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<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type= "Sic" xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
<IoTCs classType= "SicPM.Devices.IoTC" assembly= "SicPM" >
<IoTC id= "TC1" display= "TC1" schematicId= "TC1" aioType= "float" aiL1WorkingOPFeedBack= "AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack= "AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack= "AI_PSUOuterWorkingOP"
aiL1PVFeedBack="AI_PSUInnerPV" aiL2PVFeedBack="AI_PSUMiddlePV" aiL3PVFeedBack="AI_PSUOuterPV"
diL1TempHighAlarmFeedBack="DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack="DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_PSUOuterTempHAlarm"
diL1TempLowAlarmFeedBack="DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack="DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_PSUOuterTempLAlarm"
aoHeaterModeSetPoint="AO_PSUHeaterMode" aoPowerRefSetPoint="AO_PSUPowerRef"
aoL1RatioSetPoint="AO_PSUInnerRatio" aoL2RatioSetPoint="AO_PSUMiddleRatio" aoL3RatioSetPoint="AO_PSUOuterRatio"
aoL1RatedSetPoint="AO_PSUInnerRatedValue" aoL2RatedSetPoint="AO_PSUMiddleRatedValue" aoL3RatedSetPoint="AO_PSUOuterRatedValue"
aoL1LoopModeSetPoint="AO_PSUInnerLoopMode" aoL2LoopModeSetPoint="AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint="AO_PSUOuterLoopMode"
aoL1TargetSPSetPoint="AO_PSUInnerTargetSP" aoL2TargetSPSetPoint="AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint="AO_PSUOuterTargetSP"
aoL1TargetOPSetPoint="AO_PSUInnerTargetOP" aoL2TargetOPSetPoint="AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint="AO_PSUOuterTargetOP"
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aoL1RecipeValueSetPoint="AO_PSUInnerRecipeValue" aoL2RecipeValueSetPoint="AO_PSUMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_PSUOuterRecipeValue"
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aoL1InputTempSetPoint="AO_PSUInnerPyroTemp" aoL2InputTempSetPoint="AO_PSUMiddlePyroTemp" aoL3InputTempSetPoint="AO_PSUOuterPyroTemp"
aoTCPyroModeSetPoint="AO_PSUTCPyroMode" aoL1VoltageLimited="AO_PSUInnerVoltageLimited" aoL2VoltageLimited="AO_PSUMiddleVoltageLimited" aoL3VoltageLimited="AO_PSUOuterVoltageLimited"
aoL1TempHighLimitSetPoint="AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint="AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_PSUOuterTempHighLimit"
aoL1TempLowLimitSetPoint="AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint="AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN="AI_PSUTC"
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aoPSU1Y="AO_PSU1Y" aoPSU2Y="AO_PSU2Y" aoPSU3Y="AO_PSU3Y" doPyroWarnMaxDiff="DO_TC1PyroWarnMaxDiff" doAeTempRaisingFast = "DO_TC1AeTempRaisingFast"
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/>
<IoTC id= "TC2" display= "TC2" schematicId= "TC2" aioType= "float" aiL1WorkingOPFeedBack= "AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack= "AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack= "AI_SCRLowerWorkingOP"
aiL1PVFeedBack="AI_SCRUpperPV" aiL2PVFeedBack="AI_SCRMiddlePV" aiL3PVFeedBack="AI_SCRLowerPV"
diL1TempHighAlarmFeedBack="DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack="DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_SCRLowerTempHAlarm"
diL1TempLowAlarmFeedBack="DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack="DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_SCRLowerTempLAlarm"
aoHeaterModeSetPoint="AO_SCRHeaterMode" aoPowerRefSetPoint="AO_SCRPowerRef"
aoL1RatioSetPoint="AO_SCRUpperRatio" aoL2RatioSetPoint="AO_SCRMiddleRatio" aoL3RatioSetPoint="AO_SCRLowerRatio"
aoL1RatedSetPoint="AO_SCRUpperRatedValue" aoL2RatedSetPoint="AO_SCRMiddleRatedValue" aoL3RatedSetPoint="AO_SCRLowerRatedValue"
aoL1LoopModeSetPoint="AO_SCRUpperLoopMode" aoL2LoopModeSetPoint="AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint="AO_SCRLowerLoopMode"
aoL1TargetSPSetPoint="AO_SCRUpperTargetSP" aoL2TargetSPSetPoint="AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint="AO_SCRLowerTargetSP"
aoL1TargetOPSetPoint="AO_SCRUpperTargetOP" aoL2TargetOPSetPoint="AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint="AO_SCRLowerTargetOP"
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aoL1RecipeValueSetPoint="AO_SCRUpperRecipeValue" aoL2RecipeValueSetPoint="AO_SCRMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_SCRLowerRecipeValue"
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aoL1InputTempSetPoint="AO_SCRUpperPyroTemp" aoL2InputTempSetPoint="AO_SCRMiddlePyroTemp" aoL3InputTempSetPoint="AO_SCRLowerPyroTemp"
aoTCPyroModeSetPoint="AO_SCRTCPyroMode" aoL1VoltageLimited="AO_SCRUpperVoltageLimited" aoL2VoltageLimited="AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited="AO_SCRLowerVoltageLimited"
aoL1TempHighLimitSetPoint="AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint="AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_SCRLowerTempHighLimit"
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aoL1TempLowLimitSetPoint="AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint="AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN="AI_SCRTC"
doPyroWarnMaxDiff="DO_TC2PyroWarnMaxDiff" doAeTempRaisingFast = "DO_TC2AeTempRaisingFast"/>
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</IoTCs>
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<IoOmronTemps classType= "SicPM.Devices.IoOmronTemp" assembly= "SicPM" >
<IoTC id= "OmronTemp" display= "OmronTemp" schematicId= "OmronTemp" aioType= "float"
aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6=""
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aoCH7="" aoCH8="" aoCH9="" aoCH10="" aoCH11="" aoCH12=""
doLineHeaterEnable="DO_LineHeaterEnable"/>
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</IoOmronTemps>
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<IoPSUs classType= "SicPM.Devices.IoPSU" assembly= "SicPM" >
<IoPSU id= "PSU1" display= "PSU1" schematicId= "PSU1" aioType= "float"
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aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower"
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aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms"
doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant"
diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66 PSU1 Alarm[DI-320]"
diCommunicationError ="DI_PSU1dpCommunicationError" commAlarmText=""
doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
<IoPSU id= "PSU2" display= "PSU2" schematicId= "PSU2" aioType= "float"
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aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower"
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aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms"
doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant"
diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67 PSU2 Alarm[DI-321]"
diCommunicationError ="DI_PSU2dpCommunicationError" commAlarmText=""
doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
<IoPSU id= "PSU3" display= "PSU3" schematicId= "PSU3" aioType= "float"
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aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower"
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iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms"
doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant"
diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68 PSU3 Alarm[DI-322]"
diCommunicationError ="DI_PSU3dpCommunicationError" commAlarmText=""
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doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
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</IoPSUs>
<IoSCRs classType= "SicPM.Devices.IoSCR" assembly= "SicPM" >
<IoSCR id= "SCR1" display= "SCR1" schematicId= "SCR1" aioType= "float" aiVoltage= "AI_SCR1Voltage" aiArms= "AI_SCR1Arms" aiPower= "AI_SCR1Power" diStatus= "DI_SCR1Status" doReset= "DO_SCR1Reset" doStatus= "DO_SCR1Enable" diAlarm= "DI_SCR1Alarm" AlarmText= "" />
<IoSCR id= "SCR2" display= "SCR2" schematicId= "SCR2" aioType= "float" aiVoltage= "AI_SCR2Voltage" aiArms= "AI_SCR2Arms" aiPower= "AI_SCR2Power" diStatus= "DI_SCR2Status" doReset= "DO_SCR2Reset" doStatus= "DO_SCR2Enable" diAlarm= "DI_SCR2Alarm" AlarmText= "" />
<IoSCR id= "SCR3" display= "SCR3" schematicId= "SCR3" aioType= "float" aiVoltage= "AI_SCR3Voltage" aiArms= "AI_SCR3Arms" aiPower= "AI_SCR3Power" diStatus= "DI_SCR3Status" doReset= "DO_SCR3Reset" doStatus= "DO_SCR3Enable" diAlarm= "DI_SCR3Alarm" AlarmText= "" />
</IoSCRs>
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<IoUPSs classType= "SicPM.Devices.IoUPS" assembly= "SicPM" >
<IoUPS id= "UPS" display= "UPS" schematicId= "UPS" doEnable= "DO_UPSEnable" doLowBattery= "DO_UPSLowBattery" />
</IoUPSs>
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<IoHeats classType= "SicPM.Devices.IoHeat" assembly= "SicPM" >
<IoHeat module= "" id= "PMHeatEnable" display= "HeatEnable" schematicId= "HeatEnable" diEnable= "DI_PSUEnableFB" doEnable= "DO_HeaterEnable" />
</IoHeats>
