Sic04/SicRT/Equipments/Schedulers/SchedulerLoadLock.cs

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using System;
using System.Linq;
using Aitex.Core.Common;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Fsm;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using Mainframe.LLs;
using SicRT.Equipments.Systems;
using SicRT.Modules.Schedulers;
namespace SicRT.Scheduler
{
public class SchedulerLoadLock : SchedulerModule
{
#region Variables
private LoadLockModuleBase _ll = null;
private ModuleName _taskRobot;
private int _taskSlot;
private int _entityTaskToken = (int)FSM_MSG.NONE;
#endregion
#region Constructors
public SchedulerLoadLock(ModuleName module) : base(module.ToString())
{
_module = module.ToString();
_ll = Singleton<EquipmentManager>.Instance.Modules[module] as LoadLockModuleBase;
}
#endregion
#region Properties
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public override bool IsAvailable
{
get { return _ll.IsIdle && _ll.IsOnline && CheckTaskDone() && _ll.CheckSlitValveClosed(); }
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}
public override bool IsOnline
{
get { return _ll.IsOnline; }
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}
public override bool IsError
{
get { return _ll.IsError; }
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}
public bool IsInPumping =>
_task == TaskType.Pump || _task == TaskType.Purge || _task == TaskType.PrepareTransfer;
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/// <summary>
/// 是否执行放Wafer后TM放Tray前的Purge。
/// <para>如果Tray来自TMRobot放完Wafer马上Purge。</para>
/// <para>如果Tray来自TrayCassette放完Tray以后统一Purge。</para>
/// </summary>
public bool HasPurgedAfterWaferPlaced { get; private set; }
/// <summary>
/// 是否已执行组合后、TM取盘前的Purge.
/// <para>无论Tray来自TMRobot还是TrayRobotGroup以后一定要Purge。</para>
/// <para>Purge次数使用Sequence中的配置。</para>
public bool HasPurgedAfterGrouped { get; private set; }
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#endregion
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public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
{
lock (SyncRoot)
{
_task = TaskType.PrepareTransfer;
_taskRobot = robot;
_taskSlot = slot;
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LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
return _ll.PrepareTransfer(robot, Hand.Blade1, slot, type, out _);
}
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}
internal bool CheckAtAtm()
{
lock (SyncRoot)
{
SicLoadLock deviceLL = DEVICE.GetDevice<SicLoadLock>($"{_module}.{_module}");
return deviceLL.CheckAtm();
}
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}
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internal bool CheckAtVacuum()
{
lock (SyncRoot)
{
SicLoadLock deviceLL = DEVICE.GetDevice<SicLoadLock>($"{_module}.{_module}");
return deviceLL.CheckVacuum();
}
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}
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internal void SetJobStatue()
{
lock (SyncRoot)
{
SicLoadLock deviceLL = DEVICE.GetDevice<SicLoadLock>($"{_module}.{_module}");
//deviceLL.SetJobDoneStatus();
}
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}
public override bool IsReadyForPick(ModuleName robot, int slot)
{
lock (SyncRoot)
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{
if (robot == ModuleName.WaferRobot)
{
return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _)
&& WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
}
else if (robot == ModuleName.TMRobot || robot == ModuleName.TrayRobot)
{
return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _)
&& WaferManager.Instance.CheckHasTray(ModuleHelper.Converter(_module), slot);
}
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return false;
}
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}
public override bool IsReadyForPlace(ModuleName robot, int slot)
{
lock (SyncRoot)
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{
if (robot == ModuleName.WaferRobot)
{
return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _);
}
else if (robot == ModuleName.TMRobot || robot == ModuleName.TrayRobot)
{
return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _)
&& WaferManager.Instance.CheckNoTray(ModuleHelper.Converter(_module), slot);
}
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return false;
}
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}
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/// <summary>
/// 重置HasPurged和HasGrouped标记。
/// </summary>
public void ResetPurgedAndGroupedStatus()
{
lock (SyncRoot)
{
HasPurgedAfterWaferPlaced = false;
HasPurgedAfterGrouped = false;
}
}
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public bool Vent()
{
lock (SyncRoot)
{
_task = TaskType.Vent;
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_entityTaskToken = _ll.InvokeVent();
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LogTaskStart(_task, $"{Module} vent to ATM");
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return _entityTaskToken != (int)FSM_MSG.NONE;
}
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}
public bool Pump()
{
lock (SyncRoot)
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{
_entityTaskToken = _ll.InvokePump();
if (_entityTaskToken != (int)FSM_MSG.NONE)
{
_task = TaskType.Pump;
LogTaskStart(_task, $"{Module} pump to Vaccum");
return true;
}
return false;
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}
}
/// <summary>
/// Wafer放好后如果Tray将从TMRobot喂进来执行此Purge。
/// <para>Purge次数有Configuration\LoadLock\Purge中的相关次数决定。</para>
/// </summary>
/// <param name="args"></param>
/// <returns></returns>
public bool PurgeAfterWaferPlaced(params object[] args)
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{
lock (SyncRoot)
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{
// 如果循环次数为0则跳过此步骤。
if (args is null || (args[0] is int cycle && cycle <= 0))
{
