231 lines
8.6 KiB
C#
231 lines
8.6 KiB
C#
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicPM.Devices;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicPM.Routines
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{
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public class PMPumpDownRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetM1to16,
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SetPC,
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SetGroupI, //V87-96
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SetM19to38,
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MfcAll,
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SetGasOut,
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SetTv,
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SetTv1,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetGasIn2,
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SetGroupJOpen,
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OpenFinal2,
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SetMfcFinal2,
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PumpDownTimeout,
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SetTvMode,
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SetEPV1,
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SetEPV2,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetMFCMode,
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SetPCMode,
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SetTvOpen,
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SetTvModeToPress,
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SetTVto1050,
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CloseFinanl1,
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CloseFinanl2,
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SetGroupV38,
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SetV76,
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SetV75, SetGroupV25,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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}
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private PMModule _pmModule;
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private IoThrottleValve2 _IoThrottle;
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private int _pumpDownKeep = 10;
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private int _EPV12TimeSapn = 10;
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private double _pumpBasePressure;
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private int _routineTimeOut;
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private int _EPV2OpenDelayTime = 9;
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private Stopwatch _swTimer = new Stopwatch();
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public PMPumpDownRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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_pmModule = pm;
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Name = "PumpDown";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pumpBasePressure= SC.GetValue<double>($"PM.{Module}.Pump.PumpBasePressure");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.RoutineTimeOut");
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_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//1.关闭V72,所有PC,MFC设置到默认值
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.MfcAll, MfcGroupName.All, 5);
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TimeDelay((int)RoutineStep.TimeDelay1, 5);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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SetMfcByGroup((int)RoutineStep.SetM19to38, MfcGroupName.M291519to38, 0,3);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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//2.依次关闭I Value
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SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay3, 1);
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SetIoValueByGroup((int)RoutineStep.CloseFinanl2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
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//3.打开抽气系统 (打开EPV2,EPV1,打开throttle valve enable压力伺服当前压力值) [由于InterLock原因,需要先开EPV1再开EPV2]
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
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SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay4, _EPV12TimeSapn);
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//打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenDelayTime);
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//打开蝶阀,压力设定为1050
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SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTVto1050, _IoThrottle, 1050);
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TimeDelay((int)RoutineStep.TimeDelay6, 2);
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//4.Pump down到0mbar,达到稳定后保持10秒
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SetThrottlePressureAndWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
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Delay((int)RoutineStep.TimeDelay7, _pumpDownKeep);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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Notify($"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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