2022-09-19 09:16:33 +08:00
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.Devices;
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2022-09-29 17:33:25 +08:00
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using Mainframe.LLs.Routines;
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2022-09-19 09:16:33 +08:00
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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2022-09-29 17:33:25 +08:00
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namespace Mainframe.EFEMs.Routines
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2022-09-19 09:16:33 +08:00
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{
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public class TrayRobotPlaceRoutine : EfemBaseRoutine
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{
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/* 1.Place to LoadLock(需要开门)/Cassette
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* 2.判断目标是否无Tray,判断Robot是否有Tray
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* 3.判断是否需要开门(包括气压等)
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* 4.判断顶针是否下降
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* 5.伸出
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* 6.托盘旋转到定位角
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* 7.托盘对中(夹紧放开)
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* 8.关门
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*/
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private LoadRotationHomeOffsetRoutine _loadRotationHomeRoutine = new LoadRotationHomeOffsetRoutine();
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private EfemSlitValveRoutine _efemSlitValveOpenRoutine = new EfemSlitValveRoutine();
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private EfemSlitValveRoutine _efemSlitValveCloseRoutine = new EfemSlitValveRoutine();
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private LoadLockLiftRoutine _loadLockLiftDown = new LoadLockLiftRoutine();
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//private LoadLockTrayAlignerRoutine _trayAligner = new LoadLockTrayAlignerRoutine();
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private LoadLockTrayClawRoutine _trayClamp = new LoadLockTrayClawRoutine();
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private LoadLockTrayClawRoutine _trayUnClamp = new LoadLockTrayClawRoutine();
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private IoLoadRotation _llRotation = null;
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private ModuleName _source;
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private int _sourceSlot;
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private int _placeTimeout;
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private double _homeOffset;
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private int _loadRotationTimeOut = 60;
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enum RoutineStep
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{
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OpenSlitValve,
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SetLiftUp,
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CheckRobotReady,
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PickComplete,
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SetLiftDown,
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Place,
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TrayAligner,
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TrayClamp,
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TrayUnClamp,
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CloseSlitValve,
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TrayUnClamp1,
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LoadRotationRelativeHome,
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FindPositionSensor,
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SetExtendToDo,
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ClearRobortExtendToDo,
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CheckTraySensor,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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}
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public TrayRobotPlaceRoutine()
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{
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Module = ModuleName.EFEM.ToString();
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Name = "TrayRobortPlace";
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_llRotation = DEVICE.GetDevice<IoLoadRotation>("Load.Rotation");
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}
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public void Init(ModuleName sourseMod,int sourceSlt)
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{
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_source = sourseMod;
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_sourceSlot = sourceSlt;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (!WaferManager.Instance.CheckHasTray(ModuleName.TrayRobot, 0))
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{
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Stop("Can not place,TrayRobot no tray");
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return Result.FAIL;
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}
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//Place之前先,根据Sensor检测是否有盘
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if (WaferManager.Instance.CheckHasTray(_source, _sourceSlot))
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{
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2022-09-29 10:20:05 +08:00
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EV.PostWarningLog(Module, $"Can not place, {_source} slot {_sourceSlot + 1} has tray");
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2022-09-19 09:16:33 +08:00
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return Result.FAIL;
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}
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if (TrayRobot.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not place, WaferRobot is not Idle");
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EV.PostWarningLog(Module, $"Can not place, TrayRobot is not Idle");
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return Result.FAIL;
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}
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//LoadLock传感器是否需要检测有Tray盘
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if (_source == ModuleName.LoadLock || _source == ModuleName.Load)
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{
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if (_loadTrayPresence.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,{_source} sensor[DI-32] check have tray");
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return Result.FAIL;
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}
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if (!_llLift.IsDown)
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{
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EV.PostWarningLog(Module, $"Can not place,{_source} lift is not in down position!");
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return Result.FAIL;
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}
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}
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else if (_source == ModuleName.CassBL)
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{
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//检测凸片Sensor和有无Sensor
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if (_cassBLWaferConvex.Value)
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{
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2022-09-29 11:01:13 +08:00
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EV.PostWarningLog(Module, $"Can not place,{_source} check tray convex");
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2022-09-19 09:16:33 +08:00
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return Result.FAIL;
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}
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if (!_cassBL6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,{_source} sensor check no cassette");
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return Result.FAIL;
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}
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}
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_loadRotationTimeOut = SC.GetValue<int>("LoadLock.LoadRotation.RotationTimeOut");
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_efemSlitValveOpenRoutine.Init(_source, ModuleName.TrayRobot, true);
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_efemSlitValveCloseRoutine.Init(_source, ModuleName.TrayRobot, false);
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_loadLockLiftDown.Init(false);
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_trayClamp.Init(true);
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_trayUnClamp.Init(false);
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_placeTimeout = SC.GetConfigItem($"{ModuleName.TrayRobot}.MotionTimeout").IntValue;
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_homeOffset = SC.GetConfigItem($"LoadLock.LoadRotation.HomeOffset").DoubleValue;
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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/* DI_LoadTrayPresence 托盘有无
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* DI_LoadWaferPlaced Wafer有无
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* DI_LoadHomeTraySensor 托盘测距
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*/
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if (_source == ModuleName.LoadLock)
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{
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ExecuteRoutine((int)RoutineStep.TrayUnClamp1, _trayUnClamp); //夹爪打开
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _efemSlitValveOpenRoutine); //打开闸板阀
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SetTrayRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock
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CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _placeTimeout); //判断机械手当前是否空闲
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Place((int)RoutineStep.Place, TrayRobot, _source, _sourceSlot, _placeTimeout); //机械手
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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CheckTraySensor((int)RoutineStep.CheckTraySensor);
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//对中
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ExecuteRoutine((int)RoutineStep.TrayClamp, _trayClamp); //夹爪关闭
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TimeDelay((int)RoutineStep.TimeDelay2, 1);//延迟1s
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ExecuteRoutine((int)RoutineStep.TrayUnClamp, _trayUnClamp); //夹爪打开
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//ExecuteRoutine((int)RoutineStep.LoadRotationRelativeHome, _loadRotationHomeRoutine); //Tray找原点
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//TimeDelay((int)RoutineStep.TimeDelay1, 1);
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ExecuteRoutine((int)RoutineStep.CloseSlitValve, _efemSlitValveCloseRoutine); //关闭闸板阀
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}
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else
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{
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CheckRobotReady((int)RoutineStep.CheckRobotReady, TrayRobot, _placeTimeout); //判断机械手当前是否空闲
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SetTrayRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock
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Place((int)RoutineStep.Place, TrayRobot, _source, _sourceSlot, _placeTimeout); //机械手
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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return Result.FAIL;
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}
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Notify($"Finish");
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return Result.DONE;
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}
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}
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}
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