DI-32、DI-39、DI-40报警类型更改为Warning。
This commit is contained in:
parent
03f5d74334
commit
b4d749b0e8
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@ -1,5 +1,4 @@
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using System;
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using System.Security.AccessControl;
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using System.Xml;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.DataCenter;
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@ -20,25 +19,22 @@ namespace Aitex.Core.RT.Device.Unit
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private R_TRIG _trigTextOut = new R_TRIG();
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private bool _textOutTrigValue;
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public bool AlarmTrigValue
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{
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get { return _textOutTrigValue&&!string.IsNullOrEmpty(_alarmText); }
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}
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private bool _textOutTrigValue;
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private string _warningText;
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public bool AlarmTrigValue
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{
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get { return _textOutTrigValue && !string.IsNullOrEmpty(_alarmText); }
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}
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private string _warningText;
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private string _alarmText;
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private string _infoText;
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public Action WarningAction
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{
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get;
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set;
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}
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public Action WarningAction { get; set; }
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public event Action<IoSensor, bool> OnSignalChanged;
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public bool Value
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public bool Value
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{
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get
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{
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@ -69,7 +65,7 @@ namespace Aitex.Core.RT.Device.Unit
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}
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private bool _previous;
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public IoSensor(string module, XmlElement node, string ioModule = "")
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{
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var attrModule = node.GetAttribute("module");
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@ -84,8 +80,10 @@ namespace Aitex.Core.RT.Device.Unit
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_infoText = node.GetAttribute("infoText");
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_warningText = node.GetAttribute("warningText");
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_alarmText = node.GetAttribute("alarmText");
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_textOutTrigValue = Convert.ToBoolean(string.IsNullOrEmpty(node.GetAttribute("textOutTrigValue")) ? "false" : node.GetAttribute("textOutTrigValue"));
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_textOutTrigValue = Convert.ToBoolean(string.IsNullOrEmpty(node.GetAttribute("textOutTrigValue"))
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? "false"
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: node.GetAttribute("textOutTrigValue"));
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}
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public bool Initialize()
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@ -115,12 +113,14 @@ namespace Aitex.Core.RT.Device.Unit
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else if (!string.IsNullOrEmpty(_warningText.Trim()))
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{
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EV.PostWarningLog(Module, _warningText);
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}else if (!string.IsNullOrEmpty(_alarmText.Trim()))
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}
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else if (!string.IsNullOrEmpty(_alarmText.Trim()))
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{
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EV.PostAlarmLog(Module, _alarmText);
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}else if (!string.IsNullOrEmpty(_infoText.Trim()))
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EV.PostAlarmLog(Module, _alarmText);
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}
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else if (!string.IsNullOrEmpty(_infoText.Trim()))
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{
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EV.PostInfoLog(Module, _infoText);
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EV.PostInfoLog(Module, _infoText);
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}
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}
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@ -3,7 +3,7 @@
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<IoInterLocks assembly="Mainframe" classType="Mainframe.Devices.IoInterLock">
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<IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit=""
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doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM"
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aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
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aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
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doTmCyclePurgeRoutineRunning="DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning="DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning="DO_TMPumpDownRoutineRunning"
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doTmServoPressRoutineRunning="DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning="DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning="DO_LoadCyclePurgeRoutineRunning"
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doLLLeakCheckRoutineRunning="DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning="DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning="DO_LoadVentUpRoutineRunning"
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@ -18,11 +18,11 @@
