2022-09-19 09:16:33 +08:00
<?xml version="1.0" encoding="utf-8"?>
<Aitex >
<TableRecipeFormat RecipeChamberType= "Sic" RecipeVersion= "1.0" >
<!-- ########################################### -->
<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "Step Information" >
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnly" DisplayName= "Step" UnitName= "" ControlName= "StepNo" />
<Step ModuleName= "" DeviceType= "" InputType= "TextInput" DisplayName= "Name" UnitName= "" ControlName= "Name" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "Time" UnitName= "s" ControlName= "Time" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
</Catalog>
<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "SH Flow->SH Total Flow" >
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "1. Ar/H2 Switch" UnitName= "" ControlName= "SHArH2Switch.SetValve" Description= "" >
<Item DisplayName= "Ar" ControlName= "Ar" />
<Item DisplayName= "H2" ControlName= "H2" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "2. SH Total Flow" UnitName= "sccm" ControlName= "SHTotalFlow" InputMode= "" Min= "0" Max= "1000000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "3. Carray Gas Flow (M40)" UnitName= "sccm" ControlName= "Mfc40.Ramp" InputMode= "" Min= "0" Max= "1000000" Description= "" />
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "Set3RatioInput" DisplayName= "4. SH Total Flow Split Ratio" UnitName= "" ControlName= "SHTotalFlowSplitRatio" />
2022-09-19 09:16:33 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "5. Flow Set Mode" UnitName= "" ControlName= "FlowSetMode" Description= "" >
<Item DisplayName= "Ramp" ControlName= "Ramp" />
<Item DisplayName= "Jump" ControlName= "Jump" />
</Step>
</Group>
<Group DisplayName= "Pressure -> Rotation" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "6. Pressure Set" UnitName= "mbar" ControlName= "TV.SetPressure" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "7. Rotation Set" UnitName= "rpm" ControlName= "PMServo.SetActualSpeed" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
</Catalog>
<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "Temperature -> Control Mode" >
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "8. PSU Control Mode" UnitName= "" ControlName= "TC1.SetHeaterMode" Description= "" >
<Item DisplayName= "Power" ControlName= "Power" />
<Item DisplayName= "Pyro" ControlName= "Pyro" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "9. PSU Set Mode" UnitName= "" ControlName= "SusHeaterSetMode" Description= "" >
<Item DisplayName= "Ramp" ControlName= "Ramp" />
<Item DisplayName= "Jump" ControlName= "Jump" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "10. SCR Control Mode" UnitName= "" ControlName= "TC2.SetHeaterMode2" Description= "" >
<Item DisplayName= "Power" ControlName= "Power" />
<Item DisplayName= "Pyro" ControlName= "Pyro" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "11. SCR Set Mode" UnitName= "" ControlName= "WWHeaterSetMode" Description= "" >
<Item DisplayName= "Ramp" ControlName= "Ramp" />
<Item DisplayName= "Jump" ControlName= "Jump" />
</Step>
</Group>
<Group DisplayName= "Temperature -> Temp Setting" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "12. PSU Inner Temp Set" UnitName= "℃" ControlName= "TC1.SetL1TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "13. PSU Middle Temp Set" UnitName= "℃" ControlName= "TC1.SetL2TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "14. PSU Outer Temp Set" UnitName= "℃" ControlName= "TC1.SetL3TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "15. SCR Temp Set" UnitName= "℃" ControlName= "TC2.SetL3TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
<Group DisplayName= "Temperature -> Heater Output" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "16. PSU Inner Ratio Set" UnitName= "%" ControlName= "TC1.RecipeSetL1Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "17. PSU Middle Ratio Set" UnitName= "%" ControlName= "TC1.RecipeSetL2Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "18. PSU Outer Ratio Set" UnitName= "%" ControlName= "TC1.RecipeSetL3Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "19. SCR Upper Ratio Set" UnitName= "%" ControlName= "TC2.RecipeSetL1Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "20. SCR Middle Ratio Set" UnitName= "%" ControlName= "TC2.RecipeSetL2Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "21. SCR Lower Ratio Set" UnitName= "%" ControlName= "TC2.RecipeSetL3Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
</Group>
</Catalog>
