Sic04/Modules/SicPM/Routines/PMToBaseRoutine.cs

180 lines
6.2 KiB
C#
Raw Normal View History

2022-09-19 09:16:33 +08:00
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
namespace SicPM.Routines
{
public class PMToBaseRoutine : PMBaseRoutine
{
private enum RoutineStep
{
RotationEnable,
HeatEnable,
VentPumpClose,
ArSupply,
SetGroupB,
SetGroupC,
SetGroupE,
SetGroupF,
SetGroupH,
SetGroupD,
SetGroupG,
SetGroupK,
SetM1to16,
SetPC,
SetGroupI, //V87-96
SetM19to38,
SetGasOut,
SetTv,
SetGasIn1, //V65,V67,V68
OpenFinal1, //V91-96
SetMfcFinal1, //M32-38
SetM19to26,
SetGasIn2,
SetGroupJOpen,
OpenFinal2,
SetMfcFinal2,
SetEPV1,
SetEPV2,
SetTVCloseMode,
SetTvPositionToZero,
SetMFCMode,
SetPCMode,
SetV76,
SetV75,
SetGroupV25,
TimeDelay1,
TimeDelay2,
TimeDelay3,
TimeDelay4,
TimeDelay5,
TimeDelay6,
TimeDelay7,
TimeDelay8,
TimeDelay9,
TimeDelay10,
TimeDelay11,
TimeDelay18,
TimeDelayForEPV1,
}
private PMModule _pmModule;
private IoThrottleValve2 _IoThrottle;
private List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
private int _rotationCloseTimeout = 20; //旋转停止超时
private int _IoValueOpenCloseTimeout = 10; //开关超时时间
private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
private double _timeDelayForEPV1=10; // 关闭EPV1前的等待时间
public PMToBaseRoutine(ModuleName module, PMModule pm) : base(module, pm)
{
Module = module.ToString();
_pmModule = pm;
Name = "Isolation";
_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
}
public override Result Start(params object[] objs)
{
Reset();
if (_pmModule.PT1.FeedBack < 1000)
{
Notify("Chamber Pressure Is Lower Than 1000 mbar,Can not Close EPV1!");
return Result.FAIL;
}
//_timeDelayForEPV1 = SC.GetValue<int>($"PM.{Module}.Isolation.TimeDelayForEPV1");
Notify("Start");
return Result.RUN;
}
public override Result Monitor()
{
try
{
SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
SetRotationValve((int)RoutineStep.RotationEnable, 0, false, _rotationCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
//MFC设置模式,M1-16设置为默认值PC设置为默认值
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
//关闭V91到V96
SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
SetMfcByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1,0,5);
TimeDelay((int)RoutineStep.TimeDelay1, 5);
//关闭V87到90
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
SetMfcByGroup((int)RoutineStep.SetM19to26, MfcGroupName.M19toM31, 0,5);
TimeDelay((int)RoutineStep.TimeDelay2, 5);
//关闭先关EPV2再关EPV1
SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle,8);
TimeDelay((int)RoutineStep.TimeDelay18, 1);
SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelayForEPV1, _timeDelayForEPV1);
SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, false, _IoValueOpenCloseTimeout);
}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException)
{
return Result.FAIL;
}
Notify("Isolation Finished");
return Result.DONE;
}
public override void Abort()
{
}
}
}