using System.Collections.Generic; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK { public enum CommandType { SET, // Initialization setting command MOD, // Operation mode setting command GET, // Status acquisition command FIN, // Normal reception command MOV, // Operation command EVT, // Start/Stop event report command RST, // Resend initialization setting command comman RFN, // Resend normal reception command RMV, // Resend operation command } public enum RespType { NAK, // Initialization setting command ACK, // Operation mode setting command INF, // Status acquisition command ABS, // Normal reception command } //顺序不能变！！！ public enum Indicator { LOAD = 0x01, UNLOAD = 0x02, ACCESSMANUL = 0x03, PRESENCE = 0x04, PLACEMENT = 0x05, ACCESSAUTO = 0x06, RESERVE1 = 0x07, ALARM = 0x08, RESERVE2 = 0x9, CLAMP, DOCK, ACCESS_SW, } //public enum IndicatorState //{ // ON, // BLINK, // OFF, //} public enum Mode { ONMGV, //Changes to the online mode MENTE, } public enum QueryType { STATE, //Checks the status. VERSN, //Checks the version. LEDST, //Reports the indicator status. MAPDT, //Wafer search data (descending order) MAPRD, //Wafer search data (ascending order) WFCNT, //Wafer quantity check FSBxx //Checks whether the FOSB Mode is ON/OFF } public enum EvtType { EVTON, //Starts reporting all events.(FOUP events is excluded) EVTOF, //Stops reporting all events. (FOUP events is excluded) FPEON, //Starts reporting FOUP events. FPEOF, //Stops reporting FOUP events. } public enum MovType { ORGSH, //Moves the FOUP to the initial position. ABORG, //Aborts the operation and moves the FOUP to the initial position. CLOAD, //Loads the FOUP (transfers the FOUP to the process unit). CLDDK, //Loads the FOUP (same as CLOAD) to the point where the system is ready to open the door. CLDYD, //Clamps the FOUP and moves the FOUP to the Y-axis docking position. CLDOP, //Continues loading the FOUP after CLDDK. CLDMP, //Maps and loads the FOUP. CLMPO, //Continues mapping and loading the FOUP after CLDDK. CULOD, //Unloads the FOUP (at the ejection position). CULDK, //Closes the door (same as CULOD). CUDCL, //Undocks the FOUP (while being clamped) after CULDK. CUDNC, //Unloads the FOUP after CULDK. CULYD, //Unloads the FOUP to the docking status. CULFC, //Unloads the FOUP to the point where the system can release (unclamp) the FOUP. CUDMP, //Maps and unloads the FOUP from the loaded status. CUMDK, //Maps the FOUP and closes the door from the loaded status. CUMFC, //Maps the FOUP to the before-unclamp status from the loaded status. MAPDO, //Maps the FOUP while being loaded. REMAP, //Resumes the interrupted mapping. PODOP, //FOUP clamp: Open PODCL, //FOUP clamp: Close VACON, //Vacuum on VACOF, //Vacuum off DOROP, //Latch key: Open (Unlatches the FOUP door.) DORCL, //Latch key: Close (Latches the FOUP door.) MAPOP, //Mapper arm: Open MAPCL, //Mapper arm: Close ZDRUP, //Move to Z-axis up position (door open position) ZDRDW, //Move to Z-axis down position (transport unit handover possible position) ZDRMP, //Lower to Z-axis mapping end position and conduct mapping ZMPST, //Move the mapper to the start position YWAIT, //Move to Y-axis undock position YDOOR, //Move to Y-axis dock position DORBK, //Move to door open position DORFW, //Move to door close position RETRY, //Retry during recoverable error STOP_, //Immediate stop and command abort PAUSE, //Immediate stop ABORT, //Command abort RESUM, //Resume operation } public class ErrorCode { private Dictionary dict = new Dictionary { {"02","Z-axis position: NG (Down)"}, {"42","Z-axis position: NG (Up)"}, {"04","Y-axis position: NG (Dock)"}, {"44","Y-axis position: NG (Undock)"}, {"07","Wafer protrusion"}, {"47","Grass wafer protrusion (Option)"}, {"08","Door forward/backward position: NG(Open)"}, {"48","Door forward/backward position: NG(Close)"}, {"F2","FOUP door close error."}, {"09","Mapper arm position: NG (Open)"}, {"49","Mapper arm position: NG (Close)"}, {"11","Mapper stopper position: NG (On)"}, {"51","Mapper stopper position: NG (Off)"}, {"12","Mapping end position: NG"}, {"61","FOUP clamp open error (Up)"}, {"21","FOUP clamp open error (Back)"}, {"62","FOUP clamp open error (Down)"}, {"22","FOUP clamp close error (Front)"}, {"63","FOUP clamp close error (Middle)"}, {"23","Latch key open error"}, {"24","Latch key close error"}, {"25","Vacuum on error"}, {"26","Vacuum off error"}, {"27","Main air error "}, {"A1","Normal position error at FOUP open"}, {"A2","Normal position error at FOUP close"}, {"A3","Mapper storage error when Z-axis lowered"}, {"A4","Parallel signal error from upper machine"}, {"FD","Interlock relay failure"}, {"FE","Communication failure"}, {"FF","Obstacle detection sensor failure"}, {"FC","Fan operation error"}, {"EE","Mapping mechanical(Adjustment) error"}, {"EF","Mapping mechanical(Sensor) error"}, {"F1","Door detection error during dock"}, {"31","Door detection error except dock"}, }; public ErrorCode() { } public string Code2Msg(string code) { if (dict.ContainsKey(code)) { return string.Format("Code:{0},Message:{1}", code, dict[code]); } return code; } } /* public enum LoadportCassetteState { None, //Load sensor/Position sensor: All OFF Normal, //Load sensor/Position sensor: All ON Absent, //Load sensor: ON, Position sensor: 1 or 2: ON Unknown,//Load sensor: ON, Position sensor: All OFF //or Load sensor: OFF, Except Position sensor: All OFF } public enum FoupDoorState { Open, Close, Unknown, } public enum FoupClampState { Open, Close, Unknown, } */ }