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<IoValves classType= "Aitex.Core.RT.Device.Unit.IoValve" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoValve id= "V27" display= "PumpBypass" schematicId= "V27" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PumpBypassFB(V27)" doOpen= "DO_PumpBypass(V27)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V31" display= "H2Supply" schematicId= "V31" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SupplyFB(V31)" doOpen= "DO_H2Supply(V31)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V32" display= "ArSupply" schematicId= "V32" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ArSupplyFB(V32)" doOpen= "DO_ArSupply(V32)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33" display= "H2ArSwitch" schematicId= "V33" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2/ArSwitchFB(V33)" doOpen= "DO_SHH2/ArSwitch(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33s" display= "H2ArSwitch" schematicId= "V33s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHH2/ArSwitchFB(V33)" doOpen= "DO_SHH2/ArSwitch(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V35" display= "H2ArLine1" schematicId= "V35" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2ArLine1FB(V35)" doOpen= "DO_H2ArLine1(V35)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V36" display= "H2ArLine2" schematicId= "V36" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2ArLine2FB(V36)" doOpen= "DO_H2ArLine2(V36)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37" display= "N2.Switch" schematicId= "V37" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_N2SwitchFB(V37)" doOpen= "DO_N2Switch(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37s" display= "N2.Switch" schematicId= "V37s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_N2SwitchFB(V37)" doOpen= "DO_N2Switch(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39" display= "Diluted N2 Run" schematicId= "V39" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DilutedN2Run/VentFB(V39)" doOpen= "DO_DilutedN2Run/Vent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39s" display= "Diluted N2 Vent" schematicId= "V39s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DilutedN2Run/VentFB(V39)" doOpen= "DO_DilutedN2Run/Vent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40" display= "High N2 Run" schematicId= "V40" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HighN2Run/VentFB(V40)" doOpen= "DO_HighN2Run/Vent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40s" display= "High N2 Vent" schematicId= "V40s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_HighN2Run/VentFB(V40)" doOpen= "DO_HighN2Run/Vent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V41" display= "TMA Run" schematicId= "V41" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMARunFB(V41)" doOpen= "DO_TMARun(V41)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V42" display= "TMA Vent" schematicId= "V42" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TMAVentFB(V42)" doOpen= "DO_TMAVent(V42)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43" display= "TMARelease" schematicId= "V43" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAReleaseFB(V43)" doOpen= "DO_TMARelease(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43s" display= "TMARelease" schematicId= "V43s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAReleaseFB(V43)" doOpen= "DO_TMARelease(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V45" display= "TMABypass" schematicId= "V45" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TMABypassFB(V45)" doOpen= "DO_TMABypass(V45)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46" display= "TMAVac" schematicId= "V46" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAVacFB(V46)" doOpen= "DO_TMAVac(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46s" display= "TMAVac" schematicId= "V46s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMAVacFB(V46)" doOpen= "DO_TMAVac(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48" display= "TCSRelease" schematicId= "V48" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSReleaseFB(V48)" doOpen= "DO_TCSRelease(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48s" display= "TCSRelease" schematicId= "V48s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSReleaseFB(V48)" doOpen= "DO_TCSRelease(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V49" display= "TCSBypass" schematicId= "V49" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TCSBypassFB(V49)" doOpen= "DO_TCSBypass(V49)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50" display= "TCSVac" schematicId= "V50" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSVacFB(V50)" doOpen= "DO_TCSVac(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50s" display= "TCSVac" schematicId= "V50s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSVacFB(V50)" doOpen= "DO_TCSVac(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51" display= "HCLSwitch" schematicId= "V51" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HCLSwitchFB(V51)" doOpen= "DO_HCLSwitch(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51s" display= "HCLSwitch" schematicId= "V51s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_HCLSwitchFB(V51)" doOpen= "DO_HCLSwitch(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52" display= "SiH4Switch" schematicId= "V52" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SiH4SwitchFB(V52)" doOpen= "DO_SiH4Switch(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52s" display= "SiH4Switch" schematicId= "V52s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SiH4SwitchFB(V52)" doOpen= "DO_SiH4Switch(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53" display= "TCSRun" schematicId= "V53" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TCSRunVentFB" doOpen= "DO_TCSRun/Vent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53s" display= "TCSVent" schematicId= "V53s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_TCSRunVentFB" doOpen= "DO_TCSRun/Vent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54" display= "HCLRun" schematicId= "V54" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HCLRun/VentFB(V54)" doOpen= "DO_HCLRun/Vent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54s" display= "HCLVent" schematicId= "V54s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_HCLRun/VentFB(V54)" doOpen= "DO_HCLRun/Vent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V55" display= "SiH4Run" schematicId= "V55" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SiH4RunFB(V55)" doOpen= "DO_SiH4Run(V55)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V56" display= "SiH4Vent" schematicId= "V56" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SiH4VentFB(V56)" doOpen= "DO_SiH4Vent(V56)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58" display= "C2H4Switch" schematicId= "V58" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_C2H4SwitchFB(V58)" doOpen= "DO_C2H4Switch(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58s" display= "C2H4Switch" schematicId= "V58s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_C2H4SwitchFB(V58)" doOpen= "DO_C2H4Switch(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59" display= "C2H4Run" schematicId= "V59" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_C2H4RunFB(V59)" doOpen= "DO_C2H4Run(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V60" display= "C2H4Vent" schematicId= "V60" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_C2H4VentFB(V60)" doOpen= "DO_C2H4Vent(V60)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V61" display= "DoppingFinal" schematicId= "V61" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DoppingFinalFB(V61)" doOpen= "DO_DoppingFinal(V61)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V62" display= "SilaneFinal" schematicId= "V62" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SilaneFinalFB(V62)" doOpen= "DO_SilaneFinal(V62)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V63" display= "PropaneFinal" schematicId= "V63" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_PropaneFinalFB(V63)" doOpen= "DO_PropaneFinal(V63)" diCloseSensor= "" diOpenSensor= "" />
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<IoValve id= "V64" display= "CarrierGasH2" schematicId= "V64" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CarrierGasH2_FB" doOpen= "DO_CarrierGasH2" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V65" display= "CarrierGasAr" schematicId= "V65" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CarrierGasAr_FB" doOpen= "DO_CarrierGasAr" diCloseSensor= "" diOpenSensor= "" />
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<IoValve id= "V68" display= "ChamBodyArPurge" schematicId= "V68" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_ChamBodyArPurgeFB(V68)" doOpen= "DO_ChamBodyArPurge(V68)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V69" display= "ReactorLeakCheck" schematicId= "V69" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ReactorLeakCheckFB(V69)" doOpen= "DO_ReactorLeakCheck(V69)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V70" display= "TMPressBalance" schematicId= "V70" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMPressBalanceFB(V70)" doOpen= "DO_TMPressBalance(V70)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V72" display= "GasBoxVentPump" schematicId= "V72" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasBoxVentPumpFB(V72)" doOpen= "DO_GasBoxVentPump(V72)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V73" display= "MOVac" schematicId= "V73" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MOVacFB(V73)" doOpen= "DO_MOVac(V73)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V74" display= "GasboxLeakCheck" schematicId= "V74" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasboxLeakCheckFB(V74)" doOpen= "DO_GasboxLeakCheck(V74)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V75" display= "DORVac" schematicId= "V75" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DORVacFB(V75)" doOpen= "DO_DORVac(V75)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V76" display= "DORRefill" schematicId= "V76" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DORRefillFB(V76)" doOpen= "DO_DORRefill(V76)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V87" display= "SHPurgeFinal" schematicId= "V87" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHPurgeFinalFB(V87)" doOpen= "DO_SHPurgeFinal(V87)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V88" display= "OuterGasFinal" schematicId= "V88" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_OuterGasFinalFB(V88)" doOpen= "DO_OuterGasFinal(V88)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V89" display= "InnerGasFinal" schematicId= "V89" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_InnerGasFinalFB(V89)" doOpen= "DO_InnerGasFinal(V89)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V90" display= "MiddleGasFinal" schematicId= "V90" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MiddleGasFinalFB(V90)" doOpen= "DO_MiddleGasFinal(V90)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