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doUnLoadPumpDownRoutineRunning="DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning="DO_UnLoadVentUpRoutineRunning"
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/>
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</IoInterLocks>
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<IoMfcs classType="SicPM.Devices.IoMFC" assembly="SicPM">
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<IoMfc3 id="Mfc60" module="TM" display="Mfc60" schematicId="Mfc60" unit="sccm" aiFlow="AI_M60FlowRead" aoFlow="AO_M60FlowSetpoint" scBasePath="TM.MFC" aioType="float" />
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</IoMfcs>
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</IoMfcs>
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<TcAdses assembly="SicPM" classType="SicPM.Devices.SicAds">
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<TcAds id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
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<TcAds id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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@ -40,10 +40,10 @@
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc" >
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<WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<IoSensors>
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<IoSensors>
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<IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm525 TM Lid Opened [DI-12]" />
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<IoSensor id="LLLidClosed" module="LoadLock" display="" schematicId="" unit="" di="DI_LoadLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm526 LoadLid Opened [DI-13]" />
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<IoSensor id="LLLidClosed" module="LoadLock" display="" schematicId="" unit="" di="DI_LoadLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm526 LoadLid Opened [DI-13]" />
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<IoSensor id="UnloadLidClosed" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadStationLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm527 UnloadStation Lid Opened [DI-14]" />
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<IoSensor id="BufferLidClosed" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm528 BufferStation Lid Opened [DI-15]" />
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<IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" />
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@ -62,10 +62,10 @@
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<IoSensor id="CassBLInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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</IoSensors>
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<IoPumps classType="Mainframe.Devices.IoPump" assembly="Mainframe">
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<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning"/>
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<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
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<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning"/>
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<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
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</IoPumps>
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<IoValves>
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@ -83,12 +83,12 @@
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<IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance"/>
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</IoValves>
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<IoSlitValves>
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<IoSlitValves>
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<IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
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<IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
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<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
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<IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
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@ -99,16 +99,16 @@
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<IoPressureMeter3 id="UnLoadPressure" module="TM" display="UnLoadPressure" schematicId="UnLoadPressure" unit="mbar" aioType="float" aiValue="AI_UnloadPressure" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="TMPressure" module="TM" display="TMPressure" schematicId="TMPressure" unit="mbar" aioType="float" aiValue="AI_TMPressure1" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="ForelinePressure" module="TM" display="ForelinePressure" schematicId="ForelinePressure" unit="mbar" aioType="float" aiValue="AI_TMPressure2" formatString="F1" MaxValue="1500"/>
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</IoPressureMeter3s>
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</IoPressureMeter3s>
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<IoTempMeters assembly="SicPM" classType="SicPM.Devices.IoTempMeter">
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<IoTempMeter module="UnLoad" id="UnLoadTemp" display="" schematicId="" aioType="float" aiFeedback="AI_UnloadTemp" />
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<IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
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<IoTempMeter module="UnLoad" id="UnLoadTemp" display="" schematicId="" aioType="float" aiFeedback="AI_UnloadTemp" />
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<IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
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</IoTempMeters>
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<IoLift4s>
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<IoLift4 id="LLLift" module="LoadLock" display="LLLift" schematicId="LLLift" unit="" aioType="" diUp="DI_LoadLifterCYUp" diDown="DI_LoadLifterCYDown" doUp="DO_LoadLifterCYUp" doDown="DO_LoadLifterCYDown" scTimeout="10"/>
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<IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10"/>
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<IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10"/>
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</IoLift4s>
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<IoClaws>
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@ -116,8 +116,8 @@
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<IoClaw id="LLTrayClaw" module="LoadLock" display="LLTrayClaw" schematicId="LLTrayClaw" unit="" aioType="" diUp="DI_LoadTrayCYClamped" diDown="DI_LoadTrayCYOpend" doUp="DO_LoadTrayCYClamp" doDown="DO_LoadTrayCYOpen" scTimeout="10"/>
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<IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10"/>
