399 lines
16 KiB
C#
399 lines
16 KiB
C#
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicPM.Devices;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicPM.Routines
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{
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public class PMLidCloseRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetM1to16,
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SetPC,
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SetGroupJ,
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SetM291519to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetGasIn2,
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SetGroupJOpen,
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SetM291519to26,
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OpenFinal2,
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SetMfcFinal2,
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SetEPV1,
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SetEPV2,
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SetTvMode,
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RoutinePre,
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V27Open,
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V27Close,
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PressureTo1050,
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SetPressureUp,
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SetPressureDown,
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VentPumpOpen,
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PressureToMax,
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PressureToMin,
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SetPressUpOrDown1,
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SetPressUpOrDown2,
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WaitPressureDown,
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WaitPressureUp,
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SetMFCMode,
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SetPCMode,
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WaitPmTo1050,
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SetTvOpen,
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SetTvModeToPress,
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SetEPV22,
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SetV76,
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SetV75,
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SetV751,
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SetV761,
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CheckPM1000,
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SetMfc28to31Special,
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WaitPressUpTo1000,
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SetMfc28to31Default,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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OpenEPV2,
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WaitV27Open,
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SetTvTo1150,
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WaitPressUpTo20,
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SetMfc28to31To0,
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WaitPressUpTo0,
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SetMfc28to31ToDefault,
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WaitPressDownTo20,
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CheckPMPt21000,
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SetPressureDown1,
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SetMfc28to31Default1,
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CheckFinal1Open,
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SetGroupV38,
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SetGroupV25,
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StartLoop,
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EndLoop,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay18,
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Notify1,
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Notify2,
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Notify3,
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Notify4,
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}
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private ModuleName moduleName;
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private PMModule _pmModule;
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout=20; //旋转停止超时
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private int _pressureMaxDelay = 10; //到低压保持时间（采用固定值10s）
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private int _pressureMinDelay = 10; //到高压保持时间（采用固定值10s）
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private double _pressureMax; //Loop压力上限可设置600-800）
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private double _pressureMin; //Loop压力下限可设置 0-400）
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private int _pressureMinTimeout;
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private int _pressureMaxTimeout;
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private int _pressureLoopCount; //Loop次数
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private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private int _EPV2OpenTimeDelay =10; //EPV2
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private int _waitChamberTo1000TimeOut = 180; //等待腔体压力上升到1000的超时时间
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private double _mfc28SpecialFlow = 15000;
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private double _mfc29SpecialFlow = 5000;
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private double _mfc31SpecialFlow = 10000;
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private int _EPV2OpenDelayTime = 9;
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private int _pmCleanTime = 20;
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//private int _routineTimeOut;
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private Stopwatch _swTimer = new Stopwatch();
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public PMLidCloseRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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moduleName = module;
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_pmModule = pm;
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Name = "Clean";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_mfc28SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc28FlowSpecail");
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_mfc29SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc29FlowSpecail");
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_mfc31SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc31FlowSpecail");
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_EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue;
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Clean.CycleCleanCount");
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_pressureMin = SC.GetValue<double>($"PM.{Module}.Clean.PumpBasePressure");
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_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Clean.PumpDelayTime");
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_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Clean.PumpTimeout");
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_pressureMax = SC.GetValue<double>($"PM.{Module}.Clean.VentBasePressure");
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_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Clean.VentDelayTime");
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_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Clean.VentTimeout");
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_pmCleanTime = SC.GetValue<int>($"PM.{Module}.Clean.CleanTime");