V91" display= "OpticPurgeFinal" schematicId= "V91" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_OpticPurgeFinalFB(V91)" doOpen= "DO_OpticPurgeFinal(V91)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V92" display= "GasRingPurgeFinal" schematicId= "V92" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasRingPurgeFinalFB(V92)" doOpen= "DO_GasRingPurgeFinal(V92)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V93" display= "ChamberPurgeFinal" schematicId= "V93" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ChamberPurgeFinalFB(V93)" doOpen= "DO_ChamberPurgeFinal(V93)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V94" display= "RotationUpPurgeFinal" schematicId= "V94" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_RotationUpPurgeFinalFB(V94)" doOpen= "DO_RotationUpPurgeFinal(V94)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V95" display= "ConfinementRingFinal" schematicId= "V95" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_ConfinementRingFinalFB(V95)" doOpen= "DO_ConfinementRingFinal(V95)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V96" display= "HeaterWFFinal" schematicId= "V96" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_HeaterWFFinalFB(V96)" doOpen= "DO_HeaterWFFinal(V96)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V97" display= "CarryGasFinal" schematicId= "V97" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_CarryGasFinal(V97)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "EPV2" display= "EPV2" schematicId= "EPV2" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_EPV2-1FB" doOpen= "DO_EPV2" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "HeatEnable" display= "HeatEnable" schematicId= "HeatEnable" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PSUEnableFB" doOpen= "DO_HeaterEnable" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V99" display= "C2H4SwitchHTPurge" schematicId= "V99" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_C2H4SwitchHTPurge" doOpen= "DO_C2H4SwitchHTPurge" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V99s" display= "C2H4SwitchHTPurge" schematicId= "V99s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_C2H4SwitchHTPurge" doOpen= "DO_C2H4SwitchHTPurge" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V25" display= "GasBoxVentBypass" schematicId= "V99" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_GasBoxVentBypass(V25)" diCloseSensor= "" diOpenSensor= "" />
</IoValves>
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<IoThrottleValves classType= "Aitex.Core.RT.Device.Unit.IoThrottleValve2" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoThrottleValve id= "TV" display= "TV" schematicId= "TV" unit= "mbar" scBasePath= "PM.{module}"
modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4"
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aioType="float"
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aiStatus="AI_TVmode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure"
aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure"
doTVValveEnable="DO_TVEnable" diTVValveEnable=""/>
</IoThrottleValves>
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<IoMfcs classType= "SicPM.Devices.IoMFC" assembly= "SicPM" >
<IoMfc3 id= "Mfc1" display= "Mfc1" schematicId= "Mfc1" unit= "sccm" aiActMode= "AI_M1ActMode" aoSetMode= "AO_M1CtrlMode" aiFlow= "AI_M1" aoFlow= "AO_M1" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC01Offline" AlarmText= "Alarm101 MFC01 Offline[DI-351]" />
<IoMfc3 id= "Mfc2" display= "Mfc2" schematicId= "Mfc2" unit= "sccm" aiActMode= "AI_M2ActMode" aoSetMode= "AO_M2CtrlMode" aiFlow= "AI_M2" aoFlow= "AO_M2" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC02Offline" AlarmText= "Alarm102 MFC02 Offline[DI-352]" />
<IoMfc3 id= "Mfc3" display= "Mfc3" schematicId= "Mfc3" unit= "sccm" aiActMode= "AI_M3ActMode" aoSetMode= "AO_M3CtrlMode" aiFlow= "AI_M3" aoFlow= "AO_M3" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC03Offline" AlarmText= "Alarm103 MFC03 Offline[DI-353]" />
<IoMfc3 id= "Mfc4" display= "Mfc4" schematicId= "Mfc4" unit= "sccm" aiActMode= "AI_M4ActMode" aoSetMode= "AO_M4CtrlMode" aiFlow= "AI_M4" aoFlow= "AO_M4" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC04Offline" AlarmText= "Alarm104 MFC04 Offline[DI-354]" />
<IoMfc3 id= "Mfc5" display= "Mfc5" schematicId= "Mfc5" unit= "sccm" aiActMode= "AI_M5ActMode" aoSetMode= "AO_M5CtrlMode" aiFlow= "AI_M5" aoFlow= "AO_M5" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC05Offline" AlarmText= "Alarm105 MFC05 Offline[DI-355]" />
<IoMfc3 id= "Mfc6" display= "Mfc6" schematicId= "Mfc6" unit= "sccm" aiActMode= "AI_M6ActMode" aoSetMode= "AO_M6CtrlMode" aiFlow= "AI_M6" aoFlow= "AO_M6" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC06Offline" AlarmText= "Alarm106 MFC06 Offline[DI-356]" />
<IoMfc3 id= "Mfc7" display= "Mfc7" schematicId= "Mfc7" unit= "sccm" aiActMode= "AI_M7ActMode" aoSetMode= "AO_M7CtrlMode" aiFlow= "AI_M7" aoFlow= "AO_M7" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC07Offline" AlarmText= "Alarm107 MFC07 Offline[DI-357]" />
<IoMfc3 id= "Mfc8" display= "Mfc8" schematicId= "Mfc8" unit= "sccm" aiActMode= "AI_M8ActMode" aoSetMode= "AO_M8CtrlMode" aiFlow= "AI_M8" aoFlow= "AO_M8" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC08Offline" AlarmText= "Alarm108 MFC08 Offline[DI-358]" />
<IoMfc3 id= "Mfc9" display= "Mfc9" schematicId= "Mfc9" unit= "sccm" aiActMode= "AI_M9ActMode" aoSetMode= "AO_M9CtrlMode" aiFlow= "AI_M9" aoFlow= "AO_M9" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC09Offline" AlarmText= "Alarm109 MFC09 Offline[DI-359]" />
<IoMfc3 id= "Mfc10" display= "Mfc10" schematicId= "Mfc10" unit= "sccm" aiActMode= "AI_M10ActMode" aoSetMode= "AO_M10CtrlMode" aiFlow= "AI_M10" aoFlow= "AO_M10" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC10Offline" AlarmText= "Alarm110 MFC10 Offline[DI-360]" />
<IoMfc3 id= "Mfc11" display= "Mfc11" schematicId= "Mfc11" unit= "sccm" aiActMode= "AI_M11ActMode" aoSetMode= "AO_M11CtrlMode" aiFlow= "AI_M11" aoFlow= "AO_M11" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC11Offline" AlarmText= "Alarm111 MFC11 Offline[DI-361]" />
<IoMfc3 id= "Mfc12" display= "Mfc12" schematicId= "Mfc12" unit= "sccm" aiActMode= "AI_M12ActMode" aoSetMode= "AO_M12CtrlMode" aiFlow= "AI_M12" aoFlow= "AO_M12" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC12Offline" AlarmText= "Alarm112 MFC12 Offline[DI-362]" />
<IoMfc3 id= "Mfc13" display= "Mfc13" schematicId= "Mfc13" unit= "sccm" aiActMode= "AI_M13ActMode" aoSetMode= "AO_M13CtrlMode" aiFlow= "AI_M13" aoFlow= "AO_M13" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC13Offline" AlarmText= "Alarm113 MFC13 Offline[DI-363]" />
<IoMfc3 id= "Mfc14" display= "Mfc14" schematicId= "Mfc14" unit= "sccm" aiActMode= "AI_M14ActMode" aoSetMode= "AO_M14CtrlMode" aiFlow= "AI_M14" aoFlow= "AO_M14" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC14Offline" AlarmText= "Alarm114 MFC14 Offline[DI-364]" />
<IoMfc3 id= "Mfc15" display= "Mfc15" schematicId= "Mfc15" unit= "sccm" aiActMode= "AI_M15ActMode" aoSetMode= "AO_M15CtrlMode" aiFlow= "AI_M15" aoFlow= "AO_M15" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC15Offline" AlarmText= "Alarm115 MFC15 Offline[DI-365]" />
<IoMfc3 id= "Mfc16" display= "Mfc16" schematicId= "Mfc16" unit= "sccm" aiActMode= "AI_M16ActMode" aoSetMode= "AO_M16CtrlMode" aiFlow= "AI_M16" aoFlow= "AO_M16" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC16Offline" AlarmText= "Alarm116 MFC16 Offline[DI-366]" />
<IoMfc3 id= "Mfc19" display= "Mfc19" schematicId= "Mfc19" unit= "sccm" aiActMode= "AI_M19ActMode" aoSetMode= "AO_M19CtrlMode" aiFlow= "AI_M19" aoFlow= "AO_M19" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC19Offline" AlarmText= "Alarm119 MFC19 Offline[DI-369]" />
<IoMfc3 id= "Mfc20" display= "Mfc20" schematicId= "Mfc20" unit= "sccm" aiActMode= "AI_M20ActMode" aoSetMode= "AO_M20CtrlMode" aiFlow= "AI_M20" aoFlow= "AO_M20" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC20Offline" AlarmText= "Alarm120 MFC20 Offline[DI-370]" />
<IoMfc3 id= "Mfc22" display= "Mfc22" schematicId= "Mfc22" unit= "sccm" aiActMode= "AI_M22ActMode" aoSetMode= "AO_M22CtrlMode" aiFlow= "AI_M22" aoFlow= "AO_M22" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC22Offline" AlarmText= "Alarm122 MFC22 Offline[DI-372]" />
<IoMfc3 id= "Mfc23" display= "Mfc23" schematicId= "Mfc23" unit= "sccm" aiActMode= "AI_M23ActMode" aoSetMode= "AO_M23CtrlMode" aiFlow= "AI_M23" aoFlow= "AO_M23" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC23Offline" AlarmText= "Alarm123 MFC23 Offline[DI-373]" />
<IoMfc3 id= "Mfc25" display= "Mfc25" schematicId= "Mfc25" unit= "sccm" aiActMode= "AI_M25ActMode" aoSetMode= "AO_M25CtrlMode" aiFlow= "AI_M25" aoFlow= "AO_M25" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC25Offline" AlarmText= "Alarm125 MFC25 Offline[DI-375]" />
<IoMfc3 id= "Mfc26" display= "Mfc26" schematicId= "Mfc26" unit= "sccm" aiActMode= "AI_M26ActMode" aoSetMode= "AO_M26CtrlMode" aiFlow= "AI_M26" aoFlow= "AO_M26" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC26Offline" AlarmText= "Alarm126 MFC26 Offline[DI-376]" />
<IoMfc3 id= "Mfc27" display= "Mfc27" schematicId= "Mfc27" unit= "sccm" aiActMode= "AI_M27ActMode" aoSetMode= "AO_M27CtrlMode" aiFlow= "AI_M27" aoFlow= "AO_M27" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC27Offline" AlarmText= "Alarm127 MFC27 Offline[DI-377]" />
<IoMfc3 id= "Mfc28" display= "Mfc28" schematicId= "Mfc28" unit= "sccm" aiActMode= "AI_M28ActMode" aoSetMode= "AO_M28CtrlMode" aiFlow= "AI_M28" aoFlow= "AO_M28" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC28Offline" AlarmText= "Alarm128 MFC28 Offline[DI-378]" />
<IoMfc3 id= "Mfc29" display= "Mfc29" schematicId= "Mfc29" unit= "sccm" aiActMode= "AI_M29ActMode" aoSetMode= "AO_M29CtrlMode" aiFlow= "AI_M29" aoFlow= "AO_M29" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC29Offline" AlarmText= "Alarm129 MFC29 Offline[DI-379]" />
<IoMfc3 id= "Mfc40" display= "Mfc40" schematicId= "Mfc40" unit= "sccm" aiActMode= "AI_M40ActMode" aoSetMode= "AO_M40CtrlMode" aiFlow= "AI_M40" aoFlow= "AO_M40" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "" AlarmText= "" />
