C Flow (M39),3;42. C Source Split Ratio,3;43. C Source Push Flow (M15),3;44. C Source Inner Flow (M26),3;
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45. C Source Middle Flow (M25),3;46. C Source Pre-Split Pressure (PC7),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;
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49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
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54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;
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59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Flow (M2),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;
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64. Dope Pre-Split Pressure (PC5),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;
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69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. GR Purge Ar/H2 Switch,3;
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74. GR Purge HCl,3;75. GR Purge Main Flow (M32),3;76. GR Purge HCl Flow (M30),3;77. Heater-Up Purge Flow (M33),3;
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78. Chamber Purge Flow (M35),3;79. Rotation-Up Purge Flow (M36),3;80. Shutter Purge Flow (M37),3;81. Heater-WF Purge Flow (M38),3;
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82. Total Vent Flow,3;83. Vent Push Flow (M1),3;84. Vent Pre-Exhaust Pressure (PC4),3;
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</roleItem>
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<roleItem id="2" name="Technician" autologout="1" logouttime="20">
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Header,3;Overview,3;DataCharting,3;TM,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;WaferHistory,3;ProcessHistory,3;
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DataHistory,3;Statistics,3;Charting,3;Config,3;Account,3;Role,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;
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alarmPM1,3;linkedDevicePM1,3;MFCFlowPM1,3;CommMonitorPM1,3;mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;
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alarmPM2,3;linkedDevicePM2,3;
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Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Surrounding Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;
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6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;
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12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;
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17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;
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22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;
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27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;
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32. Si Source Split Ratio,3;33. Si Source Push Flow (M9),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
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36. Si Source Pre-Split Pressure (PC6),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;40. V99,3;
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41. Balance C Flow (M39),3;42. C Source Split Ratio,3;43. C Source Push Flow (M15),3;44. C Source Inner Flow (M26),3;
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45. C Source Middle Flow (M25),3;46. C Source Pre-Split Pressure (PC7),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;
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49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
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54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;
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59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Flow (M2),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;
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64. Dope Pre-Split Pressure (PC5),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;
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69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. GR Purge Ar/H2 Switch,3;
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74. GR Purge HCl,3;75. GR Purge Main Flow (M32),3;76. GR Purge HCl Flow (M30),3;77. Heater-Up Purge Flow (M33),3;
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78. Chamber Purge Flow (M35),3;79. Rotation-Up Purge Flow (M36),3;80. Shutter Purge Flow (M37),3;81. Heater-WF Purge Flow (M38),3;
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82. Total Vent Flow,3;83. Vent Push Flow (M1),3;84. Vent Pre-Exhaust Pressure (PC4),3;
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</roleItem>
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<roleItem id="3" name="Operator" autologout="1" logouttime="20">
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Header,3;Overview,3;DataCharting,3;TM,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;WaferHistory,3;ProcessHistory,3;
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DataHistory,3;Statistics,3;Charting,3;Config,3;Account,3;Role,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;
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alarmPM1,3;linkedDevicePM1,3;MFCFlowPM1,3;CommMonitorPM1,3;mainPM2,3;processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;
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alarmPM2,3;linkedDevicePM2,3;
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Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Surrounding Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;
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6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;
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12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;
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17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;
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22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;
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27. TCS Bubb High Flow (M10),3;28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;
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32. Si Source Split Ratio,3;33. Si Source Push Flow (M9),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
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36. Si Source Pre-Split Pressure (PC6),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;40. V99,3;
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41. Balance C Flow (M39),3;42. C Source Split Ratio,3;43. C Source Push Flow (M15),3;44. C Source Inner Flow (M26),3;
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45. C Source Middle Flow (M25),3;46. C Source Pre-Split Pressure (PC7),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;
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49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
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54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3;58. TMA Push Flow (M8),3;
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59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Flow (M2),3;62. Dope Inner Flow (M20),3;63. Dope Middle Flow (M19),3;
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64. Dope Pre-Split Pressure (PC5),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3;
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69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. GR Purge Ar/H2 Switch,3;
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74. GR Purge HCl,3;75. GR Purge Main Flow (M32),3;76. GR Purge HCl Flow (M30),3;77. Heater-Up Purge Flow (M33),3;
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78. Chamber Purge Flow (M35),3;79. Rotation-Up Purge Flow (M36),3;80. Shutter Purge Flow (M37),3;81. Heater-WF Purge Flow (M38),3;
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82. Total Vent Flow,3;83. Vent Push Flow (M1),3;84. Vent Pre-Exhaust Pressure (PC4),3;
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</roleItem>
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</roles>
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<users>
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<userItem id="1" loginname="admin" password="YWRtaW4=" firstname="MAE" lastname="dd" email="">
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<rolegroup>
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<role id="0"></role>
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<role id="1"></role>
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<role id="2"></role>
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<role id="3"></role>
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</rolegroup>
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</userItem>
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</users>
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</root> |