using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes { public class RorzeEfemAbsError { public static Dictionary AbsCode = new Dictionary() { {"VAC", "Lack of vacuum source"}, {"AIR", " Lack of positive source pressure"}, {"STALL", " Stall"}, {"LIMIT", " Limit"}, {"EMS", " Controller emergency stop"}, {"COMM", " Internal communication error"}, {"VACON", " Vacuum on error"}, {"VACON2", " Vacuum pressure drops during transfer"}, {"VACOF", " Vacuum OFF error"}, {"CLAMPON", " Clamp error (*)"}, {"CLAMPOF", " Clamp OFF error"}, {"PRTWAF", " Wafer protrusion"}, {"CRSWAF", " Cross wafer detection"}, {"THICKWAF", " Wafer thickness error detection (Thick)"}, {"THINWAF", " Wafer thickness error detection (Thin)"}, {"DBLWAF", " Double wafers detection"}, {"BOWWAF", " Wafer front down detection"}, {"COMMAND", " Robot command error"}, {"PODNG", " Carrier placement error"}, {"VAC_S", " Vacuum sensor error"}, {"UNIWIRE", " Uniwire error"}, {"SAFTY", " Pinch sensor reaction"}, {"LOCKNG", " Carrier lock disabled"}, {"UNLOCKNG", " Carrier unlock disabled"}, {"L-KEY_OV", " Latch key over-rotation"}, {"L-KEY_LK", " Latch key reverse disabled"}, {"L-KEY_UL", " Latch key release disabled"}, {"MAP_S1", " Mapping sensor ready disabled"}, {"MAP_S2", " Mapping sensor return disabled"}, {"NONWAF", " No wafer on arm"}, {"ALIGNNG", " Alignment failure"}, {"ORG_NG", " Origin search uncompleted"}, {"HARDWARE", " Hardware error"}, {"UNSETUP", " Setting data is not set"}, {"SETUPDT_NG", " Setting data error"}, {"CONTROLLER", " Controller malfunction"}, {"SYSTEM", " System (unit)malfunction"}, {"SYSTEM_FFxx", " System (unit) malfunction"}, {"N2", " Lack of N2 source pressure"}, {"PURGE", " N2 purge error"}, {"INTERNAL", " Internal error"}, {"UNDEFINITION", " Undefined error"}, }; public static string GetError(string code) { if (AbsCode.ContainsKey(code)) return AbsCode[code]; return code; } } }