<IoMfc3 id= "Mfc31" display= "Mfc31" schematicId= "Mfc31" unit= "sccm" aiActMode= "AI_M31ActMode" aoSetMode= "AO_M31CtrlMode" aiFlow= "AI_M31" aoFlow= "AO_M31" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC31Offline" AlarmText= "Alarm131 MFC31 Offline[DI-381]" />
<IoMfc3 id= "Mfc32" display= "Mfc32" schematicId= "Mfc32" unit= "sccm" aiActMode= "AI_M32ActMode" aoSetMode= "AO_M32CtrlMode" aiFlow= "AI_M32" aoFlow= "AO_M32" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC32Offline" AlarmText= "Alarm132 MFC32 Offline[DI-382]" />
<IoMfc3 id= "Mfc33" display= "Mfc33" schematicId= "Mfc33" unit= "sccm" aiActMode= "AI_M33ActMode" aoSetMode= "AO_M33CtrlMode" aiFlow= "AI_M33" aoFlow= "AO_M33" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC33Offline" AlarmText= "Alarm133 MFC33 Offline[DI-383]" />
<IoMfc3 id= "Mfc35" display= "Mfc35" schematicId= "Mfc35" unit= "sccm" aiActMode= "AI_M35ActMode" aoSetMode= "AO_M35CtrlMode" aiFlow= "AI_M35" aoFlow= "AO_M35" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC35Offline" AlarmText= "Alarm135 MFC35 Offline[DI-385]" />
<IoMfc3 id= "Mfc36" display= "Mfc36" schematicId= "Mfc36" unit= "sccm" aiActMode= "AI_M36ActMode" aoSetMode= "AO_M36CtrlMode" aiFlow= "AI_M36" aoFlow= "AO_M36" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC36Offline" AlarmText= "Alarm136 MFC36 Offline[DI-386]" />
<IoMfc3 id= "Mfc37" display= "Mfc37" schematicId= "Mfc37" unit= "sccm" aiActMode= "AI_M37ActMode" aoSetMode= "AO_M37CtrlMode" aiFlow= "AI_M37" aoFlow= "AO_M37" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC37Offline" AlarmText= "Alarm137 MFC37 Offline[DI-387]" />
<IoMfc3 id= "Mfc38" display= "Mfc38" schematicId= "Mfc38" unit= "sccm" aiActMode= "AI_M38ActMode" aoSetMode= "AO_M38CtrlMode" aiFlow= "AI_M38" aoFlow= "AO_M38" scBasePath= "PM.{module}.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC38Offline" AlarmText= "Alarm138 MFC38 Offline[DI-388]" />
</IoMfcs>
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<IoPressureMeters classType= "SicPM.Devices.IoPressure" assembly= "SicPM" >
<IoPressureMeter id= "Pressure1" display= "PC1" schematicId= "Pressure1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC1Valve" aiActMode= "AI_PC1ActMode" aoSetMode= "AO_PC1CtrlMode" aiValue= "AI_PressCtrl1" aoValue= "AO_PressCtrl1" formatString= "0.0" diAlarm= "DI_PC01Offline" AlarmText= "Alarm141 PC1 Offline[DI-391]" />
<IoPressureMeter id= "Pressure2" display= "PC2" schematicId= "Pressure2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC2Valve" aiActMode= "AI_PC2ActMode" aoSetMode= "AO_PC2CtrlMode" aiValue= "AI_PressCtrl2" aoValue= "AO_PressCtrl2" formatString= "0.0" diAlarm= "DI_PC02Offline" AlarmText= "Alarm142 PC2 Offline[DI-392]" />
<IoPressureMeter id= "Pressure3" display= "PC3" schematicId= "Pressure3" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC3Valve" aiActMode= "AI_PC3ActMode" aoSetMode= "AO_PC3CtrlMode" aiValue= "AI_PressCtrl3" aoValue= "AO_PressCtrl3" formatString= "0.0" diAlarm= "DI_PC03Offline" AlarmText= "Alarm143 PC3 Offline[DI-393]" />
<IoPressureMeter id= "Pressure4" display= "PC4" schematicId= "Pressure4" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC4Valve" aiActMode= "AI_PC4ActMode" aoSetMode= "AO_PC4CtrlMode" aiValue= "AI_PressCtrl4" aoValue= "AO_PressCtrl4" formatString= "0.0" diAlarm= "DI_PC04Offline" AlarmText= "Alarm144 PC4 Offline[DI-394]" />
<IoPressureMeter id= "Pressure5" display= "PC5" schematicId= "Pressure5" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC5Valve" aiActMode= "AI_PC5ActMode" aoSetMode= "AO_PC5CtrlMode" aiValue= "AI_PressCtrl5" aoValue= "AO_PressCtrl5" formatString= "0.0" diAlarm= "DI_PC05Offline" AlarmText= "Alarm145 PC5 Offline[DI-395]" />
<IoPressureMeter id= "Pressure6" display= "PC6" schematicId= "Pressure6" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC6Valve" aiActMode= "AI_PC6ActMode" aoSetMode= "AO_PC6CtrlMode" aiValue= "AI_PressCtrl6" aoValue= "AO_PressCtrl6" formatString= "0.0" diAlarm= "DI_PC06Offline" AlarmText= "Alarm146 PC6 Offline[DI-396]" />
<IoPressureMeter id= "Pressure7" display= "PC7" schematicId= "Pressure7" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC7Valve" aiActMode= "AI_PC7ActMode" aoSetMode= "AO_PC7CtrlMode" aiValue= "AI_PressCtrl7" aoValue= "AO_PressCtrl7" formatString= "0.0" diAlarm= "DI_PC07Offline" AlarmText= "Alarm147 PC7 Offline[DI-397]" />
<IoPressureMeter id= "PT1" display= "PT1" schematicId= "PT1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_ChamPress" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT2" display= "PT2" schematicId= "PT2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_ForelinePress" aoValue= "" formatString= "0.0" />
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</IoPressureMeters>
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<IoWaterFlows classType= "SicPM.Devices.IoWaterFlow" assembly= "SicPM" >
<IoWaterFlow id= "SHFlowTemp" module= "" display= "SHFlow Temp" schematicId= "SHFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_SHFlowTemp" diFlowSW= "DI_SHFlowSW" />
<IoWaterFlow id= "ChamTopFlowTemp" module= "" display= "ChamTopFlowTemp" schematicId= "ChamTopFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_ChamTopFlowTemp" diFlowSW= "DI_ChamTopFlowSW" />
<IoWaterFlow id= "ChamMiddleFlowTemp" module= "" display= "ChamMiddleFlow Temp" schematicId= "ChamMiddleFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_ChamMiddleFlow1Temp" diFlowSW= "DI_ChamMiddleFlow1SW" />
<IoWaterFlow id= "ChamMiddleFlow2Temp" module= "" display= "ChamMiddleFlow2 Temp" schematicId= "ChamMiddleFlow2Temp" unit= "" aioType= "float" aiFeedback= "AI_ChamMiddleFlow2Temp" diFlowSW= "DI_ChamMiddleFlow2SW" />
<IoWaterFlow id= "ChamBottomFlowTemp" module= "" display= "ChamBottomFlow Temp" schematicId= "ChamBottomFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_ChamBottomFlowTemp" diFlowSW= "DI_ChamBottomFlowSW" />
<IoWaterFlow id= "BottomPlateFlowTemp" module= "" display= "BottomPlateFlow Temp" schematicId= "BottomPlateFlowTemp" unit= "" aioType= "float" aiFeedback= "" diFlowSW= "" />
<IoWaterFlow id= "PowerRod1FlowTemp" module= "" display= "PowerRod1Flow Temp" schematicId= "PowerRod1FlowTemp" unit= "" aioType= "float" aiFeedback= "AI_PowerRod1FlowTemp" diFlowSW= "DI_PowerRod1FlowSW" />
<IoWaterFlow id= "PowerRod2FlowTemp" module= "" display= "PowerRod2Flow Temp" schematicId= "PowerRod2FlowTemp" unit= "" aioType= "float" aiFeedback= "AI_PowerRod2FlowTemp" diFlowSW= "DI_PowerRod2FlowSW" />
<IoWaterFlow id= "ForelineColdTrapFlowTemp" module= "" display= "Foreline ColdTrap Flow Temp" schematicId= "ForelineColdTrapFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_ForelineFlowTemp" diFlowSW= "DI_ForelineFlowSW" />
<IoWaterFlow id= "InSituFlowTemp" module= "" display= "InSituFlow Temp" schematicId= "InSituFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_ElectrodeWFlowTemp" diFlowSW= "DI_ElectrodeWFlowSW" />
<IoWaterFlow id= "TMPump1FlowTemp" module= "" display= "TMPump1FlowTemp" schematicId= "TMPump1FlowTemp" unit= "" aioType= "float" aiFeedback= "AI_TMPump1FlowTemp" diFlowSW= "DI_TMPump1FlowSW" />
<IoWaterFlow id= "TMPump2FlowTemp" module= "" display= "TMPump2FlowTemp" schematicId= "TMPump2FlowTemp" unit= "" aioType= "float" aiFeedback= "AI_TMPump2FlowTemp" diFlowSW= "DI_TMPump2FlowSW" />
<IoWaterFlow id= "TMFlow1Temp" module= "" display= "InletTotalFlow Temp" schematicId= "InletTotalFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_TMTopLidFlowTemp" diFlowSW= "DI_TMBufferFlowSW" />
<IoWaterFlow id= "TMFlow2Temp" module= "" display= "InletTotalFlow2 Temp" schematicId= "InletTotalFlow2Temp" unit= "" aioType= "float" aiFeedback= "AI_TMBufferFlowTemp" diFlowSW= "DI_TMTopLidFlowSW" />
<IoWaterFlow id= "TransformerFlowTemp" module= "" display= "TransformerFlow Temp" schematicId= "TransformerFlowTemp" unit= "" aioType= "float" aiFeedback= "AI_TransformerFlowTemp" diFlowSW= "DI_TransformerFlowSW" />
</IoWaterFlows>
<IoPumps classType= "SicPM.Devices.IoPump" assembly= "SicPM" >
<IoPump id= "Pump" module= "" display= "Pump" schematicId= "Pump" unit= "" aioType= ""
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diDryPumpAlarm="DI_PM1DryPumpAlarm"
diPumpExhaustPress="DI_PumpExhaustPressSW"
diDryPumpFlow="DI_DryPumpFlowSW"
diDryPump1Running="DI_PM1DryPump1Running"
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diDryPump1Warning="DI_PM1DryPump1Warning"/>
</IoPumps>
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<IoPTOffsetAndKs classType= "SicPM.Devices.IoPTOffsetAndK" assembly= "SicPM" >
<IoPTOffsetAndK id= "PT1OffsetAndK" module= "" display= "PT1" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT1_Offset" aoK= "AO_PT1_K" />
<IoPTOffsetAndK id= "PT2OffsetAndK" module= "" display= "PT2" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT2_Offset" aoK= "AO_PT2_K" />
<IoPTOffsetAndK id= "PT3OffsetAndK" module= "" display= "PT3" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT3_Offset" aoK= "AO_PT3_K" />
<IoPTOffsetAndK id= "PT4OffsetAndK" module= "" display= "PT4" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT4_Offset" aoK= "AO_PT4_K" />
<IoPTOffsetAndK id= "PT9OffsetAndK" module= "" display= "PT9" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT9_Offset" aoK= "AO_PT9_K" />
<IoPTOffsetAndK id= "PT10OffsetAndK" module= "" display= "PT10" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT10_Offset" aoK= "AO_PT10_K" />
</IoPTOffsetAndKs>
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<DoSensors classType= "SicPM.Devices.DoSensor" assembly= "SicPM" >
<DoSensor id= "CleanRoutineSucceed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_CleanRoutineSucceed" infoText= "" warningText= "" alarmText= "" />
</DoSensors>
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<IoSensors classType= "SicPM.Devices.IoSensor" assembly= "SicPM" >
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<IoSensor id= "SensorChamPressAboveATMSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamPressAboveATMSW" infoText= "" warningText= "" alarmText = "Alarm3 Chamber Press Above ATM [DI-4]" />
