From 6574353eb67367bf3d05e9f109496472e9276157 Mon Sep 17 00:00:00 2001 From: "DESKTOP-GPE37UV\\THINKAPD" Date: Thu, 17 Nov 2022 10:31:18 +0800 Subject: [PATCH] =?UTF-8?q?SchedulerLoadLock=E4=B8=AD=E5=A2=9E=E5=8A=A0Waf?= =?UTF-8?q?er=20Place=E4=BB=A5=E5=90=8E=E7=9A=84Purge=E6=A0=87=E8=AE=B0?= =?UTF-8?q?=E3=80=82?= MIME-Version: 1.0 Content-Type: text/plain; charset=UTF-8 Content-Transfer-Encoding: 8bit --- SicRT/Equipments/AutoTransfer.cs | 15 +++----------- .../Schedulers/SchedulerLoadLock.cs | 20 ++++++++++++------- 2 files changed, 16 insertions(+), 19 deletions(-) diff --git a/SicRT/Equipments/AutoTransfer.cs b/SicRT/Equipments/AutoTransfer.cs index c2f6265..7aa0d5f 100644 --- a/SicRT/Equipments/AutoTransfer.cs +++ b/SicRT/Equipments/AutoTransfer.cs @@ -1654,16 +1654,7 @@ namespace SicRT.Modules return; } - // 如果Sequence的下一步是Load腔,则进行吹扫 - /*if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping) - { - // Group以后执行吹扫动作 - _load.Purge(_load.GetWaferPurgeCount(0), _load.GetWaferPumpDelayTime(0)); - _load.GetWaferInfo(0).NextSequenceStep++; - return; - }*/ - - if (_load.HasPurged == false) + if (_load.HasPurgedAfterGrouped == false) return; // 有Wafer和石墨盘,等待TM来取 @@ -1993,7 +1984,7 @@ namespace SicRT.Modules if (canPlace) { // TMRobot向Load喂Tray时,如果Wafer还未Purge,先Purge - if (_load.HasPurged == false) + if (_load.HasPurgedAfterGrouped == false) { if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) && !_unload.IsInPumping) { @@ -2740,7 +2731,7 @@ namespace SicRT.Modules return; // 如果Tray从Cassette喂进来,则等Wafer/Tray组合完毕后统一Purge - if (_load.HasPurged == false && _load.HasWafer(0) && _load.HasTray(0) && _load.CheckWaferTrayGrouped()) + if (_load.HasPurgedAfterGrouped == false && _load.HasWafer(0) && _load.HasTray(0) && _load.CheckWaferTrayGrouped()) { if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping) { diff --git a/SicRT/Equipments/Schedulers/SchedulerLoadLock.cs b/SicRT/Equipments/Schedulers/SchedulerLoadLock.cs index 842d6b6..0dc80dc 100644 --- a/SicRT/Equipments/Schedulers/SchedulerLoadLock.cs +++ b/SicRT/Equipments/Schedulers/SchedulerLoadLock.cs @@ -57,12 +57,17 @@ namespace SicRT.Scheduler _task == TaskType.Pump || _task == TaskType.Purge || _task == TaskType.PrepareTransfer; /// - /// 是否已执行Purge. - /// 当Wafer从Cassette传入后,是否Purge分两种情况: - /// 1. 如果Tray来自Buffer,则直接Purge - /// 2. 如果Tray来自Cassette,等Tray放好后Purge + /// 是否执行放Wafer后,TM放Tray前的Purge。 + /// 如果Tray来自TMRobot,放完Wafer马上Purge。 + /// 如果Tray来自TrayCassette,放完Tray以后统一Purge。 /// - public bool HasPurged { get; private set; } + public bool HasPurgedAfterWaferPlaced { get; private set; } + + /// + /// 是否已执行组合后、TM取盘前的Purge. + /// 无论Tray来自TMRobot还是TrayRobot,Group以后一定要Purge。 + /// Purge次数使用Sequence中的配置。 + public bool HasPurgedAfterGrouped { get; private set; } #endregion @@ -152,7 +157,8 @@ namespace SicRT.Scheduler { lock (SyncRoot) { - HasPurged = false; + HasPurgedAfterWaferPlaced = false; + HasPurgedAfterGrouped = false; } } @@ -197,7 +203,7 @@ namespace SicRT.Scheduler { _task = TaskType.Purge; LogTaskStart(_task, $"{Module} purge for new job"); - HasPurged = true; + HasPurgedAfterGrouped = true; return true; }