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</IoClaws>
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<TMRobots assembly="Mainframe" classType="Mainframe.TMs.SicTMRobot">
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<TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
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@ -126,11 +126,11 @@
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<WaferRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicWaferRobot">
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<WaferRobot id="WaferRobot" module="WaferRobot" display="" schematicId="" unit="" />
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</WaferRobots>
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<TrayRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicTrayRobot">
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<TrayRobot id="TrayRobot" module="TrayRobot" display="" schematicId="" unit="" />
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</TrayRobots>
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<Aligners assembly="Mainframe" classType="Mainframe.Aligners.SicAligner">
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<Aligner id="Aligner" module="Aligner" display="" schematicId="" unit="" />
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</Aligners>
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@ -141,36 +141,36 @@
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<Cassette id="CassBL" module="CassBL" display="" schematicId="" unit="" />
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</Cassettes>
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<LoadRotations assembly="Mainframe" classType="Mainframe.Devices.IoLoadRotation">
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<LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
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diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
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diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
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diCCD2PosDone="DI_LdRotationCCD2PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
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doJogCW="DO_LdRotationJogCW" doJogCCW="DO_LdRotationJogCCW" doStop="DO_LdRotationStop" doMoveRelativeHome="DO_LdRotationMoveRelativeHome"
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doMoveOneCircle="DO_LdRotationMoveOneCircle" doMoveCCD1Pos="DO_LdRotationMoveCCD1Pos" doMoveCCD2Pos="DO_LdRotationMoveCCD2Pos"
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aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
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aoCCD1Degree="AO_LdRotationCCD1Degree" aoHomeSpeed="AO_LdRotationSpeed" aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
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aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
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</LoadRotations>
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<LoadRotations assembly="Mainframe" classType="Mainframe.Devices.IoLoadRotation">
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<LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
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diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
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diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
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diCCD2PosDone="DI_LdRotationCCD2PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
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doJogCW="DO_LdRotationJogCW" doJogCCW="DO_LdRotationJogCCW" doStop="DO_LdRotationStop" doMoveRelativeHome="DO_LdRotationMoveRelativeHome"
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doMoveOneCircle="DO_LdRotationMoveOneCircle" doMoveCCD1Pos="DO_LdRotationMoveCCD1Pos" doMoveCCD2Pos="DO_LdRotationMoveCCD2Pos"
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aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
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aoCCD1Degree="AO_LdRotationCCD1Degree" aoHomeSpeed="AO_LdRotationSpeed" aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
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aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
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</LoadRotations>
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<TMs assembly="Mainframe" classType="Mainframe.TMs.SicTM">
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<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp"/>
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</TMs>
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<TMs assembly="Mainframe" classType="Mainframe.TMs.SicTM">
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<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp"/>
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</TMs>
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<EFEMs assembly="Mainframe" classType="Mainframe.EFEMs.SicEFEM">
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<Buffer id="EFEM" module="EFEM" display="" schematicId="" unit="" />
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</EFEMs>
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<EFEMs assembly="Mainframe" classType="Mainframe.EFEMs.SicEFEM">
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<Buffer id="EFEM" module="EFEM" display="" schematicId="" unit="" />
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</EFEMs>
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<LLs assembly="Mainframe" classType="Mainframe.LLs.SicLoadLock">
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<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
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</LLs>
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<LLs assembly="Mainframe" classType="Mainframe.LLs.SicLoadLock">
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<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
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</LLs>
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<Unloads assembly="Mainframe" classType="Mainframe.UnLoads.SicUnLoad">
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<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
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</Unloads>
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<Unloads assembly="Mainframe" classType="Mainframe.UnLoads.SicUnLoad">
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<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
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</Unloads>
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|
||||
<Buffers assembly="Mainframe" classType="Mainframe.Buffers.SicBuffer">
|
||||
<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
|
||||
</Buffers>
|
||||
|
||||
<Buffers assembly="Mainframe" classType="Mainframe.Buffers.SicBuffer">