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<IoSensor id= "SensorChamAtSafeProcessPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamAtSafeProcessPressSW" infoText = "Information3 Chamber At Safe Process Press [DI-5]" warningText= "" alarmText= "" />
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<IoSensor id= "SensorPMATMSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PMATMSW" infoText = "Information2 PM At ATM [DI-9]" warningText= "" alarmText= "" />
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<IoSensor id= "SensorHeaterTempBelow900CSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_HeaterTempLowLimitSW" infoText = "Information4 Heater Temp Below 900C [DI-11]" warningText= "" alarmText= "" />
<IoSensor id= "SensorConfinementRingUp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ConfinementRingUp" infoText = "Information5 Confinement Ring At Up Position [DI-12]" warningText= "" alarmText= "" />
<IoSensor id= "SensorSusceptorAtSafeSpeed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SusceptorAtSafeSpeed" infoText = "Information6 Susceptor At Safe Speed [DI-13]" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamLidPushButtonLocal" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamLidPushButtonLocal" infoText = "Information7 Chamer Lid Push Button On Local Mode [DI-49]" warningText= "" alarmText= "" />
<IoSensor id= "SensorConfinementRingDown" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ConfinementRingDown" infoText = "Information8 Confinement Ring At Down position [DI-50]" warningText= "" alarmText= "" />
<IoSensor id= "SensorChamCabDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamCabDoorClosed" infoText= "" warningText = "Warning1 Chamber Cab Door Not Closed [DI-3]" alarmText= "" />
<IoSensor id= "SensorDORPressATMSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_DORPressATMSW" infoText= "" warningText = "Warning2 DOR Press ATM [DI-7]" alarmText= "" />
<IoSensor id= "SensorInletTotalFlowLowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_InletTotalFlowLowSW" infoText= "" warningText = "" alarmText= "Alarm17 Chamber Cooling Water Pressure Low [DI-27]" />
<IoSensor id= "SensorInletTotalFlowHighSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_InletTotalFlowHighSW" infoText= "" warningText = "" alarmText= "Alarm17 Chamber Cooling Water Pressure High [DI-28]" />
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<IoSensor id= "SensorPowerRackExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PowerRackExhaustDPSW" infoText= "" warningText = "" alarmText= "Alarm18 Power Rack Exhaust DP Error [DI-29]" />
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<IoSensor id= "SensorGBDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBDoorClosed" infoText= "" warningText = "Warning3 Gas Box Door Not Closed [DI-33]" alarmText= "" />
<IoSensor id= "SensorTCSAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TCSAlarm" infoText= "" warningText = "" alarmText= "Alarm28 TCS.Alarm [DI-43]" />
<IoSensor id= "SensorReactorWaterLeakSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ReactorWaterLeakSW" infoText= "" warningText = "Warning5 Reactor Water Leak [DI-48]" alarmText= "" />
<IoSensor id= "SensorTMFlow1SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMBufferFlowSW" infoText= "" warningText = "Warning6 TM Cooling Water Low Flow -U13 [DI-51]" alarmText= "" />
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<IoSensor id= "SensorReactorHCLDetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ReactorHCLDetectorSW" infoText= "" warningText = "" alarmText= "Alarm43 ReactorHCLDetector [DI-52]" />
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<IoSensor id= "SensorGBWaterLeakSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBWaterLeakSW" infoText= "" warningText = "Warning7 Gas Box Water Leak [DI-60]" alarmText= "" />
<IoSensor id= "SensorDryPump1Warning" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PM1DryPump1Warning" infoText= "" warningText = "Warning8 PM1DryPump1 Warning [DI-67]" alarmText= "" />
<IoSensor id= "SensorEMOStatusSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_EMOStatusSW" infoText= "" warningText = "" alarmText= "Alarm42 EMOStatus [DI-70]" />
<IoSensor id= "SensorPRWaterLeakSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PowerRackWaterLeakSW" infoText= "" warningText = "Warning9 Power Rack Water Leak [DI-77]" alarmText= "" />
<IoSensor id= "SensorSHLidClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SHLidClosed" infoText= "" warningText = "Warning10 SH Lid Opened [DI-106]" alarmText= "" />
<IoSensor id= "SensorMiddleLidClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_MiddleLidClosed" infoText= "" warningText = "Warning12 Middle Lid Opened [DI-120]" alarmText= "" />
<IoSensor id= "SensorPSU1Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PSU1Status" infoText= "Info13 PSU1 Status Is Off[DI-296]" warningText = "" alarmText= "" />
<IoSensor id= "SensorPSU2Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PSU2Status" infoText= "Info14 PSU2 Status Is Off[DI-297]" warningText = "" alarmText= "" />
<IoSensor id= "SensorPSU3Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PSU3Status" infoText= "Info15 PSU3 Status Is Off[DI-298]" warningText = "" alarmText= "" />
<IoSensor id= "SensorSCR1Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SCR1Status" infoText= "Info16 SCR1 Status Is Off[DI-302]" warningText = "" alarmText= "" />
<IoSensor id= "SensorSCR2Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SCR2Status" infoText= "Info17 SCR2 Status Is Off[DI-303]" warningText = "" alarmText= "" />
<IoSensor id= "SensorSCR3Status" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SCR3Status" infoText= "Info18 SCR3 Status Is Off[DI-304]" warningText = "" alarmText= "" />
<IoSensor id= "SensorPSUInnerTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUInnerTempHAlarm" infoText= "" warningText = "Warning19 PSU Inner.Temp High [DI-305]" alarmText= "" />
<IoSensor id= "SensorPSUMiddleTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUMiddleTempHAlarm" infoText= "" warningText = "Warning20 PSU Middle.Temp High [DI-306]" alarmText= "" />
<IoSensor id= "SensorPSUOuterTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PSUOuterTempHAlarm" infoText= "" warningText = "Warning21 PSU Outer.Temp High [DI-307]" alarmText= "" />
<IoSensor id= "SensorSCRUpperTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRUpperTempHAlarm" infoText= "" warningText = "Warning22 SCR Upper TempHigh [DI-311]" alarmText= "" />
<IoSensor id= "SensorSCRMiddleTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRMiddleTempHAlarm" infoText= "" warningText = "Warning23 SCR Middle TempHigh [DI-312]" alarmText= "" />
<IoSensor id= "SensorSCRLowerTempHAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SCRLowerTempHAlarm" infoText= "" warningText = "Warning24 SCR Lower TempHigh [DI-313]" alarmText= "" />
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<IoSensor id= "SensorSHFlowTempU1OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_SHFlowTempU1OT" infoText= "" warningText = "Warning25 SH Cooling Water Temp Over Temp -U1 [DI-401]" alarmText= "" />
<IoSensor id= "SensorChamTopFlowTempU2OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamTopFlowTempU2OT" infoText= "" warningText = "Warning26 Chamber Top Cooling Water Over Temp -U2 [DI-402]" alarmText= "" />
<IoSensor id= "SensorChamMiddleFlow1TempU3OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMiddleFlow1TempU3OT" infoText= "" warningText = "Warning27 Chamber Middle1 Cooling Water Over Temp -U3 [DI-403]" alarmText= "" />
<IoSensor id= "SensorChamMiddleFlow2TempU4OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamMiddleFlow2TempU4OT" infoText= "" warningText = "Warning28 Chamber Middle2 Cooling Water Over Temp -U4 [DI-404]" alarmText= "" />
<IoSensor id= "SensorChamBottomFlowTempU5OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ChamBottomFlowTempU5OT" infoText= "" warningText = "Warning29 Chamber Bottom Cooling Water Over Temp -U5 [DI-405]" alarmText= "" />
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<IoSensor id= "SensorTMPump2FlowTempU6OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TMPump2FlowTempU06OT" infoText= "" warningText = "Warning30 TMPump2 Cooling Water Over Temp -U6 [DI406]" alarmText= "" />
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<IoSensor id= "SensorPowerRodFlow1TempU7OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PowerRodFlow1TempU7OT" infoText= "" warningText = "Warning31 Power Rod1 Cooling Water Over Temp -U7 [DI-407]" alarmText= "" />
<IoSensor id= "SensorPowerRodFlow2TempU8OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_PowerRodFlow2TempU8OT" infoText= "" warningText = "Warning32 Power Rod2 Cooling Water Over Temp -U8 [DI-408]" alarmText= "" />
<IoSensor id= "SensorForelineColdTrapFlowTempU9OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ForelineFlowTempU9OT" infoText= "" warningText = "Warning33 Foreline Cooling Water Over Temp -U9 [DI409]" alarmText= "" />
<IoSensor id= "SensorInSituFlowTempU10OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ElectrodeWFlowTempU10OT" infoText= "" warningText = "Warning34 Electrode-W Cooling Water Over Temp -U10 [DI410]" alarmText= "" />
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<IoSensor id= "SensorTMPump1FlowTempU11OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TMPump1FlowTempU11OT" infoText= "" warningText = "Warning35 TMPump1 Cooling Water Over Temp -U11 [DI411]" alarmText= "" />
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<IoSensor id= "SensorTransformerFlowTempU14OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TransformerFlowTempU14OT" infoText= "" warningText = "Warning36 Transformer Cooling Water Over Temp -U14 [DI-412]" alarmText= "" />
<IoSensor id= "SensorTMFlow1TempU12OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TMPumpFlowTempU11OT" infoText= "" warningText = "Warning37 TMTopLid Cooling Water Over Temp -U12 [DI413]" alarmText= "" />
