724 lines
24 KiB
C#
724 lines
24 KiB
C#
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using DePacker;
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using Global;
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using Mainframe.Devices;
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using MECF.Framework.Common.CommonData;
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using MECF.Framework.Common.Event;
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//using RTOverEthernetDevelopmentKit;
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using SessionLayer;
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using System;
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using System.Collections.ObjectModel;
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using System.Runtime.InteropServices;
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using System.Runtime.Serialization;
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using System.Xml;
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namespace Mainframe.Devices
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{
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public struct BEI_SYSTEM_STATUS_ZH
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{
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public int nStatus;
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public double dReflectWaferAverageInner; //内圈衬底反射率平均值
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public double dReflectWaferAverageMiddle;//中圈衬底反射率平均值
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public double dReflectWaferAverageOutter;//外圈衬底反射率平均值
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public double dTemperatureAverageWaferInner; //内圈衬底温度平均值
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public double dTemperatureAverageWaferMiddle; //中圈衬底温度平均值
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public double dTemperatureAverageWaferOutter;//外圈衬底温度平均值
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public double dTemperatureAverageSusceptorInner; //内圈托盘温度平均值
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public double dTemperatureAverageSusceptorMiddle; //中圈托盘温度平均值
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public double dTemperatureAverageSusceptorOutter;//外圈托盘温度平均值
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};
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public class OpticsViperStatus : NotifiableItem
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{
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public int Status { get; set; }
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public int Head { get; set; }
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public int DetectorMask { get; set; }
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public int Reserved { get; set; }
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public double SusAvg_1 { get; set; }
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public double SusAvg_2 { get; set; }
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public double SusAvg_3 { get; set; }
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public double SusAvg_4 { get; set; }
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public double WaferAvg_1 { get; set; }
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public double WaferAvg_2 { get; set; }
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public double WaferAvg_3 { get; set; }
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public double WaferAvg_4 { get; set; }
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public OpticsViperStatus()
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{
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Status = 0;
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Head = 0;
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DetectorMask = 0;
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Reserved = 0;
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SusAvg_1 = 0.0;
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SusAvg_2 = 0.0;
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SusAvg_3 = 0.0;
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SusAvg_4 = 0.0;
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WaferAvg_1 = 0.0;
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WaferAvg_2 = 0.0;
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WaferAvg_3 = 0.0;
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WaferAvg_4 = 0.0;
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}
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}
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public class OpticsViperInfo
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{
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private int _lastStatus = 0;
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public int lastStatus
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{
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get
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{
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return _lastStatus;
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}
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}
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private OpticsViperStatus _opticsViperStatus = new OpticsViperStatus();
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public OpticsViperStatus opticsViperStatus
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{
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get
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{
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return _opticsViperStatus;
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}