|
||||
<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
|
||||
</Buffers>
|
||||
|
||||
</DeviceModelDefine>
|
||||
|
|
@ -11,7 +11,7 @@
|
|||
aoL1LoopModeSetPoint="AO_PSUInnerLoopMode" aoL2LoopModeSetPoint="AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint="AO_PSUOuterLoopMode"
|
||||
aoL1TargetSPSetPoint="AO_PSUInnerTargetSP" aoL2TargetSPSetPoint="AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint="AO_PSUOuterTargetSP"
|
||||
aoL1TargetOPSetPoint="AO_PSUInnerTargetOP" aoL2TargetOPSetPoint="AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint="AO_PSUOuterTargetOP"
|
||||
aoL1RecipeValueSetPoint="AO_PSUInnerRecipeValue" aoL2RecipeValueSetPoint="AO_PSUMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_PSUOuterRecipeValue"
|
||||
aoL1RecipeValueSetPoint="AO_PSUInnerRecipeValue" aoL2RecipeValueSetPoint="AO_PSUMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_PSUOuterRecipeValue"
|
||||
aoL1InputTempSetPoint="AO_PSUInnerPyroTemp" aoL2InputTempSetPoint="AO_PSUMiddlePyroTemp" aoL3InputTempSetPoint="AO_PSUOuterPyroTemp"
|
||||
aoTCPyroModeSetPoint="AO_PSUTCPyroMode" aoL1VoltageLimited="AO_PSUInnerVoltageLimited" aoL2VoltageLimited="AO_PSUMiddleVoltageLimited" aoL3VoltageLimited="AO_PSUOuterVoltageLimited"
|
||||
aoL1TempHighLimitSetPoint="AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint="AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_PSUOuterTempHighLimit"
|
||||
|
|
@ -29,42 +29,42 @@
|
|||
aoL1LoopModeSetPoint="AO_SCRUpperLoopMode" aoL2LoopModeSetPoint="AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint="AO_SCRLowerLoopMode"
|
||||
aoL1TargetSPSetPoint="AO_SCRUpperTargetSP" aoL2TargetSPSetPoint="AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint="AO_SCRLowerTargetSP"
|
||||
aoL1TargetOPSetPoint="AO_SCRUpperTargetOP" aoL2TargetOPSetPoint="AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint="AO_SCRLowerTargetOP"
|
||||
aoL1RecipeValueSetPoint="AO_SCRUpperRecipeValue" aoL2RecipeValueSetPoint="AO_SCRMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_SCRLowerRecipeValue"
|
||||
aoL1RecipeValueSetPoint="AO_SCRUpperRecipeValue" aoL2RecipeValueSetPoint="AO_SCRMiddleRecipeValue" aoL3RecipeValueSetPoint="AO_SCRLowerRecipeValue"
|
||||
aoL1InputTempSetPoint="AO_SCRUpperPyroTemp" aoL2InputTempSetPoint="AO_SCRMiddlePyroTemp" aoL3InputTempSetPoint="AO_SCRLowerPyroTemp"
|
||||
aoTCPyroModeSetPoint="AO_SCRTCPyroMode" aoL1VoltageLimited="AO_SCRUpperVoltageLimited" aoL2VoltageLimited="AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited="AO_SCRLowerVoltageLimited"
|
||||
aoL1TempHighLimitSetPoint="AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint="AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_SCRLowerTempHighLimit"
|
||||
aoL1TempLowLimitSetPoint="AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint="AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN="AI_SCRTC"/>
|
||||
</IoTCs>
|
||||
|
||||
<IoOmronTemps classType="SicPM.Devices.IoOmronTemp" assembly="SicPM">
|
||||
<IoTC id="OmronTemp" display="OmronTemp" schematicId="OmronTemp" aioType="float"
|
||||
aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6=""
|
||||
<IoOmronTemps classType="SicPM.Devices.IoOmronTemp" assembly="SicPM">
|
||||
<IoTC id="OmronTemp" display="OmronTemp" schematicId="OmronTemp" aioType="float"
|
||||
aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6=""
|
||||
aoCH7="" aoCH8="" aoCH9="" aoCH10="" aoCH11="" aoCH12=""
|
||||
doLineHeaterEnable="DO_LineHeaterEnable"/>
|
||||
</IoOmronTemps>
|
||||
|
||||
</IoOmronTemps>
|
||||
|
||||
<IoPSUs classType="SicPM.Devices.IoPSU" assembly="SicPM">
|
||||
<IoPSU id="PSU1" display="PSU1" schematicId="PSU1" aioType="float"
|
||||
aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower"
|
||||
aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower"
|
||||
aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms"
|
||||
doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant"
|
||||
diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66 PSU1 Alarm[DI-320]"
|
||||
diCommunicationError ="DI_PSU1dpCommunicationError" commAlarmText=""
|
||||
doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
|
||||
<IoPSU id="PSU2" display="PSU2" schematicId="PSU2" aioType="float"
|
||||
aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower"
|
||||
aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower"
|
||||
aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms"
|
||||
doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant"
|
||||
diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67 PSU2 Alarm[DI-321]"
|
||||
diCommunicationError ="DI_PSU2dpCommunicationError" commAlarmText=""
|
||||
doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
|
||||
<IoPSU id="PSU3" display="PSU3" schematicId="PSU3" aioType="float"
|
||||
aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower"
|
||||
aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower"
|
||||
iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms"
|
||||
doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant"
|
||||
diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68 PSU3 Alarm[DI-322]"
|
||||
diCommunicationError ="DI_PSU3dpCommunicationError" commAlarmText=""
|
||||
doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
|
||||
doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
|
||||
</IoPSUs>
|
||||
|
||||
<IoSCRs classType="SicPM.Devices.IoSCR" assembly="SicPM">
|
||||
|
|
@ -73,15 +73,15 @@
|
|||
<IoSCR id="SCR3" display="SCR3" schematicId="SCR3" aioType="float" aiVoltage="AI_SCR3Voltage" aiArms="AI_SCR3Arms" aiPower="AI_SCR3Power" diStatus="DI_SCR3Status" doReset="DO_SCR3Reset" doStatus="DO_SCR3Enable" diAlarm="DI_SCR3Alarm" AlarmText="" />
|
||||
</IoSCRs>
|
||||
|
||||
<IoUPSs classType="SicPM.Devices.IoUPS" assembly="SicPM">
|
||||
<IoUPS id="UPS" display="UPS" schematicId="UPS" doEnable="DO_UPSEnable" doLowBattery="DO_UPSLowBattery"/>
|
||||
</IoUPSs>
|
||||
<IoUPSs classType="SicPM.Devices.IoUPS" assembly="SicPM">
|
||||
<IoUPS id="UPS" display="UPS" schematicId="UPS" doEnable="DO_UPSEnable" doLowBattery="DO_UPSLowBattery"/>
|
||||
</IoUPSs>
|
||||
|
||||
|
||||
<IoHeats classType="SicPM.Devices.IoHeat" assembly="SicPM">
|
||||
<IoHeat module="" id="PMHeatEnable" display="HeatEnable" schematicId="HeatEnable" diEnable="DI_PSUEnableFB" doEnable="DO_HeaterEnable" />
|
||||
</IoHeats>
|
||||
|
||||
|
||||
<IoValves classType="Aitex.Core.RT.Device.Unit.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
|
||||
<IoValve id="V27" display="PumpBypass" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PumpBypassFB(V27)" doOpen="DO_PumpBypass(V27)" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor=""/>
|
||||
|
|
@ -125,10 +125,10 @@
|
|||
<IoValve id="V61" display="DoppingFinal" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DoppingFinalFB(V61)" doOpen="DO_DoppingFinal(V61)" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V62" display="SilaneFinal" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SilaneFinalFB(V62)" doOpen="DO_SilaneFinal(V62)" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V63" display="PropaneFinal" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PropaneFinalFB(V63)" doOpen="DO_PropaneFinal(V63)" diCloseSensor="" diOpenSensor=""/>