<IoSensor id= "SensorTMFlow2TempU13OT" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TMBufferFlowTempU13OT" infoText= "" warningText = "Warning38 TMBuffer Cooling Water Over Temp -U13 [DI414]" alarmText= "" />
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<!-- <IoSensor id="SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_ChamMiddleFlow2Temp" infoText="" warningText ="" alarmText="Alarm48 Chamber Middle1 Cooling Water Over Temp - U4 [DO195]"/>
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<IoSensor id= "SensorSHFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_SHFlowTemp" infoText= "" warningText = "" alarmText= "Alarm45 SH Cooling Water Temp Over Temp -U1 [DO196]" />
<IoSensor id= "SensorChamTopFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_ChamTopFlowTemp" infoText= "" warningText = "" alarmText= "Alarm46 Chamber Top Cooling Water Over Temp -U2 [DO197]" />
<IoSensor id= "SensorChamMiddleFlow1Temp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_ChamMiddleFlow1Temp" infoText= "" warningText = "" alarmText= "Alarm47 Chamber Middle1 Cooling Water Over Temp -U3 [DO198]" />
<IoSensor id= "SensorChamBottomFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_ChamBottomFlowTemp" infoText= "" warningText = "" alarmText= "Alarm49 Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
<IoSensor id= "SensorTMPump2FlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TMPump2FlowTemp" infoText= "" warningText = "" alarmText= "Alarm50 TMPump2 Cooling Water Over Temp -U6 [DO200]" />
<IoSensor id= "SensorPowerRod1FlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_PowerRod1FlowTemp" infoText= "" warningText = "" alarmText= "Alarm51 Power Rod1 Cooling Water Over Temp -U7 [DO201]" />
<IoSensor id= "SensorPowerRod2FlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_PowerRod2FlowTemp" infoText= "" warningText = "" alarmText= "Alarm52 Power Rod2 Cooling Water Over Temp -U8 [DO202]" />
<IoSensor id= "SensorForelineFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_ForelineFlowTemp" infoText= "" warningText = "" alarmText= "Alarm53 Foreline Cooling Water Over Temp -U9 [DO203]" />
<IoSensor id= "SensorElectrodeWFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_ElectrodeWFlowTemp" infoText= "" warningText = "" alarmText= "Alarm54 Electrode-W Cooling Water Over Temp -U10 [DO204]" />
<IoSensor id= "SensorTMPump1FlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TMPump1FlowTemp" infoText= "" warningText = "" alarmText= "Alarm55 TMPump1 Cooling Water Over Temp -U11 [DO205]" />
<IoSensor id= "SensorTransformerFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TransformerFlowTemp" infoText= "" warningText = "" alarmText= "Alarm56 Transformer Cooling Water Over Temp -U14 [DO206]" />
<IoSensor id= "SensorTMTopLidFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TMTopLidFlowTemp" infoText= "" warningText = "" alarmText= "Alarm57 TMTopLid Cooling Water Over Temp -U12 [DO207]" />
<IoSensor id= "SensorTMBufferFlowTemp" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" do= "DO_TMBufferFlowTemp" infoText= "" warningText = "" alarmText= "Alarm58 TMBuffer Cooling Water Over Temp -U13 [DO208]" /> -->
<IoSensor id= "SensorChamLidClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamLidClosed" infoText= "" warningText= "" alarmText = "Alarm1 Chamber Lid Opened [DI-0]" />
<IoSensor id= "SensorMiddleFlow2SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamMiddleFlow2SW" infoText= "" warningText= "" alarmText = "Alarm2 Chamber Middle2 Cooling Water Flow Abnormal U4[DI-46]" />
<IoSensor id= "SensorHeaterTempUp1680CSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_HeaterTempUpLimitSW" infoText= "" warningText= "" alarmText = "Alarm4 Heater Controller1 Present Temp High [DI-10]" />
<IoSensor id= "SensorSHFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_SHFlowSW" infoText= "" warningText= "" alarmText = "Alarm5 SH Cooling Water Low Flow -U1 [DI-15]" />
<IoSensor id= "SensorChamTopFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamTopFlowSW" infoText= "" warningText= "" alarmText = "Alarm6 Chamber Top Cooling Water Low Flow -U2 [DI-16]" />
<IoSensor id= "SensorChamMiddleFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamMiddleFlow1SW" infoText= "" warningText= "" alarmText = "Alarm7 Chamber Middle1 Cooling Water Flow Abnormal -U3 [DI-17]" />
<IoSensor id= "SensorChamBottomFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ChamBottomFlowSW" infoText= "" warningText= "" alarmText = "Alarm8 Chamber Bottom Cooling Water Flow Abnormal -U5 [DI-18]" />
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<IoSensor id= "SensorTMPump2FlowSW" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_TMPump2FlowSW" infoText = "" warningText = "" alarmText = "Alarm9 TMPump2 Water Low Flow -U6 [DI-19]" />
2022-09-19 09:16:33 +08:00
<IoSensor id= "SensorPowerRodFlow1SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PowerRod1FlowSW" infoText= "" warningText= "" alarmText = "Alarm10 Power Rod1 Cooling Water Low Flow -U7 [DI-20]" />
<IoSensor id= "SensorPowerRodFlow2SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PowerRod2FlowSW" infoText= "" warningText= "" alarmText = "Alarm11 Power Rod2 Cooling Water Low Flow -U8 [DI-21]" />
<IoSensor id= "SensorForelineFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ForelineFlowSW" infoText= "" warningText= "" alarmText = "Alarm12 Foreline Cooling Water Low Flow -U9 [DI-22]" />
<IoSensor id= "SensorInSituFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ElectrodeWFlowSW" infoText= "" warningText= "" alarmText = "Alarm13 Electrode-W Cooling Water Low Flow -U10 [DI-23]" />
<IoSensor id= "SensorTMPump1FlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMPump1FlowSW" infoText= "" warningText= "" alarmText = "Alarm14 TMPump1 Cooling Water Low Flow -U11 [DI-24]" />
<IoSensor id= "SensorTransformerFlowSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TransformerFlowSW" infoText= "" warningText= "" alarmText = "Alarm15 Transformer Cooling Water Low Flow -U14 [DI-25]" />
<IoSensor id= "SensorTMFlow2SW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMTopLidFlowSW" infoText= "" warningText= "" alarmText = "Alarm16 TM Pump Low Flow -U12 [DI-26]" />
<IoSensor id= "SensorPMH2DetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PMH2DetectorSW" infoText= "" warningText= "" alarmText = "Alarm19 PM H2 Leak Detect [DI-30]" />
<IoSensor id= "SensorGBHCLDetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBHCLDetectorSW" infoText= "" warningText= "" alarmText = "Alarm20 Gasbox HCL Leak Detect [DI-31]" />
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<IoSensor id= "SensorGBExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBExhaustDPSW" infoText= "" warningText= "Alarm21 Gasbox Exhaust DP Error [DI-32]" alarmText = "" />
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<IoSensor id= "SensorGasPipeTempCtrlAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GasPipeTempCtrlAlarm" infoText= "" warningText= "Warning39 GasPipeTempCtrl Alarm [DI-35]" alarmText = "" />
<IoSensor id= "SensorDryPumpAlarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PM1DryPumpAlarm" infoText= "" warningText= "" alarmText = "Alarm22 PM1DryPump.Alarm [DI-36]" />
<IoSensor id= "SensorPumpExhaustPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PumpExhaustPressSW" infoText= "" warningText= "" alarmText = "Alarm23 Pump Exhaust Pressure Abnormal [DI-38]" />
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<IoSensor id= "SensorPMAExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PMAExhaustDPSW" infoText= "" warningText= "Alarm24 PM Exhaust DP Error [DI-39]" alarmText = "" />
<IoSensor id= "SensorPumpExhaustDPSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PumpExhaustDPSW" infoText= "" warningText= "Alarm25 Pump Exhaust DP Error [DI-40]" alarmText = "" />
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<IoSensor id= "SensorScrubberIntlkSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_ScrubberIntlkSW" infoText= "" warningText= "" alarmText = "Alarm26 Scrubber System Error [DI-41]" />
<IoSensor id= "SensorFacilityIntlkSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_FacilityIntlkSW" infoText= "" warningText= "" alarmText = "Alarm27 Facility Error [DI-42]" />
<IoSensor id= "SensorServoDriverFaultSW" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_ServoDriverFaultSW" infoText = "" warningText = "" alarmText = "Alarm29 Rotation Servo Driver Error [DI-45]" />
<IoSensor id= "SensorGN2InletPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_GN2InletPressSW" infoText= "" warningText= "" alarmText = "Alarm30 Gasbox N2 Pressure Low [DI-55]" />
<IoSensor id= "SensorArInletPressSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ArInletPressSW" infoText= "" warningText= "" alarmText = "Alarm31 Gasbox Ar Pressure Low [DI-56]" />
<IoSensor id= "SensorH2PressureSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_H2PressureSW" infoText= "" warningText= "" alarmText = "Alarm32 Gasbox H2 Pressure Low [DI-57]" />
<IoSensor id= "SensorGBH2DetectorSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_GBH2DetectorSW" infoText= "" warningText= "" alarmText = "Alarm33 Gasbox H2 Leak Detect [DI-59]" />
<IoSensor id= "SensorDryPump1Running" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_PM1DryPump1Running" infoText= "" warningText= "" alarmText = "Alarm34 DryPump1 Not Running [DI-65]" />
<IoSensor id= "SensorFacilityWarningSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_FacilityWarningSW" infoText= "" warningText= "" alarmText = "Alarm35 Facility Equipment Alarm [DI-72]" />
<IoSensor id= "SensorMainCBStatusSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_MainCBStatusSW" infoText= "" warningText= "" alarmText = "Alarm36 Main CB Status Off [DI-76]" />
<IoSensor id= "SensorProcessStopSW" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ProcessStopSW" infoText= "" warningText= "" alarmText = "Alarm37 Process Stop [DI-81]" />
