2022-09-19 09:16:33 +08:00
|
|
|
|
<?xml version="1.0" encoding="utf-8"?>
|
|
|
|
|
|
<Aitex>
|
|
|
|
|
|
<TableSequenceFormat RecipeVersion="Sic">
|
|
|
|
|
|
<Catalog Type="Position">
|
|
|
|
|
|
<Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >
|
|
|
|
|
|
<Selection Name="Sic" DisplayName="PM" Parameter="PMSelection,ProcessRecipe" />
|
|
|
|
|
|
<Selection Name="Buffer" DisplayName="Buffer" Parameter="SlotSelection,BufferType,SetValue" />
|
|
|
|
|
|
<Selection Name="Aligner" DisplayName="Aligner" Parameter="" />
|
|
|
|
|
|
<Selection Name="Load" DisplayName="Load" Parameter="PurgeCount,PumpDelayTime" />
|
2022-11-23 10:24:01 +08:00
|
|
|
|
<Selection Name="UnLoad" DisplayName="UnLoad" Parameter="PurgeCount,PumpDelayTime,PurgeCountBeforeWaferPicking,PumpDelayTimeBeforeWaferPicking,PurgeCountAfterWaferPicking,PumpDelayTimeAfterWaferPicking,CoolingTime" />
|
2022-09-19 09:16:33 +08:00
|
|
|
|
</Item>
|
|
|
|
|
|
</Catalog>
|
|
|
|
|
|
|
|
|
|
|
|
<Catalog Type="Parameter">
|
|
|
|
|
|
<Item Name="PMSelection" DisplayName="Reactor Selection" InputType="MultiSelection" >
|
|
|
|
|
|
<Selection Name="PM1" DisplayName="PM1"/>
|
2022-09-26 10:49:29 +08:00
|
|
|
|
<!--<Selection Name="PM2" DisplayName="PM2"/>-->
|
2022-09-19 09:16:33 +08:00
|
|
|
|
</Item>
|
|
|
|
|
|
<Item Name="ProcessRecipe" DisplayName="Process Recipe" InputType="RecipeSelection" Parameter="Process" Min="0" Max="999999" />
|
|
|
|
|
|
<Item Name="SlotSelection" DisplayName="SlotSelection" InputType="MultiSelection" >
|
|
|
|
|
|
<Selection Name="1" DisplayName="1"/>
|
|
|
|
|
|
<Selection Name="2" DisplayName="2"/>
|
|
|
|
|
|
<Selection Name="3" DisplayName="3"/>
|
|
|
|
|
|
</Item>
|
|
|
|
|
|
<Item Name="BufferType" DisplayName="Type" InputType="ReadOnlySelection" >
|
|
|
|
|
|
<Selection Name="HeatByTime" DisplayName="HeatByTime"/>
|
|
|
|
|
|
<Selection Name="HeatByTemp" DisplayName="HeatByTemp"/>
|
|
|
|
|
|
<Selection Name="CoolingByTime" DisplayName="CoolingByTime"/>
|
|
|
|
|
|
</Item>
|
|
|
|
|
|
<Item Name="SetValue" DisplayName="SetValue" InputType="NumInput" Min="0" Max="10000" />
|
2022-11-23 10:24:01 +08:00
|
|
|
|
<Item Name="PurgeCount" DisplayName="Purge Loop" InputType="NumInput" Min="0" Max="1000" />
|
|
|
|
|
|
<Item Name="PumpDelayTime" DisplayName="Pump Delay" InputType="NumInput" Min="0" Max="1000" />
|
|
|
|
|
|
<Item Name="PurgeCountBeforeWaferPicking" DisplayName="Purge Loop BEF-WAF.PK" InputType="NumInput" Min="0" Max="1000" />
|
|
|
|
|
|
<Item Name="PumpDelayTimeBeforeWaferPicking" DisplayName="Pump Delay BEF-WAF.PK" InputType="NumInput" Min="0" Max="1000" />
|
|
|
|
|
|
<Item Name="PurgeCountAfterWaferPicking" DisplayName="Purge Loop AFT-WAF.PK" InputType="NumInput" Min="0" Max="1000" />
|
|
|
|
|
|
<Item Name="PumpDelayTimeAfterWaferPicking" DisplayName="Pump Delay AFT-WAF.PK" InputType="NumInput" Min="0" Max="1000" />
|
|
|
|
|
|
<Item Name="CoolingTime" DisplayName="Cooling Time(s)" InputType="NumInput" Min="0" Max="3600" />
|
2022-09-19 09:16:33 +08:00
|
|
|
|
</Catalog>
|
|
|
|
|
|
</TableSequenceFormat>
|
|
|
|
|
|
<TableSequenceData RecipeVersion="Sic" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
|
|
|
|
|
|
<Step></Step>
|
|
|
|
|
|
</TableSequenceData>
|
|
|
|
|
|
<TableRecipeSchema>
|
|
|
|
|
|
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
|
|
|
|
|
<xs:simpleType name="booleanType">
|
|
|
|
|
|
<xs:restriction base="xs:string">
|
|
|
|
|
|
<xs:enumeration value="0" />
|
|
|
|
|
|
<xs:enumeration value="1" />
|
|
|
|
|
|
<xs:enumeration value="False" />
|
|
|
|
|
|
<xs:enumeration value="True" />
|
|
|
|
|
|
<xs:enumeration value="false" />
|
|
|
|
|
|
<xs:enumeration value="true" />
|
|
|
|
|
|
</xs:restriction>
|
|
|
|
|
|
</xs:simpleType>
|
|
|
|
|
|
<xs:element name="TableSequenceData">
|
|
|
|
|
|
<xs:complexType>
|
|
|
|
|
|
<xs:sequence>
|
|
|
|
|
|
<xs:element maxOccurs="unbounded" name="Step">
|
|
|
|
|
|
|
|
|
|
|
|
</xs:element>
|
|
|
|
|
|
</xs:sequence>
|
|
|
|
|
|
<xs:attribute name="RecipeVersion" type="xs:string" fixed="Sic" use="required" />
|
|
|
|
|
|
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
|
|
|
|
|
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
|
|
|
|
|
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
|
|
|
|
|
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
|
|
|
|
|
<xs:attribute name="Barcode" type="xs:string" use="required" />
|
|
|
|
|
|
<xs:attribute name="Description" type="xs:string" use="required" />
|
|
|
|
|
|
</xs:complexType>
|
|
|
|
|
|
</xs:element>
|
|
|
|
|
|
</xs:schema>
|
|
|
|
|
|
</TableRecipeSchema>
|
|
|
|
|
|
<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
|
|
|
|
|
|
</Aitex>
|
