2022-09-19 09:16:33 +08:00
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using System;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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2022-09-29 17:33:25 +08:00
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namespace Mainframe.LLs.Routines
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2022-09-19 09:16:33 +08:00
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{
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public class LoadLockServoToRoutine : LoadLockBaseRoutine
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{
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enum RoutineStep
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{
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CheckForelinePressure,
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RequestPump,
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RequestPumpDelay,
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SlowPump,
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CloseSlowValve,
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FastPump,
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PumpDelay,
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CloseFastValve,
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Delay,
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SlowVent,
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CloseSlowVentValve,
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TimeDelay1,
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TimeDelay2,
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}
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private double _pumpSwitchPressure;
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private int _slowPumpTimeout=100;
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private int _fastPumpTimeout=100;
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private int _slowVentTimeout = 100;
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private bool _useSettingValue;
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private double _targetPressure;
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private bool _needPump = false;
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public LoadLockServoToRoutine(ModuleName module)
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{
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Module = module.ToString();
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Name = "LoadLockServoTo";
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}
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public void Init(double pressure)
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{
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_targetPressure = pressure;
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_useSettingValue = true;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (!_useSettingValue)
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{
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_targetPressure = SC.GetConfigItem("TM.PressureBalance.BalancePressure").DoubleValue;
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}
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_pumpSwitchPressure = SC.GetValue<double>("LoadLock.Pump.SlowFastPumpSwitchPressure");
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_slowVentTimeout = SC.GetValue<int>("LoadLock.Vent.RoutineTimeOut");
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string reason;
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if (!LoadLockDevice.SetFastVentValve(false, out reason) || !LoadLockDevice.SetSlowVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (!LoadLockDevice.SetFastPumpValve(false, out reason) || !LoadLockDevice.SetSlowPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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if (isAtmMode)
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{
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EV.PostInfoLog(Module, $"system in atm mode, {Module} pump skipped");
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return Result.DONE;
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}
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if (!LoadLockDevice.CheckLidClose())
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{
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EV.PostAlarmLog(Module, $"Can not pump, door is open");
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return Result.FAIL;
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}
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if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(Module)))
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{
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EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open");
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return Result.FAIL;
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}
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if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue && LoadLockDevice.CheckVacuum())
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{
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return Result.DONE;
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}
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_needPump = LoadLockDevice.ChamberPressure > _targetPressure;
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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if (_needPump)
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{
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//需要调节的压力低于打开快抽的压力
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if (_targetPressure < _pumpSwitchPressure)
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{
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SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);
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FastPump((int)RoutineStep.FastPump, _targetPressure, _fastPumpTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 5);
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CloseFastPumpValve((int)RoutineStep.CloseFastValve);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
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}
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else
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{
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SlowPump((int)RoutineStep.SlowPump, _targetPressure, _slowPumpTimeout);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
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}
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}
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else
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{
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SlowVent((int)RoutineStep.SlowVent, _targetPressure, _slowVentTimeout);
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CloseVentValve((int)RoutineStep.CloseSlowVentValve);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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}
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}
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