<IoSensor id = "SensorPSU1Alarm" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSU1Alarm" infoText = "" warningText = "" alarmText = "Alarm66 PSU1.Alarm [DI-320]" />
<IoSensor id = "SensorPSU2Alarm" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSU2Alarm" infoText = "" warningText = "" alarmText = "Alarm67 PSU2.Alarm [DI-321]" />
<IoSensor id = "SensorPSU3Alarm" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSU3Alarm" infoText = "" warningText = "" alarmText = "Alarm68 PSU3.Alarm [DI-322]" />
<IoSensor id = "SensorSCR1Alarm" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_SCR1Alarm" infoText = "" warningText = "" alarmText = "Alarm69 SCR1.Alarm [DI-323]" />
<IoSensor id = "SensorSCR2Alarm" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_SCR2Alarm" infoText = "" warningText = "" alarmText = "Alarm70 SCR2.Alarm [DI-324]" />
<IoSensor id = "SensorSCR3Alarm" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_SCR3Alarm" infoText = "" warningText = "" alarmText = "Alarm71 SCR3.Alarm [DI-325]" />
<IoSensor id = "SensorPSUTCDPCommunicationError" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSUdpCommunicationError" infoText = "" warningText = "" alarmText = "Alarm72 PSU dp Communication Error [DI-328]" />
<IoSensor id = "SensorSCRTCDPCommunicationError" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_SCRTCDPCommunicationError" infoText = "" warningText = "" alarmText = "Alarm73 SCR dp Communication Error [DI-329]" />
<IoSensor id = "SensorPSU1dpCommunicationError" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSU1dpCommunicationError" infoText = "" warningText = "" alarmText = "Alarm74 PSU-1 dp Communication Error [DI-330]" />
<IoSensor id = "SensorPSU2dpCommunicationError" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSU2dpCommunicationError" infoText = "" warningText = "" alarmText = "Alarm75 PSU-2 dp Communication Error [DI-331]" />
<IoSensor id = "SensorPSU3dpCommunicationError" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PSU3dpCommunicationError" infoText = "" warningText = "" alarmText = "Alarm76 PSU-3 dp Communication Error [DI-332]" />
<IoSensor id = "SensorSCRdpCommunicationError" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_SCRdpCommunicationError" infoText = "" warningText = "" alarmText = "Alarm77 SCR dp Communication Error [DI-333]" />
<IoSensor id = "SensorHearbeatTimeout" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_HearbeatTimeout" infoText= "" warningText= "" alarmText = "Alarm100 PM Hearbeat Timeout [DI-350]" />
<IoSensor id = "SensorMFC01Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC01Offline" infoText = "" warningText = "" alarmText = "Alarm101 MFC01 Offline [DI-351]" />
<IoSensor id = "SensorMFC02Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC02Offline" infoText = "" warningText = "" alarmText = "Alarm102 MFC02 Offline [DI-352]" />
<IoSensor id = "SensorMFC03Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC03Offline" infoText = "" warningText = "" alarmText = "Alarm103 MFC03 Offline [DI-353]" />
<IoSensor id = "SensorMFC04Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC04Offline" infoText = "" warningText = "" alarmText = "Alarm104 MFC04 Offline [DI-354]" />
<IoSensor id = "SensorMFC05Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC05Offline" infoText = "" warningText = "" alarmText = "Alarm105 MFC05 Offline [DI-355]" />
<IoSensor id = "SensorMFC06Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC06Offline" infoText = "" warningText = "" alarmText = "Alarm106 MFC06 Offline [DI-356]" />
<IoSensor id = "SensorMFC07Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC07Offline" infoText = "" warningText = "" alarmText = "Alarm107 MFC07 Offline [DI-357]" />
<IoSensor id = "SensorMFC08Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC08Offline" infoText = "" warningText = "" alarmText = "Alarm108 MFC08 Offline [DI-358]" />
<IoSensor id = "SensorMFC09Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC09Offline" infoText = "" warningText = "" alarmText = "Alarm109 MFC09 Offline [DI-359]" />
<IoSensor id = "SensorMFC10Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC10Offline" infoText = "" warningText = "" alarmText = "Alarm110 MFC10 Offline [DI-360]" />
<IoSensor id = "SensorMFC11Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC11Offline" infoText = "" warningText = "" alarmText = "Alarm111 MFC11 Offline [DI-361]" />
<IoSensor id = "SensorMFC12Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC12Offline" infoText = "" warningText = "" alarmText = "Alarm112 MFC12 Offline [DI-362]" />
<IoSensor id = "SensorMFC13Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC13Offline" infoText = "" warningText = "" alarmText = "Alarm113 MFC13 Offline [DI-363]" />
<IoSensor id = "SensorMFC14Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC14Offline" infoText = "" warningText = "" alarmText = "Alarm114 MFC14 Offline [DI-364]" />
<IoSensor id = "SensorMFC15Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC15Offline" infoText = "" warningText = "" alarmText = "Alarm115 MFC15 Offline [DI-365]" />
<IoSensor id = "SensorMFC16Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC16Offline" infoText = "" warningText = "" alarmText = "Alarm116 MFC16 Offline [DI-366]" />
<IoSensor id = "SensorMFC19Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC19Offline" infoText = "" warningText = "" alarmText = "Alarm119 MFC19 Offline [DI-369]" />
<IoSensor id = "SensorMFC20Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC20Offline" infoText = "" warningText = "" alarmText = "Alarm120 MFC20 Offline [DI-370]" />
<IoSensor id = "SensorMFC22Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC22Offline" infoText = "" warningText = "" alarmText = "Alarm122 MFC22 Offline [DI-372]" />
<IoSensor id = "SensorMFC23Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC23Offline" infoText = "" warningText = "" alarmText = "Alarm123 MFC23 Offline [DI-373]" />
<IoSensor id = "SensorMFC26Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC26Offline" infoText = "" warningText = "" alarmText = "Alarm126 MFC26 Offline [DI-376]" />
<IoSensor id = "SensorMFC27Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC27Offline" infoText = "" warningText = "" alarmText = "Alarm127 MFC27 Offline [DI-377]" />
<IoSensor id = "SensorMFC28Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC28Offline" infoText = "" warningText = "" alarmText = "Alarm128 MFC28 Offline [DI-378]" />
<IoSensor id = "SensorMFC29Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC29Offline" infoText = "" warningText = "" alarmText = "Alarm129 MFC29 Offline [DI-379]" />
<IoSensor id = "SensorMFC31Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC31Offline" infoText = "" warningText = "" alarmText = "Alarm131 MFC31 Offline [DI-381]" />
<IoSensor id = "SensorMFC32Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC32Offline" infoText = "" warningText = "" alarmText = "Alarm132 MFC32 Offline [DI-382]" />
<IoSensor id = "SensorMFC33Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC33Offline" infoText = "" warningText = "" alarmText = "Alarm133 MFC33 Offline [DI-383]" />
<IoSensor id = "SensorMFC35Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC35Offline" infoText = "" warningText = "" alarmText = "Alarm135 MFC35 Offline [DI-385]" />
<IoSensor id = "SensorMFC36Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC36Offline" infoText = "" warningText = "" alarmText = "Alarm136 MFC36 Offline [DI-386]" />
<IoSensor id = "SensorMFC37Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC37Offline" infoText = "" warningText = "" alarmText = "Alarm137 MFC37 Offline [DI-387]" />
<IoSensor id = "SensorMFC38Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC38Offline" infoText = "" warningText = "" alarmText = "Alarm138 MFC38 Offline [DI-388]" />
<IoSensor id = "SensorMFC40Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_MFC40Offline" infoText = "" warningText = "" alarmText = "Alarm140 MFC40 Offline [DI-390]" />
<IoSensor id = "SensorPC01Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC01Offline" infoText = "" warningText = "" alarmText = "Alarm141 PC1 Offline [DI-391]" />
<IoSensor id = "SensorPC02Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC02Offline" infoText = "" warningText = "" alarmText = "Alarm142 PC2 Offline [DI-392]" />
<IoSensor id = "SensorPC03Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC03Offline" infoText = "" warningText = "" alarmText = "Alarm143 PC3 Offline [DI-393]" />
<IoSensor id = "SensorPC04Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC04Offline" infoText = "" warningText = "" alarmText = "Alarm144 PC4 Offline [DI-394]" />
<IoSensor id = "SensorPC05Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC05Offline" infoText = "" warningText = "" alarmText = "Alarm145 PC5 Offline [DI-395]" />
<IoSensor id = "SensorPC06Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC06Offline" infoText = "" warningText = "" alarmText = "Alarm146 PC6 Offline [DI-396]" />
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<IoSensor id = "SensorPC07Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC07Offline" infoText = "" warningText = "" alarmText = "Alarm147 PC7 Offline [DI-397]" />
<IoSensor id = "SensorReactorSuspectorCheck" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_ReactorSuspectorCheck" infoText = "" warningText = "" alarmText = "" />
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</IoSensors>
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<SicServos classType= "SicPM.Devices.SicServo" assembly= "SicPM" >
<SicServo id= "PMServo" module= "" display= "PMServo" schematicId= "PMServo" unit= "" aioType= "float"
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aiActualSpeed="AI_ActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC"
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aoActualSpeedSetPoint="AO_SpindleSpeed" aoAccSpeedSetPoint="AO_SpindleACC" aoDecSpeedSetPoint="AO_SpindleDEC"