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_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
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if (!_pmIoInterLock.SetPMLidCloseRoutineRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not Clean,{reason}");
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return Result.FAIL;
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}
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//Purge Succeed 清掉
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_pmIoInterLock.DoLidOpenRoutineSucceed = false;
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//Clean Succeed 清掉
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_pmIoInterLock.DoLidCloseRoutineSucceed = false;
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_checkPMPt2Over1000 = false;
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_checkPMPressureOver1000 = false;
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_finalOpen = false;
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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Notify($"Start LoopCount:{_pressureLoopCount}");
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return Result.RUN;
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}
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//PM Clean
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public override Result Monitor()
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{
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try
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{
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed,false, _rotationCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open);
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if (!_finalOpen)
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{
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SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5);
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TimeDelay((int)RoutineStep.TimeDelay1, 5);
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}
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GetPressureConditionPT2((int)RoutineStep.CheckPMPt21000, 1000);
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if (!_checkPMPt2Over1000)
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{
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//1.打开EPV1,等待10s
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay18, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay);
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}
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//2.打开进气系统 （V65,V67,V68)
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SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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//3.打开Final valves 和对应的MFC值
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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TimeDelay((int)RoutineStep.TimeDelay3, 3);
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SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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//4.打开J Valves
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SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3);
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if (!_checkPMPt2Over1000)
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{
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//判断反应腔压力是否超过1000mbar
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GetPressureCondition((int)RoutineStep.CheckPM1000, 1000);
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if (!_checkPMPressureOver1000)
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{
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//设置M28,M29,M31 为特定值
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SetMfc28to31Special((int)RoutineStep.SetMfc28to31Special, _mfc28SpecialFlow, _mfc29SpecialFlow, _mfc31SpecialFlow, 1);
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}
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//等待反应腔压力到达1000
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NotifyInfo((int)RoutineStep.Notify1, "Wait PM Pressure over 1000 mbar");
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WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, 1000, _waitChamberTo1000TimeOut);
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to31Default, MfcGroupName.M28toM31, 0);
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}
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NotifyInfo((int)RoutineStep.Notify2, "Wait V27 open!");
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WaitV27Open((int)RoutineStep.WaitV27Open,1000);
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TimeDelay((int)RoutineStep.TimeDelay5, _pmCleanTime);
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if (_checkPMPt2Over1000)
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{
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//1.打开EPV1,等待10s
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
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SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay);
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}
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//打开EPV2,等待9秒,打开蝶阀
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.OpenEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay6, _EPV2OpenDelayTime);
|
|||
|
|
SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
|
|||
|
|
SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10);
|
|||
|
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetTvTo1150, _IoThrottle, 1150);
|
|||
|
|
|
|||
|
|
//打开V72
|
|||
|
|
//SetIoValueByGroup((int)RoutineStep.VentPumpOpen, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|
|||
|
|
Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
|
|||
|
|
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
|
|||
|
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin);
|
|||
|
|
WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _pressureMinTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay8, _pressureMinDelay);
|
|||
|
|
|
|||
|
|
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
|
|||
|
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax);
|
|||
|
|
WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay9, _pressureMaxDelay);
|
|||
|
|
EndLoop((int)RoutineStep.EndLoop);
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
catch (RoutineBreakException)
|
|||
|
|
{
|
|||
|
|
return Result.RUN;
|
|||
|
|
}
|
|||
|
|
catch (RoutineFaildException)
|
|||
|
|
{
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
|||
|
|
_swTimer.Stop();
|
|||
|
|
SetRoutineRuningDo();
|
|||
|
|
SetRoutineSuccessedDo();
|
|||
|
|
return Result.DONE;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override void Abort()
|
|||
|
|
{
|
|||
|
|
SetRoutineRuningDo();
|
|||
|
|
PMDevice._ioThrottleValve.StopRamp();
|
|||
|
|
PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All));
|
|||
|
|
base.Abort();
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void SetRoutineRuningDo()
|
|||
|
|
{
|
|||
|
|
_pmIoInterLock.DoLidCloseRoutineRunning = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void SetRoutineSuccessedDo()
|
|||
|
|
{
|
|||
|
|
_pmIoInterLock.SetLidClosedRoutineSucceed(true, out string reason);
|
|||
|
|
_pmIoInterLock.DoLidOpenRoutineSucceed = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
//private void CheckRoutineTimeOut()
|
|||
|
|
//{
|
|||
|
|
// if (_routineTimeOut > 10)
|
|||
|
|
// {
|
|||
|
|
// if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
|||
|
|
// {
|
|||
|
|
// Notify($"Routine TimeOut! over {_routineTimeOut} s");
|
|||
|
|
// throw (new RoutineFaildException());
|
|||
|
|
// }
|
|||
|
|
// }
|
|||
|
|
//}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|