180 lines
6.2 KiB
C#
180 lines
6.2 KiB
C#
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using System;
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using System.Collections.Generic;
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namespace SicPM.Routines
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{
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public class PMToBaseRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetM1to16,
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SetPC,
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SetGroupI, //V87-96
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SetM19to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetM19to26,
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SetGasIn2,
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SetGroupJOpen,
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OpenFinal2,
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SetMfcFinal2,
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SetEPV1,
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SetEPV2,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetMFCMode,
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SetPCMode,
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SetV76,
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SetV75,
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SetGroupV25,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay18,
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TimeDelayForEPV1,
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}
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private PMModule _pmModule;
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private IoThrottleValve2 _IoThrottle;
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private List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCloseTimeout = 20; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _timeDelayForEPV1=10; // 关闭EPV1前的等待时间
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public PMToBaseRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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_pmModule = pm;
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Name = "Isolation";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (_pmModule.PT1.FeedBack < 1000)
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{
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Notify("Chamber Pressure Is Lower Than 1000 mbar,Can not Close EPV1!");
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return Result.FAIL;
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}
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//_timeDelayForEPV1 = SC.GetValue<int>($"PM.{Module}.Isolation.TimeDelayForEPV1");
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, 0, false, _rotationCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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//MFC设置模式,M1-16设置为默认值,PC设置为默认值
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//关闭V91到V96
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SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
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SetMfcByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1,0,5);
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TimeDelay((int)RoutineStep.TimeDelay1, 5);
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//关闭V87到90
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
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SetMfcByGroup((int)RoutineStep.SetM19to26, MfcGroupName.M19toM31, 0,5);
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TimeDelay((int)RoutineStep.TimeDelay2, 5);
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//关闭先关EPV2,再关EPV1
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle,8);
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TimeDelay((int)RoutineStep.TimeDelay18, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelayForEPV1, _timeDelayForEPV1);
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SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, false, _IoValueOpenCloseTimeout);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Isolation Finished");
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return Result.DONE;
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}
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public override void Abort()
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{
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}
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}
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}
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