|
||||
|
||||
<IoValve id="V64" display="CarrierGasH2" schematicId="V64" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarrierGasH2_FB" doOpen="DO_CarrierGasH2" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V65" display="CarrierGasAr" schematicId="V65" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CarrierGasAr_FB" doOpen="DO_CarrierGasAr" diCloseSensor="" diOpenSensor=""/>
|
||||
|
||||
|
||||
<IoValve id="V64" display="CarrierGasH2" schematicId="V64" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarrierGasH2_FB" doOpen="DO_CarrierGasH2" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V65" display="CarrierGasAr" schematicId="V65" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CarrierGasAr_FB" doOpen="DO_CarrierGasAr" diCloseSensor="" diOpenSensor=""/>
|
||||
|
||||
<IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_ChamBodyArPurgeFB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor=""/>
|
||||
|
|
@ -154,17 +154,17 @@
|
|||
<IoValve id="V99s" display="C2H4SwitchHTPurge" schematicId="V99s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor=""/>
|
||||
<IoValve id="V25" display="GasBoxVentBypass" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_GasBoxVentBypass(V25)" diCloseSensor="" diOpenSensor=""/>
|
||||
</IoValves>
|
||||
|
||||
|
||||
<IoThrottleValves classType="Aitex.Core.RT.Device.Unit.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
|
||||
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}"
|
||||
modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4"
|
||||
aioType="float"
|
||||
aioType="float"
|
||||
aiStatus="AI_TVmode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure"
|
||||
aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure"
|
||||
doTVValveEnable="DO_TVEnable" diTVValveEnable=""/>
|
||||
</IoThrottleValves>
|
||||
|
||||
|
||||
|
||||
|
||||
<IoMfcs classType="SicPM.Devices.IoMFC" assembly="SicPM">
|
||||
<IoMfc3 id="Mfc1" display="Mfc1" schematicId="Mfc1" unit="sccm" aiActMode="AI_M1ActMode" aoSetMode="AO_M1CtrlMode" aiFlow="AI_M1" aoFlow="AO_M1" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01Offline" AlarmText="Alarm101 MFC01 Offline[DI-351]"/>
|
||||
<IoMfc3 id="Mfc2" display="Mfc2" schematicId="Mfc2" unit="sccm" aiActMode="AI_M2ActMode" aoSetMode="AO_M2CtrlMode" aiFlow="AI_M2" aoFlow="AO_M2" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC02Offline" AlarmText="Alarm102 MFC02 Offline[DI-352]"/>
|
||||
|
|
@ -200,7 +200,7 @@
|
|||
<IoMfc3 id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" AlarmText="Alarm137 MFC37 Offline[DI-387]"/>
|
||||
<IoMfc3 id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.{module}.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" AlarmText="Alarm138 MFC38 Offline[DI-388]"/>
|
||||
</IoMfcs>
|
||||
|
||||
|
||||
<IoPressureMeters classType="SicPM.Devices.IoPressure" assembly="SicPM">
|
||||
<IoPressureMeter id="Pressure1" display="PC1" schematicId="Pressure1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC01Offline" AlarmText="Alarm141 PC1 Offline[DI-391]"/>
|
||||
<IoPressureMeter id="Pressure2" display="PC2" schematicId="Pressure2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve" aiActMode="AI_PC2ActMode" aoSetMode="AO_PC2CtrlMode" aiValue="AI_PressCtrl2" aoValue="AO_PressCtrl2" formatString="0.0" diAlarm="DI_PC02Offline" AlarmText="Alarm142 PC2 Offline[DI-392]"/>
|
||||
|
|
@ -211,8 +211,8 @@
|
|||
<IoPressureMeter id="Pressure7" display="PC7" schematicId="Pressure7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve" aiActMode="AI_PC7ActMode" aoSetMode="AO_PC7CtrlMode" aiValue="AI_PressCtrl7" aoValue="AO_PressCtrl7" formatString="0.0" diAlarm="DI_PC07Offline" AlarmText="Alarm147 PC7 Offline[DI-397]"/>
|
||||
<IoPressureMeter id="PT1" display="PT1" schematicId="PT1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ChamPress" aoValue="" formatString="0.0"/>
|
||||
<IoPressureMeter id="PT2" display="PT2" schematicId="PT2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ForelinePress" aoValue="" formatString="0.0"/>
|
||||
</IoPressureMeters>
|
||||
|
||||
</IoPressureMeters>
|
||||
|
||||
<IoWaterFlows classType="SicPM.Devices.IoWaterFlow" assembly="SicPM">
|
||||
<IoWaterFlow id="SHFlowTemp" module="" display="SHFlow Temp" schematicId="SHFlowTemp" unit="" aioType="float" aiFeedback="AI_SHFlowTemp" diFlowSW="DI_SHFlowSW"/>
|
||||
<IoWaterFlow id="ChamTopFlowTemp" module="" display="ChamTopFlowTemp" schematicId="ChamTopFlowTemp" unit="" aioType="float" aiFeedback="AI_ChamTopFlowTemp" diFlowSW="DI_ChamTopFlowSW"/>
|
||||
|
|
@ -233,30 +233,30 @@
|
|||
|
||||
<IoPumps classType="SicPM.Devices.IoPump" assembly="SicPM" >
|
||||
<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType=""
|
||||
diDryPumpAlarm="DI_PM1DryPumpAlarm"
|
||||
diPumpExhaustPress="DI_PumpExhaustPressSW"
|
||||
diDryPumpFlow="DI_DryPumpFlowSW"
|
||||
diDryPump1Running="DI_PM1DryPump1Running"
|
||||
diDryPumpAlarm="DI_PM1DryPumpAlarm"
|
||||
diPumpExhaustPress="DI_PumpExhaustPressSW"
|
||||
diDryPumpFlow="DI_DryPumpFlowSW"
|
||||
diDryPump1Running="DI_PM1DryPump1Running"
|
||||
diDryPump1Warning="DI_PM1DryPump1Warning"/>
|
||||
</IoPumps>
|
||||
|
||||
<IoPTOffsetAndKs classType="SicPM.Devices.IoPTOffsetAndK" assembly="SicPM" >
|
||||
<IoPTOffsetAndK id="PT1OffsetAndK" module="" display="PT1" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset" aoK="AO_PT1_K"/>
|
||||
<IoPTOffsetAndK id="PT2OffsetAndK" module="" display="PT2" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_Offset" aoK="AO_PT2_K"/>
|
||||
<IoPTOffsetAndK id="PT3OffsetAndK" module="" display="PT3" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_Offset" aoK="AO_PT3_K"/>
|
||||
<IoPTOffsetAndK id="PT4OffsetAndK" module="" display="PT4" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_Offset" aoK="AO_PT4_K"/>
|
||||
<IoPTOffsetAndK id="PT9OffsetAndK" module="" display="PT9" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_Offset" aoK="AO_PT9_K"/>
|
||||
<IoPTOffsetAndK id="PT10OffsetAndK" module="" display="PT10" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_Offset" aoK="AO_PT10_K"/>
|
||||
</IoPTOffsetAndKs>
|
||||
<IoPTOffsetAndKs classType="SicPM.Devices.IoPTOffsetAndK" assembly="SicPM" >
|
||||
<IoPTOffsetAndK id="PT1OffsetAndK" module="" display="PT1" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset" aoK="AO_PT1_K"/>
|
||||
<IoPTOffsetAndK id="PT2OffsetAndK" module="" display="PT2" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_Offset" aoK="AO_PT2_K"/>
|
||||
<IoPTOffsetAndK id="PT3OffsetAndK" module="" display="PT3" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_Offset" aoK="AO_PT3_K"/>
|
||||
<IoPTOffsetAndK id="PT4OffsetAndK" module="" display="PT4" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_Offset" aoK="AO_PT4_K"/>
|
||||
