107 lines
4.2 KiB
C#
107 lines
4.2 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Fsm;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
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using System.Collections.Generic;
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namespace SicPM
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{
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public abstract class PMModuleBase : ModuleFsmDevice, ITransferTarget, IModuleDevice
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{
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private int _slot = 1;
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public PMModuleBase(int slot)
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{
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_slot = slot;
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}
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public override bool Initialize()
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{
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WaferManager.Instance.SubscribeLocation(Module, _slot);
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return base.Initialize();
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}
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public abstract double ChamberPressure { get; }
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public abstract bool IsIdle { get; }
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public abstract bool IsProcessIdle { get; }
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public abstract bool CheckAcked(int entityTaskToken);
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//Initialize
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public abstract bool Home();
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//Transfer
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public abstract bool IsPrepareTransferReady(ModuleName robot, EnumTransferType pick, int slot);
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public abstract int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot);
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public abstract bool InvokeCheckHeaterDisable();
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public abstract int InvokeSetHeatDisable();
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//IModuleDevice
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public abstract bool IsReady { get; }
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public abstract bool IsError { get; }
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public abstract bool IsInit { get; }
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public abstract bool Home(out string reason);
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//ITransferTarget
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public abstract bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason);
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public abstract bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason);
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public abstract bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason);
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public abstract bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason);
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public abstract void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType);
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public abstract void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType);
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//Process
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public abstract int InvokeProcess(string recipeName, bool isCleanRecipe, bool withWafer);
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public abstract int InvokeCleanProcess(string recipeName);
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public abstract bool IsProcessed();
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//Pump
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public abstract bool PreparePump(out string reason);
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public abstract bool CheckPreparePump();
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public abstract bool SlowPump(int tvPosition, out string reason);
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public abstract bool FastPump(int tvPosition, out string reason);
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public abstract bool TurnOnPump(out string reason);
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public abstract bool CheckPumpIsOn();
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public abstract bool ShutDownPump(out string reason);
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public abstract bool AbortPump();
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//Vent
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public abstract bool PrepareVent(out string reason);
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public abstract bool CheckPrepareVent();
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public abstract bool Vent(out string reason);
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public abstract bool StopVent(out string reason);
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//Leak check
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//public abstract bool PrepareLeakCheck(out string reason);
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//public abstract bool CheckPrepareLeakCheck();
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//public abstract bool AbortLeakCheck();
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//Slit Valve
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//public abstract bool OpenSlitValve(out string reason);
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//public abstract bool CheckSlitValveOpen();
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//public abstract bool CloseSlitValve(out string reason);
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public abstract bool CheckSlitValveClose();
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//Lid
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public abstract bool CheckLidClosed();
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// PreProcess
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public abstract bool CheckPreProcessCondition(Dictionary<string, string> recipeCommands, out string reason);
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// 2704
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public abstract bool EnableHeater(bool enable, out string reason);
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public abstract bool CheckHeaterEnable();
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public abstract bool SetRotationEnable(bool enable, out string reason);
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public abstract bool CheckRotationEnable();
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}
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}
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