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<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type= "Sic" xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
<IoInterLocks assembly= "Mainframe" classType= "Mainframe.Devices.IoInterLock" >
<IoInterLock id= "IoInterLock" module= "TM" display= "IoInterLock" schematicId= "IoInterLock" unit= ""
doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM"
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aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
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doTmCyclePurgeRoutineRunning="DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning="DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning="DO_TMPumpDownRoutineRunning"
doTmServoPressRoutineRunning="DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning="DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning="DO_LoadCyclePurgeRoutineRunning"
doLLLeakCheckRoutineRunning="DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning="DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning="DO_LoadVentUpRoutineRunning"
diVacRobotExtenLLEnableFB="DI_VacRobotExtenLoadEnableFB" diVacRobotExtendBufferEnableFB="DI_VacRobotExtendBufferEnableFB" diVacRobotExtendPMAEnableFB="DI_VacRobotExtendPMAEnableFB"
diATMRobotExtendUnloadEnableFB="DI_ATMRobotExtendUnloadEnableFB" diATMRobotExtendLoadLSideEnableFB="DI_ATMRobotExtendLoadLSideEnableFB" diATMRobotExtendLoadRSideEnableFB="DI_ATMRobotExtendLoadRSideEnableFB"
diVacRobotExtendUnloadEnableFB="DI_VacRobotExtendUnloadEnableFB" diVacRobotExtendPMBEnableFB="DI_VacRobotExtendPMBEnableFB"
doVacRobotExtenLLEnable="DO_VacRobotExtenLoadEnable" doVacRobotExtendBufferEnable="DO_VacRobotExtendBufferEnable" doVacRobotExtendPMAEnable="DO_VacRobotExtendPMAEnable"
doVacRobotExtendUnloadEnable="DO_VacRobotExtendUnloadEnable" doVacRobotExtendPMBEnable="DO_VacRobotExtendPMBEnable" doATMRobotExtendUnloadEnable="DO_ATMRobotExtendUnloadEnable"
doATMRobotExtendLoaLSideEnable="DO_ATMRobotExtendLoaLSideEnable" doATMRobotExtendLoaRSideEnable="DO_ATMRobotExtendLoaRSideEnable"
doRectorAATMTransferReady="DO_ReactorAATMTransferReady" doRectorAProcessTransferReady="DO_ReactorAProcessTransferReady" doPm1LidClosed="DO_PM1LidClosed"
doUnLoadPurgeRoutineRunning="DO_UnLoadCyclePurgeRoutineRunning" doUnLoadLeakCheckRoutineRunning="DO_UnLoadLeakCheckRoutineRunning"
doUnLoadPumpDownRoutineRunning="DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning="DO_UnLoadVentUpRoutineRunning"
/>
</IoInterLocks>
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<IoMfcs classType= "SicPM.Devices.IoMFC" assembly= "SicPM" >
<IoMfc3 id= "Mfc60" module= "TM" display= "Mfc60" schematicId= "Mfc60" unit= "sccm" aiFlow= "AI_M60FlowRead" aoFlow= "AO_M60FlowSetpoint" scBasePath= "TM.MFC" aioType= "float" />
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</IoMfcs>
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<TcAdses assembly= "SicPM" classType= "SicPM.Devices.SicAds" >
<TcAds id= "MainPLC" module= "PM1" display= "" schematicId= "" unit= "" option= "true" />
<TcAds id= "MainPLC" module= "PM2" display= "" schematicId= "" unit= "" option= "true" />
</TcAdses>
<WcfPlcs assembly= "MECF.Framework.Common" classType= "MECF.Framework.Common.PLC.WcfPlc" >
<WcfPlc id= "MainPLC" module= "PM1" display= "" schematicId= "" unit= "" option= "true" />
<WcfPlc id= "MainPLC" module= "PM2" display= "" schematicId= "" unit= "" option= "true" />
</WcfPlcs>
<TcAdses assembly= "Mainframe" classType= "Mainframe.Devices.SicAds" >
<TcAds id= "MainPLC" module= "TM" display= "" schematicId= "" unit= "" option= "true" />
</TcAdses>
<WcfPlcs assembly= "MECF.Framework.Common" classType= "MECF.Framework.Common.PLC.WcfPlc" >
<WcfPlc id= "MainPLC" module= "TM" display= "" schematicId= "" unit= "" option= "true" />
</WcfPlcs>
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<IoSensors >
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<IoSensor id= "TMLidClosed" module= "TM" display= "" schematicId= "" unit= "" di= "DI_TMLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "Alarm525 TM Lid Opened [DI-12]" />
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<IoSensor id= "LLLidClosed" module= "LoadLock" display= "" schematicId= "" unit= "" di= "DI_LoadLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "Alarm526 LoadLid Opened [DI-13]" />
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<IoSensor id= "UnloadLidClosed" module= "UnLoad" display= "" schematicId= "" unit= "" di= "DI_UnloadStationLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "Alarm527 UnloadStation Lid Opened [DI-14]" />