LogTaskStart(_task, " Purge after wafer placed was ignored since the cycle is zero");
HasPurgedAfterGrouped = true;
return true;
}
_entityTaskToken = _ll.InvokePurge(args);
if (_entityTaskToken != (int)FSM_MSG.NONE)
{
_task = TaskType.Purge;
LogTaskStart(_task, $" Purge after wafer placed");
HasPurgedAfterWaferPlaced = true;
return true;
}
return false;
}
}
/// <summary>
/// 当Wafer和Tray组合完毕后执行此Purge。
/// <para>组合完毕后无条件支持此PurgePurge次数有Sequence设定。</para>
/// </summary>
/// <param name="args"></param>
/// <returns></returns>
public bool PurgeAfterGrouped(params object[] args)
{
lock (SyncRoot)
{
// 如果循环次数为0则跳过此步骤。
if (args is null || (args[0] is int cycle && cycle <= 0))
{
LogTaskStart(_task, " Purge after Grouping was ignored since the cycle is zero");
HasPurgedAfterGrouped = true;
return true;
}
_entityTaskToken = _ll.InvokePurge(args);
if (_entityTaskToken != (int)FSM_MSG.NONE)
{
_task = TaskType.Purge;
LogTaskStart(_task, $"Purge after grouping");
HasPurgedAfterGrouped = true;
return true;
}
return false;
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}
}
public bool GroupWaferTray()
{
lock (SyncRoot)
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{
_entityTaskToken = _ll.InvokeGroupWaferTray();
if (_entityTaskToken != (int)FSM_MSG.NONE)
{
_task = TaskType.Group;
LogTaskStart(_task, $"{Module} start group wafer and tray");
return true;
}
return false;
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}
}
public bool SeparateWaferTray()
{
throw new NotSupportedException();
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}
public int? GetWaferPurgeCount(int slot)
{
lock (SyncRoot)
{
if (!WaferManager.Instance.CheckHasWafer(Module, slot))
return null;
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WaferInfo wafer = WaferManager.Instance.GetWafer(Module, slot);
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if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
return null;
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if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
.Any(m => m == ModuleName.LoadLock || m == ModuleName.Load))
return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter.ContainsKey("PurgeCount"))
return null;
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if (int.TryParse(
wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PurgeCount"].ToString(),
out int purgeCount))
{
return purgeCount;
}
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return null;
}
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}
public int? GetWaferPumpDelayTime(int slot)
{
lock (SyncRoot)
{
if (!WaferManager.Instance.CheckHasWafer(Module, slot))
return null;
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WaferInfo wafer = WaferManager.Instance.GetWafer(Module, slot);
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if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
return null;
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if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
.Any(m => m == ModuleName.LoadLock || m == ModuleName.Load))
return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter.ContainsKey("PumpDelayTime"))
return null;
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if (int.TryParse(
wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PumpDelayTime"]
.ToString(), out int pumpDelayTime))
{
return pumpDelayTime;
}
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return null;
}
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}
public override bool CheckWaferNextStepIsThis(ModuleName module, int slot)
{
lock (SyncRoot)
{
if (!WaferManager.Instance.CheckHasWafer(module, slot))
return false;
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WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);
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if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
return false;
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if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
return false;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
.Any(m => m == ModuleName.LoadLock || m == ModuleName.Load))
return false;
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return true;
}
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}
public override bool CheckWaferTrayGrouped()
{
lock (SyncRoot)
{
return !_ll.CheckWaferClamped() && WaferManager.Instance.CheckHasWafer(Module, 0);
}
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}
public override bool CheckWaferTraySeparated()
{
throw new NotSupportedException();
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}
public override bool CheckSlitValveClosed()
{
lock (SyncRoot)
{
return _ll.CheckSlitValveClosed();
}
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}
public bool Monitor()
{
lock (SyncRoot)
{
return true;
}
}
public string GetTaskRunning()
{
return $"{_task.ToString()}/{_taskRobot}";
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}
public bool CheckTaskDone()
{
lock (SyncRoot)
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{
bool ret = false;
switch (_task)
{
case TaskType.None:
ret = true;
break;
case TaskType.PrepareTransfer:
ret = _ll.CheckAcked(
_entityTaskToken); //&& _ll.CheckReadyForTransfer(_taskRobot, Hand.Blade1, _taskSlot, EnumTransferType.Place, out _);
break;
case TaskType.Cooling:
ret = _ll.CheckAcked(_entityTaskToken);
break;
case TaskType.Vent:
ret = _ll.CheckAcked(_entityTaskToken);
break;
case TaskType.Pump:
ret = _ll.CheckAcked(_entityTaskToken);
break;
case TaskType.Purge:
ret = _ll.CheckAcked(_entityTaskToken);
break;
case TaskType.Group:
ret = _ll.CheckAcked(_entityTaskToken);
break;
case TaskType.Separate:
ret = _ll.CheckAcked(_entityTaskToken);
break;
}
if (ret && _task != TaskType.None)
{
LogTaskDone(_task, "");
_task = TaskType.None;
}
return ret;
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}
}
}
}