<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "SH Flow->Si Source->Si Source Total Flow" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "22. Si Source Total Flow" UnitName= "sccm" ControlName= "SiSourTotalFlow" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
<Group DisplayName= "SH Flow->Si Source->SiH4 Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "23. SiH4 Flow Mode" UnitName= "" ControlName= "SiH4.SetValve" Description= "" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "24. SiH4 Flow (M14)" UnitName= "sccm" ControlName= "Mfc14.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M14.SiH4Flow" />
</Group>
<Group DisplayName= "SH Flow->Si Source->TCS Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "25. TCS Flow Mode" UnitName= "" ControlName= "TCS.SetValve" Description= "" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "26. TCS Bubb Low Flow (M11)" UnitName= "sccm" ControlName= "Mfc11.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "27. TCS Bubb High Flow (M10)" UnitName= "sccm" ControlName= "Mfc10.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "28. TCS Push Flow (M12)" UnitName= "sccm" ControlName= "Mfc12.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "29. TCS Bubb Pressure (PC3)" UnitName= "mbar" ControlName= "Pressure3.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
<Group DisplayName= "SH Flow->Si Source->HCl Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "30. HCl Flow Mode" UnitName= "" ControlName= "HCl.SetValve" Description= "" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "31. HCl Flow (M13)" UnitName= "sccm" ControlName= "Mfc13.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M13.HClFlowsccm" />
</Group>
<Group DisplayName= "SH Flow->Si Source->Si Source Split" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "Set3RatioInput" DisplayName= "32. Si Source Split Ratio" UnitName= "" ControlName= "SiSourSplitRatio" />
2022-09-19 09:16:33 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "33. Si Source Push Pressure (PC6)" UnitName= "mbar" ControlName= "Pressure6.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "PC6.SiSourcePushPressure" />
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "34. Si Source Inner Flow (M23)" UnitName= "sccm" ControlName= "Mfc23.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M23.SiSourceInnerFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "35. Si Source Middle Flow (M22)" UnitName= "sccm" ControlName= "Mfc22.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M22.SiSourceMiddleFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "36. Si Source Outer Flow (M9)" UnitName= "sccm" ControlName= "Mfc9.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M9.SiSourceOuterFlow" />
2022-09-19 09:16:33 +08:00
</Group>
<Group DisplayName= "SH Flow->C Source->C Source Total Flow" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "37. C Source Total Flow" UnitName= "sccm" ControlName= "CSourTotalFlow" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
2022-09-26 10:49:29 +08:00
2022-09-19 09:16:33 +08:00
<Group DisplayName= "SH Flow->C Source->C2H4 Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "38. C2H4 Flow Mode" UnitName= "" ControlName= "C2H4.SetValve" Description= "" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "39. C2H4 Flow (M16)" UnitName= "sccm" ControlName= "Mfc16.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M16.C2H4Flow" />
</Group>
<Group DisplayName= "SH Flow->C Source->C Source Split" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "Set3RatioInput" DisplayName= "42. C Source Split Ratio" UnitName= "" ControlName= "CSourSplitRatio" />
2022-09-19 09:16:33 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "43. C Source Push Pressure (PC7)" UnitName= "mbar" ControlName= "Pressure7.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "PC7.CSourcePushPressure" />
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "44. C Source Inner Flow (M26)" UnitName= "sccm" ControlName= "Mfc26.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M26.CSourceInnerFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "45. C Source Middle Flow (M25)" UnitName= "sccm" ControlName= "Mfc25.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M25.CSourceMidFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "46. C Source Outer Flow (M15)" UnitName= "sccm" ControlName= "Mfc15.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M15.CSourceOuterFlow" />
2022-09-19 09:16:33 +08:00
</Group>
<Group DisplayName= "SH Flow->Dope->Dope Total Flow" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "47. Dope Total Flow" UnitName= "sccm" ControlName= "DopeTotalFlow" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