<IoPTOffsetAndK id="PT9OffsetAndK" module="" display="PT9" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_Offset" aoK="AO_PT9_K"/>
|
||||
<IoPTOffsetAndK id="PT10OffsetAndK" module="" display="PT10" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_Offset" aoK="AO_PT10_K"/>
|
||||
</IoPTOffsetAndKs>
|
||||
|
||||
<DoSensors classType="SicPM.Devices.DoSensor" assembly="SicPM">
|
||||
<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSucceed" infoText="" warningText="" alarmText=""/>
|
||||
</DoSensors>
|
||||
<DoSensors classType="SicPM.Devices.DoSensor" assembly="SicPM">
|
||||
<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSucceed" infoText="" warningText="" alarmText=""/>
|
||||
</DoSensors>
|
||||
|
||||
<IoSensors classType="SicPM.Devices.IoSensor" assembly="SicPM">
|
||||
<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText ="Alarm3 Chamber Press Above ATM [DI-4]"/>
|
||||
<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText ="Alarm3 Chamber Press Above ATM [DI-4]"/>
|
||||
<IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamAtSafeProcessPressSW" infoText ="Information3 Chamber At Safe Process Press [DI-5]" warningText="" alarmText=""/>
|
||||
<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PMATMSW" infoText ="Information2 PM At ATM [DI-9]" warningText="" alarmText=""/>
|
||||
<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PMATMSW" infoText ="Information2 PM At ATM [DI-9]" warningText="" alarmText=""/>
|
||||
<IoSensor id="SensorHeaterTempBelow900CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_HeaterTempLowLimitSW" infoText ="Information4 Heater Temp Below 900C [DI-11]" warningText="" alarmText=""/>
|
||||
<IoSensor id="SensorConfinementRingUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingUp" infoText ="Information5 Confinement Ring At Up Position [DI-12]" warningText="" alarmText=""/>
|
||||
<IoSensor id="SensorSusceptorAtSafeSpeed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SusceptorAtSafeSpeed" infoText ="Information6 Susceptor At Safe Speed [DI-13]" warningText="" alarmText=""/>
|
||||
|
|
@ -266,14 +266,14 @@
|
|||
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText ="Warning2 DOR Press ATM [DI-7]" alarmText=""/>
|
||||
<IoSensor id="SensorInletTotalFlowLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowLowSW" infoText="" warningText ="" alarmText="Alarm17 Chamber Cooling Water Pressure Low [DI-27]"/>
|
||||
<IoSensor id="SensorInletTotalFlowHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowHighSW" infoText="" warningText ="" alarmText="Alarm17 Chamber Cooling Water Pressure High [DI-28]"/>
|
||||
<IoSensor id="SensorPowerRackExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PowerRackExhaustDPSW" infoText="" warningText ="" alarmText="Alarm18 Power Rack Exhaust DP Error [DI-29]"/>
|
||||
|
||||
<IoSensor id="SensorPowerRackExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PowerRackExhaustDPSW" infoText="" warningText ="" alarmText="Alarm18 Power Rack Exhaust DP Error [DI-29]"/>
|
||||
|
||||
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText ="Warning3 Gas Box Door Not Closed [DI-33]" alarmText=""/>
|
||||
<IoSensor id="SensorTCSAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TCSAlarm" infoText="" warningText ="" alarmText="Alarm28 TCS.Alarm [DI-43]"/>
|
||||
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText ="Warning5 Reactor Water Leak [DI-48]" alarmText=""/>
|
||||
<IoSensor id="SensorTMFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMBufferFlowSW" infoText="" warningText ="Warning6 TM Cooling Water Low Flow -U13 [DI-51]" alarmText=""/>
|
||||
<IoSensor id="SensorReactorHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorHCLDetectorSW" infoText="" warningText ="" alarmText="Alarm43 ReactorHCLDetector [DI-52]"/>
|
||||
|
||||
<IoSensor id="SensorReactorHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorHCLDetectorSW" infoText="" warningText ="" alarmText="Alarm43 ReactorHCLDetector [DI-52]"/>
|
||||
|
||||
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText ="Warning7 Gas Box Water Leak [DI-60]" alarmText=""/>
|
||||
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PM1DryPump1Warning" infoText="" warningText ="Warning8 PM1DryPump1 Warning [DI-67]" alarmText=""/>
|
||||
<IoSensor id="SensorEMOStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_EMOStatusSW" infoText="" warningText ="" alarmText="Alarm42 EMOStatus [DI-70]"/>
|
||||
|
|
@ -293,23 +293,23 @@
|
|||
<IoSensor id="SensorSCRUpperTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempHAlarm" infoText="" warningText ="Warning22 SCR Upper TempHigh [DI-311]" alarmText=""/>
|
||||
<IoSensor id="SensorSCRMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempHAlarm" infoText="" warningText ="Warning23 SCR Middle TempHigh [DI-312]" alarmText=""/>
|
||||
<IoSensor id="SensorSCRLowerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempHAlarm" infoText="" warningText ="Warning24 SCR Lower TempHigh [DI-313]" alarmText=""/>
|
||||
|
||||
|
||||
<IoSensor id="SensorSHFlowTempU1OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHFlowTempU1OT" infoText="" warningText ="Warning25 SH Cooling Water Temp Over Temp -U1 [DI-401]" alarmText=""/>
|
||||
<IoSensor id="SensorChamTopFlowTempU2OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamTopFlowTempU2OT" infoText="" warningText ="Warning26 Chamber Top Cooling Water Over Temp -U2 [DI-402]" alarmText=""/>
|
||||
<IoSensor id="SensorChamMiddleFlow1TempU3OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMiddleFlow1TempU3OT" infoText="" warningText ="Warning27 Chamber Middle1 Cooling Water Over Temp -U3 [DI-403]" alarmText=""/>
|
||||
<IoSensor id="SensorChamMiddleFlow2TempU4OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMiddleFlow2TempU4OT" infoText="" warningText ="Warning28 Chamber Middle2 Cooling Water Over Temp -U4 [DI-404]" alarmText=""/>
|
||||
<IoSensor id="SensorChamBottomFlowTempU5OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamBottomFlowTempU5OT" infoText="" warningText ="Warning29 Chamber Bottom Cooling Water Over Temp -U5 [DI-405]" alarmText=""/>
|
||||
<IoSensor id="SensorTMPump2FlowTempU6OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPump2FlowTempU06OT" infoText="" warningText ="Warning30 TMPump2 Cooling Water Over Temp -U6 [DI406]" alarmText=""/>
|
||||
<IoSensor id="SensorTMPump2FlowTempU6OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPump2FlowTempU06OT" infoText="" warningText ="Warning30 TMPump2 Cooling Water Over Temp -U6 [DI406]" alarmText=""/>
|
||||
<IoSensor id="SensorPowerRodFlow1TempU7OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PowerRodFlow1TempU7OT" infoText="" warningText ="Warning31 Power Rod1 Cooling Water Over Temp -U7 [DI-407]" alarmText=""/>
|
||||
<IoSensor id="SensorPowerRodFlow2TempU8OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PowerRodFlow2TempU8OT" infoText="" warningText ="Warning32 Power Rod2 Cooling Water Over Temp -U8 [DI-408]" alarmText=""/>
|
||||