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}
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private AITOpticsViperData[] _innerOpticsViperItem = new AITOpticsViperData[0];
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public AITOpticsViperData[] innerOpticsViperItem
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{
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get
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{
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return _innerOpticsViperItem;
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}
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}
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private AITOpticsViperData[] _middleOpticsViperItem = new AITOpticsViperData[0];
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public AITOpticsViperData[] middleOpticsViperItem
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{
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get
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{
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return _middleOpticsViperItem;
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}
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}
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private AITOpticsViperData[] _outerOpticsViperItem = new AITOpticsViperData[0];
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public AITOpticsViperData[] outerOpticsViperItem
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{
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get
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{
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return _outerOpticsViperItem;
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}
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}
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private AITOpticsViperData[] _exOpticsViperItem = new AITOpticsViperData[0];
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public AITOpticsViperData[] exOpticsViperItem
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{
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get
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{
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return _exOpticsViperItem;
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}
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}
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public OpticsViperInfo()
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{
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_innerOpticsViperItem = new AITOpticsViperData[0];
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_middleOpticsViperItem = new AITOpticsViperData[0];
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_outerOpticsViperItem = new AITOpticsViperData[0];
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_exOpticsViperItem = new AITOpticsViperData[0];
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}
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public OpticsViperInfo(OpticsViperStatus opticsViperStatus, AITOpticsViperData[] innerOpticsViperItem, AITOpticsViperData[] middleOpticsViperItem, AITOpticsViperData[] outerOpticsViperItem)
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{
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_opticsViperStatus = opticsViperStatus;
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_innerOpticsViperItem = innerOpticsViperItem;
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_middleOpticsViperItem = middleOpticsViperItem;
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_outerOpticsViperItem = outerOpticsViperItem;
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}
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public OpticsViperInfo(OpticsViperStatus opticsViperStatus, AITOpticsViperData[] innerOpticsViperItem, AITOpticsViperData[] middleOpticsViperItem, AITOpticsViperData[] outerOpticsViperItem, AITOpticsViperData[] exOpticsViperItem)
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{
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_opticsViperStatus = opticsViperStatus;
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_innerOpticsViperItem = innerOpticsViperItem;
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_middleOpticsViperItem = middleOpticsViperItem;
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_outerOpticsViperItem = outerOpticsViperItem;
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_exOpticsViperItem = exOpticsViperItem;
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_lastStatus = opticsViperStatus.Status;
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//_opticsViperStatus = opticsViperStatus;
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//_innerOpticsViperItem = new AITOpticsViperData[innerOpticsViperItem.Length / 2];
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//_middleOpticsViperItem = new AITOpticsViperData[middleOpticsViperItem.Length / 2];
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//_outerOpticsViperItem = new AITOpticsViperData[outerOpticsViperItem.Length / 2];
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//_exOpticsViperItem = new AITOpticsViperData[exOpticsViperItem.Length / 2];
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//_lastStatus = opticsViperStatus.Status;
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//bool tempIsWafer = SC.GetValue<bool>("PM.AnngkunWaferTemp");
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//for (int i = 0; i < _innerOpticsViperItem.Length; i++)
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//{
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// if (tempIsWafer)
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// {
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// _innerOpticsViperItem[i] = innerOpticsViperItem[i * 2];
