SchedulerLoadLock中增加Wafer Place以后的Purge标记。

SicRT/Equipments/AutoTransfer.cs

@@ -1654,16 +1654,7 @@ namespace SicRT.Modules
                     return;
                 }
 
-                // 如果Sequence的下一步是Load腔，则进行吹扫
+                if (_load.HasPurgedAfterGrouped == false)
-                /*if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping)
-                {
-                    // Group以后执行吹扫动作
-                    _load.Purge(_load.GetWaferPurgeCount(0), _load.GetWaferPumpDelayTime(0));
-                    _load.GetWaferInfo(0).NextSequenceStep++;
-                    return;
-                }*/
-
-                if (_load.HasPurged == false)
                     return;
                 
                 // 有Wafer和石墨盘，等待TM来取
@@ -1993,7 +1984,7 @@ namespace SicRT.Modules
             if (canPlace)
             {
                 // TMRobot向Load喂Tray时，如果Wafer还未Purge，先Purge
-                if (_load.HasPurged == false)
+                if (_load.HasPurgedAfterGrouped == false)
                 {
                     if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) && !_unload.IsInPumping)
                     {
@@ -2740,7 +2731,7 @@ namespace SicRT.Modules
                 return;
 
             // 如果Tray从Cassette喂进来，则等Wafer/Tray组合完毕后统一Purge
-            if (_load.HasPurged == false && _load.HasWafer(0) && _load.HasTray(0) && _load.CheckWaferTrayGrouped())
+            if (_load.HasPurgedAfterGrouped == false && _load.HasWafer(0) && _load.HasTray(0) && _load.CheckWaferTrayGrouped())
             {
                 if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0) && !_unload.IsInPumping && !_tmRobot.IsInPumping)
                 {

SicRT/Equipments/Schedulers/SchedulerLoadLock.cs

@@ -57,12 +57,17 @@ namespace SicRT.Scheduler
             _task == TaskType.Pump || _task == TaskType.Purge || _task == TaskType.PrepareTransfer;
 
         /// <summary>
-        /// 是否已执行Purge.
+        /// 是否执行放Wafer后，TM放Tray前的Purge。
-        /// <para> 当Wafer从Cassette传入后，是否Purge分两种情况：</para>
+        /// <para>如果Tray来自TMRobot，放完Wafer马上Purge。</para>
-        /// <para> 1. 如果Tray来自Buffer，则直接Purge</para>
+        /// <para>如果Tray来自TrayCassette，放完Tray以后统一Purge。</para>
-        /// <para> 2. 如果Tray来自Cassette，等Tray放好后Purge</para>
         /// </summary>
-        public bool HasPurged { get; private set; }
+        public bool HasPurgedAfterWaferPlaced { get; private set; }
+        
+        /// <summary>
+        /// 是否已执行组合后、TM取盘前的Purge.
+        /// <para>无论Tray来自TMRobot还是TrayRobot，Group以后一定要Purge。</para>
+        /// <para>Purge次数使用Sequence中的配置。</para>
+        public bool HasPurgedAfterGrouped { get; private set; }
 
         #endregion
 
@@ -152,7 +157,8 @@ namespace SicRT.Scheduler
         {
             lock (SyncRoot)
             {
-                HasPurged = false;
+                HasPurgedAfterWaferPlaced = false;
+                HasPurgedAfterGrouped = false;
             }
         }
 
@@ -197,7 +203,7 @@ namespace SicRT.Scheduler
                 {
                     _task = TaskType.Purge;
                     LogTaskStart(_task, $"{Module} purge for new job");
-                    HasPurged = true;
+                    HasPurgedAfterGrouped = true;
                     return true;
                 }