diServoReady="DI_ServoReady" diServoError="DI_ServoDriverFaultSW" doServoEnable="DO_ServoEnable" doServoInital="DO_ServoInitial" doServoReset="DO_ServoReset" />
</SicServos>
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<SicAETemps classType= "SicPM.Devices.SicAETemp" assembly= "SicPM" >
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<SicAETemp id= "PMAETemp" module= "" display= "PMAETemp" schematicId= "PMAETemp" doPyroCommunicationError= "DO_PyroCommunicationError" EnableLogMessage= "True" />
</SicAETemps>
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<IoSignalTowers classType= "SicPM.Devices.IoSignalTower" assembly= "SicPM" >
<IoSignalTower id= "SignalTower" module= "PM1" display= "SignalTower" schematicId= "PMSignalTower" doGreen= "DO_TowerGreen" doYellow= "DO_TowerYellow" doRed= "DO_TowerRed" doBuzzer= "DO_Buzzer" />
</IoSignalTowers>
<IoChamberMoveBodys classType= "SicPM.Devices.IoChamberMoveBody" assembly= "SicPM" >
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<IoChamberMoveBody id= "ChamberMoveBody" module= "" display= "ChamberMoveBody" schematicId= "ChamberMoveBody" unit= "" aioType= "" diUpFaceback= "DI_ChamMoveBodyUp"
diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp"
doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward"
doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW"
diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ChamMoveLock" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
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</IoChamberMoveBodys>
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<IoGasConnectors classType= "SicPM.Devices.IoGasConnector" assembly= "SicPM" >
<IoGasConnector id= "GasConnector" module= "" display= "GasConnector" schematicId= "GasConnector" unit= "" aioType= "" diGasConnectorLoosen= "DI_SHGasConnectorLoosen" diGasConnectorTighten= "DI_SHGasConnectorTighten" doGasConnectorLoosen= "DO_SHGasConnectorLoosen" doGasConnectorTighten= "DO_SHGasConnectorTighten" />
</IoGasConnectors>
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<IoLids classType= "SicPM.Devices.IoLid" assembly= "SicPM" >
<IoLid id= "SHLid" module= "" display= "SH Lid" schematicId= "SHLid" unit= "" aioType= "" diLoosenFaceback= "DI_SHLidLoosen" diTightenFaceback= "DI_SHLidTighten" diClosedFaceback= "DI_SHLidClosed" doLoosenSetpoint= "DO_SHLidLoosen" doTightenSetpoint= "DO_SHLidTighten" />
<IoLid id= "MiddleLid" module= "" display= "Middle Lid" schematicId= "MiddleLid" unit= "" aioType= "" diLoosenFaceback= "DI_MiddleLidLoosen" diTightenFaceback= "DI_MiddleLidTighten" diClosedFaceback= "DI_MiddleLidClosed" doLoosenSetpoint= "DO_MiddleLidLoosen" doTightenSetpoint= "DO_MiddleLidTighten" />
</IoLids>
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<IoLidSwings classType= "SicPM.Devices.IoLidSwing" assembly= "SicPM" >
<IoLidSwing id= "SHLidSwing" module= "" display= "SH Lid Swing" schematicId= "SHLidSwing" unit= "" aioType= "" diLidLockFaceback= "DI_SHLidSwingLock" diLidUnlockFaceback= "DI_SHLidSwingUnlock" doLidLockSetpoint= "DO_SHLidSwingLock" doLidUnlockSetpoint= "DO_SHLidSwingUnlock" />
<IoLidSwing id= "MiddleLidSwing" module= "" display= "Middle Lid Swing" schematicId= "MiddleLidSwing" unit= "" aioType= "" diLidLockFaceback= "DI_MiddleLidSwingLock" diLidUnlockFaceback= "DI_MiddleLidSwingUnlock" doLidLockSetpoint= "DO_MiddleLidSwingLock" doLidUnlockSetpoint= "DO_MiddleLidSwingUnlock" />
</IoLidSwings>
<IoConfinementRings classType= "SicPM.Devices.IoConfinementRing" assembly= "SicPM" >
<IoConfinementRing id= "ConfinementRing" module= "" display= "ConfinementRing" schematicId= "ConfinementRing" unit= "" aioType= ""
diRingDownFaceback="DI_ConfinementRingDown" diRingUpFaceback="DI_ConfinementRingUp" diRingDone="DI_ConfinementRingDone"
diRingServoOn="DI_ConfinementRingServoOn" diRingHomed="DI_ConfinementRingHomed" diRingBusy="DI_ConfinementRingBusy" diRingServoError="DI_ConfinementRingServoError"
doRingServoOn="DO_ConfinementRingServoOn" doRingJogUp="DO_ConfinementRingJogUp" doRingJogDown="DO_ConfinementRingJogDown"
doRingStop="DO_ConfinementRingStop" doRingTeachUp="DO_ConfinementRingUpPosTeach" doRingTeachDown="DO_ConfinementRingDownPosTeach"
doRingMoveUp="DO_ConfinementRingMoveUp" doRingMoveDown="DO_ConfinementRingMoveDown" aiRingCurPos="AI_ConfinementRingCurPos"
aiRingUpPos="AI_ConfinementRingUpPos" aiRingDownPos="AI_ConfinementRingDownPos" aoRingMode="AO_ConfinementRingMode"
aoRingSpeed="AO_ConfinementRingSpeed" aoRingDistance="AO_ConfinementRingDistance" doRingServoReset="DO_ConfinementRingServoReset"
aoRingUpPos="AO_ConfinementRingUpPos" aoRingDownPos="AO_ConfinementRingDownPos"/>
</IoConfinementRings>
<IoHeartBeats classType= "SicPM.Devices.IoHeartBeat" assembly= "SicPM" >
<IoHeartBeat id= "HeartBeat" display= "HeartBeat" schematicId= "HeartBeat" aioType= "float" ai= "AI_HeartBeat" ao= "AO_HeartBeat" />
</IoHeartBeats>
<IoC2H4s classType= "SicPM.Devices.IoC2H4" assembly= "SicPM" >
<IoC2H4 id= "C2H4" display= "" schematicId= "" unit= "" valve1= "V58" valve2= "V58s" valve3= "V59" valve4= "V60" valve5= "V63" />
</IoC2H4s>
<IoHCls classType= "SicPM.Devices.IoHCl" assembly= "SicPM" >
<IoHCl id= "HCl" display= "" schematicId= "" unit= "" valve1= "V51" valve2= "V51s" valve3= "V54" valve4= "V54s" />
</IoHCls>
<IoN2Dilutions classType= "SicPM.Devices.IoN2Dilution" assembly= "SicPM" >
<IoN2Dilution id= "N2Dilution" display= "" schematicId= "" unit= "" valve1= "V37" valve2= "V37s" valve3= "V39" valve4= "V39s" valve5= "V61" />
</IoN2Dilutions>
<IoN2HighDopings classType= "SicPM.Devices.IoN2HighDoping" assembly= "SicPM" >
<IoN2HighDoping id= "N2HighDoping" display= "" schematicId= "" unit= "" valve1= "V37" valve2= "V37s" valve3= "V40" valve4= "V40s" />
</IoN2HighDopings>
<IoSiH4s classType= "SicPM.Devices.IoSiH4" assembly= "SicPM" >
<IoSiH4 id= "SiH4" display= "" schematicId= "" unit= "" valve1= "V52" valve2= "V52s" valve3= "V55" valve4= "V56" valve5= "V62" />
</IoSiH4s>
<IoTCSs classType= "SicPM.Devices.IoTCS" assembly= "SicPM" >
<IoTCS id= "TCS" display= "" schematicId= "" unit= "" valve1= "V48" valve2= "V48s" valve3= "V49" valve4= "V53" valve5= "V53s" />
</IoTCSs>
<IoTMAs classType= "SicPM.Devices.IoTMA" assembly= "SicPM" >
<IoTMA id= "TMA" display= "" schematicId= "" unit= "" valve1= "V41" valve2= "V42" valve3= "V43" valve4= "V43s" valve5= "V45" />
</IoTMAs>
<IoSHArH2Switchs classType= "SicPM.Devices.IoSHArH2Switch" assembly= "SicPM" >
<IoSHArH2Switch id= "SHArH2Switch" display= "" schematicId= "" unit= "" valve1= "V33" valve2= "V33s" valve3= "V35" valve4= "V36" valve5= "V64" valve6= "V65" />
</IoSHArH2Switchs>
<IoPurgeArH2Switchs classType= "SicPM.Devices.IoPurgeArH2Switch" assembly= "SicPM" >
<IoPurgeArH2Switch id= "PurgeArH2Switch" display= "" schematicId= "" unit= "" valve1= "V68" />
</IoPurgeArH2Switchs>
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<IoV99s classType= "SicPM.Devices.IoV99" assembly= "SicPM" >
<IoV99 id= "Valve99" display= "" schematicId= "" unit= "" valve1= "V99" valve2= "V99s" />
</IoV99s>
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<IoInterLocks classType= "SicPM.Devices.IoInterLock" assembly= "SicPM" >
<IoInterLock id= "PMInterLock" display= "" schematicId= "" unit= ""
doLidOpenRoutineSucceed="DO_PurgeRoutineSucceed" doLidCloseRoutineSucceed="DO_CleanRoutineSucceed" doProcessRunning="DO_ProcessRunning"
doPreprocessRunning="DO_PreprocessRunning" doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning" doPumpDownRoutineRunning="DO_PumpRoutineRunning"
doVentRoutineRunning="DO_VentRoutineRunning" doPostProcessRunning="DO_PostProcessRunning"
diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW" doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed"
doProcessIdleRunning="DO_ProcessIdleRunning"
diPSU1Status="DI_PSU1Status" diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status"
diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
doPSU1Enable ="DO_PSU1Enable" doPSU2Enable ="DO_PSU2Enable" doPSU3Enable ="DO_PSU3Enable"
doSCR1Enable="DO_SCR1Enable" doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable"
doTCSSupply="DO_TCSFluidInfusion" aiTempCtrl1="AI_PSUTC"
doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady"
diPMATMSW="DI_PMATMSW" aiActualSpeed="AI_ActualSpeed" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
doPMASlitDoorClosed="DO_PM1SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown" aiChamPress1000Torr1333mbar="AI_ChamPress"
doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp" doSHFlowTemp="DO_SHFlowTemp" doChamTopFlowTemp="DO_ChamTopFlowTemp" doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
doChamBottomFlowTemp="DO_ChamBottomFlowTemp" doBottomPlateFlowTemp="" doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
doPowerRod2FlowTemp="DO_PowerRod2FlowTemp" doInSituFlowTemp="DO_ElectrodeWFlowTemp" doTMPump1FlowTemp="DO_TMPump1FlowTemp" doTMPump2FlowTemp="DO_TMPump2FlowTemp"
doTransformerFlowTemp="DO_TransformerFlowTemp" doForelineColdTrapFlowTemp="DO_ForelineFlowTemp" aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp" aiSHFlowTemp="AI_SHFlowTemp" aiChamTopFlowTemp="AI_ChamTopFlowTemp"
aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp" aiChamBottomFlowTemp="AI_ChamBottomFlowTemp" aiBottomPlateFlowTemp=""
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp" aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp" aiInSituFlowTemp="AI_ElectrodeWFlowTemp"
aiTMPump1FlowTemp="AI_TMPump1FlowTemp" aiTMPump2FlowTemp="AI_TMPump2FlowTemp" aiTransformerFlowTemp="AI_TransformerFlowTemp" aiForelineColdTrapFlowTemp="AI_ForelineFlowTemp"
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aiTMTopLidTemp="AI_TMTopLidFlowTemp" aiTMBufferFlowTemp="AI_TMBufferFlowTemp"
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doTMTopLidTemp="DO_TMTopLidFlowTemp" doTMBufferFlowTemp="DO_TMBufferFlowTemp"/>
</IoInterLocks>
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<IoTestDevices classType= "SicPM.Devices.IoTestDevice" assembly= "SicPM" >
<IoTestDevice id= "TestDevice" display= "" schematicId= "" unit= "" />
</IoTestDevices>
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</DeviceModelDefine>