<Group DisplayName= "SH Flow->Dope->N2 Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "48. N2 Flow Mode" UnitName= "" ControlName= "N2Dilution.SetValve" Description= "" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "49. N2 Actual Flow" UnitName= "sccm" ControlName= "N2ActualFlow" InputMode= "" Min= "0" Max= "10000" Description= "N2ActualFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "50. N2 Low Flow (M4)" UnitName= "sccm" ControlName= "Mfc4.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M4.N2lowFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "51. Dilut Flow For N2 (M3)" UnitName= "sccm" ControlName= "Mfc3.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M3.DiluFlowforN2" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "52. Diluted N2 Flow (M6)" UnitName= "sccm" ControlName= "Mfc6.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M6.DilutedN2Flow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "53. N2 Post Dilut Pressure (PC1)" UnitName= "mbar" ControlName= "Pressure1.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "PC1.N2PostDiluPres" />
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "54. N2 High Flow Mode" UnitName= "" ControlName= "N2HighDoping.SetValve" Description= "N2 HIGH FLOW MODE" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "55. N2 High Flow (M5)" UnitName= "sccm" ControlName= "Mfc5.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M5.N2HighFlow" />
</Group>
<Group DisplayName= "SH Flow->Dope->TMA Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "FlowModeSelection" DisplayName= "56. TMA Flow Mode" UnitName= "" ControlName= "TMA.SetValve" Description= "TMA FLOW MODE" >
2022-09-19 09:16:33 +08:00
<Item DisplayName= "Purge" ControlName= "Purge" />
<Item DisplayName= "Vent" ControlName= "Vent" />
<Item DisplayName= "Run" ControlName= "Run" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "57. TMA Bubb Flow (M7)" UnitName= "sccm" ControlName= "Mfc7.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M7.TMABubbFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "58. TMA Push Flow (M8)" UnitName= "sccm" ControlName= "Mfc8.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M8.TMA Push" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "59. TMA Bubb Pressure (PC2)" UnitName= "mbar" ControlName= "Pressure2.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "PC2.TMAPost-DiluPres" />
</Group>
<Group DisplayName= "SH Flow->Dope->Dope Split" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "Set3RatioInput" DisplayName= "60. Dope Split Ratio" UnitName= "" ControlName= "DopeSplitRatio" />
2022-10-10 12:07:54 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "61. Dope Push Pressure (PC5)" UnitName= "mbar" ControlName= "Pressure5.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "PC5.DopePushPressure" />
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "62. Dope Inner Flow (M20)" UnitName= "sccm" ControlName= "Mfc20.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M20.DopeInnerFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "63. Dope Middle Flow (M19)" UnitName= "sccm" ControlName= "Mfc19.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M19.DopeMidFlow" />
2022-10-10 12:07:54 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "64. Dope Outer Flow (M2)" UnitName= "sccm" ControlName= "Mfc2.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M2.DopeOuterFlow" />
2022-09-19 09:16:33 +08:00
</Group>
<Group DisplayName= "SH Flow->SH Push Flow" >
2022-09-26 10:49:29 +08:00
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "65. SH Push Total Flow" UnitName= "sccm" ControlName= "SHSuppTotalFlow" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "66. SH Inner Flow" UnitName= "sccm" ControlName= "SHInnerFlow" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "67. SH Middle Flow" UnitName= "sccm" ControlName= "SHMidFlow" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "68. SH Outer Flow" UnitName= "sccm" ControlName= "SHOutterFlow" InputMode= "" Min= "0" Max= "10000" DIsColumnEditable= "false" escription= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "69. Inner Push Flow (M29)" UnitName= "sccm" ControlName= "Mfc29.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M29.InnerSuppFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "70. Middle Push Flow (M31)" UnitName= "sccm" ControlName= "Mfc31.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M31.MidSuppFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "71. Outer Push Flow (M28)" UnitName= "sccm" ControlName= "Mfc28.Ramp" InputMode= "" Min= "0" Max= "10000" IsColumnEditable= "false" Description= "M28.OuterSuppFlow" />