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// }
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// else if(i * 2 + 1 < innerOpticsViperItem.Length)
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// {
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// _innerOpticsViperItem[i] = innerOpticsViperItem[i * 2 + 1];
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// }
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//}
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//for (int i = 0; i < _middleOpticsViperItem.Length; i++)
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//{
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// if (tempIsWafer)
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// {
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// _middleOpticsViperItem[i] = middleOpticsViperItem[i * 2];
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// }
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// else if (i * 2 + 1 < middleOpticsViperItem.Length)
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// {
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// _middleOpticsViperItem[i] = middleOpticsViperItem[i * 2 + 1];
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// }
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//}
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//for (int i = 0; i < _outerOpticsViperItem.Length; i++)
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//{
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// if (tempIsWafer)
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// {
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// _outerOpticsViperItem[i] = outerOpticsViperItem[i * 2];
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// }
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// else if (i * 2 + 1 < outerOpticsViperItem.Length)
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// {
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// _outerOpticsViperItem[i] = outerOpticsViperItem[i * 2 + 1];
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// }
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//}
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//for (int i = 0; i < exOpticsViperItem.Length; i++)
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//{
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// if (tempIsWafer)
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// {
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// _exOpticsViperItem[i] = exOpticsViperItem[i * 2];
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// }
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// else
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// {
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// _exOpticsViperItem[i] = exOpticsViperItem[i * 2 + 1];
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// }
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//}
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}
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public void SetlastStatus(int lastStatus)
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{
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_lastStatus = lastStatus;
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}
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}
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public class AkOpticsViperGuide : BaseDevice, IDevice
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{
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public AkOpticsViperGuide(string module, string name)
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{
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this.Name = name;
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this.Module = module;
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TcpSession = new Session();
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TcpSession.BeforeConnect += TcpSession_BeforeConnect;
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TcpSession.AfterConnect += TcpSession_AfterConnect;
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TcpSession.DisConnected += TcpSession_DisConnected;
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TcpSession.MsgRecv += TcpSession_MsgRecv;
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DP = new DePacker.DPack();
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DP.GetPackCallback += GetPack;
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DP.BeginDepack();
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DATA.Subscribe($"PM1.{Name}.InnerOpticsViperItem", () => _opticsViperInfo?.innerOpticsViperItem);
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DATA.Subscribe($"PM1.{Name}.MiddleOpticsViperItem", () => _opticsViperInfo?.middleOpticsViperItem);
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DATA.Subscribe($"PM1.{Name}.OuterOpticsViperItem", () => _opticsViperInfo?.outerOpticsViperItem);
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DATA.Subscribe($"PM1.{Name}.ExOpticsViperItem", () => _opticsViperInfo?.exOpticsViperItem);
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DATA.Subscribe($"PM1.{Name}.OpticsViperStatus", () => _opticsViperInfo?.opticsViperStatus);
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}
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struct BinaryData
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{
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public BEI_SYSTEM_STATUS_EX status;
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public TempData[] zoneInner;
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public TempData[] zoneMiddle;
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public TempData[] zoneOuter;