<IoSensor id= "BufferLidClosed" module= "Buffer" display= "" schematicId= "" unit= "" di= "DI_BufferStationLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "Alarm528 BufferStation Lid Opened [DI-15]" />
<IoSensor id= "BufferWaferHigh" module= "TM" display= "" schematicId= "" unit= "" di= "DI_BufferStationOptSensorHigh" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "BufferWaferMiddle" module= "TM" display= "" schematicId= "" unit= "" di= "DI_BufferStationOptSensorMid" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "BufferWaferLow" module= "TM" display= "" schematicId= "" unit= "" di= "DI_BufferStationOptSensorLow" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "LLTrayPresence" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadTrayPresence" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "LLWaferPlaced" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadWaferPlaced" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "UnLoadTrayPlaced" module= "TM" display= "" schematicId= "" unit= "" di= "DI_UnloadStationWaferPresence" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "UnLoadWaferPlaced" module= "TM" display= "" schematicId= "" unit= "" di= "DI_UnloadStationWaferPresence" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "ForelineBasePressureReady" module= "TM" display= "" schematicId= "" unit= "" di= "DI_ForelineBasePressureReady" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "LoadTrayHomeSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadHomeTraySensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassALWaferConvexSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetLeftConvexSensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassARWaferConvexSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetRightConvexSensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassALInch6Sensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetLeftInch6" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassARInch6Sensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetRightInch6" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassBLInch6Sensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_TrayCassetInch6" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassBLWaferConvexSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_TrayCassetConvexSensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
</IoSensors>
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<IoPumps classType= "Mainframe.Devices.IoPump" assembly= "Mainframe" >
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<IoPump id= "TMPump1" module= "TM" display= "Pump1" schematicId= "TMPump1" unit= "" diRunning= "DI_TMDryPump1Running" diAlarm= "DI_TMDryPump1Alarm" diWarning= "DI_TMDryPump1Warning" />
<IoPump id= "TMPump2" module= "TM" display= "Pump2" schematicId= "TMPump2" unit= "" diRunning= "DI_TMDryPump2Running" diAlarm= "DI_TMDryPump2Alarm" diWarning= "DI_TMDryPump2Warning" />
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</IoPumps>
<IoValves >
<IoValve id= "LoadSlowPump" module= "TM" display= "V84" schematicId= "LoadSlowPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_LoadSlowPumpFB" doOpen= "DO_LoadSlowPump" />
<IoValve id= "LoadFastPump" module= "TM" display= "V83" schematicId= "LoadFastPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_LoadFastPumpFB" doOpen= "DO_LoadFastPump" />
<IoValve id= "TMSlowPump" module= "TM" display= "V82" schematicId= "TMSlowPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMSlowPumpFB" doOpen= "DO_TMSlowPump" />
<IoValve id= "TMFastPump" module= "TM" display= "V81" schematicId= "TMFastPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMFastPumpFB" doOpen= "DO_TMFastPump" />
<IoValve id= "UnLoadSlowPump" module= "TM" display= "V123" schematicId= "UnLoadSlowPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_UnloadSlowPumpFB" doOpen= "DO_UnloadSlowPump" />
<IoValve id= "UnLoadFastPump" module= "TM" display= "V122" schematicId= "UnLoadFastPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_UnloadFastPumpFB" doOpen= "DO_UnloadFastPump" />
<IoValve id= "BufferVent" module= "TM" display= "V80" schematicId= "BufferVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_BufferVentFB" doOpen= "DO_BufferVent" />
<IoValve id= "LoadVent" module= "TM" display= "V79" schematicId= "LoadVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_LoadVentFB" doOpen= "DO_LoadVent" />