<IoSensor id="SensorForelineColdTrapFlowTempU9OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ForelineFlowTempU9OT" infoText="" warningText ="Warning33 Foreline Cooling Water Over Temp -U9 [DI409]" alarmText=""/>
|
||||
<IoSensor id="SensorInSituFlowTempU10OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ElectrodeWFlowTempU10OT" infoText="" warningText ="Warning34 Electrode-W Cooling Water Over Temp -U10 [DI410]" alarmText=""/>
|
||||
<IoSensor id="SensorTMPump1FlowTempU11OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPump1FlowTempU11OT" infoText="" warningText ="Warning35 TMPump1 Cooling Water Over Temp -U11 [DI411]" alarmText=""/>
|
||||
<IoSensor id="SensorTMPump1FlowTempU11OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPump1FlowTempU11OT" infoText="" warningText ="Warning35 TMPump1 Cooling Water Over Temp -U11 [DI411]" alarmText=""/>
|
||||
<IoSensor id="SensorTransformerFlowTempU14OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TransformerFlowTempU14OT" infoText="" warningText ="Warning36 Transformer Cooling Water Over Temp -U14 [DI-412]" alarmText=""/>
|
||||
<IoSensor id="SensorTMFlow1TempU12OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPumpFlowTempU11OT" infoText="" warningText ="Warning37 TMTopLid Cooling Water Over Temp -U12 [DI413]" alarmText=""/>
|
||||
<IoSensor id="SensorTMFlow2TempU13OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMBufferFlowTempU13OT" infoText="" warningText ="Warning38 TMBuffer Cooling Water Over Temp -U13 [DI414]" alarmText=""/>
|
||||
|
||||
<!--<IoSensor id="SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_ChamMiddleFlow2Temp" infoText="" warningText ="" alarmText="Alarm48 Chamber Middle1 Cooling Water Over Temp -U4 [DO195]"/>
|
||||
<!--<IoSensor id="SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_ChamMiddleFlow2Temp" infoText="" warningText ="" alarmText="Alarm48 Chamber Middle1 Cooling Water Over Temp -U4 [DO195]"/>
|
||||
<IoSensor id="SensorSHFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_SHFlowTemp" infoText="" warningText ="" alarmText="Alarm45 SH Cooling Water Temp Over Temp -U1 [DO196]"/>
|
||||
<IoSensor id="SensorChamTopFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_ChamTopFlowTemp" infoText="" warningText ="" alarmText="Alarm46 Chamber Top Cooling Water Over Temp -U2 [DO197]"/>
|
||||
<IoSensor id="SensorChamMiddleFlow1Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_ChamMiddleFlow1Temp" infoText="" warningText ="" alarmText="Alarm47 Chamber Middle1 Cooling Water Over Temp -U3 [DO198]"/>
|
||||
|
|
@ -332,7 +332,7 @@
|
|||
<IoSensor id="SensorChamTopFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW" infoText="" warningText="" alarmText ="Alarm6 Chamber Top Cooling Water Low Flow -U2 [DI-16]"/>
|
||||
<IoSensor id="SensorChamMiddleFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW" infoText="" warningText="" alarmText ="Alarm7 Chamber Middle1 Cooling Water Flow Abnormal -U3 [DI-17]"/>
|
||||
<IoSensor id="SensorChamBottomFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW" infoText="" warningText="" alarmText ="Alarm8 Chamber Bottom Cooling Water Flow Abnormal -U5 [DI-18]"/>
|
||||
<IoSensor id = "SensorTMPump2FlowSW" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_TMPump2FlowSW" infoText = "" warningText = "" alarmText = "Alarm9 TMPump2 Water Low Flow -U6 [DI-19]" />
|
||||
<IoSensor id="SensorTMPump2FlowSW" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_TMPump2FlowSW" infoText = "" warningText = "" alarmText = "Alarm9 TMPump2 Water Low Flow -U6 [DI-19]" />
|
||||
<IoSensor id="SensorPowerRodFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW" infoText="" warningText="" alarmText ="Alarm10 Power Rod1 Cooling Water Low Flow -U7 [DI-20]"/>
|
||||
<IoSensor id="SensorPowerRodFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW" infoText="" warningText="" alarmText ="Alarm11 Power Rod2 Cooling Water Low Flow -U8 [DI-21]"/>
|
||||
<IoSensor id="SensorForelineFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ForelineFlowSW" infoText="" warningText="" alarmText ="Alarm12 Foreline Cooling Water Low Flow -U9 [DI-22]"/>
|
||||
|
|
@ -342,12 +342,12 @@
|
|||
<IoSensor id="SensorTMFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMTopLidFlowSW" infoText="" warningText="" alarmText ="Alarm16 TM Pump Low Flow -U12 [DI-26]"/>
|
||||
<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText ="Alarm19 PM H2 Leak Detect [DI-30]"/>
|
||||
<IoSensor id="SensorGBHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBHCLDetectorSW" infoText="" warningText="" alarmText ="Alarm20 Gasbox HCL Leak Detect [DI-31]"/>
|
||||
<IoSensor id="SensorGBExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW" infoText="" warningText="" alarmText ="Alarm21 Gasbox Exhaust DP Error [DI-32]"/>
|
||||
<IoSensor id="SensorGBExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW" infoText="" warningText="Alarm21 Gasbox Exhaust DP Error [DI-32]" alarmText =""/>
|
||||
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning39 GasPipeTempCtrl Alarm [DI-35]" alarmText =""/>
|
||||
<IoSensor id="SensorDryPumpAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PM1DryPumpAlarm" infoText="" warningText="" alarmText ="Alarm22 PM1DryPump.Alarm [DI-36]"/>
|
||||
<IoSensor id="SensorPumpExhaustPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW" infoText="" warningText="" alarmText ="Alarm23 Pump Exhaust Pressure Abnormal [DI-38]"/>
|
||||
<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="" alarmText ="Alarm24 PM Exhaust DP Error [DI-39]"/>
|
||||
<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="" alarmText ="Alarm25 Pump Exhaust DP Error [DI-40]"/>
|
||||
<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="Alarm24 PM Exhaust DP Error [DI-39]" alarmText =""/>
|
||||
<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="Alarm25 Pump Exhaust DP Error [DI-40]" alarmText =""/>
|
||||
<IoSensor id="SensorScrubberIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW" infoText="" warningText="" alarmText ="Alarm26 Scrubber System Error [DI-41]"/>
|
||||
<IoSensor id="SensorFacilityIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW" infoText="" warningText="" alarmText ="Alarm27 Facility Error [DI-42]"/>
|
||||
<IoSensor id="SensorServoDriverFaultSW" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_ServoDriverFaultSW" infoText = "" warningText = "" alarmText = "Alarm29 Rotation Servo Driver Error [DI-45]" />
|
||||
|
|
@ -410,44 +410,44 @@
|
|||
<IoSensor id = "SensorPC04Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC04Offline" infoText = "" warningText = "" alarmText = "Alarm144 PC4 Offline [DI-394]" />
|
||||
<IoSensor id = "SensorPC05Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC05Offline" infoText = "" warningText = "" alarmText = "Alarm145 PC5 Offline [DI-395]" />
|
||||
<IoSensor id = "SensorPC06Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC06Offline" infoText = "" warningText = "" alarmText = "Alarm146 PC6 Offline [DI-396]" />
|
||||
<IoSensor id = "SensorPC07Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC07Offline" infoText = "" warningText = "" alarmText = "Alarm147 PC7 Offline [DI-397]" />