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public TempData[] zoneEx;
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public BinaryData(bool IsCreate)
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{
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status = new BEI_SYSTEM_STATUS_EX();
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zoneInner = new TempData[18];
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zoneMiddle = new TempData[36];
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zoneOuter = new TempData[36];
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zoneEx = new TempData[72];
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}
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}
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BinaryData Data = new BinaryData(true);
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private bool IsNewStatus = false;
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private PeriodicJob _thread;//工作线程
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Session TcpSession;
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DPack DP;
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private OpticsViperInfo _opticsViperInfo = new OpticsViperInfo();
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public event Action<string, AlarmEventItem> OnDeviceAlarmStateChanged;
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/// <summary>
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/// 接受到数据时触发事件
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/// </summary>
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public event Action<OpticsViperInfo> DataReceivedEvent;
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/// <summary>
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/// 通讯数据
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/// </summary>
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public OpticsViperInfo OpticsViperInfo
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{
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get
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{
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return _opticsViperInfo;
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}
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set
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{
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_opticsViperInfo = value;
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DataReceivedEvent?.Invoke(_opticsViperInfo);
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}
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}
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public string Module { get; set; }
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public string Name { get; set; }
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public bool HasAlarm => false;
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public int reconnectionNumber;
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public bool jobThreadStop;
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public AkOpticsViperGuide()
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{
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}
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BEI_SYSTEM_STATUS_ZH SystemStatus = new BEI_SYSTEM_STATUS_ZH();
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const int StatusSize = 7856;
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const int VoltBinarySize = 48024;
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private void GetPack(byte[] bin)
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{
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switch (bin.Length)
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{
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case StatusSize:
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UpdateStatus(bin);
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break;
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//case VoltBinarySize:
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// {
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// UpdateVoltData(bin);
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// if (IsSaveVolt)
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// {
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// SaveVoltData();
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// IsSaveVolt = false;
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// btnSaveVolt.Enabled = true;
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// }
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// }
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// break;
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//default:
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|||
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// txtMsgRecv.Text += System.Text.Encoding.Default.GetString(bin);
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// break;
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}
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}
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private void TcpSession_MsgRecv(int id, byte[] buf)
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{
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DP.AddStream(buf);
|
|||
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//throw new NotImplementedException();
|
|||
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}
|
|||
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private void TcpSession_DisConnected(int id, bool IsSuccess)
|
|||
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{
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|||
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//throw new NotImplementedException();