2022-09-19 09:16:33 +08:00
</Group>
</Catalog>
<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "Purge->SH Periphery Purge" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "72. SH Purge Flow (M27)" UnitName= "sccm" ControlName= "Mfc27.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M27.SHPurgeFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "73. Optic Purge Flow (M33)" UnitName= "sccm" ControlName= "Mfc33.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M33.OpticPurgeFlow" />
</Group>
<Group DisplayName= "Purge->Chamber Periphery Purge" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "74. GasRing Purge Flow (M32)" UnitName= "sccm" ControlName= "Mfc32.Ramp" InputMode= "" Min= "0" Max= "1000000" Description= "M32.GasRingPurgeFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "75. Chamber Purge Flow (M35)" UnitName= "sccm" ControlName= "Mfc35.Ramp" InputMode= "" Min= "0" Max= "1000000" Description= "M35.ChamberPurgeFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "76. Rotation-Up Purge Flow (M36)" UnitName= "sccm" ControlName= "Mfc36.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M36.Rotation-upPurgeFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "77. Shutter Purge Flow (M37)" UnitName= "sccm" ControlName= "Mfc37.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M37.ShutterPurgeFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "78. Heater-WF Purge Flow (M38)" UnitName= "sccm" ControlName= "Mfc38.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M38.Heater-WFPurgeFlow" />
</Group>
<Group DisplayName= "Purge->Vent Flow" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "79. Total Vent Flow" UnitName= "sccm" ControlName= "TotalVentFlow" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "80. Vent Push Flow (M1)" UnitName= "sccm" ControlName= "Mfc1.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "M1.VentPushFlow" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "81. Vent Pre-Exhaust Pressure (PC4)" UnitName= "mbar" ControlName= "Pressure4.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "PC4.VentPre-ExhaustPres" />
</Group>
</Catalog>
<!-- ************************************************************* -->
<ProcessConfig DisplayName= "ProcessConfig" >
<Configs DisplayName= "Process Config" >
</Configs>
</ProcessConfig>
</TableRecipeFormat>
<TableRecipeSchema >
<xs:schema attributeFormDefault= "unqualified" elementFormDefault= "qualified" xmlns:xs= "http://www.w3.org/2001/XMLSchema" >
<xs:simpleType name= "processType" >
<xs:restriction base= "xs:string" >
<xs:enumeration value= "Process" />
<xs:enumeration value= "Clean" />
</xs:restriction>
</xs:simpleType>
<xs:simpleType name= "booleanType" >
<xs:restriction base= "xs:string" >
<xs:enumeration value= "0" />
<xs:enumeration value= "1" />
<xs:enumeration value= "False" />
<xs:enumeration value= "True" />
<xs:enumeration value= "false" />
<xs:enumeration value= "true" />
</xs:restriction>
</xs:simpleType>
<xs:element name= "TableRecipeData" >
<xs:complexType >
<xs:sequence >
<xs:element maxOccurs= "unbounded" name= "Step" >
<xs:complexType >
<xs:sequence >
<xs:element name= "Mfc" >
<xs:complexType >
<xs:attribute name= "Flow.Gas1" type= "xs:double" use= "optional" />
<xs:attribute name= "Flow.Gas2" type= "xs:double" use= "optional" />
<xs:attribute name= "Flow.Gas3" type= "xs:double" use= "optional" />
<xs:attribute name= "Flow.Gas4" type= "xs:double" use= "optional" />
</xs:complexType>
</xs:element>
</xs:sequence>
<xs:attribute name= "StepNo" type= "xs:string" use= "required" />
<xs:attribute name= "Name" type= "xs:string" use= "required" />
<xs:attribute name= "Loop" type= "xs:string" use= "required" />
<xs:attribute name= "Type" type= "xs:string" use= "required" />
<xs:attribute name= "StepTime" type= "xs:time" use= "optional" />
</xs:complexType>
</xs:element>
</xs:sequence>
<xs:attribute name= "RecipeChamberType" type= "xs:string" fixed= "Strip" use= "required" />
<xs:attribute name= "RecipeProcessType" type= "xs:string" use= "required" />
<xs:attribute name= "RecipeVersion" type= "xs:string" fixed= "1.0" use= "required" />
<xs:attribute name= "CreatedBy" type= "xs:string" use= "required" />
<xs:attribute name= "CreationTime" type= "xs:dateTime" use= "required" />
<xs:attribute name= "LastRevisedBy" type= "xs:string" use= "required" />
<xs:attribute name= "LastRevisionTime" type= "xs:dateTime" use= "required" />
<xs:attribute name= "Description" type= "xs:string" use= "required" />
</xs:complexType>
</xs:element>
</xs:schema>
</TableRecipeSchema>
</Aitex>