<IoValve id= "TMVent" module= "TM" display= "V77" schematicId= "TMVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMVentFB" doOpen= "DO_TMVent" />
<IoValve id= "UnLoadVent" module= "TM" display= "V78" schematicId= "UnLoadVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_UnloadVentFB" doOpen= "DO_UnloadVent" />
<IoValve id= "TMLoadBanlance" module= "TM" display= "V85" schematicId= "TMLoadBanlance" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMLoadBanlanceFB" doOpen= "DO_TMLoadBanlance" />
<IoValve id= "TMUnLoadBanlance" module= "TM" display= "V124" schematicId= "TMToUnloadBanlance" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_TMToUnloadBanlance" />
</IoValves>
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<IoSlitValves >
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<IoSlitValve id= "LoadLockDoor" module= "TM" display= "LLDoor" Type= "" unit= "" schematicId= "LLDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_LoadDoorOpened" diClose= "DI_LoadDoorClosed" doOpen= "DO_LoadDoorOpen" doClose= "DO_LoadDoorClose" />
<IoSlitValve id= "PM1Door" module= "TM" display= "PM1Door" Type= "" unit= "" schematicId= "PM1Door" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_ReactorADoorOpened" diClose= "DI_ReactorADoorClosed" doOpen= "DO_RectorADoorOpen" doClose= "DO_RectorADoorClose" />
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<IoSlitValve id= "PM2Door" module= "TM" display= "PM2Door" Type= "" unit= "" schematicId= "PM2Door" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_ReactorBDoorOpened" diClose= "DI_ReactorBDoorClosed" doOpen= "DO_RectorBDoorOpen" doClose= "DO_RectorBDoorClose" />
<IoSlitValve id= "UnLoadDoor" module= "TM" display= "UnLoadDoor" Type= "" unit= "" schematicId= "UnLoadDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_UnloadStationDoorOpened" diClose= "DI_UnloadStationDoorClosed" doOpen= "DO_UnloadStationDoorOpen" doClose= "DO_UnloadStationDoorClose" />
<IoSlitValve id= "BufferDoor" module= "TM" display= "BufferDoor" Type= "" unit= "" schematicId= "BufferDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_BufferStationDoorOpened" diClose= "DI_BufferStationDoorClosed" doOpen= "DO_BufferStationDoorOpen" doClose= "DO_BufferStationDoorClose" />
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<IoSlitValve id= "UnLoadSubDoor" module= "EFEM" display= "UnLoadSubDoor" Type= "" unit= "" schematicId= "UnLoadSubDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_UnloadSubStationDoorOpened" diClose= "DI_UnloadSubStationDoorClosed" doOpen= "DO_UnloadSubStationDoorOpen" doClose= "DO_UnloadSubStationDoorClose" />
<IoSlitValve id= "LoadLockLSideDoor" module= "EFEM" display= "LLLSideDoor" Type= "" unit= "" schematicId= "LLLSideDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_LoadLSideDoorOpened" diClose= "DI_LoadLSideDoorClosed" doOpen= "DO_LoadLSideDoorOpen" doClose= "DO_LoadLSideDoorClose" />
<IoSlitValve id= "LoadLockRSideDoor" module= "EFEM" display= "LLRSideDoor" Type= "" unit= "" schematicId= "LLRSideDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_LoadRSideDoorOpened" diClose= "DI_LoadRSideDoorClosed" doOpen= "DO_LoadRSideDoorOpen" doClose= "DO_LoadRSideDoorClose" />
</IoSlitValves>
<IoPressureMeter3s >
<IoPressureMeter3 id= "LLPressure" module= "TM" display= "LLPressure" schematicId= "LLPressure" unit= "mbar" aioType= "float" aiValue= "AI_LoadPressure" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "UnLoadPressure" module= "TM" display= "UnLoadPressure" schematicId= "UnLoadPressure" unit= "mbar" aioType= "float" aiValue= "AI_UnloadPressure" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "TMPressure" module= "TM" display= "TMPressure" schematicId= "TMPressure" unit= "mbar" aioType= "float" aiValue= "AI_TMPressure1" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "ForelinePressure" module= "TM" display= "ForelinePressure" schematicId= "ForelinePressure" unit= "mbar" aioType= "float" aiValue= "AI_TMPressure2" formatString= "F1" MaxValue= "1500" />
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</IoPressureMeter3s>
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<IoTempMeters assembly= "SicPM" classType= "SicPM.Devices.IoTempMeter" >
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<IoTempMeter module= "UnLoad" id= "UnLoadTemp" display= "" schematicId= "" aioType= "float" aiFeedback= "AI_UnloadTemp" />
<IoTempMeter module= "Buffer" id= "BufferTemp" display= "" schematicId= "" aioType= "float" aiFeedback= "AI_BufferTemp" />
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</IoTempMeters>