|
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}
|
|||
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|||
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private void TcpSession_AfterConnect(int id, bool IsSuccess)
|
|||
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{
|
|||
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string fmtLeft = "<RT_Plus>";
|
|||
|
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string fmtRight = "<End>;";
|
|||
|
|
string request_command = fmtLeft + "RuntimeData" + fmtRight;
|
|||
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|
|
|||
|
|
byte[] buf = System.Text.Encoding.ASCII.GetBytes(request_command);
|
|||
|
|
|
|||
|
|
TcpSession.Send(buf, buf.Length);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void TcpSession_BeforeConnect()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public AITOpticsViperData ConvertTempData(int WaferNo, TempData tempData)
|
|||
|
|
{
|
|||
|
|
AITOpticsViperData opticsViperItem = new AITOpticsViperData();
|
|||
|
|
|
|||
|
|
opticsViperItem.WaferNo = WaferNo;
|
|||
|
|
opticsViperItem.DateTime = tempData.DateTime;
|
|||
|
|
opticsViperItem.Para1 = tempData.Para1;
|
|||
|
|
opticsViperItem.Para2 = tempData.Para2;
|
|||
|
|
opticsViperItem.Para3 = tempData.Para3;
|
|||
|
|
opticsViperItem.Para4 = tempData.Para4;
|
|||
|
|
opticsViperItem.Temperature = tempData.Temperature;
|
|||
|
|
|
|||
|
|
return opticsViperItem;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public AITOpticsViperData[] ConvertTempData(TempData[] tempData)
|
|||
|
|
{
|
|||
|
|
AITOpticsViperData[] opticsViperItem = new AITOpticsViperData[tempData.Length];
|
|||
|
|
for (int i = 0; i < tempData.Length; i++)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
opticsViperItem[i] = ConvertTempData(i + 1, tempData[i]);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return opticsViperItem;
|
|||
|
|
}
|
|||
|
|
public OpticsViperStatus ConvertStatusData(BEI_SYSTEM_STATUS_EX statusData)
|
|||
|
|
{
|
|||
|
|
OpticsViperStatus opticsViperStatus = new OpticsViperStatus();
|
|||
|
|
|
|||
|
|
opticsViperStatus.Status = statusData.nStatus;
|
|||
|
|
opticsViperStatus.Head = statusData.Head;
|
|||
|
|
opticsViperStatus.DetectorMask = statusData.DetectorMask;
|
|||
|
|
opticsViperStatus.Reserved = statusData.Reserved;
|
|||
|
|
opticsViperStatus.SusAvg_1 = statusData.SusAvg_1;
|
|||
|
|
opticsViperStatus.SusAvg_2 = statusData.SusAvg_2;
|
|||
|
|
opticsViperStatus.SusAvg_3 = statusData.SusAvg_3;
|
|||
|
|
opticsViperStatus.SusAvg_4 = statusData.SusAvg_4;
|
|||
|
|
opticsViperStatus.WaferAvg_1 = statusData.WaferAvg_1;
|
|||
|
|
opticsViperStatus.WaferAvg_2 = statusData.WaferAvg_2;
|
|||
|
|
opticsViperStatus.WaferAvg_3 = statusData.WaferAvg_3;
|
|||
|
|
opticsViperStatus.WaferAvg_4 = statusData.WaferAvg_4;
|
|||
|
|
|
|||
|
|
return opticsViperStatus;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Connect()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
string ip = SC.GetStringValue($"{Name}.Address"); ;
|
|||
|
|
int port = SC.GetValue<int>($"{Name}.Port");
|
|||
|
|
|
|||
|
|
if (!TcpSession.Query(ip, port))
|
|||
|
|
{
|
|||
|
|
//MessageBox.Show("Target IP port is error!");
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
if (_thread == null)
|
|||
|
|
{
|
|||
|
|
_thread = new PeriodicJob(1000, OnTimer, "AkOpticsTimer", true);//测试用，直接连接
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
if (!TcpSession.Link())
|
|||
|
|
{
|
|||
|
|
// MessageBox.Show("Target connect failed !");
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
// RT.Init();
|
|||
|
|
//Task.Factory.StartNew(()=> {
|
|||
|
|
|
|||
|
|
//});
|
|||
|
|
}
|
|||
|
|
catch (Exception e)
|
|||
|
|
{
|
|||
|
|
LOG.Write(e.ToString());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
public void AddLog(int Status, bool IsAdd)
|
|||
|
|
{
|
|||
|
|
switch (Status)
|
|||
|
|
{
|
|||
|
|
case 0:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": ProcessWell");
|
|||
|
|
break;
|
|||
|
|
case 1:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": DetectorConnectError");
|
|||
|
|
break;
|
|||
|
|
case 2:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": TimeIntervalError");
|
|||
|
|
break;
|
|||
|
|
case 3:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": MemeoryAllocError");
|
|||
|
|
break;
|
|||
|
|
case 4:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": Initializing");
|
|||
|
|
break;
|
|||
|
|
case 5:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": UnStarted");
|
|||
|
|
break;
|
|||
|
|
default:
|
|||
|
|
if (IsAdd) LOG.Write("AkOptics-" + Status.ToString() + ": 未知错误");
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void StartRT()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
///RT.StartRT();
|
|||
|
|
}
|
|||
|
|
catch (Exception e)
|
|||
|
|
{
|
|||
|
|
LOG.Write(e.ToString());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Close()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
//DP.StopDepack();
|
|||
|
|
//TcpSession.UnLink();
|
|||
|
|
//RT.Close();
|
|||
|
|
//_thread?.Stop();
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
LOG.Write("AkOpticsViper Close Error:" + ex.Message);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public object locker = new object();
|
|||
|
|
|
|||
|
|
public bool ReadData()
|
|||
|
|
{
|
|||
|
|
bool Result = false;
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
int lastStatus = _opticsViperInfo.lastStatus;
|
|||
|
|
|
|||
|
|
OpticsViperInfo = new OpticsViperInfo(ConvertStatusData(Data.status), ConvertTempData(Data.zoneInner), ConvertTempData(Data.zoneMiddle), ConvertTempData(Data.zoneOuter), ConvertTempData(Data.zoneEx));
|
|||
|
|
if (_opticsViperInfo.lastStatus == lastStatus)
|
|||
|
|
{
|
|||
|
|
IsNewStatus = false;
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
IsNewStatus = true;