|
||||
<IoSensor id = "SensorReactorSuspectorCheck" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_ReactorSuspectorCheck" infoText = "" warningText = "" alarmText = "" />
|
||||
<IoSensor id = "SensorPC07Offline" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" di = "DI_PC07Offline" infoText = "" warningText = "" alarmText = "Alarm147 PC7 Offline [DI-397]" />
|
||||
<IoSensor id = "SensorReactorSuspectorCheck" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "false" di = "DI_ReactorSuspectorCheck" infoText = "" warningText = "" alarmText = "" />
|
||||
|
||||
</IoSensors>
|
||||
</IoSensors>
|
||||
|
||||
|
||||
<SicServos classType="SicPM.Devices.SicServo" assembly="SicPM">
|
||||
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
|
||||
aiActualSpeed="AI_ActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC"
|
||||
aiActualSpeed="AI_ActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC"
|
||||
aoActualSpeedSetPoint="AO_SpindleSpeed" aoAccSpeedSetPoint="AO_SpindleACC" aoDecSpeedSetPoint="AO_SpindleDEC"
|
||||
diServoReady="DI_ServoReady" diServoError="DI_ServoDriverFaultSW" doServoEnable="DO_ServoEnable" doServoInital="DO_ServoInitial" doServoReset="DO_ServoReset" />
|
||||
</SicServos>
|
||||
|
||||
<SicAETemps classType="SicPM.Devices.SicAETemp" assembly="SicPM">
|
||||
|
||||
<SicAETemps classType="SicPM.Devices.SicAETemp" assembly="SicPM">
|
||||
<SicAETemp id="PMAETemp" module="" display="PMAETemp" schematicId="PMAETemp" doPyroCommunicationError="DO_PyroCommunicationError" EnableLogMessage="True" />
|
||||
</SicAETemps>
|
||||
|
||||
|
||||
<IoSignalTowers classType="SicPM.Devices.IoSignalTower" assembly="SicPM">
|
||||
<IoSignalTower id="SignalTower" module="PM1" display="SignalTower" schematicId="PMSignalTower" doGreen="DO_TowerGreen" doYellow="DO_TowerYellow" doRed="DO_TowerRed" doBuzzer="DO_Buzzer"/>
|
||||
</IoSignalTowers>
|
||||
|
||||
<IoChamberMoveBodys classType="SicPM.Devices.IoChamberMoveBody" assembly="SicPM">
|
||||
<IoChamberMoveBody id="ChamberMoveBody" module="" display="ChamberMoveBody" schematicId="ChamberMoveBody" unit="" aioType="" diUpFaceback="DI_ChamMoveBodyUp"
|
||||
diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp"
|
||||
doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward"
|
||||
doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW"
|
||||
diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ChamMoveLock" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
|
||||
<IoChamberMoveBody id="ChamberMoveBody" module="" display="ChamberMoveBody" schematicId="ChamberMoveBody" unit="" aioType="" diUpFaceback="DI_ChamMoveBodyUp"
|
||||
diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp"
|
||||
doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward"
|
||||
doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW"
|
||||
diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ChamMoveLock" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
|
||||
</IoChamberMoveBodys>
|
||||
|
||||
|
||||
<IoGasConnectors classType="SicPM.Devices.IoGasConnector" assembly="SicPM">
|
||||
<IoGasConnector id="GasConnector" module="" display="GasConnector" schematicId="GasConnector" unit="" aioType="" diGasConnectorLoosen="DI_SHGasConnectorLoosen" diGasConnectorTighten="DI_SHGasConnectorTighten" doGasConnectorLoosen="DO_SHGasConnectorLoosen" doGasConnectorTighten="DO_SHGasConnectorTighten"/>
|
||||
</IoGasConnectors>
|
||||
|
||||
|
||||
<IoLids classType="SicPM.Devices.IoLid" assembly="SicPM">
|
||||
<IoLid id="SHLid" module="" display="SH Lid" schematicId="SHLid" unit="" aioType="" diLoosenFaceback="DI_SHLidLoosen" diTightenFaceback="DI_SHLidTighten" diClosedFaceback="DI_SHLidClosed" doLoosenSetpoint="DO_SHLidLoosen" doTightenSetpoint="DO_SHLidTighten" />
|
||||
<IoLid id="MiddleLid" module="" display="Middle Lid" schematicId="MiddleLid" unit="" aioType="" diLoosenFaceback="DI_MiddleLidLoosen" diTightenFaceback="DI_MiddleLidTighten" diClosedFaceback="DI_MiddleLidClosed" doLoosenSetpoint="DO_MiddleLidLoosen" doTightenSetpoint="DO_MiddleLidTighten" />
|
||||
</IoLids>
|
||||
|
||||
|
||||
<IoLidSwings classType="SicPM.Devices.IoLidSwing" assembly="SicPM">
|
||||
<IoLidSwing id="SHLidSwing" module="" display="SH Lid Swing" schematicId="SHLidSwing" unit="" aioType="" diLidLockFaceback="DI_SHLidSwingLock" diLidUnlockFaceback="DI_SHLidSwingUnlock" doLidLockSetpoint="DO_SHLidSwingLock" doLidUnlockSetpoint="DO_SHLidSwingUnlock"/>
|
||||
<IoLidSwing id="MiddleLidSwing" module="" display="Middle Lid Swing" schematicId="MiddleLidSwing" unit="" aioType="" diLidLockFaceback="DI_MiddleLidSwingLock" diLidUnlockFaceback="DI_MiddleLidSwingUnlock" doLidLockSetpoint="DO_MiddleLidSwingLock" doLidUnlockSetpoint="DO_MiddleLidSwingUnlock"/>
|
||||
|
|
@ -507,9 +507,9 @@
|
|||
<IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68"/>
|
||||
</IoPurgeArH2Switchs>
|
||||
|
||||
<IoV99s classType="SicPM.Devices.IoV99" assembly="SicPM">
|
||||
<IoV99 id="Valve99" display="" schematicId="" unit="" valve1="V99" valve2="V99s"/>
|
||||
</IoV99s>
|
||||
<IoV99s classType="SicPM.Devices.IoV99" assembly="SicPM">
|
||||
<IoV99 id="Valve99" display="" schematicId="" unit="" valve1="V99" valve2="V99s"/>
|
||||
</IoV99s>
|
||||
|
||||
<IoInterLocks classType="SicPM.Devices.IoInterLock" assembly="SicPM">
|
||||
<IoInterLock id="PMInterLock" display="" schematicId="" unit=""
|
||||
|
|
@ -537,14 +537,14 @@
|
|||
aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp" aiChamBottomFlowTemp="AI_ChamBottomFlowTemp" aiBottomPlateFlowTemp=""
|
||||
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp" aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp" aiInSituFlowTemp="AI_ElectrodeWFlowTemp"
|
||||
aiTMPump1FlowTemp="AI_TMPump1FlowTemp" aiTMPump2FlowTemp="AI_TMPump2FlowTemp" aiTransformerFlowTemp="AI_TransformerFlowTemp" aiForelineColdTrapFlowTemp="AI_ForelineFlowTemp"
|
||||
aiTMTopLidTemp="AI_TMTopLidFlowTemp" aiTMBufferFlowTemp="AI_TMBufferFlowTemp"
|
||||
aiTMTopLidTemp="AI_TMTopLidFlowTemp" aiTMBufferFlowTemp="AI_TMBufferFlowTemp"
|
||||
doTMTopLidTemp="DO_TMTopLidFlowTemp" doTMBufferFlowTemp="DO_TMBufferFlowTemp"/>
|
||||
</IoInterLocks>
|
||||
|
||||
|
||||
<IoTestDevices classType="SicPM.Devices.IoTestDevice" assembly="SicPM">
|
||||
<IoTestDevice id="TestDevice" display="" schematicId="" unit="" />
|
||||
</IoTestDevices>
|
||||
<IoTestDevices classType="SicPM.Devices.IoTestDevice" assembly="SicPM">
|
||||
<IoTestDevice id="TestDevice" display="" schematicId="" unit="" />
|
||||
</IoTestDevices>
|
||||
|
||||
|
||||
</DeviceModelDefine>
|
||||
File diff suppressed because it is too large
Load Diff
|
|
@ -9,6 +9,11 @@
|
|||
Sic 系统更新历史记录
|
||||
|
||||
---------------------------------------------------------------------------------
|
||||
Sic04 2022-09-28 Version 1.0.0.3
|
||||
|
||||
1.DI-32、DI-39、DI-40报警类型更改为Warning。
|
||||
|
||||
|
||||
|
||||
Sic04 2022-09-27 Version 1.0.0.2
|
||||
|
||||
|
|
|
|||
Loading…
Reference in New Issue