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<IoLift4s >
<IoLift4 id= "LLLift" module= "LoadLock" display= "LLLift" schematicId= "LLLift" unit= "" aioType= "" diUp= "DI_LoadLifterCYUp" diDown= "DI_LoadLifterCYDown" doUp= "DO_LoadLifterCYUp" doDown= "DO_LoadLifterCYDown" scTimeout= "10" />
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<IoLift4 id= "UnLoadLift" module= "UnLoad" display= "UnLoadLift" schematicId= "UnLoadLift" unit= "" aioType= "" diUp= "DI_UnloadStationLifterCYUp" diDown= "DI_UnloadStationLifterCYDown" doUp= "DO_UnloadStationLifterCYUp" doDown= "DO_UnloadStationLifterCYDown" scTimeout= "10" />
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</IoLift4s>
<IoClaws >
<IoClaw id= "LLWaferClaw" module= "LoadLock" display= "LLWaferClaw" schematicId= "LLWaferClaw" unit= "" aioType= "" diUp= "DI_LoadWaferCYClamped" diDown= "DI_LoadWafeCYOpened" doUp= "DO_LoadWaferCYClamp" doDown= "DO_LoadWaferCYOpen" scTimeout= "10" />
<IoClaw id= "LLTrayClaw" module= "LoadLock" display= "LLTrayClaw" schematicId= "LLTrayClaw" unit= "" aioType= "" diUp= "DI_LoadTrayCYClamped" diDown= "DI_LoadTrayCYOpend" doUp= "DO_LoadTrayCYClamp" doDown= "DO_LoadTrayCYOpen" scTimeout= "10" />
<IoClaw id= "UnLoadWaferClaw" module= "UnLoad" display= "UnLoadWaferClaw" schematicId= "UnLoadWaferClaw" unit= "" aioType= "" diUp= "DI_UnloadStationWaferCYClamped" diDown= "DI_UnloadStationWaferCYOpened" doUp= "DO_UnloadStationWaferCYClamp" doDown= "DO_UnloadStationWaferCYOpen" scTimeout= "10" />
</IoClaws>
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<TMRobots assembly= "Mainframe" classType= "Mainframe.TMs.SicTMRobot" >
<TMRobot id= "TMRobot" module= "TMRobot" display= "" schematicId= "" unit= "" />
</TMRobots>
<WaferRobots assembly= "Mainframe" classType= "Mainframe.EFEMs.SicWaferRobot" >
<WaferRobot id= "WaferRobot" module= "WaferRobot" display= "" schematicId= "" unit= "" />
</WaferRobots>
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<TrayRobots assembly= "Mainframe" classType= "Mainframe.EFEMs.SicTrayRobot" >
<TrayRobot id= "TrayRobot" module= "TrayRobot" display= "" schematicId= "" unit= "" />
</TrayRobots>
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<Aligners assembly= "Mainframe" classType= "Mainframe.Aligners.SicAligner" >
<Aligner id= "Aligner" module= "Aligner" display= "" schematicId= "" unit= "" />
</Aligners>
<Cassettes assembly= "Mainframe" classType= "Mainframe.Cassettes.SicCassette" >
<Cassette id= "CassAL" module= "CassAL" display= "" schematicId= "" unit= "" />
<Cassette id= "CassAR" module= "CassAR" display= "" schematicId= "" unit= "" />
<Cassette id= "CassBL" module= "CassBL" display= "" schematicId= "" unit= "" />
</Cassettes>
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<LoadRotations assembly= "Mainframe" classType= "Mainframe.Devices.IoLoadRotation" >
<LoadRotation id= "Rotation" module= "Load" display= "LoadRotation" schematicId= "LoadRotation" unit= ""
diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
diCCD2PosDone="DI_LdRotationCCD2PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
doJogCW="DO_LdRotationJogCW" doJogCCW="DO_LdRotationJogCCW" doStop="DO_LdRotationStop" doMoveRelativeHome="DO_LdRotationMoveRelativeHome"
doMoveOneCircle="DO_LdRotationMoveOneCircle" doMoveCCD1Pos="DO_LdRotationMoveCCD1Pos" doMoveCCD2Pos="DO_LdRotationMoveCCD2Pos"
aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
aoCCD1Degree="AO_LdRotationCCD1Degree" aoHomeSpeed="AO_LdRotationSpeed" aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
</LoadRotations>
<TMs assembly= "Mainframe" classType= "Mainframe.TMs.SicTM" >
<TM id= "TM" module= "System" display= "" schematicId= "" unit= "" DiTMLidClosedAlarm= "DI_TMLidClosed" DiLLLidClosedAlarm= "DI_LLLidClosed" DiBufferLidClosedAlarm= "DI_BufferLidClosed" aiLLTemp= "AI_LoadTemp" aiBufferTemp= "AI_BufferTemp" />
</TMs>
<EFEMs assembly= "Mainframe" classType= "Mainframe.EFEMs.SicEFEM" >
<Buffer id= "EFEM" module= "EFEM" display= "" schematicId= "" unit= "" />
</EFEMs>
<LLs assembly= "Mainframe" classType= "Mainframe.LLs.SicLoadLock" >
<TM id= "LoadLock" module= "LoadLock" display= "" schematicId= "" unit= "" />
</LLs>
<Unloads assembly= "Mainframe" classType= "Mainframe.UnLoads.SicUnLoad" >
<Unload id= "UnLoad" module= "UnLoad" display= "" schematicId= "" unit= "" />
</Unloads>
<Buffers assembly= "Mainframe" classType= "Mainframe.Buffers.SicBuffer" >
<Buffer id= "Buffer" module= "Buffer" display= "" schematicId= "" unit= "" />
</Buffers>
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</DeviceModelDefine>