|
|||
|
|
_opticsViperInfo.SetlastStatus(lastStatus);
|
|||
|
|
AddLog(_opticsViperInfo.lastStatus, (_opticsViperInfo.lastStatus == 0 ? false : true));
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
Result = true;
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
catch (Exception e)
|
|||
|
|
{
|
|||
|
|
LOG.Write("AkOpticsViper ReadData Error:" + e.ToString());
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return Result;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
public bool OnTimer()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
if (!TcpSession.IsConnected)//未连接，尝试重新连接
|
|||
|
|
{
|
|||
|
|
Close();
|
|||
|
|
if (reconnectionNumber > 3)
|
|||
|
|
{
|
|||
|
|
reconnectionNumber = 0;
|
|||
|
|
EV.PostAlarmLog(Module,"AkOptics connection failed");
|
|||
|
|
jobThreadStop = true;
|
|||
|
|
_thread?.Stop();
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
if (jobThreadStop)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
Connect();
|
|||
|
|
reconnectionNumber ++;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
ReadData();
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
LOG.Write("AkOpticsViper OnTimer Error：" + ex.Message);
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void ChangeStepID(int stepID, string stepName, string stepDesc)
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
//if (RT.Data.status.nStatus == 0)
|
|||
|
|
//{
|
|||
|
|
// RT.ChangeStepID(stepID, stepName, stepDesc);
|
|||
|
|
//}
|
|||
|
|
//else
|
|||
|
|
//{
|
|||
|
|
// AddLog(_opticsViperInfo.lastStatus, (_opticsViperInfo.lastStatus == 0 ? false : true));
|
|||
|
|
//}
|
|||
|
|
}
|
|||
|
|
catch (Exception e)
|
|||
|
|
{
|
|||
|
|
LOG.Write(e.ToString());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
#region 接口
|
|||
|
|
/// <summary>
|
|||
|
|
/// 初始化
|
|||
|
|
/// </summary>
|
|||
|
|
/// <returns></returns>
|
|||
|
|
public bool Initialize()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
Connect();
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog("AkOpticsViper", "AkOpticsViper connect failed.");
|
|||
|
|
LOG.Write(ex);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Monitor()
|
|||
|
|
{
|
|||
|
|
//if (!TcpSession.IsConnected)//如果未读取到数据，尝试重新连接
|
|||
|
|
//{
|
|||
|
|
// Close();
|
|||
|
|
// Connect();
|
|||
|
|
//return;
|
|||
|
|
//}
|
|||
|
|
//ReadData();
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
/// <summary>
|
|||
|
|
/// 终止
|
|||
|
|
/// </summary>
|
|||
|
|
public void Terminate()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
Close();
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
System.Diagnostics.Trace.WriteLine(ex.Message);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
/// <summary>
|
|||
|
|
/// 复位
|
|||
|
|
/// </summary>
|
|||
|
|
public void Reset()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
if (!TcpSession.IsConnected)
|
|||
|
|
{
|
|||
|
|
jobThreadStop = false;
|
|||
|
|
_thread = null;
|
|||
|
|
Connect();
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//IsNewStatus = true;
|
|||
|
|
}
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
const int BinSize = 7856;
|
|||
|
|
void UpdateStatus(byte[] bin)
|
|||
|
|
{
|
|||
|
|
IntPtr hPack = Marshal.AllocHGlobal(BinSize);
|
|||
|
|
|
|||
|
|
Marshal.Copy(bin, 0, hPack, bin.Length);
|
|||
|
|
|
|||
|
|
Data.status = (BEI_SYSTEM_STATUS_EX)Marshal.PtrToStructure(hPack, typeof(BEI_SYSTEM_STATUS_EX));
|
|||
|
|
|
|||
|
|
SystemStatus.nStatus = Data.status.nStatus;
|
|||
|
|
SystemStatus.dTemperatureAverageWaferInner = Data.status.WaferAvg_1;
|
|||
|
|
SystemStatus.dTemperatureAverageWaferMiddle = Data.status.WaferAvg_2;
|
|||
|
|
SystemStatus.dTemperatureAverageWaferOutter = Data.status.WaferAvg_3;
|
|||
|
|
|
|||
|
|
SystemStatus.dTemperatureAverageSusceptorInner = Data.status.SusAvg_1;
|
|||
|
|
SystemStatus.dTemperatureAverageSusceptorMiddle = Data.status.SusAvg_2;
|
|||
|
|
SystemStatus.dTemperatureAverageSusceptorOutter = Data.status.SusAvg_3;
|
|||
|
|
|
|||
|
|
|
|||
|
|
int offset = Marshal.SizeOf(typeof(BEI_SYSTEM_STATUS_EX));
|
|||
|
|
int sizeTemp = Marshal.SizeOf(typeof(TempData));
|
|||
|
|
|
|||
|
|
double reflectAvg = 0.0;
|
|||
|
|
for (int i = 0; i < Data.zoneInner.Length; ++i)
|
|||
|
|
{
|
|||
|
|
Data.zoneInner[i] = (TempData)Marshal.PtrToStructure(hPack + offset + i * sizeTemp, typeof(TempData));
|
|||
|
|
reflectAvg += Data.zoneInner[i].Para2;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SystemStatus.dReflectWaferAverageInner = reflectAvg / Data.zoneInner.Length;
|
|||
|
|
|
|||
|
|
reflectAvg = 0.0;
|
|||
|
|
|
|||
|
|
offset += Data.zoneInner.Length * sizeTemp;
|
|||
|
|
|
|||
|
|
for (int i = 0; i < Data.zoneMiddle.Length; ++i)
|
|||
|
|
{
|
|||
|
|
Data.zoneMiddle[i] = (TempData)Marshal.PtrToStructure(hPack + offset + i * sizeTemp, typeof(TempData));
|
|||
|
|
reflectAvg += Data.zoneMiddle[i].Para2;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SystemStatus.dReflectWaferAverageMiddle = reflectAvg / Data.zoneMiddle.Length;
|
|||
|
|
|
|||
|
|
reflectAvg = 0.0;
|
|||
|
|
|
|||
|
|
offset += Data.zoneMiddle.Length * sizeTemp;
|
|||
|
|
|
|||
|
|
for (int i = 0; i < Data.zoneOuter.Length; ++i)
|
|||
|
|
{
|
|||
|
|
Data.zoneOuter[i] = (TempData)Marshal.PtrToStructure(hPack + offset + i * sizeTemp, typeof(TempData));
|
|||
|
|
reflectAvg += Data.zoneOuter[i].Para2;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SystemStatus.dReflectWaferAverageOutter = reflectAvg / Data.zoneOuter.Length;
|
|||
|
|
|
|||
|
|
offset += Data.zoneOuter.Length * sizeTemp;
|
|||
|
|
|
|||
|
|
for (int i = 0; i < Data.zoneEx.Length; ++i)
|
|||
|
|
{
|
|||
|
|
Data.zoneEx[i] = (TempData)Marshal.PtrToStructure(hPack + offset + i * sizeTemp, typeof(TempData));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
Marshal.FreeHGlobal(hPack);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|